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Curved Water Jet Guided Laser Micro-ManufacturingYi Shi, Jian Cao, Kornel Ehmann
Contents
• Motivation• Dielectrophoresis• Experimental Setup• Experiments and Results• Applications • Conclusions
Motivation Water Jet Technology
[1] Kong, M. C., and D. A. Axinte. "Capability of advanced abrasive waterjetmachining and its applications." Applied Mechanics and Materials. Vol. 110.Trans Tech Publications, 2012.[2] Kulekci, Mustafa Kemal. "Processes and apparatus developments inindustrial waterjet applications." International Journal of Machine Tools andManufacture 42.12 (2002): 1297-1306.[3] Tönshoff, H. K., F. Kroos, and C. Marzenell. "High-pressure waterpeening-a new mechanical surface-strengthening process." CIRP Annals-Manufacturing Technology 46.1 (1997): 113-116.[4] Guha, Anirban, Ronald M. Barron, and Ram Balachandar. "Anexperimental and numerical study of water jet cleaning process." Journal ofMaterials Processing Technology 211.4 (2011): 610-618.
Abrasive water jet (AWJ) cutting [1]
Water jet cutting [2]
Water jet peening [3] Water jet cleaning [4]
Water jet without abrasive particlesWater jet with abrasive particles
Motivation Water Jet Cutting
Advantages• Uniform energy transfer• No heat effects• Environmentally clean• No material restrictions
Limitations• Accuracy (limited by orifice and particle size) >
100 µm • Instability of jet in micro domain• Short workable distance
Abrasive water jet cutting [1]
Water jet cutting[1] Kong, M. C., and D. A. Axinte. "Capability of advanced abrasive waterjet machining and its applications." Applied Mechanics and Materials. Vol. 110. Trans Tech Publications, 2012.
MotivationLaser Technology
[1] http://www.ionix.fi/en/technologies/
Laser Cutting [1]
Laser Cladding
Laser Drilling
Laser Welding Laser Marking
Laser Cleaning
MotivationWater Jet Guided Laser Processing
[1] Richerzhagen, Bernold, et al. "Water jet guided laser cutting: a powerful hybrid technology for fine cutting and grooving." Advanced Laser ApplicationsConference and Exposition. 2004.[2] Sokołowski, Z., and I. Malinowski. "Perspectives of applications of micro-machining utilizing water jet guided laser." Recent Advances in Mechatronics.Springer Berlin Heidelberg, 2007. 365-369.
Water Jet Guided Laser Process [1]
Principle
Laser beam is focused at the nozzle exit into the water jet mediumand transmitted by total internal reflection to the point of impingementof the jet [1].
Advantages [2]
• Minimum thermal damage• High quality cuts• Not restricted by focal length of the optics• No burrs, charring, or contaminations• Small cutting radius (25-100 )• No recrystallization, oxidation or micro cracks
Motivation Water Jet Guided Laser Processing Applications
[1] Gobet, Mathilde, et al. "Implementation of short pulse lasers for wafer scribing and grooving applications." Journal of Laser Micro/nanoengineering 5 (2010): 16‐20.[2] Perrottet, Delphine, et al. "GaAs‐wafer dicing using the water jet guided laser." CS Mantech 2005 (2005).[3] Perrottet, Delphine, Simone Amorosi, and Bernold Richerzhagen. "New process for screen cutting: water‐jet guided laser." Workshop on Building European OLED Infrastructure. International Society for Optics and Photonics, 2005.
Deep Groove on Wafer [1] GaAs-Wafer Dicing [3] Screen Cutting [3]
100 μm
Conception of a New Process Water Jet Guided Laser Processing Applications
100 μm
Deflection of free falling stream of water under the influence ofcharged rod.
To achieve a paradigm shift in the process capabilities ofwaterjet-guided laser micro-manufacturing through aninnovative method of waterjet spatial control and todemonstrate the utility of the developed methodology in arange of newly developed micro-incremental formingprocesses.
Curved Water Jet Guided Laser ProcessProposed Hybrid Process
Manipulation of Water Jet Trajectory
Laser Beam
Water Jet Guided Laser
Laser Assisted Water jet Micro-Incremental Forming
Water Jet Guided Laser Micro-Machining
Water Jet Guided Laser Surface Texturing
Adaptive Hybrid Process Enhancement
Water Jet
DielectrophoresisWater Jet Manipulation
[1] Van den Driesche, Sander, et al. "Continuous cell from cell separation by traveling wave dielectrophoresis." Sensors and Actuators B: Chemical 170 (2012): 207‐214.[2] Chiarot, Paul R., and T. B. Jones. "Dielectrophoretic deflection of ink jets." Journal of Micromechanics and Microengineering 19.12 (2009): 125018.[3] Hokmabad, B. Vajdi, et al. "Electric field‐assisted manipulation of liquid jet and emanated droplets." International Journal of Multiphase Flow 65 (2014): 127‐137.
Bioparticles (Cell) [1] Water droplets [2] Water stream [3]
Dielectrophoresis (DEP): A force of translation acting on a induceddipole subjected to a non-uniform electric field [1]
·1 2⁄
where is the dipole moment vector. is the dipole moment per unitvolume in unit field
DEP force on a spherical particle:
22
where is the permittivity of body, is the permittivity of surroundingfluid, and R is the radius of the particle.
• DEP force direction will be the same if the polarity of the electrodeis switched
DielectrophoresisDielectrophoresis Theory
[1] Pohl, H. A., 1978, Dielectrophoresis: The behavior of neutral matter in nonuniform electric fields. , Cambridge University Press. Cambridge.
Governing equations for water jet’s motion in x direction:(Inside electric field region)
0 (Outside electric field region)For z direction, water jet speed considered to be constant[1]:
2
where K is discharge coefficient.The deflection can be expressed as:
1
→If is expressed as · , , , is solved from Laplace's equation,the deflection can be finally expresses as a function of and :
4,
→
,
DielectrophoresisWater Jet Deflection
[1] Couty, P., et al. "Laser‐induced break‐up of water jet waveguide." Experiments in fluids 36.6 (2004): 919‐927.
d
Vj
FDEP
D
lL
xz
Electric Field
No Electric Field
Electrode
Voltage U
HFG FG
O
H = 26
d
W ater Jet
O bjective
Electrode
N ozzle w ithO rifice Inside
Air Sw itch
W ater InletH igh SpeedCam era
Cutting Assem bly
N ozzle
Max. 448 MPa
10 μm/div
60 μm
Experimental SetupDielectrophoresis
Amplifier
NI DAQ
High-Pressure Water
Air Switch
Cutting Assembly
Water Inlet
High Speed Camera
Manual Stage
Design of Experiments (DoE)DielectrophoresisObjective:Study the relationships between water jet deflection and threeprocess parameters
Experimental Parameters:• Voltage (U)• Water pressure (P)• Distance between water jet and electrode (d)
Experimental Parameters
VoltageU (V)
Pressure P (MPa)
Distance d (μm)
Values
8001,0001,2001,400
17.2425.8634.4743.09
100200300400 25 μm
Water Jet Profile
800 1000 1200 14000
10
20
30
40Distance d = 100 m
Voltage (V)
Def
lect
ion
( m
)
17.24 MPa25.86 MPa34.47 MPa43.09 MPa
800 1000 1200 14000
6
12
18
24Distance d = 200 m
Voltage (V)
Def
lect
ion
( m
)
17.24 MPa25.86 MPa34.47 MPa43.09 MPa
800 1000 1200 14000
3.5
7
10.5
14Distance d = 300 m
Voltage (V)
Def
lect
ion
( m
)
17.24 MPa25.86 MPa34.47 MPa43.09 MPa
800 1000 1200 14000
2.5
5
7.5
10Distance d = 400 m
Voltage (V)
Def
lect
ion
( m
)
17.24 MPa25.86 MPa34.47 MPa43.09 MPa
Experimental ResultsDeflection D vs. Voltage U; D ∝ U2
10 20 30 40 500
3.5
7
10.5
14Voltage U = 800 V
Pressure (MPa)
Def
lect
ion
(m
)
100 m200 m300 m400 m
10 20 30 40 500
5
10
15
20Voltage U = 1000 V
Pressure (MPa)
Def
lect
ion
( m
)
100 m200 m300 m400 m
10 20 30 40 500
7
14
21
28Voltage U = 1200 V
Pressure (MPa)
Def
lect
ion(m
)
100 m200 m300 m400 m
10 20 30 40 500
10
20
30
40Voltage U = 1400 V
Pressure (MPa)
Def
lect
ion
( m
)
100 m200 m300 m400 m
Experimental ResultsDeflection D vs. Voltage P; D ∝ 1/P
0 100 200 300 400 5000
3.5
7
10.5
14Voltage U = 800 V
Distance (m)
Def
lect
ion
( m
)
17.24 MPa25.86 MPa34.47 MPa43.09 MPa
0 100 200 300 400 5000
5
10
15
20Voltage U = 1000 V
Distance (m)
Def
lect
ion
(m
)
17.24 MPa25.86 MPa34.47 MPa43.09 MPa
0 100 200 300 400 5000
7
14
21
28Voltage U = 1200 V
Distance (m)
Def
lect
ion
(m
)
17.24 MPa25.86 MPa34.47 MPa43.09 MPa
0 100 200 300 400 5000
10
20
30
40Voltage U = 1400 V
Distance (m)
Def
lect
ion
(m
)
17.24 MPa25.86 MPa34.47 MPa43.09 MPa
Experimental ResultsDeflection D vs. Voltage d; D ∝ 1/d
0 1 2 3 4x 10-4
0
0.005
0.01
0.015
0.02
0.025
0.03
0.035
0.04
1U2/RPd
D/
e
Linear Regression
Experimental ResultsEmpirical Equation for Deflection
Base on the observations from theexperiments, D can be expressed as:
Φ
• , R and Φ , are permittivity of air,radius of the water jet and diameteror the electrode, respectively.
• R2 = 0.9968 with C = 90.
DynamicsDesign of Experiments• Typical signals at different frequencies are used to obtain the water jet motion.• High-speed camera frame rate is set to 20,000 fps.
Waveforms Sinusoid Square Triangle Sawtooth
Frequencies 10, 100, and 500 Hz
Amplitude 1000 V
Distance (d) 300 μm
Pressure (P) 17.24 MPa
DynamicsExperiments
Waveform: TriangleFrequency: 500 HzFrame Rate: 20,000 fpsPlay Rate: 30 fpsResolution: 520x248 PixelsScale: 0.5 μm/pixel
• Considering the static relationship for voltage:
4,
→
,
• By fixing all other parameters, the equation will collapse to
where is fixed for all different scenarios because the waveform types and frequency will not change the value ofthis constant.• Normalized RMSE is calculated by the following equation to quantify the prediction capability of the model
above.
RMSE
Where n is the number of validation sites; and denote the predicted value from model and the realmeasured deflection at each validation site; is the full deflection when voltage is at maximal.
DynamicsModeling
Dynamics10 Hz Input Signals
Square Sinusoid
0.0268 0.0460
SawtoothTriangle
0.0318 0.0149
Dynamics10 Hz Input Signals
Square Sinusoid
0.0598 0.0597
Dynamics100 Hz Input Signals
SawtoothTriangle
0.0488 0.0674
Dynamics100 Hz Input Signals
SquareSinusoid
0.0486 0.2412
Dynamics500 Hz Input Signals
SawtoothTriangle
0.0499 0.0592
Dynamics500 Hz Input Signals
• The behavior of the water jet motion is very similar to typical first order system.• Time constant can be obtained by definition to characterize the first order system.• Pressure was found to have impact on the time constant.
DynamicsDelay
• Data was fitted by a simple model:1
is obtained to be 0.2126 with R-squarevalue to be 0.9889.
1
= 34.47 MPa= 17.24 MPa
0.0776 0.0321
Experimental Results500 Hz with First Order System Model
= 103.42 MPa= 68.95 MPa
0.0300 0.0568
Experimental Results500 Hz with First Order System Model
= 137.90 MPa
Experiment Results500 Hz with First Order System Model
0.0776
• The first order system model is much better thanthe static model with high frequency signal inputswith a sudden voltage change.
Experimental SetupCurved Water Jet Guided Micro-Manufacturing
Pump
Steel Table
Piezo Stage
Air Bearing Stage
Focus Lens
XY Manual StageZ Manual Stage
Water Inlet
Laser
Beam Splitter
Base FrameHigh Pressure Water
CCDCamera
High Pressure Water Jet
Experimental SetupCurved Water Jet Guided Micro-Manufacturing
Collimator
Focus Lens
Polarized Beam Splitter
CCD Camera
Lens
Beam Splitter Water in
Laser in
Water JetCoupled with Laser
Experimental SetupCurved Water Jet Guided Micro-Manufacturing
Experimental SetupCurved Water Jet Guided Micro-Manufacturing
ApplicationsMicro Incremental Sheet Metal Forming (ISMF)Two Point Incremental Forming (TPIF)
Single Point Incremental Forming (SPIF)
Conventional Forming SPIF
ApplicationsMicro Incremental Sheet Metal Forming (ISMF)
Toolpath
The sum of the local deformations adds up to result in a final formed part
ApplicationsMicro Incremental Sheet Metal Forming (ISMF)
Conventional Micro Double Sided Incremental Forming Process
Water Jet Incremental Sheet Metal FormingApplications
Laser
Part for battery manufacturing
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