WPE BF Tampere Compressed

7/29/2019 WPE BF Tampere Compressed

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NanoManufacturing

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Bertrand Fillon Oct. 10th 2006

Convergence of technologies

Hans Hartmann Pedersen (EC)Bertrand Fillon (CEA)

Paolo Matteazzi (MBN Nanomaterials)

Parallel thematic workshops



NanoManufacturing

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Welcome- B. Fillon - 5 min.

µ-nano-manufacturing roadmap presentation – B.Fillon - 20 min.

FP7 presentation - Hans Hartmann Pedersen - 15 min.

Ex. of possible RTD project topics – Paolo Matteazzi - 10 min.

Workshops on industrial needs: Discussion on contents and

forward planning (nanosurfaces & Micromanufacturing) – twogroups - 30 min.

Wrap up- B. Fillon

Agenda



NanoManufacturing

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From nanoparticles to applications

Nanoparticles, processes

30 %

Nanoparticles/

processes,

Functionalisation

Uses

Services

Assembling, handling

30 %

End user application

40%

1 période 10nm

20nm Nanocouches TiN / AlTiN

1 période 10nm

20nm

1 period 10nm

20nm Nanolayers TiN / AlTiN

IntegrationComponents



NanoManufacturing

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Potential industrial applications

Nano

materials

Textiles intelligentclothes, power shaft,Functionalised fibers…

Mass reduction

AutomobileValves, piston axle,connecting rod,camshaft, crankshaft…

Aeronautic Structural and fixing parts of engine pylon, gears,transmission system,blades,nuts and bolts…

Energy / Industry Fuel cell, heat exchanger

tubes, heating elements…

Telecomunication/Electronic, µ-power,functionalisedcomponents, sensors,durability…

Pharmaceutical/

Packaging, intelligentpackaging, high barrier,functionalised, optical,..



NanoManufacturing

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Micro- and NanoManufacturing – from Technology/Materials to Application

Micro- and NanoManufacturing

Electronics & Dispays

Pharmaceutical

Automotive

Textiles & Clothes

Materials Process-Technology

Source: Süss MicroTec,Jenoptik, Kugler Präzisionsschleifen,Trumpf Lasertechnik

Aerospace

Energy/industry



NanoManufacturing

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Micro- and NanoManufacturing is growing and growing!

NEXUS Market Analysis 2005-2009

2004 in bill. $

2009 in bill. $

IT peripherals 8,5 13,7

Consumer Electronics 0,8 5,5

Automotive 1,3 2

Medical / Life Science 0,6 1,5

Telecommunications 0,2 0,9

Ind. Process Control 0,6 0,9

Aero, Defense, Security 0,1 0,4

Household applications 0,1 0,2

growth rate of about 20% for Micro- and Nanoproducts

Micro market may reach 20 billion € in 2010

• New products in nearly all kind of sectors like medicine,automotive, textile, consumer,etc. are not imaginable without

micro- or nanotechnology.• Today’s innovations in

mechatronic systems arenot realizable without micro- andnanotechnology

• Undoubtedly micro- and

nanotechnology is the future keytechnology world wide.


http://slidepdf.com/reader/full/wpe-bf-tampere-compressed 7/35NanoManufacturing

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“….winning a major share of world manufacturing output in the future…”

Target of Micro- and NanoManufacturing industry

To achieve these goals...

the targets of a Micro- and NanoManufacturing industry are:

• to establish a new industry for the manufacturing of products based onemerging Micro- and Nano-Technologies.

• to develop Europe as the leading location for the production of NanoParticles,Micro- and Nanostructures and components with “Micro/Nano inside”.

• to establish the complete Micro- and Nano-Technology value chain leading tothe manufacturing of European MNT products.

• to ensure that the new MNT products are produced at European facilities using equipment and systems of European origin.

Mission of Manufuture (www.manufuture.org)



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Realize vision of futureMicro- and NanoManufacturing

Increasing amount of industrial stakeholders

GeneratingRoadmaps /StrategicResearch Agenda

CA

CA

Working Group

Micro- and Nano

Manufacturing

Community


NoE

NanoManufacturing

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Deliverables to create the Micro and NanoManufacturing Roadmap

June 2006



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2007

2008

2009

2010

2011

2012

2013

M a n u f

a c t u r i n

g

N a n o M

a t e r i a l

s

M a n u f

a c t u r i n

g

S u r f a c

e s

M a n u f

a c t u r i

n g

M i c r o C

o m p o n

e n t s

M i c r o - a n d N

a n o M a n u f a c

t u r i n g S y s t e

m s a n d P l a t

f o r m s

The vision for Micro- and NanoManufacturing

To establish a European

Community in Micro- and

NanoManufacturing and achieve

worldwide leadership of Europeanmanufacturers and equipment-

suppliers in the field of

manufacturing micro- and nano-

technological products.

today

Vision



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Sector Micro- Micro- Micro- Overall (inc. other)

fluidics optics sensors &actuators

Medical/Surgical ███▌ ███▌ ███ ███████████████▌

Automotive and Transport █▌ ██████ █████▌ ██████████████▌

Biotechnology ████▌ █▌ █▌ ████████████▌

Consumer Products

██▌

███▌

█▌

██████████

Information and Communication █▌ █ ██ ███████▌

Energy/Chemical ██ ██ █▌ █████

Scientific/Academic Community ▌ █▌ █ █████

Pharmaceutical ███ █ ▌ ████▌

Construction █▌ █ ██▌

Domestic Products █▌ ▌ █ ██▌

Food ██ ▌ ▌ ██▌

Aerospace/Space Science █ ██

Perceived importance of market sectors (industry)



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0 10 20 30 40 50

Military/Aerospace

Consumer/Entertainment

Automotive/Transportation

Medical/Pharmaceuticals

Pollution control

Comm unications

Clothing/Textiles

Construction

Food and Drink

Computers /Business

Energy/Water /Chemicals

Agriculture/Fisheries/Fores try

Security

Other

Number of suggested product developments

(Note: A single product may be sold across several markets)

Product suggestions: Target markets



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Security (7)

Pollution control (2)

Military/Aerospace (6)

Medical/Pharmaceuticals (23)

Manufacturing (1)

Food and Drink (9)

Ener gy/Water /Chem icals (6)

Consumer/Entertainment (10)

Construction (1)

Computers /Business (8)

Communications (6)

Clothing/Textiles (4)

Automot ive/Transportation (20)


(2)

All (105)

Sector

() Number of contributions

Emerging Growing Stable Declining

Perceived importance of market sectors



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0 0 1 0 1 0 0 0 0 0 0 0 0 0

1 1 0 1 0 0 0 0 0 0 0 0 0 0

1 0.5 0.5 1 0 0.5 0.5 0.5 0.5 0 0 0 0 0

0.5 0.5 0.5 0.5 1 0.5 0.5 0.5 0.5 0 0 0 0 0

0.75 0.25 0.25 0.25 0 0.5 0.25 0.5 0 0 0.5 0 0.25 0

0.9 0.8 0.2 0.9 0.3 0 0 0.1 0.2 0.3 0.4 0 0.1 0

0.625 0.5 0.25 0 0.125 0.125 0. 125 0. 125 0.75 0.375 0 0.25 0 0

0.33 0.16 0.33 0.16 0.84 0.5 0.33 0.33 0.67 0.16 0 0.16 0 0

0.5 0.5 0.33 0.67 0.5 0.16 0.33 0 0 0.16 0.16 0.16 0.16 0

0.222222 0.555556 0.222222 0.222222 0.444444 0.222222 0.555556 0.222222 0.555556 0.222222 0.111111 0.111111 0 00.55 0.6 0.25 0.65 0.35 0.45 0.35 0 0.25 0.3 0.4 0.15 0.05 0

0.714286 0.047619 0.047619 0.571429 0.571429 0.285714 0.571429 0.714286 0.047619 0.285714 0.142857 0.142857 0.142857 0

0.521739 0.521739 0.391304 0.608696 0.434783 0.26087 0.478261 0.695652 0.73913 0.26087 0.173913 0.304348 0.086957 0.130435

0.833333 0.833333 0.333333 0.5 0.5 0.5 0.5 0.5 0.666667 0.333333 0.833333 0.166667 0.333333 0.333333

Sector

() Number of contributions

Nil Low Medium High

Construction (1)

Manufacturing (1)

Agriculture/Fisheries/Forestry (2)

Pollution control (2)

Clothing/Textiles (4)

Consumer/Entertainment (10)

Computers/Business (8)

Energy/Water/Chemicals (6)

Communications (6)

Food and Drink (9)

Automotive/Transportation (20)

Security (7)

Medical/Pharmaceuticals (23)

Military/Aerospace (6)

M i c r o - e l e c t r o n i c

M i c r o - e l e c t r o m e c h

a n i c a l

N a n o - p a t t e r n s

M i c r o - o p t i c

N a n o - s u r f a c e s

N a n o - p a r t i c l e s

G a s / c h e m i c a l s e n s i n g

B i o / G e n e t i c

M i c r o - f l u i d i c

M i c r o - a c o u s t i c

M i c r o - R F / m i c r o w a

v e

M i c r o - m a g n e t i c

O t h e r

N a n o - m a c h i n e s

Technology

Projected use of MNT per sector (sorted)



NanoManufacturing

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0 10 20 30 40 50

Micro-electromechanical

Micro-optic

Bio/Genetic

Micro-fluidic

Micro-RF/microwave

Micro-magnetic

Nano-surfaces

Nano-particles

Nano-machines

Nano-patterns

Micro-electronic

Gas/chemical sensing

Micro-acoustic

Other

Featured in: number of products

Product suggestions: Technology content

µ-components



NanoManufacturing

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Key: ███████ Researchers ▒▒▒▒▒▒▒ Industry

Technology Perceived importance 3D Printing ████████████████████▒▒

Milling ██████████▒▒▒▒▒▒▒▒▒▒

Powder injection moulding ████▒▒▒▒▒▒▒▒▒▒▒▒▒▒▒

Reel to reel embossing █████████████▒▒▒

Nanoimprint lithography (NIL) ██████▒▒▒▒▒▒▒▒

Injection moulding ████████▒▒▒▒▒▒ Nanoimprinting ▒▒▒▒▒▒▒▒▒▒▒▒▒▒ Multi-component injection moulding ▒▒▒▒▒▒▒▒▒▒▒▒▒

Laser ablation ██████▒▒▒▒▒

Selective laser sintering ████████▒

Metal Forming ████████▒ Plasma machining ██▒▒▒▒▒

E beam lithography ████▒▒▒

Perceived future technology importance



NanoManufacturing

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Key: ███████ Researchers ▒▒▒▒▒▒▒ Industry

(Drivers, barriers, and technical capabilities for developing/manufacturing micro products)

█████▒▒ K Nano-micro or micro-meso integration

██████▒▒ J Assembly & packaging

█████▒▒▒ I Process / machine technologies

████████▒ H Integrated process chains

███████▒▒ G New/improved/multi materials

███▒▒▒▒▒▒▒▒ F Quality/reproducibility/reliability

███████▒▒▒▒▒▒ E Function and physical integration

█████████▒▒▒▒ D Technology / maturity / standards

██████▒▒▒▒▒▒▒▒ C 3D features, surface properties

██████████▒▒▒▒▒▒▒▒▒▒▒▒▒▒ B Interdisciplinary, design, and

process/technology knowledge

███████████▒▒▒▒▒▒▒▒▒▒▒▒▒▒▒▒▒▒▒▒ A Low cost / volume productionPerceived ImportanceApplication requirement

█████▒▒ K Nano-micro or micro-meso integration

██████▒▒ J Assembly & packaging

█████▒▒▒ I Process / machine technologies

████████▒ H Integrated process chains

███████▒▒ G New/improved/multi materials

███▒▒▒▒▒▒▒▒ F Quality/reproducibility/reliability

███████▒▒▒▒▒▒ E Function and physical integration

█████████▒▒▒▒ D Technology / maturity / standards

██████▒▒▒▒▒▒▒▒ C 3D features, surface properties

██████████▒▒▒▒▒▒▒▒▒▒▒▒▒▒ B Interdisciplinary, design, and


███████████▒▒▒▒▒▒▒▒▒▒▒▒▒▒▒▒▒▒▒▒ A Low cost / volume productionPerceived ImportanceApplication requirement

Perceived 4M application requirements



NanoManufacturing

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IM, HE, NIL

Vol. EDM & ECM, IM,Coining,

Forging,…

X

Y

Z

3D Channel(Volume)

IM & NIL

X

Y

1D Channel

Milling, SLS,Turning, SLA, FDM

Milling, µs&nsLA&F, wEDM

Turning, EDM &

ECM milling, SLS,

ps & fs LA, FIB, e-beam

Milling, Turning,SLS

Electroplating,Electroforming

X

Y

Z

3D Channel(Surface)

PVD & CVD

M e t a l s

P o l y m e r s

C e r a m i c s

A N Y

Bending

Scr. Printing,Tape Casting

Array of 1DChannels

X

Printing

Blanking,Punching

PROFIB,Etching, Exc.

LA

Photolithogr.SLA

X Y

2D Channel

Photolithogr.,SLA

Promising process chains (research)



NanoManufacturing

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The Roadmap of Micro- and NanoManufacturing

2007

2008

2009

2010

2011

2012

2013

technologies

meso / micro

components

volume

production

processes

micro-

assemblynanostructuring

and coating

functionalisation

/ nanolayering

particles

production/

functionalisation

bulk

integration

bulk

integrationknowledge

based

fabrication

clean

and

safe

integrated

platforms

meso/ micro/

nano-

manufacturing

systems

meso/ micro/

nano-

manufacturing

systems

M a n u f a c t u r i

n g

N a n o M

a t e r i a l s

M a n u f

a c t u r i n

g

S u r f a c

e s

M a n u f

a c t u r i

n g

M i c r o C

o m p o n

e n t s

M i c r o - a n d

N a n o M a n u f a

c t u r i n g S y s t e m s a n d

P l a t f o r m s

particles

production/functionalisation

technologies

meso / micro

components

volume

production

processes

micro

assembly

nanostructuringand coating

functionalisation

/ nanolayering

particles

and bulk

integration

particles

production/

functionalisation

meso/micro/nano-

manufacturing

systems

integrated

platforms

today

Vision

NanoManufacturing

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NanoManufacturing

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Micro- and NanoManufacturing - THE ENABLING TECHNOLOGY

Medical

European MANUFACTURING IndustryTransformation of European industry from a resource-intensive

to a knowledge-intensive industry.

Military

Textiles

Security

Chemical

EnergyHydro/Fuel/PV

Robotics

Consumer

Electronics

Communication


1. Manufacturing NanoMaterials2. Manufacturing NanoSurfaces3. Manufacturing Micro-Components

4. Micro- and Nano Manufacturing Systems and Platforms

Automotive

NanoManufacturing

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NanoManufacturing

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From production processes …

Manufacturing

NanoMaterials

Nanophased particlesproduction & functionalisation

Bulk integration

Nanophased particles

production & functionalisationbulk integration

Manufacturing

NanoSurfaces

Nanostructuring and coating of surfaces

Surface functionalisation andnanolayering

Manufacturing

Micro-Components

Technologies for (micro/nano) componentsand devices

Volume productionprocesses

Assembly andintegration processes

Integrated platforms

Development and implementation of scalable, intelligent and modular meso-,micro- and nanomanufacturing systems

Knowledge based fabrication

Micro- and Nano

Manufacturing Systems and Platforms

… to production lines

… to production lines… to production lines



NanoManufacturing

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The presented results are acommon work from

• 4M: www.4M-net.org • NMG group: www.nanomanufacturing.eu

• µSapient: www.microsapient.org

• IPMMAN: www.Ipmman.eu

• Supported by the commission:

NanoManufacturing

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http://www.4m-net.org/

http://www.nanomanufacturing.eu/

http://www.microsapient.org/

http://www.ipmman.eu/

http://www.ipmman.eu/

http://www.microsapient.org/

http://www.nanomanufacturing.eu/






NanoManufacturing

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Conference 2006 Tampere Hall

“Workshop E: Convergence of Technologies”

Chairs:

Hans Hartmann Pedersen, European Commission

Bertrand Fillon, CEA/LITEN France

Paolo Matteazzi, MBN Nanomaterialia SpA, Italy



NanoManufacturing

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Micro- and NanoManufacturing - THE ENABLING TECHNOLOGY

Medical

European MANUFACTURING IndustryTransformation of European industry from a resource-intensive

to a knowledge-intensive industry.

Military

Textiles

Security

Chemical

EnergyHydro/Fuel/PV

Robotics

Consumer

Electronics

Communication


1. Manufacturing NanoMaterials2. Manufacturing NanoSurfaces3. Manufacturing Micro-Components

4. Micro- and Nano Manufacturing Systems and Platforms

Automotive

S



NanoManufacturing

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Exploiting the convergence of technologies

stimulate thecreation of new

industries

facilitate next

generation highvalue-added

products

newmanufacturing

processes

create potentiallydisruptive products

and productionsystems

New, cost efficientproductionmethods

Y1 Y2 Y3 Y4 …

Processes and

Equipment for High

Quality Industrial

Production of 3-

Dimensional

Nanosurfaces

Surface

functionalisation and

nanolayering

Production

Technologies andequipment for Micro-

Manufacturing

Volume production

process chains for

high throughput

micro-manufacturing

µ- and Nano Manu-

facturing Platforms:

• Design, Modelling andSimulation Tools

• Equipment and ToolsIntegration

• Intelligent scalable adaptable• Flexible, Modular Networked

System Architectures

Handling and Micro-assembly processes for

multi-functional multi-

material meso-micro

devices

Automation and

economical

production…

…

Summary



NanoManufacturing

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Gaps / Needs

Processes and

Equipment for High

Quality Industrial

Production of 3-

Dimensional

Nanosurfaces

Summary

RTD Ideas and projectsText… Text…

Nano-

surfaces

Surface

functionalisation and

nanolayering

Automation and

economical

production…

Y1

Y2

Y3



NanoManufacturing

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Gaps / Needs

Summary


Y1

Y2

Y3

Production

Technologies and

equipment for Micro-

Manufacturing

Volume production

process chains for

high throughput

micro-manufacturing

Handling and Micro-

assembly processes for

multi-functional multi-

material meso-micro

devices

…

Micro-

manufacturing



NanoManufacturing

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Gaps / Needs

Summary


Y1

Y2

Y3 µ- and Nano Manu-

facturing Platforms:

• Design, Modelling andSimulation Tools

• Equipment and ToolsIntegration

• Intelligent scalable adaptable• Flexible, Modular Networked

System Architectures

Integration /

Platforms



NanoManufacturing

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For further details and to register on-line please visit http://www.microsapient.org

or contact by email: [email protected]

…linking technical experts and industrial practitioners with common

interests in the area of

micro- and nano-manufacturing technologies. ..

Lunch and networking event 13.15-15.00

Closing Remarks13.00-13.15

Reports from parallel sessions and calendar for future events12.00–13.00

Coffee11.30-12.00Developing Micro- Nano-manufacturing Research Agenda Parallel Sessions9.00

–11.30

Review of Industrial Needs and proposal for Special Interest Groups8.30–9.00

8 November 2006

Networking Reception and Dinner 18.30–21.00

Problem statements from industrialists16.00-18.30

Coffee15.30-16.00

Problem statements from industrialists14.15–15.30

International Micro and Nano-Manufacturing Roadmaps13.45–14.15

Welcome and introduction13.30–13.45

Registration and buffet lunch12.30–13.30

Micro-Sapient Brokerage Event

Microsapient Project Meeting (members only)10.30-12.00

7 November 2006

Lunch and networking event 13.15-15.00

Closing Remarks13.00-13.15

Reports from parallel sessions and calendar for future events12.00–13.00

Coffee11.30-12.00Developing Micro- Nano-manufacturing Research Agenda Parallel Sessions9.00

–11.30

Review of Industrial Needs and proposal for Special Interest Groups8.30–9.00

8 November 2006

Networking Reception and Dinner 18.30–21.00

Problem statements from industrialists16.00-18.30

Coffee15.30-16.00

Problem statements from industrialists14.15–15.30

International Micro and Nano-Manufacturing Roadmaps13.45–14.15

Welcome and introduction13.30–13.45

Registration and buffet lunch12.30–13.30

Micro-Sapient Brokerage Event

Microsapient Project Meeting (members only)10.30-12.00

7 November 2006

7th-8th November, FZ Karlsruhe, Germany



NanoManufacturing

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NanoManufacturing

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Potential industrial applications

Nano

materials

Textiles intelligentclothes, power shaft,Functionalised fibers…

Mass reduction

AutomobileValves, piston axle,connecting rod,camshaft, crankshaft…

Aeronautic Structural and fixing parts of engine pylon, gears,transmission system,blades,nuts and bolts…

Energy / Industry Fuel cell, heat exchanger

tubes, heating elements…

Telecomunication/Electronic, µ-power,functionalisedcomponents, sensors,durability…

Pharmaceutical/

Packaging, intelligent

packaging, high barrier,functionalised, optical,..



NanoManufacturing

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Nano-micro or micro-meso integration

Assembly & packaging

Process / machine technologies

Integrated process chains

New/improved/multi materials

Quality/reproducibility/reliability

Function and physical integration

Technology / maturity / standards

3D features, surface properties

Interdisciplinary, design, and


Low cost / volume production

Application requirements (in order of

importance)

Nano-micro or micro-meso integration

Assembly & packaging

Process / machine technologies

Integrated process chains

New/improved/multi materials

Quality/reproducibility/reliability

Function and physical integration

Technology / maturity / standards

3D features, surface properties

Interdisciplinary, design, and


Low cost / volume production

Application requirements (in order of

importance)

E beam lithography

Plasma machining

Metal Forming

Selective laser sintering

Laser ablation

Multi-component injectionmoulding

Nanoimprinting

Injection moulding

Nanoimprint lithography (NIL)

Reel to reel embossing

Powder injection moulding

Milling

3D Printing

Future Technologies (in order of importance)

E beam lithography

Plasma machining

Metal Forming

Selective laser sintering

Laser ablation

Multi-component injectionmoulding

Nanoimprinting

Injection moulding

Nanoimprint lithography (NIL)

Reel to reel embossing

Powder injection moulding

Milling

3D Printing

Future Technologies (in order of importance)



NanoManufacturing

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0 10 20 30 40 50 60 70 80

Micro-electromechanical

Micro-optic

Bio/Genetic

Micro-fluidic

Micro-RF/microwave

Micro-magnetic

Nano-surfaces

Nano-particles

Nano-machines

Nano-patterns

Micro-electronic

Gas/chemical sensing

Micro-acoustic

Other

Featured in: number of projects

Research projects: Technology Content



NanoManufacturing

WorkingWorking

GroupGroup


0 10 20 30 40 50 60 70 80 90 100

Military/Aerospace

Consumer/Entertainment

Automotive/Transportation

Medical/Pharmaceuticals

Pollution control

Comm unications

Clothing/Textiles

Construction

Food and Drink

Computers /Business

Energy/Water /Chemicals


Security

Other

Supported by: number of projects

Research projects: Market sectors supported



NanoManufacturing

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Manufacturing

NanoMaterials

Nanophased particlesproduction & functionalisation

Year 1: Economical production& Automation

Year 3: Production environment

Year 5: Quality

Bulk integration

Year 2: Economical production& automation

Year 4: Production environment

Year 6: Automation

Nanophased particlesproduction & functionalisationbulk integration

Year 7: Quality & automation

Manufacturing

NanoSurfaces

Nanostructuring and coating of surfaces

Year 1: Quality

Year 5: Automation andeconomical production

Surface functionalisation andnanolayering

Year 3: Quality

Year 7:Automation andeconomical production

Micro-Nano Manufacturing Integrated Topics 7-years Call Planning

NanoManufacturing

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Micro-Nano Manufacturing Integrated Topics 7-years Call Planning



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Manufacturing

Micro-Components

Technologies for (micro/nano)

components and devices

Year 1/4: multi-material meso/microcomponents and devices with microand nano scale functional features

Volume production processes

Year 2/5: enabling volumeproduction process chains for development of high throughput micro-

manufacturing platforms

Assembly and integrationprocesses

Year 3/6: Micro-assemblyprocesses for multi-functional multi-material meso-micro devices

Year 2: Intelligent, scalable, adaptablemanufacturing systems and platforms

Year 5: Collaboration (esp. SME

production networks )

Year 3 and 7: Integration in specificand cross-domain sectors

Year 1: Design, modelling andsimulation of specific knowledge of themicro- and nano domain

Integrated platforms

Year 4: Fabrication environment under clean and safe conditions

Year 3: Flexible, modular and knowledgebased manufacturing system architectures

Year 6: Integrated solutions for reliability,quality, safety, standardization

Development and implementation of scalable, intelligent and modular meso-,micro- and nanomanufacturing systems

Micro- and Nano

Manufacturing Systems and Platforms

Knowledge based fabrication

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NanoManufacturing

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Documents

WPE BF Tampere Compressed