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© 2013 75 Cours Emile Zola, F-69100 Villeurbanne - Lyon, France Tel: +33 472 83 01 80 - Fax: +33 472 83 01 83 Web: http://www.yole.fr What are the business and technology trends that are impacting the MEMS business for the next 5 years? JC ELOY, [email protected]

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© 2013

75 Cours Emile Zola, F-69100 Villeurbanne - Lyon, France

Tel: +33 472 83 01 80 - Fax: +33 472 83 01 83

Web: http://www.yole.fr

What are the business and technology

trends that are impacting the MEMS

business for

the next 5 years?

JC ELOY, [email protected]

© 2013• 2

• Yole Developpement is a market, technology and strategy consultingcompany, founded in 1998. We operate in the following areas:

• Our expertise is based on research done by our in-house analysts,conducting open-ended interviews with most industry players.

• 30 full time analysts with technical and marketing degrees

• Primary research including over 3,500 interviews per year

MEMS & image sensors

Photovoltaic

Advanced Packaging

Microfluidic

& Med Tech

Power Electronics

HB LED, LED & LD Equipment and materials

YOLE presentation

© 2013• 3

• Custom Analysis:

– Largest part of Yole activities

– Covered by NDA agreement

– A few days to several months of work, depending on objectives

• Published Reports:

– An average of 40 reports published every year

– Available individually or through Annual Subscription Program

– Market and technology reports, Patent analysis, ReverseEngineering/Costing reports and Reverse Costing tools

• i-Micronews Media:

– Newsletter and webcasts on 3D, MEMS, Power electronics, LED andimaging

– 45 000+ subscribers…

• Yole Finance services:

– M&A (buying and selling)

– Due diligence

– Fund-raising services

4 business models

© 2013• 4

Last YOLE reports on MEMS

• Sensors and electronics technologies for the IoT

• Mems for mobile and consumer applications

• Permanent Wafer Bonding for Semiconductor: Application Trends &

Technology

• MEMS Microphone: Market, Applications and Business Trends 2014

• Inertial MEMS Manufacturing Trends 2014 - Volumes 1 & 2

• Market & Technology Trends in Materials & Equipment for Printed &

Flexible Electronics

• Status of the CMOS Image Sensor Industry

• Sensors for Home Healthcare Applications: Market & Technology Analysis

• Thin Film PZT for Semiconductor Application Trends & Technology Update

• 6 and 9 axis sensors: consumer inertial combos report

© 2013• 5

Yole Inc.

Yole Paris

Yole Japan

30% of our business

is in North America

30% of our business

is in Asia

40% of our business is

in EU Countries

Yole KoreaYole Développement Lyon HQ

S+C

Global activities

© 2013• 6

Financial investors

& industry advocates

R&D Organizations

Suppliers (equipment,

wafers, materials)

Component

manufacturers

Integrators, system

suppliers & end users

Some of our customers

© 2013• 7

FEW TRENDS ARE IMPACTING THE MEMS

BUSINESS…

© 2013• 8

Business is growing everywhere…

2012-2019 MEMS Markets (US$M)

2013-1

9 C

AG

R

2012 2013 2014 2015 2016 2017 2018 2019

Others $244M $326M $324M $385M $437M $519M $644M $798M

Oscillators $29M $31M $38M $51M $68M $129M $247M $393M

RF MEMS $474M $586M $669M $767M $872M $1 026M $1 186M $1 391M

Microdispensers (microfluidics) $174M $201M $234M $272M $316M $368M $428M $498M

Microfluidics for IVD $787M $949M $1 165M $1 415M $1 733M $2 132M $2 643M $3 302M

Microfluidics for research $412M $557M $751M $1 014M $1 369M $1 849M $2 588M $3 334M

Other optical MEMS $189M $211M $239M $262M $290M $322M $359M $372M

Projection systems $855M $775M $866M $933M $1 172M $1 395M $1 688M $2 062M

Micro displays $4M $4M $0M $3M $10M $16M $30M $57M

PIR & thermopiles $52M $60M $70M $83M $97M $118M $151M $211M

Microbolometers $228M $244M $271M $309M $350M $388M $427M $496M

Inertial combos $269M $552M $888M $1 278M $1 673M $1 896M $2 199M $2 478M

Digital compass $363M $428M $456M $439M $436M $367M $336M $313M

Gyroscopes $1 347M $1 307M $1 328M $1 262M $1 213M $1 173M $1 079M $1 040M

Accelerometers $1 587M $1 547M $1 566M $1 523M $1 480M $1 397M $1 309M $1 253M

Microphones $589M $785M $929M $1 050M $1 174M $1 318M $1 483M $1 651M

Pressure sensors $1 871M $2 003M $2 095M $2 223M $2 396M $2 592M $2 819M $3 124M

InkJet heads $1 189M $1 158M $1 123M $1 143M $1 174M $1 199M $1 218M $1 238M

$0M

$5 000M

$10 000M

$15 000M

$20 000M

$25 000M

$30 000M

US$

M r

eve

nu

es

MEMS market forecast 2012-2019 value (in M$)April 2014

TOTAL $10 662M $11 723M $13 012M $14 413M $16 260M $18 203M $20 833M $24 011M

16,1%

52,7%

15,5%

16,3%

23,1%

34,8%

10,0%

17,7%

57,8%

23,5%

12,5%

28,4%

-5,1%

-3,7%

-3,4%

13,2%

7,7%

1,1%

© 2013• 9

Business is growing everywhere…

2012-2019 MEMS Markets (Munits)

2013-1

9 C

AG

R

15,8%

65,6%

20,2%

18,7%

34,4%

42,3%

18,7%

106,7%

64,8%

59,5%

24,7%

41,3%

5,6%

8,4%

-3,6%

18,3%

22,6%

-3,2%

TOTAL 7 657 9 818 11 893 13 953 16 273 18 685 21 972 26 204

2012 2013 2014 2015 2016 2017 2018 2019

Others (microstructures, micro tips, flow meter …) 36 96 42 47 60 84 134 231

Oscillators 93 100 135 203 304 608 1 216 2 068

RF MEMS 977 1 192 1 424 1 671 1 935 2 353 2 884 3 596

Microdispensers (microfluidics) 29 34 41 48 57 68 80 96

Microfluidics for IVD 110 145 193 262 349 488 646 856

Microfluidics for Research 1 2 2 3 5 6 10 14

Other optical MEMS 3 3 4 5 6 7 8 9

Projection systems 6 7 10 25 70 175 354 527

Micro displays 0 0 0 0 0 1 1 2

PIR & Thermopiles 21 25 36 52 70 129 222 406

Microbolometers 0 0 0 1 1 1 1 2

Inertial combos 162 460 884 1 428 2 010 2 465 3 060 3 666

Digital Compass 805 1 109 1 396 1 568 1 729 1 625 1 573 1 538

Gyroscopes 628 803 934 988 1 052 1 141 1 216 1 299

Accelerometers 1 949 2 139 2 306 2 271 2 244 2 040 1 824 1 718

Microphones 1 678 2 414 3 060 3 704 4 399 5 149 5 891 6 602

Pressure Sensors 834 977 1 124 1 384 1 700 2 071 2 587 3 315

InkJet Heads 324 312 302 292 283 274 266 258

0

5 000

10 000

15 000

20 000

25 000

30 000

Ship

me

nts

(M

un

its)

MEMS market forecast shipments (in Munits) April 2014

© 2013• 10

76%

62%

34%

32%

20%

15%

12%

12%

12%

9%

8%

6%

6%

6%

5%

3%

2%

2%

1%

0%

-1%

-3%

-3%

-4%

-8%

-11%

-11%

-11%

-18%

-79%

-100% -80% -60% -40% -20% 0% 20% 40% 60% 80% 100%

GOERTEK

AAC

INVENSENSE

CANON

BOSCH SENSORTEC

AVAGO TECHNOLOGIES

TRIQUINT

SONY

OMRON

INFINEON TECHNOLOGIES

KNOWLES ELECTRONICS

FREESCALE SEMICONDUCTOR

MEASUREMENT SPECIALTIES INC.

KIONIX

SENSATA

ULIS

GE SENSING

FLIR SYSTEMS

MURATA

HONEYWELL

UTC Aerospace Systems

STMICROELECTRONICS

DENSO

HEWLETT PACKARD

TEXAS INSTRUMENTS

PANASONIC

ALPS ELECTRIC

AKM

ANALOG DEVICES

SEIKO EPSON

RELATIVE DIFFERENCE IN MEMS SALES 2013/2012

Business is growing everywhere…

Growth of Mems companies 2012-2013

© 2013• 11

New devices are coming…

Emerging MEMS Market in Units

Yole Développement September 2013

Total 10.97 21.81 44.83 106.35 260.63 511.65 934.62

© 2013• 12

BUT…

© 2013• 13

2010 2011 2012 2013 2014 2015 2016 2017 2018 2019

ASP analog 0,32 0,305 0,285 0,26 0,24 0,225 0,215 0,21 0,205 0,2

ASP digital 0,46 0,447 0,425 0,4 0,37 0,345 0,325 0,31 0,301 0,29

0,15

0,19

0,23

0,27

0,31

0,35

0,39

0,43

0,47

0,51

$

Global ASP Evolution of MEMS Microphone2010-2019

Yole Développement © February 2014

Decrease of price in CE…

ASP of MEMS microphones

© 2013• 14

Component size is still decreasingTypical package footprint for sensors used in mobile devices

2008 2009 2010 2011 2012 2013 2014

4x4

mm²

3x3

mm²

2x2

mm²

1.6x

1.61.4x

1.4

2.2x2.2

mm²

Accelerometers

Magnetometers

Gyroscopes

6-axis e-compass

6-axis IMU

9-axis

3x3

mm²

4x4

mm²

3x3

mm²

2x2

mm²

3x3

mm²

4x4

mm²

1.6x

1.6?

3x3

mm²

4x4

mm²

2.5x2.5

mm²

3x5

mm²

2x2

mm²

2x2

mm²

2.4x2.4

mm²

© 2013• 15

Things are different depending on what you are

looking at…

Packaged microphone market share in 2013

61%

13%

8%

7%

5%

2%

1%1%1%

1%

Global MEMS Microphone Market Share in Value ($M)2013

Knowles

AAC

Goertek

STMicroelectronics

Gettop

Bosch/Akustica

ADI (now InvenSense)

BSE

Wolfson

NeoMEMS

MEMSensing

Epcos

Others

Yole Développement © February 2014

$785M

© 2013• 16

Things are different depending on what you are

looking at…

Microphone die market share in 2013

61%

20%

7%

3%

2%1%

6%

Global MEMS Die Manufacturing Market Share 2013 (in volume)

Sony

Infineon

Omron

AAC

Bosch

TSMC

Others

Yole Développement © February 2014

2.4Bunits

© 2013• 17

Successful Companies are Still Large Leaders in

Distinct MEMS CategoriesTop 4 players have >50% of market shares in 5 different MEMS markets

0

100

200

300

400

500

600

700

800

20

13

Sal

es

($M

)

Top MEMS Suppliers in the Mobile Phone and Tablet Market- 2013 Revenue ($M) - Breakdown by Product Type -

MEMS accelerometers MEMS Gyroscopes Magnetometers 6-axis IMU 6-axis E-Compass

BAW filters & Duplexers Silicon Microphones Pressure sensors Others

Yole développement © May 2014

© 2013• 18

Evolution 2009-2013: Maintaining growth in

consumer electronic applications is a challenge…

© 2013• 19

Products

Pressure

sensors

Accelerometers

1950 1960 1970 1980 1990 2000 2010 2012

Lab R&D

Gyroscopes

Toward a commercial

productCost reduction Ramp up

15 years

8 years

8 years6 years

8 years9 years

5 years

15 years6 years

19 years

25 years

36 years from R&D to commercial ramp-up

But commercial ramp-up is still a big

issue…

Oscillators 6 years 5 years5 years

16 years

Autofocus 4 years6 years7 years

17 years

Microphones 6 years6 years6 years

18 years

… but the « cost reduction » barrier still there!

© 2013• 20

• We note the difficulty to reach the commercialization phase: we have not seen new

types of MEMS entering production for years!

– Delayed production for Auto-Focus, Micro speakers…

• A major change in the industry linked to the importance of mobile applications can

explain that:

But commercial ramp-up is still a big issue…

The « Nessie curve » law

Time

Today: “Nessie”- like

commercialization curve

Time

In the past: « stairs »-

shaped commercialization

curve

© 2013• 21

So…

• The automotive, industrial and medical applications of MEMS are

also driving the growth of the MEMS business:

– With healthier business models

– Ability to innovate more easily and take risks step by step

– And also taking benefit of the developments of the Ce applications in

term of packaging ans integration.

© 2013 • 22BioMEMS January 2013 Copyrights © Yole Développement SA. All rights reserved.

MEMS FOR MEDICAL APPLICATIONS

© 2013 • 23BioMEMS January 2013 Copyrights © Yole Développement SA. All rights reserved.

Life sciences

Markets Considered in the Medical MEMS business

Pharmaceutical

R&D spending ~17% of

annual turnover source PhRma

Medical DevicesIn Vitro Diagnostics

Environment

control

• water

monitoring,

• homeland

security,…

Agrofood

control

. process

control,

traceability,

Medical equipment

development and

commercialization

$267B 2011

CAGR 11: 6%

BioMEMS

contribution: $521MSource Yole estimation

R&D spending around

8% of sales source Eucomed

Biological test

development and

commercialization

$65.3B 2011

CAGR 11: ~8%

BioMEMS contribution:

$674MSource Yole estimation

Drug discovery and

commercialization

$855B 2011

CAGR 11: 5%Source IMS Health, VFA

BioMEMS contribution:

$317M

Medical Home Care

Prescribed Medical

devices and services

for home care

$69B 2011

CAGR 11: 9%

BioMEMS

contribution: $52MSource Yole estimation

Wide range of products.

Excludes consumer health

and sport products

© 2013 • 24BioMEMS January 2013 Copyrights © Yole Développement SA. All rights reserved.

Devices versus Applications

Accelero

metersGyroscopes Flow meters Pressure sensors

Temperature

sensors

Bio-Chemical

sensors

Market Applications Expected System Connectivity

Ventilator & Anesthesia Wired X X

Infusion devices Wired X

Respiratory Monitoring Wired X X X

Oxygen concentrator Wired X X

Surgery (robots, endoscopes...) Wired X X

Camera Pills Autonomous, Wireless

Capnograph (CO2 meter) Wired X X

Cardiac monitoring, pacemakers Autonomous, Wireless X X

Hearing Aids Autonomous, Wireless

Blood monitoring Autonomous, Wireless X X X

Kidney Dialysis control Autonomous, Wireless X X X

Dispensing, blending Autonomous, Wireless

Point of care devices, Lab on chip Autonomous, Wireless X

Pharmaceutical research Wired X

analytical devices (MS, GC, HPLC) Wired X

Comfort Wireless X

Safety Wireless X X

Patient monitoring Autonomous, Wireless X X X

Activity monitoring Autonomous, Wireless X X X

Reusable

Single use, disposable

Disposable or reusable, depending on product

MEMS & Sensors

Medical

Diagnostic

Home care

© 2013 • 25BioMEMS January 2013 Copyrights © Yole Développement SA. All rights reserved.

Devices versus Applications

RFID Strain sensors Image sensors Microphones µpumps Energy Harvesting

Market Applications Expected System Connectivity

Ventilator & Anesthesia Wired X

Infusion devices Wired X

Respiratory Monitoring Wired X

Oxygen concentrator Wired X

Surgery (robots, endoscopes...) Wired X X X

Camera Pills Autonomous, Wireless X X

Capnograph (CO2 meter) Wired

Cardiac monitoring, pacemakers Autonomous, Wireless X

Hearing Aids Autonomous, Wireless X

Blood monitoring Autonomous, Wireless X

Kidney Dialysis control Autonomous, Wireless X X

Dispensing, blending Autonomous, Wireless X

Point of care devices, Lab on chip Autonomous, Wireless X

Pharmaceutical research Wired

analytical devices (MS, GC, HPLC) Wired

Comfort Wireless

Safety Wireless X X

Patient monitoring Autonomous, Wireless X X X

Activity monitoring Autonomous, Wireless X X X X X

Reusable

Single use, disposable

Disposable or reusable, depending on product

MEMS & Sensors

Medical

Diagnostic

Home care

© 2013 • 26BioMEMS January 2013 Copyrights © Yole Développement SA. All rights reserved.

Microsystem Devices Market Distribution2011-2018 market in $M

2011 2012 2013 2014 2015 2016 2017 2018

Medical devices 521 602 672 759 861 974 1113 1270

Home Care 52 59 72 85 97 112 124 136

In Vitro Diagnostics 674 788 949 1165 1415 1733 2132 2643

Pharmaceutical and biological Research 317 412 557 751 1014 1369 1849 2588

0

1000

2000

3000

4000

5000

6000

7000

Bio

MEM

S an

d M

icro

syst

ems

Mar

ket

per

Ap

plic

atio

n in

$M

BioMEMS and Microsystems Market per Application in $M

CAGR2013-2018=24%

© 2013 • 27BioMEMS January 2013 Copyrights © Yole Développement SA. All rights reserved.

Microsystem Devices for Healthcare Applications2011 & 2018 market in M$

0

1000

2000

3000

4000

5000

6000

7000

2011 2012 2013 2014 2015 2016 2017 2018

BioMEMS and Microsystems for Life Science Market in $MRF ID

Strain sensors

Energy Harvesting

IR-Temperature sensors for medical Diagnostics

Flow meter for medical and Diagnostics

Microneedles

Micropumps

Inhalers

Industrial and environmental

Analytical devices

Pharmaceutical and life science research

Point of Care diagnostics

Clinical & veterinary diagnostics

X-Ray imaging

Camera pills

Endoscopes

HMDs

Microspectrometers

Human motion analysis

Accelerometer for pacemaker

Hearing Aids

Kidney Dialysis

Respiratory equipment

Ventilator & Anesthesia

Blood monitoring equipment

Blood monitoring disposable

CAGR2013-2018=24%

© 2013 • 28BioMEMS January 2013 Copyrights © Yole Développement SA. All rights reserved.

Benchtop•Anesthesia

• ventilators

•medical monitoring

•...

Portable•IVD

•Point of care

•Infusion and drug delivery

•Respiratory monitoring

•...

Wearable•Glucose monitoring

•Kidney dialysis

•Theranostics

•Activity monitoring

•Patient monitoring

•Smart pills

•...

Implantable•Pacemakers

•Neurostimulators

•ECG

•Coclear implants

•...

Global Miniaturization roadmapM

inia

turi

za

tio

n a

nd

in

teg

rati

on

le

ve

l

Time

Mobility

Medical requirementsOnly for chronic diseases

and for medical safety reasons

Ease of use

Near Patient

Hospital and

Lab Care

Home Care

Point of care

Anywhere Care

Quality

of Life

© 2013 • 29BioMEMS January 2013 Copyrights © Yole Développement SA. All rights reserved.

Summary and Conclusions (1/3)EXECUTIVE SUMMARY

• Microsystem technologies are changing the Healthcare industry.New in-vitro diagnostic systems, new therapy strategies, geneticdisease treatment, targeted and intelligent drug delivery,artificial pancreas, drug discovery processes… are healthcareimprovements promised to future generations.

• One of the main trends for the future is to increase theintegration of the devices. Indeed, the size is often a criticalparameter for the medical devices.

• For the future, we don’t forecast the apparition of numerousnew type of devices. Nevertheless, we foresee new productsbased on a combination of existing sensors and innovativesoftware.

© 2013• 30

MEMS IN AUTOMOTIVE

© 2013• 31

MEMS in Automotive

Infineon source

© 2013• 32

MEMS for AutomotiveOverview

MEMS Sensors

Pressure sensorsUncooled IR detectors

Inertial devices Microphones

Micro-mirors &

pico projectors

TPMS

Side airbags,

Seat occupancy

HVAC

Particle filter

Active Safety

Night vision

Head-up

displays

Vision enhancement system (Source: Bosch)

ABSESP

© 2013• 33

MEMS for Automotive 2012-2018 ($M)

• MEMS for auto will grow from $2.6B in 2012 to $3.6B in 2018 with a

5% CAGR.

$0

$500

$1 000

$1 500

$2 000

$2 500

$3 000

$3 500

$4 000

2012 2013 2014 2015 2016 2017 2018

MEMS for Auto ($M)

Micro bolometers

Optical MEMS

IMUs

Magnetometers

Gyros

Acceleros

Microphones

Pressure

Accelero 1%CAGR

IMUs 35% CAGR

Gyro -7% CAGR

© 2013• 34

Automotive FIR Thermal CamerasMarket forecast in $ and units

• CAGR 2012-2017: + 13.1% in $ and + 33.8% in units.

2013

49M$

2017

82M$

© 2013• 35

Automotive53.8%

Industrial9.9%

Consumer27.4%

Medical6.3%

High-end2.6%

2018 Pressure sensor marketValue breakdown by application

Yole Développement @ January 2013

MEMS pressure sensor applicationsMarket breakdown by applications

• MEMS pressure sensors market is dominated by automotive applications today.

– Industrial, Medical applications are following.

• Yole estimates a huge growth of consumer applications in the coming years. By

2018, this segment of the industry will be more than 27% of the total market. But

still automotive will be 54%

Automotive69.1%

Industrial13.7%

Consumer4.1%

Medical9.6%

High-end3.5%

2012 Pressure sensor marketValue breakdown by application

Yole Développement @ January 2013

Total Market $1.5BTotal Market $2.6B

© 2013• 36

Pressure Sensor for Automotive ApplicationsKey applications

• Air Intake Sensors for Engine Controls (MAP/BAP/Boost)

• TPMS

• HVAC

Higher Volume

Applications

(tens of millions of units)

• Fuel Common Rail (100% of Diesel Engines, Also needed for Gasoline Direct Injection)

• Oil Pressure, Brake, Suspension, Steering

• Side Airbags

• Particulate

• Mass Air Flow Sensors

• Seat occupancy

• Fuel Vapor (saturated)

Other

Applications

• TPMS sensors over 15% CAGR in Sensor Demand

• Most of others from 5% to 10% CAGR in Sensor Demand

Application Market

Dynamics

© 2013• 37

Inertial MEMS in AutomotiveStructure of passenger vehicles with current integration of inertial sensors

BMW

Airbag ECU

ABS /

Brake ECU

TPMS

module

TPMS

module

Standalone

peripheral

module

Standalone

peripheral

module

Standalone

sensor GPS

• Front crash sensor

• Rollover sensors

• ESC accelerometer

• ESC gyro (possibly)

Standalone peripheral module

• Satellite crash sensors

• Motion detection sensor

Standalone sensor

• ESC gyro (possibly)

• Navigation gyroscope

• ESC unit (processing)

• ESC gyroscope (possibly)

• ESC accelerometer

(possibly)

© 2013• 38

Price is still dropping quarter after quarter… Strong pressure also in automotive…

• ESC market is growing, driven by regulations

• A big pressure on prices is seen on the market

• ESC combos are successful since their launch in 2010

– They provide significant cost savings compared to discrete sensors

$,0.0

$2,0.0

$4,0.0

$6,0.0

$8,0.0

$10,0.0

$12,0.0

$14,0.0

2008 2009 2010 2011 2012 2013 2014 2015 2016 2017 2018

0

20

40

60

80

100

120

140

160

180

ASP

($

)

Mar

ket

(M U

nit

s)

2008 - 2018 ESC Accelerometers, Gyroscopes and Combos

Munits Discrete Accel & Gyro Munits Combos Accel & Gyro ASP accel (US$)

ASP gyro(US$) ASP combo (US$)

Yole développement © Oct 2013

© 2013• 39

So…

• MEMS industry is big and growing. Strong market pull observed for

sensors and actuators in cell phones, automotive, medical, industrial…

• Not limited to few devices. A new wave of MEMS is coming!

• Component and die size are still being optimized while combo approaches

become mainstream. And several disruptive technology approaches are

now in development to keep going in term of size and price decrease

• But the MEMS industry has not solved a critical issue: how to increase the

chance of new devices to enter the market?

– RF switch, autofocus… are example of devices still under development after

more than 10 years of effort

– How to help companies to go faster and safer on the market with new devices?

© 2013• 40

Please give me your business card in order to get an electronic copy

of my presentation.

For more information:

[email protected]

Thank You for your Attention!Q&A

www.yole.fr www.i-micronews.com