WJ 999R/T Spare Parts List Updated Dec. 14, 2017

88 Equipment Engineering and Process Consulting, Inc

88 Equipment CONFIDENTIAL Page 1

WJ 999R/T Spare Parts List Updated Dec. 14, 2017

WJ Spares on Sale

California USA Spares Available for Sale

More photos available upon request for all items listed If you do not see what you need here, let us know, we can provide most any WJ part you

could need including many new high quality 2nd source parts CA USA Parts Includes: MonoBlok Chemical Metering Tubes: 3-12”, 1-8” 12” Parallel Plate Injectors: 5 3” Exhaust Vents for 12” injectors: 4 2” Exhaust Vents for 12” Injectors: 6 Etch Muffle for 999 series

Some Sample Photos Showing the Quality and Cleanliness




Parts Located in California USA

Item Description, Makers, Models Part # QTY

Cal 1 999 series etch muffle,

used, cleaned, Teflon fitting needs replaced

1

Cal 2 12 inch parallel plate injectors 5

Cal 3 3” exhaust vents for 999/12

inch injectors, 12 screw bottoms

4

Cal 4

2” exhaust vents for 999/12 inch injectors

3 are 4 screw bottoms, 3 are 10 screw bottoms

6

Cal 6 2 bags flat silicon gaskets

for 12” injectors, bag of inj. bolts

3 bags

Cal 7 Pig-noses 12

MB1 8 inch monoblok chemical tube

995732-003, sn 688-287 1

MB2 12 inch monoblok chemical tube (still sealed in bag)

912596-007-C, sn 04-6323,

vint 1996 1

MB3 12 inch monoblok chemical tube (still sealed in bag)

912596-007-C, sn 04-6333,

vint 1996 1

MB4 12 inch monoblok chemical tube, (still sealed in bag)

912596-007-B, sn 04-6992,

vint 1996 1







Used/Cleaned 999 Etch Muffle, 6-2” vents for 999/12” injectors

4-3” exhaust vents for 999/12” injectors, 3-shields, 5-12” parallel plate injectors




WJ999, 999R, T999 etch muffle, good clean condition, Teflon input fitting needs replaced

5-12 inch parallel plate injectors, 2 with TEOS insulated chemical line and 3 as standard hydride (non-heated). All can be used for hydride or TEOS process (add insulation to the

chemical line)




Injector Details

All with 10 hole base plates, all gas port skirts look good

#1: with TEOS chemical line (okay for hydride) Plate IDs: XJ6-W15-W15-T92




#2: with TEOS chemical line (okay for hydride) Plate IDs: XJ6-1S93-1S93-P33







#3: standard hydride type gas lines (with heater connection for TEOS-need to add line insulation)

Plate IDs: All 372




#4: standard hydride type gas lines (with heater connection for TEOS-need to add line insulation)

Plate IDs: all R66




#5: standard hydride type gas lines (with heater connection for TEOS) Plate IDs: all 4 #1005




MonoBlok Chemical Tubes in Calif. Storage

#MB1: 8 inch, Chemical tube, #995732-003, sn 688-287

#MB2, 3, 4: 3-12 inch, Chemical tubes, #912596-007 (2 are C, 1 is B)




Pig-noses and flat silicon inj.-vent gaskets, injector bolts

Documents

WJ 999R/T Spare Parts List Updated Dec. 14, 2017