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Chemical elemental analysis

by Energy-dispersive X-ray spectroscopy (EDX)

Energy-dispersive X-ray spectroscopy (EDX)

Chemical characterization in the scanning electron microscope (SEM) is performed non-destructively with energy dispersive X-

ray analysis (EDX). The electron beam stimulate the atoms in the sample with uniform energy and they instantaneously send

out X-rays of specific energies for each element, the so called characteristic X-rays. This radiation gives information about the

elemental composition of the sample. Chemical elements starting with the atomic number 6 (carbon) can be determined with

this analysis method.

EDX Mapping (Element distribution images)

EDX mapping provides in addition to the conventional SEM image a meaningful picture of the element distribution of a surface.

The acquisition times for a satisfactory resolution and noise performance can take from 30 minutes to 12 hours, because a

complete EDX spectrum is made from each image point.

SEM image Carbon Potassium Sodium

Nitrogen Sulphur Zirconium

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07/11/2013http://www.sensore-electronic.com/en/SEMEDX_ChemicalElementalAnalysis.html