Writing Engineering Abstracts(51)

8/7/2019 Writing Engineering Abstracts(51)

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(1 of 2) (+) Increasingly larger substraterequirements have spurred advances in semiconductormanufacturing. Thus, to satisfy ultracleam environmentrequirements, the pumping performance of vacuum pumps isincreasingly important in the etching process, chemical vapor

deposition (CVD), and physical vapor deposition (PVD).However, the processing pressure fails to remain constant with adeclining pumping performance. The inability to evaluate thepumping performance efficiently and precisely makes itimpossible to comply with the demand of actual processingpressure. Therefore, this work describe a novel vacuum

performance system according to ISO standards, with automatictesting and human-machine interface functions. Pumpingperformance is evaluated based on the flow meter method. Theflow rate is then adjusted to obtain a balanced inlet pressure.Next, the pumping speed is determined based on thisrelationship. Additionally, results of the experimental pumping

speed are compared with those of simulations.


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(2 of 2)Analysis results indicate that the proposedvacuum performance system evaluates the throughput, pumpingspeed, ultimate pressure, and residue gas analysis via itsautomatic testing and human-machine interface functions in aninlet pressure range exceeding 1.3x10-6 Torr.

Importantly, the proposed system eliminates the evaluatedtime and provide human-machine interface functions.


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(1 of 2) (+) Advances in telecommunicationsand information technology have led to the transformation ofoptical storage media from CD, VCD, DVD to BD format.Consumer demand for an optical pick-up head in higher capacityportable optical storage media, e.g., near-field optical disc,

focuses on a more compact and lightweight size with a largerstorage capability, as well as fast read and write actioncapabilities. In particular, a glass material refractive indexexceeding 2.0, a weight less than 80 gram and a size smallerthan 1.0 millimeter in diameter are of priority concern. Forcurrent specifications of a refractive index exceeding 2.0 for

glass material and a diameter smaller than 1 millimeter for glassbeads, conventional grinding and polishing glass processingmethods fail to satisfy stability requirements and consumerdemand regarding the shape of the optical storage media devicein terms of precision and efficiency.


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(2 of 2) Therefore, this work designs a novel method that canmanufacture 100 optical lenses in a single run using a glassmolding process. Two 10 * 10 ceramic mold array plates,with each mold having a diameter of 1 mllimeter, are producedbased on the temperature distribution of a heating device. Glass

with a refractive index of 2.003 is then selected and pre-manufactured to the appropriate volume. Next, the requiredshape for an optical lens is pressed by controlling the heatingand cooling times through use of a high-temperature glassmolding machine. Simulation results indicatethat the proposed method ensures the manufacturing of 100

precision optical lenses in 3 hours, along with homogeneity ofthe shape reaching 95%. Importantly, inaddition to its desired features of optimized batch production,precise speed control and shorter processing time, the proposedmethod ensures that the components cost less when a greatervolume is produced.


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(1 of 3)(+) The image data of a spatialdimension in cross-track and the spectral dimension aresampled simultaneously for hyperspectral imagers by usinga 2D detector array. Based on use of the pushbroommechanism, these spectrographs, with an entrance slit and

a PGP dispersing element, is extensively adopted inremote sensing. A hyperspectral image of a large groundsurface can be easily obtained by multiple imageacquisition using these imagers. However, the detectorarray gradually malfunctions after long-term imaging

operations. Additionally, a few CCDs in the detector arraydecline in performance with different levels.


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(2 of 3)Therefore, this work describes a novel restoration algorithmfor a hyperspectral image to maintain a high image qualitywithout replacing the detector array of an imager. To achieverestoration, the proposed algorithm includes defective CCDsdetection based on acquired images and image restoration

based on inter-band radiance interpolation. Defective CCDsare detected (based on OR according to) radiance deviation ofeach image line for all hyperspectral bands. Image restoration isthen performed using inter-band radiance interpolation ofLagrange polynomial on the image lines with defective CCDs.Next, CCDs defects for an imager are identified periodically to

update the CCDs health status. Additionally, hyperspectralobserver of plants and environment (HOPE) images, asdeveloped by ITRC, with simulated defective CCDs of variousperformance decay levels are applied for validation.


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(2 of 3) Analysis results indicate that the proposedrestoration algorithm has an accuracy for images with ahomogeneous ground feature that exceeds those with non-homogeneous features. Additionally, defective CCDs with aperformance decay of 10% can still be designated precisely.

Moreover, restoration accuracy of pixel radiance is achieved aswell for various spectral bands using the proposed algorithm.Furthermore, image reconstruction is performed usinginterpolation of spatial neighboring pixels. Both methods arecompared in terms of radiance deviation. In contrast with themethod using interpolation of neighboring pixcels, the proposed

algorithm handles the images taken by hyperspectral imagerwith adjoining defective CCDs both in spatial and spectrald imensions. Highly promising forhyperspectral images, the proposed algorithm ensures that animager operates continuously despite the presence of a fewdefects in the detector array.


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Writing Engineering Abstracts(51)