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Slide 1

”Roadshow” presentation

Chapter 1 Introduction

microBUILDERAn integrated modular service for microfluidics

and mixed technologies

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Slide 2

microBUILDER is ...

A collaboration of 9 European companies, R&D institutes and universities on microsystem foundry services, focusing on microfluidic applications

Part of the EUROPRACTICE network

www.europractice.com Supported by the European Union within the

Information Society Technology (IST) thematic priority of the 6th Framework program

Providing a complete service package for the development and production of new products

based on mixed technologies with a focus on microfluidics applications

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Slide 3

The Mission

Increase the commercial success and competitiveness of European industry

Simple and cost-efficient access to mixed technology development and manufacturing through

Design & engineering services Prototyping and manufacturing services Specific CoventorWare software modules Training

Demonstration of technological capabilities by sample devices

SME User club Advises the microBUILDER partners First-hand access to information Open for interested SMEs

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Slide 4

Mixed Technology

Combination and interaction of different technologies and competences

Moulding of plastics Silicon and glass

micromachining Packaging and

system integration Actuators Electronics Surface functionalisation

and modification All technologies and

competences are available within the microBUILDER network

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Slide 5

Microfluidics

Handling of small amounts of liquids and gases

Key enabling technology for different application areas:

Diagnostics and analytics Drug discovery Drug delivery Medical devices Fuel cells Process control Machinery and automation

Microfluidic devices and systems: Lab-on-chip Valves and pumps Flow and gas sensors Chemical micro-reactors

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Slide 6

The Offer

Complete service package from the first idea to a final product

Design and engineering services Silicon prototyping and series

production Prototyping and series production

of polymer parts CoventorWare software modules Training and education

Technologies and processes are documented in a design handbook

Easy access to services through one single customer interface

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Slide 7

Design & Engineering Services

Custom-tailored development services Feasibility and concept studies Proof of principle investigations Design, modelling and simulation Prototyping Test and characterisation

Based on a portfolio of validated methods, processes and technologies

Design Handbook Specifications of the available

technologies and processes Design rules Examples of validated designs Enables experienced users to design

their own device

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Slide 8

CoventorWare Process Access Kits

Library of microBuilder specific process emulation files Specific material property databases Library of parametric elements for system-level and component

design Layout template file incl. DRC

Materials’Properties

Process Parameters

Fabrication@ MicroBuilder

(SensoNor, Tronics etc.)

System and MEMS Co-design

Layout3D

Model

FEM/BEM Analysis

Target Process

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Slide 9

MPW Services atInfineon Technologies SensoNor

Bulk micromachining of Si and glass Minimum feature size: 2 µm High-volume approach to production High-precision membrane definition by

etch stop against pn-junctions High aspect ratio RIE

High stability piezoresistors for sensing elements Triple-stack Glass/Si/Glass anodically bonded Hermetically sealed cavities with electrical feed-

throughs Thermal excitation / Piezoresistive detection

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Slide 10

Industrialization and manufacturing of Si/Glass products

» Advancing concepts into reliable products

» Building supply chains for custom products

Prototyping on MPW and semi-custom runs: SOI-HARM (High Aspect Ratio Micromachining) Si-DRIE/Glass under development

MPW and manufacturing services atTRONICS Microsystems

Hermetic Sealing

Si = 60µm

Gold electrical contacts

DRIE etching of pillars, channels…Aspect ratio > 1:20Min. gap: 3µm, Min. Feat.: 4µm

Openings for light,fluids, gas or vacuum

Hermetic Sealing

Si = 60µm

Gold electrical contacts

DRIE etching of pillars, channels…Aspect ratio > 1:20Min. gap: 3µm, Min. Feat.: 4µm

Openings for light,fluids, gas or vacuum

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Slide 11

Polymer technology

Microfludic design Service

Check for mass production

Full service: From design and construction to mass production

Ultra precision milling Quick prototyping

Small volume production

Mass production by high precision moulding

Add on processes, e.g. hydrophilic coating

Micro assembly

Advanced quality service

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Slide 12

Microfluidic Construction Kit

The idea: modular concept as an intermediate step on the way to integrated systems

Lab on a ChipMicrofluidicFunctions

Concept = Kit

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Slide 13

Microfluidic Construction Kit

The product: Assembly platform and

microfluidic connectors Library of standard slides:

pumps, mixers, splitters Customer specific microfluidic

slides by high precision moulding

Application field examples: Fuel cells Environmental monitoring Biological assay development Pharmaceutical formulation Drug synthesis on demand

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Slide 14

Add-on processes – bioactive layers

Functional surfaces for attachment of: proteins (antibodies) single stranded

oligo-nucleotides glucose molecules …

Au or NiCr/Au films on silicon Commercial or customers’ own biochemistry To be combined with lab-on-chip systems

K.W. Wee et al. 2005

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Slide 15

Add-on processes – hydrophobic surfaces

Functional surfaces for inhibiting fluids or for driving fluids through designated areas

Teflon (C4F8) or SiO2 on silicon as hydrophobic and hydrophilic surfaces

Attractive for making valves and for metering (hydrophobic) and for pumps (hydrophilic)

To be combined with lab-on-chip systems

Hydrophobic surface

Hydrophobic surface utilized to inhibit fluid flow in a channel

Photo: SINTEF

Photo: SINTEF

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Slide 16

Add-on processes – optimizing lab-on-chip systems

Au films or piezoresistors for local heating

On-chip temperature measurements

Sample separation, enrichment and cleaning by electric fields (using e.g. Au thin film electrodes)

Avoid inhibition of biochemistry reactions by means of surface coatings

Infineon SensoNor process

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Slide 17

Add-on processes – piezoelectric thin films

Functional surfaces for resonating elements (cantilevers or diaphragms) or for pumps and actuators

Attractive for chemical and biochemical sensors

Piezorelectric film (PZT) on silicon

To be used as stand-aloneor to be combined withlab-on-chip systems

LP-A; sn01; FG-inst: 8Vp-pAC sinus 0Voffset; 25-45kHz(12,5-22,5); 200Hz (100Hz) mellan sampel; 7,8VDC; 1s mellan sampel; flat ingångsfilter; 100ms slutfilter; vektorrepresentation; mätning 7;

rumstemperatur, 21,5°C; 31% RH; CO2; 2003-11-06

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Prototype acoustic gas sensor in a ceramic package

Frequency characteristics of the prototype acoustic gas sensor in CO2 at room temperature

Photo: MASCOT

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Slide 18

Training

Short courses: 1 to 2 days introduction to the microBUILDER foundry processes

2-4 days hands-on training courses: Design training for the microBUILDER foundry processes using state-of-the-art design tools like CoventorWare

Web-based distant learning with animation presentation Master level university course with MEMS and microfluidics

basics, introduction to microBUILDER foundry processes and hands-on design with design tools

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Slide 19

Application Areas

Life sciences research Medical diagnostics and

analysis Drug discovery Drug delivery Environmental monitoring Process control e.g. oil

industry and food industry Food analysis Security devices e.g.

detection of explosives Energy technology

including fuel cells

Photo: SINTEF/Stanford

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Slide 20

microBUILDER partners