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© 2013 HORIBA, Ltd. All rights reserved.
Your Trusted Technology Partner for
Advanced Measurement and Control
HORIBA Europe
Semiconductor
Date: 06/06/2013
Harald Birk
© 2013 HORIBA, Ltd. All rights reserved.
Kyoto, Japan
• Consolidated sales 1,400 M US$
• 5200 employees worldwide
• Founder: Dr. Masao Horiba
• Incorporated: 1953
• President and CEO: Atsushi Horiba
HORIBA
© 2013 HORIBA, Ltd. All rights reserved.
HORIBA Worldwide
Asia
18%
Japan
40%
Europe
26%
America
16%
Sales of FY2012: 117.6 BJPY
( 1473 MUSD)
Sales Ratio by Region
The Number of Group Companies by region (As of December 31, 2012)
America 6 Europe 16 Asia 15 (4 in Japan, including HORIBA, Ltd.) Total 37
© 2013 HORIBA, Ltd. All rights reserved.
Scientific Synergy of HORIBA and
HORIBA Jobin Yvon’s Technologies
Raman, Grating, and Fluorescence
Automotive Test Systems Emission Measurement Systems (EMS)
Mechatronics Devices (MCT)
Test Automation Systems (TAS)
Driving Control Systems (HIT)
Process & Environmental Environmental Systems
Environmental Radiation Monitor
Environmental Regulation & Process Business
Medical
In-Vitro Diagnostic (IVD) Systems
Integration of HORIBA ABX’s
Technology & Marketing Know-How
Semiconductor Mass Flow Controller
In-situ Analysis
Synergy among HORIBA HQ, HORIBA STEC
and HORIBA Jobin Yvon’s Technologies
Business Segments
© 2013 HORIBA, Ltd. All rights reserved.
Automotive Test Systems Mechatronics Devices (MCT)
Emission Measurement Systems (EMS)
Test Automation Systems (TAS) Driving Control Systems (HIT)
Process & Environmental Environmental Systems
Environmental Radiation Monitor
Environmental Regulation
& Process Business
Semiconductor Mass Flow Controller
Synergy among HORIBA HQ,
HORIBA STEC and
HORIBA Jobin Yvon’s Technologies
Scientific
Synergy of HORIBA Ltd and
HORIBA Jobin Yvon’s Technologies
Raman, Gratings, and Fluorescence
Medical
In-Vitro Diagnostic (IVD) Systems
Integration of HORIBA ABX’s
Technology & Marketing Know-How
Automotive 43.2 (541)
P&E 13.7 (171)
Medical 22.4 (280)
Semicon 17.8 (223)
As of December 31, 2012
Sales: 117.6 BJPY
( )= Segment Sales in MUSD
% = Segment Sales Ratio
Sales Breakdown by Segment
(1,473 MUSD)
Scientific 20.4 (255)
Business Segments
© 2013 HORIBA, Ltd. All rights reserved.
Main Products
Fluid Control
Mass Flow Controller
Liquid Vaporization System
Wet Process Monitoring
Chemical Solution Monitor
Dry Process Monitoring
FTIR Gas Analyzer
Residual Gas Analyzer
Plasma Diagnosis Endpoint Monitor
Metrology Product
Reticle/Mask Particle Detection
Multi range Multi Gas Mass
Flow controller Liquid Vaporization System
Residual Gas Analyzer
15% of
Activity
Sales: 17.8 BJPY
(223 MUSD)
Headcount: 781
Reticle/Mask Particle
Detection System
Chemical Solution
Monitor
Plasma Diagnosis
Endpoint Monitor
Semiconductor
© 2013 HORIBA, Ltd. All rights reserved.
Key Products Multi Range Multi Gas Digital Mass Flow Controllers
(SEC-Z500X Series)
Compact, high precision (set point accuracy), fast
response (variable PID), RoHS compliance
Chemical Solution Monitor (CS-100F1 Series)
Real-time, inline measurement, four types of chemical
solutions or ranges with single concentration monitor,
reduced lot failures boost yields in the cleaning process.
Reticle/Mask Particle Detection System (PR-PD2HR)
Compact, low operating cost, and a wide range of
applications
Gas Concentration Monitor
Metal-organic Chemical Vapor Deposition (MOCVD)
is widely used in the manufacture of LED’s, optical
devices and other components.
© 2013 HORIBA, Ltd. All rights reserved.
To be 1st Class Solution Provider in Semiconductor / FPD Industry
based on:
Strong Brand as
1st class mass flow controller supplier
1st class chemical concentration monitor supplier
1st class FPD manufacturing thin film metrology supplier
Global Sales and service Network as
Covering manufacturing system supplier nearby their site in north
America and in Asia pacific
Early stage cooperation with front edge player
Outstanding Technology as
Thermal & piezo fluid control and vaporizer
Extensive and robust IR-spectroscopy and ellipsometry
Growth Drivers / Strengths
© 2013 HORIBA, Ltd. All rights reserved.
Four Business Segments (Dec. 31, 2006) Wet process monitoring covered by HORIBA products
© 2013 HORIBA, Ltd. All rights reserved.
Technologies
HORIBA uses typically 3 kinds of Technology for monitoring
chemical solutions:
1. Absorption Spectroscopy
CS-100/100F1 Series
2. Conductivity Method
CM-200/210, HF-960M, HE-480C, etc.
3. Resistivity Method
HE-480R, etc.
More than above, HORIBA has proven technology:
Chemical Luminescent, pH, Potentiometry and others.
HORIBA can support Wet Process monitoring using most appropriate technology.
© 2013 HORIBA, Ltd. All rights reserved.
Reticle / Photomask Inspection
© 2013 HORIBA, Ltd. All rights reserved.
Thank you Gracias
Danke
Большое спасибо
Grazie
اُشْكر
Σας εσταριστούμε
너를 감사하십시요 Obrigado
Tacka dig 謝謝
ขอบคณุครบั
dhanyawad
ありがとうございました
Visit us at Silicon Saxony, Booth 007
© 2013 HORIBA, Ltd. All rights reserved.
Thank you
© 2013 HORIBA, Ltd. All rights reserved.
Danke
Gracias
Большое спасибо
Grazie اُشْكر Σας εσταριστούμε
감사합니다 Obrigado
Tacka dig
谢谢 ขอบคณุครบั
ありがとうございました
धन्यवाद நன்ற
Cảm ơn
Danke
Gracias
Большое спасибо
Grazie
Σας εσταριστούμε اُشْكر
감사합니다 Obrigado
Tacka
谢谢 ขอบคณุครบั
ありがとうございました
நன்ற
Cảm ơn Dziękuję
© 2013 HORIBA, Ltd. All rights reserved.
Scientific Synergy of HORIBA and
HORIBA Jobin Yvon’s Technologies
Raman, Grating, and Fluorescence
Automotive Test Systems Emission Measurement Systems (EMS) Mechatronics Devices (MCT) Test Automation Systems (TAS) Driving Control Systems (HIT)
Process & Environmental Environmental Systems
Environmental Radiation Monitor
Environmental Regulation & Process Business
Medical
In-Vitro Diagnostic (IVD) Systems
Integration of HORIBA ABX’s
Technology & Marketing Know-How
Semiconductor Mass Flow Controller In-situ Analysis Synergy among HORIBA HQ, HORIBA STEC and HORIBA Jobin Yvon’s Technologies
Business Segments