WHEN THIN FILM MATTERS PVD SYSTEMS

www.polyteknik.com

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WHEN THIN FILM MATTERS

Polyteknik AS is a PVD equipment manufacturer with an innovative and best service approach. With more than twenty years in business,

industry.

POLYTEKNIK AS

PVD SYSTEMS

The portfolio of platform systems range from small scale R&D to high volume or large area deposition systems. Polyteknik AS cover several

deposition processes including sputtering, evaporation, and varieties of these. At Polyteknik AS you will meet a dedicated team interested

purposes.

Our reliable PVD systems are featuring:

• Modular standard systems

• Modular process packages

• Modular investment platforms

HISTORY

Director and Owner, Jens William Larsen (M.Sc.) founded Polyteknik AS in 1995. During the years, we have grown from being a local

knowhow and technology platforms.

FLEXIBILITY – RELIABILITY – KNOWHOW – DEDICATION

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YOUR NEXT PVD SYSTEM

DRIVEN BY UNIQUE PROCESSES

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• Epitaxial Growth

• Highly ionised sputtering

• Glancing Angle Deposition

• Combined evaporation and sputtering

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BROAD MARKET APPLICATION

• Semiconductor and MEMS

• Automotive & Power electronics

• Optical sensors and communication

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• Advanced packaging

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• Photovoltaics R&D

from Polyteknik AS is unveiling a new way of modular thinking for PVD systems. From the single chamber with classic PVD processes

investments follow increasing demands of your facility. The Polyteknik Flextura systems are highlighting a unique combination of high

FLEXTURA PVD PLATFORM

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MODULARITY OF THE FLEXTURA PVD PLATFORM

FLEXIBLE PRODUCTION

FLEXIBILITY AND PREPARED FOR THE FUTURE

• Wide range of processes: DC, Pulsed DC, HiPIMS, RF, and MF

• Sputtering of metals, dielectrics, oxides, and nitrides

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• Single wafer or batch process

• High quality, high uniformity layers

• Scalable capacity from medium to high volume production for low Cost of Ownership

• Very small footprint and a clean design

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• Fully automated process control with advanced data logging

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sputtering processes in mind. Meaning multiple smaller targets to limit the capital binding

in noble target materials. The typical application could be as a batch process, but the

compatibility with the Flextura Cluster platform also opens to upgrade to a fully automated

The Sputter modules of the Flextura PVD platform handles sputtering processes from

standard metallisation or electrode layers to reactive sputtering of AlN, TCOs or even

ternary alloys.

FLEXTURA SPUTTER

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FLEXIBLE PROCESSES

as well as ion beam assisted deposition (IBAD). Though not well known as a process in connection with a cluster tool, the Flextura

Evaporator modules can be connected to the Flextura Cluster platform for single substrate processing of advanced processes such as

FLEXIBILITY AND RELIABILITY IS THE KEY!

• New clean design and smaller footprint

• Various processes:

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• Thermal evaporation

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• Ion beam assisted deposition (IBAD)

• High quality, high uniformity layers

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• Scalable capacity from medium to high volume production for low Cost of Ownership

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• Fully automated process control with advanced data logging

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ADVANCED PROCESS CONTROL

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• OTM (Optical Thickness Monitor)

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FLEXTURA EVAPORATOR

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e Flextura

es such as

PROCESS MODULES

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• Increased layer quality

• Epitaxial growth

• HiPIMS sputtering (highly ionised) chamber

• High aspect ratio metallisation

• Layer property tuning

• Direct magnetron sputtering (DC, RF and pDC)

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FLEXIBLE INVESTMENT

VOLUME PRODUCTION APPLICATIONS

• High yield production by PVD: Metallisation, TCOs, AlN, optical

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• Glancing Angle Deposition on wafers in mass production

scale (GLAD)

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semicon solutions

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The Flextura Cluster platform is unveiling a new way of modular thinking of PVD systems – Flexible production and prepared for the

future. The Flextura PVD platform is truly almost Plug&Play and you may add process modules as your need for capacity or new processes

increase. The modules function as stand alone units – see Flextura Sputter or Flextura Evaporator – which may be connected to a Flextura

PVD Cluster.

FLEXTURA CLUSTER

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SPECIALISED APPLICATIONS

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controlled stoichiometry, and deposition rate in especially reactive sputtering processes

• HiPIMS sputtering for highly ionised deposition

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• Market leading process software technology for accurate real time control of deposition

UNIQUE PROCESS CONTROL WITH CRYOSOFT

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• Multiple user levels

• Recipe based processing

• Save, load, edit recipes

• Multilayer or multiprocesses

• Individual or batch recipe

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• Advanced datalogging of all process parameters

• System status – integrated feedback from components

• Remote system monitoring or operation

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A SPUTTERING WORKHORSE

PROCESSES

• Single or dual side sputtering

• DC, RF, pDC or HiPIMS

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• Plasma cleaning

• Single or multilayer deposition without breaking vacuum

APPLICATION AND CAPACITY

• Versatile development tool and medium volume

production tool

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• Proven volume production of QCM biosensors and

biomedical electrodes

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A true workhorse for medium volume sputtering. The Discovery platform is a typical batch system with single or dual side sputtering –

perfect for deposition of electrodes on temperature sensitive piezoelectric materials, biosensors etc.

electrodes in volume production of QCM biosensors and through hole electrode coating.

DISCOVERY

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ENDLESS VERTICAL SPUTTERING

NUMEROUS BENEFITS

• Modular design

• Short pump down times

• High uniformity coating

• Vertical sputtering

• Limited pinhole defects

• High volume – Large area manufacturing

PROCESSES

• Sputtering of metals and dielectrics

• Controlled reactive sputtering

• Proven through hole deposition on large area

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• Up to 6 linear magnetrons

• Dual side sputtering

• Plasma cleaning and degassing

TYPICAL APPLICATION AREAS

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• MEMS and Piezo sensor fabrication

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• Battery, Fuel cell and TEG production

• Membranes and solar absorbers

is a modular system comprised of minimum one process chamber and a load lock. The throughput can gradually be increased by adding

HiPIMS and biasing for through hole metallisation on temperature sensitive piezo ceramic composites.

INFINITY SYSTEMS

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SPECIALISED APPLICATONS

TURNKEY SYSTEMS

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• Tube coating (internal and external)

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control

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ROLL-TO-ROLL

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• Linear or drum design

• Substrates: Metals, polymers, textiles etc.

• Special substrate: Silicone web

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• Transparent conductive oxides

• Metallisation, electrode layers

• Semiconducting oxides

TUBE COATING

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• Multilayer optical absorber coating

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• Automated process

• Internal tube coaters

• Accelerator and synchrotron components

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processes – ensuring high reliability, high quality and optimised throughput of the production line.

CUSTOM COATING SYSTEMS

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POLYTEKNIK AS

Moellegade 21

DK9750 Oestervraa

Denmark

PHONE: +45 9689 2800 EMAIL: sales@polyteknik.dk

WEB: www.polyteknik.com

MADE IN DENMARK