Vacuum valves play a very important role in determining the efficiency of vacuum equipment and vacuum pumps. Valves used

in a vacuum atmosphere work at very small pressure differentials and absolute pressures compared to general industrial

pumps.

ULVAC designs and manufactures vacuum valves based on many years of technological experience in order to meet and

surpass customer needs. Be sure to use appropriate ULVAC vacuum valves for work in environments from atmospheric

pressure to ultra-high vacuums.

Vacuum Valve Series

These valves have a large conductance when the disk is open in order to maximize pumping capabilities of the vacuum pump.

Valve Types: SS (soft steel), stainless steel, aluminum are used as valve body materials depending on the pressure and application involved.Vacuum flanges, quick couplings, UFC flanges, and other connection methods are possible.

High vacuum valvesMain products: L (angle) model, T (3-ways) model, gate type vacuum valvesApplicable pressure ranges

Other valves: VLH (P), VAH (P) series: Atmospheric pressure to10–5 PaO-ring seals are used in the axis seal sections.Seal materials that emit little gas (nitrile rubber and fluorine rubber) are used in the bonnet and disk seals.

Features Ultra-high vacuum pumpMain products: L (angle) model and gate model vacuum valvesApplicable pressure range: Atmospheric pressure to 10–8 PaSeal materials that emit little gas (fluorine rubber and metal gaskets) are selected based on the applicable pressure and used in the bonnet and disk seals.A bellows seal is used in the axis seal section.

Other valvesVariable leak valve : This is a flow rate adjustment valve applicable from atmospheric pressure to the high and ultra-high vacuum range.

Vacuum exhaust line for sputter and evaporation systemsVacuum exhaust line for various heat processing furnacesVacuum exhaust line for vacuum drying machine and freeze-drying machineVacuum exhaust line for leak tester

Appl icat ions

VUGPVUGH

VULH VLP

VTP

VLH

VUH VUH-MVF 10-AIV VULP

Vacuum Valve

Vacuum Valve

2

High Vacuum Valve VLH Series Manual Valve

Vacuum Valve Series

N-dia. B

dia. C

Ldia. D

dia. A

H1

H2

T

L

dia.

D

T

N-dia. Bdia. C

Ldia. D

dia. A

H1

H2

L

dia.

D

＊1 Seal performance value when valve is shut. O-ring permeability is not included in the leak volume. When the valve is operated air caught in the shaft is turned in and may increase the apparent leak volume.

L

dia. A

dia. D

H1

H2

L

dia.

D

＊1: conductance: calculated valve using molecular flow, 20 ˚C (68 F̊), and air

Specifications

Dimensions

VLH-U3 (S) -U10 (S)VLH-U3/4 (S) -2 (S)

Item Model VLH-U VLH-US VLH-US-KF

Common diameter 20A (3/4B) to 100A (4B) 25A (1B) to 50A (2B)

Flange diameter VF20 to VF100 KF25 to KF50

Main unit material Soft steel SUS304

Gasket material Nitrile rubber FPM

Allowable baking temperature ˚C ≦60 ≦120

(at stopped) ˚F ≦140 ≦248

Pressure range Pa 1.0×10-5 to 1.0×105 (abs)

Torr 7.5×10-8 to 760 (abs)

mbar 1.0×10-7 to 1.0×103 (abs)

Leak rate ＊1 Pa・m3/s ≦1.3×10-7 ≦7.0×10-9

Torr・L/s ≦9.75×10-7 ≦5.25×10-8

mbar・L/s ≦1.3×10-6 ≦7.0×10-8

Allowable ambient temperature ˚C 5 to 40

˚F 41 to 104

Open/close operation principle Manual

Maintenance cycle 100000

(unit: mm)

Model

Item Common port diameter

Flange diameter Conductance Flange to

diameter

Flange to Flange

dimension

When completely

closed

When completely

openHandle Flange

thickness Bolt center Hole quantity/diameter Weight

A m3/s ＊1 dia. D L H1 H2 dia. A T dia. C N-dia. B kgVLH-U3/4 (S) 20 VF20 0.0066 80 60 167 184 40 8 60 4-10 1.3VLH-U1 (S) 25 VF25 0.0197 90 65 192 224 40 8 70 4-10 1.6VLH-U1 1/2 (S) 40 VF40 0.020 105 80 225 264 55 10 85 4-10 2.7VLH-U2 (S) 50 VF50 0.0544 120 90 252 292 55 10 100 4-10 4.0VLH-U3 (S) 80 VF80 0.142 160 120 368 424 100 12 135 4-12 8.8VLH-U4 (S) 100 VF100 0.203 185 130 405 475 125 12 160 8-12 11.4VLH-US-25KF 25 KF25 0.0075 40 50 156 173 40 － － － 0.7 VLH-US-40KF 40 KF40 0.0232 55 65 211 250 55 － － － 1.6 VLH-US-50KF 50 KF50 0.034 75 70 232 272 55 － － － 2.7

VLH-U (S) series

VLH-US-KF series

3

High Vacuum Valve VLP Series Compressed Air Driven

＊1 Please inquire the size of 400A (16B) or more separately.＊2 60˚C (140˚F) for the air cylinder section.＊3 Seal performance value when valve is shut. O-ring permeability is not included in the leak volume. When the valve is operated air caught in the shaft is turned in and may increase the apparent leak volume.

＊1: conductance: calculated valve using molecular flow, 20 ˚C (68 F̊), and air

Dimensions

Specifications

Item Model VLP-U VLP-US VLP-US-KF

Common diameter 20A (3/4B) to 900A (36B) ＊1 25A (1B) to 50A (2B)

Flange diameter VF20 to VF900 KF25 to KF50

Main unit material Soft steel SUS304Gasket material

Nitrile rubber FPM Disk seal： FPMBonnet seal： Nitrile rubber

Allowable baking temperature ˚C ≦60 ≦120

(at stopped) ＊2 ˚F ≦140 ≦248

Pressure range Pa 1.0×10-5 to 1.0×105 (abs)

Torr 7.5×10-8 to 760 (abs)

mbar 1.0×10-7 to 1.0×103 (abs)

Leak rate ＊3 Pa・m3/s ≦1.3×10-7 ≦7.0×10-9

Torr・L/s ≦9.75×10-7 ≦5.25×10-8

mbar・L/s ≦1.3×10-6 ≦7.0×10-8

Allowable ambient temperature ˚C 5 to 40

˚F 41 to 104

Open/close operation principle Compressed air

Compressed air pressure MPa G 0.45 to 0.55

psi 65.3 to 79.8

Open/close signal output Attachment up to diameter of 550A (22B) is possible (optional)

Maintenance cycle 100000Remarks 20A (3/4B) to 100A (4B): Reverse pressure possible,

150A (6B) to 900A (36B): Reverse pressure not possible; Model with reverse pressure capability is available as an option (R model).

(unit: mm)

Model

Item Common port diameter

Flange diameter Conductance Flange

diameter

Flange to Flange

dimension.Total height Flange

thickness Bolt center Hole quantity/diameter Cylinder

Compressed air connection

portWeight

A m3/s ＊1 dia. D L H T dia. C N-dia. B Sq.A E kg

VLP-U3/4 (S) 20 VF20 0.0068 80 60 157 8 60 4-10 36.0 φ6×φ4 Tubeconnection 1.4

VLP-U1 (S) 25 VF25 0.0154 90 65 192 8 70 4-10 45.0 Rc1/8 2.1 VLP-U1 1/2 (S) 40 VF40 0.0199 105 80 220 10 85 4-10 45.0 Rc1/8 2.9 VLP-U2 (S) 50 VF50 0.05 120 90 254 10 100 4-10 64.0 Rc1/4 4.7 VLP-U3 (S) 80 VF80 0.164 160 120 331 12 135 4-12 77.0 Rc1/4 10.0 VLP-U4 (S) 100 VF100 0.206 185 130 354 12 160 8-15 98.0 Rc3/8 12.2 VLP-U6 (S) 150 VF150 0.637 235 160 609 12 210 8-15 102.0 Rc1/2 38.0 VLP-U8 (S) 200 VF200 1.235 300 200 771 16 270 8-15 116.0 Rc1/2 60.0 VLP-U10 (S) 250 VF250 2.006 350 220 844 16 320 8-15 116.0 Rc1/2 82.0 VLP-U12 (S) 300 VF300 3.084 400 250 942 16 370 8-15 145.0 Rc1/2 112.0 VLP-U14 (S) 350 VF350 3.93 450 280 1066 20 420 8-15 145.0 Rc1/2 147.0

VLP-US-25KF 25 KF25 0.007 40 50 147 － － － 36.0 φ6×φ4 Tubeconnection 0.8

VLP-US-40KF 40 KF40 0.0239 55 65 192 － － － 45.0 Rc1/8 1.6 VLP-US-50KF 50 KF50 0.0294 75 70 220 － － － 64.0 Rc1/4 3.5

Auto SW (optional)

dia.

D

dia. D

L

L

T

H

E

N-dia. B

dia. C

Sq. A

Ldia. D

dia.

DL

Auto SW (optional)

H

E Sq. A

VLP-U (S) series

VLP-US-KF series

4

Vacuum Valve Series

A A

A

□D

B

CFG

dia.

I

dia.

I

J

dia.

H

dia. H

dia.

H

dia. I

J

VTP series only

limit swich(option)

Comp. air connection2-K

E

J

High Vacuum Valve VLP-UA/VTP-UA SeriesSpecifications

Dimensions

Feature of Aluminum Block Valve

(unit: mm)

VTP series

Item Model VLP-U3A VL(T)P-U4A VL(T)P-U6ACommon port diameter dia.80mm dia.100mm dia.150mmFlange specification VF80 VF100 VF150Valve plate seal Reverse pressure capableMax. valve plate seal differential pressure (at positive pressure)

MPa 0.10psi 14.50

Max. valve plate seal differential pressure (at reverse pressure)

MPa 0.10psi 14.50

Max. differnetial pressure when opening/closing

MPa 0.10psi 14.50

Valve plate seal O-ring sealShaft seal Double O-ring seal intermediate greaseMain parts material Main body: A5052

Valve plate: A5056 Other main parts: SUS304

Gasket: Fluoride rubber (Optional: Nitrile, EPDM)Open conductance m3/s 0.131 0.346 0.881Leak rate ＊1 Pa・m3/s ≦7.0×10-9

Torr・L/s ≦5.25×10-8

mbar・L/s ≦7.0×10-8

Pressure range ＊2 Pa 1.0×10-5 to 1.0×105 (abs)Torr 7.5×10-8 to 760 (abs)mbar 1.0×10-7 to 1.0×103 (abs)

Allowable baking temperature ＊3 ˚C ≦120˚F ≦248

Allowable ambient temperature ˚C 5 to 40 (not condensing) ˚F 41 to 104 (not condensing)

Ambient condition No presense of corrosive gasCompressed air pressure MPaG 0.45 to 0.55

psi 65.3 to 79.8Compressed air supply port Rc1/4 Rc3/8 Rc1/2Open/close time 2.0 ± 0.5 sec per open and closeAuto sensor OptionalWeight Kg Approx. 12.0 Approx. 15.0 Approx. 25.0Maintenance cycle 100000

＊1 Leak amount does not include transmission through O-ring.＊2 Pressure range does not change when O-ring materials are changed as option.＊3 When valve plate is open. Please keep cylinder parts temperature at 60˚C (140˚F) or less.

Model Item VTP-U4A VTP-U6A VLP-U3A VLP-U4A VLP-U6AA 95 120 85 95 120B 96 122 86 96 122C 191 242 176 191 242D 192 244 170 192 244E 219 349 182 219 349F 100 172 95.5 100 172G 141.5 300 113 141.5 300H 187 236 164 187 236 I 160 210 135 160 210J 8-M10 Depth15 8-M10 Depth15 4-M10 Depth20 8-M10 Depth15 8-M10 Depth15K Rc3/8 Rc1/2 Rc1/4 Rc3/8 Rc1/2

Fore pump

VTP valve

Conventionel example

T shape piping connection (multiple piping + isolation valve)can be reduced to 1 unit of valve only. ⇒Small foot print & low cost.

ChangeIsolation valve

Fore pump

Example when VTR is used

Fore pump

Fore pump

Isolation valve

ChamberChamber

VTP valve

Bypass & Slow vacuum line

Conventional example Example when VTP is used

Change

5

High Vacuum Valve VAH/VAP Series

High Vacuum Valve VAH Series Manual Valve

High Vacuum Valve VAP Series Compressed Air Driven

Note: Open and close the valve with a maximum pressure differential of 1000Pa (7.5Torr, 10mbar) or less.

＊1 Conductance:calculated valve using molecular flow, 20˚C (68˚F), and air.

＊2 Seal performance value when valve is shut.

O-ring permeability is not included in the leak volume.

When the valve is operated air caught in the shaft is turned in and may increase the apparent leak volume.

Note: Open and close the valve with a maximum pressure differential of 1000Pa (7.5Torr, 10mbar) or less.

＊1 Conductance:calculated valve using molecular flow, 20˚C (68˚F), and air.

＊2 Seal performance value when valve is shut.

O-ring permeability is not included in the leak volume.

When the valve is operated air caught in the shaft is turned in and may increase the apparent leak volume.

Specifications

Specifications

Item Model VAH-U100 VAH-U150Common diameter 100A 150AFlange diameter VF100 VF150Main unit material/Internal parts Aluminum alloy / Soft steelGasket material Nitrile rubberCoductance ＊1 m3/s 0.591 1.4Allowable baking ˚C ≦60temperature (at stopped) ˚F ≦140Pressure range Pa 1.0×10-5 to 1.0×105 (abs)

Torr 7.5×10-8 to 760 (abs)mbar 1.0×10-7 to 1.0×103 (abs)

Leak rate ＊2 Pa・m3/s ≦7.0×10-9

Torr・L/s ≦5.25×10-8

mbar・L/s ≦7.0×10-8

Allowable ambient temperature ˚C 5 to 40˚F 41 to 104

Open/close operation principle ManualOpen/close signal output －Compressed air pressure MPa G －

psi －Maintenance cycle 100000Remarks FPM (optional)

Item Model VAP-U100 VAP-U150Common diameter 100A 150AFlange diameter VF100 VF150Main unit material/Internal parts Aluminum alloy / Soft steelGasket material Nitrile rubberCoductance ＊1 m3/s 0.591 1.4Allowable baking ˚C ≦60temperature (at stopped) ˚F ≦140Pressure range Pa 1.0×10-5 to 1.0×105 (abs)

Torr 7.5×10-8 to 760 (abs)mbar 1.0×10-7 to 1.0×103 (abs)

Leak rate ＊2 Pa・m3/s ≦7.0×10-9

Torr・L/s ≦5.25×10-8

mbar・L/s ≦7.0×10-8

Allowable ambient temperature ˚C 5 to 40˚F 41 to 104

Open/close operation principle Compressed airOpen/close signal output Attachment possible (optional)Compressed air pressure MPa G 0.45 to 0.55

psi 65.3 to 79.8Maintenance cycle 100000Remarks FPM (optional)

185(240) 76(78.5)

60(72)

320(

420)

220(

290)

31(53)

95(1

20)

180(268)

dia.160(210)

dia.100(150)

136(150.5)

Flange correspondingtoVF100(VF150)Tap 8-M10 Depth 10(The back is the same processing)

237.5(255.5)161(183)

59(57)60(72)

104(

144)

102.

4(11

8)95

(120

)32

0(42

0)

Auto SW (Option)

Flange correspondingtoVF100(VF150)Tap8-M10 Depth 10(The back is the same processing)

Compressed airoperation port 2-dia.6 tube connection(Meter out type speed controlle)

dia.100(150)

dia.160(210)

VAH-U100 (U150)

VAP-U100 (U150)

＊ Values in ( ) are for the VAH-U150

＊ Values in ( ) are for the VAP-U150

Dimensions

Dimensions

VAH series

VAP series

6

Vacuum Valve Series

Ultra-High Vacuum Valve VULH Series Manual Valve

＊1 Seal performance value when valve is shut. O-ring permeability is not included in the leak volume. When the valve is operated air caught in the shaft is turned in and may increase the apparent leak volume.

＊1: conductance: calculated valve using molecular flow, 20 ˚C (68 F̊), and air

Specifications

Item Model VULH-KF VULH-F VULH-CM

Common diameter 16A to 40A 25A to 250A 10A to 250A

Flange diameter KF25 to KF50 VF25 to VF250 UFC

Main unit material SUS304Gasket material

Disk seal： FPM / Bonnet seal： FPM Disk seal：FPMBonnet seal：Silver wire

Allowable baking ˚C ≦150 OPEN： ≦200 / CLOSE： ≦150temperature (at stopped) ˚F ≦302 OPEN: ≦392 / CLOSE: ≦302

Pressure range Pa 1.0×10-7 to 1.0×105 (abs) 1.0×10-8 to 1.0×105 (abs)

Torr 7.5×10-10 to 760 (abs) 7.5×10-11 to 760 (abs)

mbar 1.0×10-9 to 1.0×103 (abs) 1.0×10-10 to 1.0×103 (abs)

Leak rate ＊1 Pa・m3/s ≦1.3×10-11

Torr・L/s ≦9.75×10-11

mbar・L/s ≦1.3×10-10

Allowable ambient ˚C 5 to 40temperature ˚F 41 to 104

Open/close operation principle Manual

Maintenance cycle 10000

(unit: mm)

Model

Item Common diameter

Flange diameter Conductance Flange

diameter

Flange to Flange

dimension.

When completely

closed

When completely

openHandle Flange

thickness Bolt center Hole quantity/diameter Weight

A m3/s ＊1 dia. D L H1 H2 dia. A T dia. C N-dia. B kgVULH-16KF 16 KF16 0.0011 30 30 110 113 40 － － － 0.5 VULH-25KF 25 KF25 0.0087 40 50 146 157 40 － － － 0.7 VULH-40KF 40 KF40 0.023 55 65 180 206 55 － － － 1.2 VULH-25F 25 VF25 0.0087 90 65 161 172 40 8 70 4-10 1.4 VULH-40F 40 VF40 0.023 105 80 195 221 55 10 85 4-10 2.4 VULH-65F 65 VF65 0.083 145 93 234 270 55 10 120 4-12 4.7 VULH-100F 100 VF100 0.21 185 130 379 － 125 12 160 8-12 11.6 VULH-150F 150 VF150 0.69 235 156 430 － 125 12 210 8-12 20.0 VULH-200F 200 VF200 1.05 300 200 670 － 160 16 270 8-15 50.0 VULH-250F 250 VF250 1.73 350 220 726 － 200 16 320 12-15 68.0 VULH-10CM 10 UFC034-018FH 0.0011 33.8 30 110 113 40 7.2 27 6-4.4 0.6 VULH-25CM 25 UFC070-025FH 0.0087 69.3 50 146 158 40 12.7 58.7 6-6.8 1.6 VULH-40CM 40 UFC070-040FH 0.023 69.3 63 178 204 55 12.7 58.7 6-6.8 2.2 VULH-65CM 65 UFC114-065FH 0.083 113.5 95 235 273 55 17.5 92.2 8-8.5 5.2 VULH-100CM 100 UFC152-100FH 0.21 151.6 131.1 381 － 125 19.8 130.3 16-8.5 12.5 VULH-150CM 150 UFC203-150FH 0.69 202.4 162.7 433.7 － 125 22.4 181.1 20-8.5 23.0 VULH-200CM 200 UFC253-200FH 1.05 253.2 204.7 653.2 － 160 24.6 231.8 24-8.5 50.0 VULH-250CM 250 UFC306-250FH 1.73 306 220 725 － 200 27 284 32-8.5 68.0

T

dia. A

dia. D

dia.

D

H1

H2

L

L

N-dia. B

dia. C dia

. C

N-dia. B

dia. C

L

T

dia.

D

dia. A

Ldia. D

H1

H2

dia.

D

H1H2

dia. A

dia. DL

N-dia. B

dia. C

dia. C

T

L

H1H2

dia. A

dia.

DL

dia. D L

dia. C

N-dia. B

T

VULH-100CM, 150CM, 200CM,250CMVULH-100F, 150F, 200F, 250F

VULH-10CM, 25CM, 40CM,65CMVULH-25F, 40F, 65FVULH-16KF, 25KF, 40KF

VULH-KF / F / CM series

Dimensions

L

dia. A

dia. D

H1H2

L

dia.

D

7

Ultra-High Vacuum Valve VULP Series Compressed Air Driven

＊1 The bonnet seal material of the VULP-16KF model is silver wire.＊2 60˚C (140˚F) for the air cylinder section.＊3 Seal performance value when valve is shut. O-ring permeability is not included in the leak volume. When the valve is operated air caught in the shaft is turned in and may increase the apparent leak volume.

＊1: conductance: calculated valve using molecular flow, 20 ˚C (68 F̊), and air

Specifications

Dimensions

Item Model VULP-KF VULP-F VULP-CM

Common diameter 16A to 40A 25A to 250A 10A to 250A

Flange diameter KF25 to KF50 VF25 to VF250 UFC

Main unit material SUS304Gasket material ＊1

Disk seal： FPM / Bonnet seal： FPM Disk seal: FPMBonnet seal: Silver wire

Allowable baking ˚C ≦150 OPEN: ≦200 / CLOSE: ≦150temperature (at stopped) ＊2 ˚F ≦302 OPEN: ≦392 / CLOSE: ≦302

Pressure range Pa 1.0×10-7 to 1.0×105 (abs) 1.0×10-8 to 1.0×105 (abs)

Torr 7.5×10-10 to 760 (abs) 7.5×10-11 to 760 (abs)

mbar 1.0×10-9 to 1.0×103 (abs) 1.0×10-10 to 1.0×103 (abs)

Leak rate ＊3 Pa・m3/s ≦1.3×10-11

Torr・L/s ≦9.75×10-11

mbar・L/s ≦1.3×10-10

Allowable ambient ˚C 5 to 40temperature ˚F 41 to 104

Open/close operation principle Compressed air

Compressed air pressure MPa G 0.45 to 0.55

psi 65.3 to 79.8

Open/close signal output Attachment possible (optional)

Maintenance cycle 10000

(unit: mm)

Model

Item Common diameter

Flange diameter Conductance Flange

diameter

Flange to Flange

dimension.Total height Flange

thickness Bolt center Hole quantity/diameter Cylinder

Compressed air connection

portWeight

A m3/s ＊1 dia. D L H T dia. C N-dia. B Sq. A E kgVULP-16KF 16 KF16 0.0011 30 30 118 － － － 36 M5 0.6 VULP-25KF 25 KF25 0.0087 40 50 156 － － － 36 G1/8 0.9 VULP-40KF 40 KF40 0.023 55 65 195 － － － 45 Rc1/8 1.6 VULP-25F 25 VF25 0.0087 90 65 171 8 70 4-10 36 G1/8 1.6 VULP-40F 40 VF40 0.023 105 80 210 10 85 4-10 45 Rc1/8 2.7 VULP-65F 65 VF65 0.083 145 93 253 10 120 4-12 52 Rc1/8 5.0 VULP-100F 100 VF100 0.21 185 130 343 12 160 8-12 77 Rc1/4 11.6 VULP-150F 150 VF150 0.69 235 156 425 12 210 8-12 98 Rc3/8 23.0 VULP-200F 200 VF200 1.05 300 200 566 16 270 8-15 117 Rc3/8 50.0 VULP-250F 250 VF250 1.73 350 220 795 16 320 12-15 145 Rc1/2 68.0 VULP-10CM 10 UFC034-018FH 0.0011 33.8 30 129.2 7.2 27 6-4.4 36 M5 0.6 VULP-25CM 25 UFC070-025FH 0.0087 69.3 50 181 12.7 58.7 6-6.8 36 Rc1/8 1.6 VULP-40CM 40 UFC070-040FH 0.023 69.3 63 220 12.7 58.7 6-6.8 45 Rc1/8 2.2 VULP-65CM 65 UFC114-065FH 0.083 113.5 95 290 17.5 92.2 8-8.5 52 Rc1/8 5.2 VULP-100CM 100 UFC152-100FH 0.21 151.6 131.1 375 19.8 130.3 16-8.5 77 Rc1/4 12.5 VULP-150CM 150 UFC203-150FH 0.69 202.4 162.7 465 22.4 181.1 20-8.5 98 Rc3/8 23.0 VULP-200CM 200 UFC253-200FH 1.05 253.2 204.7 591 24.6 231.8 24-8.5 117 Rc3/8 50.0 VULP-250CM 250 UFC306-250FH 1.73 306 220 795 27 284 32-8.5 145 Rc1/2 68.0

N-dia. B

dia. C

dia. C

Auto switch (optional) model: D-A73 (SMC)

dia. D

Sq. AE

dia.

D

HT

L

L

N-dia. B

Auto switch (optional) model: D-A73 (SMC)

dia. Cdia.

C

dia. D

Sq. AE

dia.

D

HT

L

L

VULP-10CM, 25CM, 40CM, 65CMVULP-100F, 150F, 200F, 250F

VULP-16KF, 25KF, 40KF VULP-100CM, 150CM, 200CM, 250CMVULP-25F, 40F, 65F

Auto switch (optional) E

L

Sq. A

dia. D

H

L

dia.

D

Sq. A

dia. C

N-dia. B

Ldia. D

dia.

DL

Auto switch (optional)E

H

T

Sq. A

dia. C

Ldia. D

dia.

DL

Auto switch (optional) E

H

T

N-dia. B

VULP-KF / F / CM series

8

Vacuum Valve Series

Ultra-High Vacuum Valve VUGH Series Manual Valve

Note: Open and close the valve with a maximum pressure differential of 1000Pa (7.5Torr, 10mbar) or less.＊1 60 ˚C (140 ˚F) for the air cylinder section.＊2 Seal performance value when valve is shut. O-ring permeability is not included in the leak volume. When the valve is operated air caught in the shaft is turned in and may increase the apparent leak volume.＊3 Automatic switch model: D-A73 (for both DC24V and AC100 V, with indicator lamp)

＊1: conductance: calculated valve using molecular flow, 20 ˚C, (68 F̊) and air

Specifications

Item Model VUGH-F VUGH-CS

Common diameter 40A to 200A 40A to 200A

Flange diameter VF40 to VF200 UFC

Main unit material/Internal parts SUS304

Gasket material Disk seal： FPM / Bonnet seal： FPM Disk seal： FPM / Bonnet seal： Silver wire

Allowable baking temperature ˚C ≦150 OPEN: ≦200 / CLOSE: ≦150(at stopped) ＊1 ˚F ≦302 OPEN: ≦392 / CLOSE: ≦302

Pressure range Pa 1.0×10-8 to 1.0×105 (abs)

Torr 7.5×10-11 to 760 (abs)

mbar 1.0×10-10 to 1.0×103 (abs)

Leak rate ＊2 Pa・m3/s ≦1.3×10-11

Torr・L/s ≦9.75×10-11

mbar・L/s ≦1.3×10-10

Allowable ambient temperature ˚C 5 to 40

˚F 41 to 104

Open/close operation principle Manual

Open/close signal output ＊3 －Compressed air pressure MPa G －

psi －Maintenance cycle 10000

(unit: mm)

Model

Item Common diameter

Flange diameter Conductance Flange

diameter

Flange to Flange

dimension.

Total height Cylinder Handle Bolt

center

Hole quantity/diameter

Compressed air connection

portWeight

A m3/s ＊1 dia. D L H Sq.A dia. A dia. PCD N-dia. B B E F G K M kg

VUGH-40F 40 VF40 0.0605 105 52 342 － 100 85 4-M8 depth 8 76.0 - 38.5 93.0 60.0 100.0 － 4.0

VUGH-65F 65 VF65 0.209 145 60 494 － 125 120 4-M10 depth 7 110.0 - 57.0 157.5 74.0 140.0 － 9.0

VUGH-100F 100 VF100 0.54 185 70 624 － 125 160 8-M10 depth 11 152.0 - 76.0 209.5 78.0 186.0 － 13.0

VUGH-150F 150 VF150 1.303 235 85 805 － 125 210 8-M10 depth 10 200.0 45.0 100.0 350.0 96.0 236.0 － 23.0

VUGH-200F 200 VF200 2.284 300 100 991 － 160 270 8-M12 depth 12 252.0 45.0 126.0 435.0 104.0 290.0 － 42.0

VUGH-40CS 40 UFC070 0.0605 69.3 52 342 － 100 58.7 6-M6 depth 8 76.0 － 38.5 93.0 62.0 120.0 － 4.0

VUGH-65CS 65 UFC114 0.209 113.5 60 494 － 125 92.15 8-M8 depth 10 110.0 － 57.0 157.5 80.0 162.0 － 9.0

VUGH-100CS 100 UFC152 0.54 151.6 70 624 － 125 130.3 16-M8 depth 10 152.0 － 76.0 209.5 82.0 200.0 － 13.0

VUGH-150CS 150 UFC203 1.303 202.4 85 800 － 125 181.05 20-M8 depth 10 200.0 45.0 100.0 350.0 92.0 242.0 － 23.0

VUGH-200CS 200 UFC253 2.284 253.2 100 991 － 160 231.9 24-M8 depth 10 252.0 45.0 126.0 435.0 108.0 314.0 － 42.0

VUGH-150 to 200VUGH-40 to 100

VUGH-CS series

VUGH-F series

PCD

N-C

B

H

GF

M

L

K

dia.

D

dia. A K

dia.

D

dia. A

LB

E

H

GF

M

PCD

N-dia. C

Shows the disk seat direction

Dimensions

9

K

PCD

N-CB

H

GF

M

C

dia.

D

Sq. A

Kdi

a. D

CB

E

H

GF

M

N-dia. C

P

PCD

P

Sq. A

Ultra-High Vacuum Valve VUGP Series Compressed Air Driven

Note: Open and close the valve with a maximum pressure differential of 1000Pa (7.5Torr, 10mbar) or less.＊1 60 ˚C (140 ˚F) for the air cylinder section.＊2 Seal performance value when valve is shut. O-ring permeability is not included in the leak volume. When the valve is operated air caught in the shaft is turned in and may increase the apparent leak volume.＊3 Automatic switch model: D-A54 (for both DC24V and AC100 V, with indicator lamp)

＊1: conductance: calculated valve using molecular flow, 20 ˚C (68 F̊), and air

Specifications

Item Model VUGP-F VUGP-CS

Common diameter 40A to 200A 40A to 200A

Flange diameter VF40 to VF200 UFC

Main unit material/Internal parts SUS304

Gasket material Disk seal： FPM / Bonnet seal： FPM Disk seal： FPM / Bonnet seal： Silver wire

Allowable baking temperature ˚C ≦150 OPEN: ≦200 / CLOSE: ≦150

(at stopped) ＊1 ˚F ≦302 OPEN: ≦392 / CLOSE: ≦302

Pressure range Pa 1.0×10-8 to 1.0×105 (abs)

Torr 7.5×10-11 to 760 (abs)

mbar 1.0×10-10 to 1.0×103 (abs)

Leak rate ＊2 Pa・m3/s ≦1.3×10-11

Torr・L/s ≦9.75×10-11

mbar・L/s ≦1.3×10-10

Allowable ambient temperature ˚C 5 to 40

˚F 41 to 104

Open/close operation principle Compressed air

Open/close signal output ＊3 Attachment possible (optional)

Compressed air pressure MPa G 0.45 to 0.55

psi 65.3 to 79.8

Maintenance cycle 10000

(unit: mm)

Model

Item Common diameter

Flange diameter Conductance Flange

diameter

Flange to Flange

dimension.

Total height Cylinder Handle Bolt

center

Hole quantity/diameter

Compressed air connection

portWeight

A m3/s ＊1 dia. D L H Sq.A dia. A dia. PCD N-dia. B B E F G K M kg

VUGP-40F 40 VF40 0.0605 105 52 324.5 60 － 85 4-M8 depth 8 76.0 － 38.5 93.0 60.0 100.0 Rc1/8 4.0

VUGP-65F 65 VF65 0.209 145 60 467.2 74 － 120 4-M10 depth 7 110.0 － 57.0 157.5 74.0 140.0 Rc1/8 10.5

VUGP-100F 100 VF100 0.54 185 70 613 86 － 160 8-M10 depth 11 152.0 － 76.0 209.5 78.0 186.0 Rc1/8 15.0

VUGP-150F 150 VF150 1.303 235 85 732 108 － 210 8-M10 depth 12.5 200.0 45.0 100.0 350.0 96.0 236.0 Rc1/8 25.0

VUGP-200F 200 VF200 2.284 300 100 965.5 132 － 270 8-M12 depth 12 252.0 45.0 126.0 435.0 104.0 290.0 Rc1/8 45.0

VUGP-40CS 40 UFC070 0.0605 69.3 52 324.5 60 － 58.7 6-M6 depth 8 76.0 － 38.5 93.0 62.0 120.0 Rc1/8 3.6

VUGP-65CS 65 UFC114 0.209 113.5 60 467.2 74 － 92.15 8-M8 depth 10 110.0 － 57.0 157.5 80.0 162.0 Rc1/8 8.6

VUGP-100CS 100 UFC152 0.54 151.6 70 613 86 － 130.3 16-M8 depth 10 152.0 － 76.0 209.5 82.0 200.0 Rc1/8 15.0

VUGP-150CS 150 UFC203 1.303 202.4 85 729.5 108 － 181.05 20-M8 depth 10 200.0 45.0 100.0 350.0 92.0 242.0 Rc1/8 25.0

VUGP-200CS 200 UFC253 2.284 253.2 100 968.5 132 － 231.9 24-M8 depth 10 252.0 45.0 126.0 435.0 108.0 314.0 Rc1/8 45.0

VUGP-150 to 200VUGP-40 to 100

VUGP-CS series

VUGP-F series

Shows the disk seat direction

Dimensions

10

Vacuum Valve Series

Ultra-High Vacuum Valve VUH Series Manual Valve

Ultra-High Vacuum Valve (metal) VUH Series

＊1 Conductance:calculated valve using molecular flow, 20˚C (68˚F), and air.

＊2 A torque wrench is required to close the valve. Prepare a 45N.m (450 kg·cm) preset torque wrench with a

socket having a common diameter of 24.＊3 Lifespans vary depending on various irregular factors including

use environment and use history. When sealing performance over time cannot be obtained within the range from initial sealing torque to maximum sealing torque, nose replacement is required. Lifespan is also decreased by bake-out operations.

＊4 Nose replacement operations should only be done by designated representatives.

The VUH-10D model has a welded structure and nose replacement is not possible.

SpecificationsModel VUH

Item VUH-10D VUH-251C VUH-401C VUH-651CCommon port diameter 10A 25A 40A 65AConnection flange UFC034 UFC070 UFC070 UFC114Main unit material Austenitic stainless steelGasket material Bonnet seal: Gold wire / Disk seal: CopperCoductance ＊1 m3/s 0.0003 0.00811 0.0247 0.0558Allowable baking temperature ˚C OPEN: ≦250 / CLOSE: ≦200(at stopped) ˚F OPEN: ≦482 / CLOSE: ≦392Pressure range Pa 1.0×10-9 to 1.0×105 (abs)

Torr 7.5×10-12 to 1.0×760 (abs)mbar 1.0×10-11 to 1.0×103 (abs)

Leak rate Pa・m3/s ≦1.3×10-11

Torr・L/s ≦9.75×10-11

mbar・L/s ≦1.3×10-10

Allowable ambient ˚C 5 to 40temperature ˚F 41 to 104Open/close operation principle ManualSealing torque N・m ＊2 Initial 4.9 14.7

Maximum 29.4 44.1Bellows lifespan 10000Nose lifespan at room temperature(reference value) ＊3 ＊4 300 350 300 250

(unit: mm)

Model

ItemFlange diameter Flange to Flange

dimension. Total height Bolt center Hole quantity/diameter Weight

dia. D L H dia. PCD N-dia. C dia. A D kgVUH-10D Refer to external dimension diagram 1.9 VUH-251C 69.3 50 137 58.7 6-6.8 62.0 18.0 1.6 VUH-401C 69.3 63 176 58.7 6-6.8 71.0 27.0 2.3 VUH-651C 113.5 95 255 92.2 8-8.5 96.0 0.0 4.4

15

dia. A

D

7090 24

UFC034seat surface side

UFC0344-dia. 990 47

50 30

33

5090

94Lift 2

dia.

33.

8

P.C.D

Ldia. D

LH

N-dia. C

Dimensions

VUH-251C, 401C, 651CVUH-10D

Ultra-High Vacuum Valve (mini) VUH-MVF

＊1 This valve has a welded structure and the disk seal material cannot be replaced.

＊2 Polyimide resin permeability is not included in the specifications.

SpecificationsItem Model VUH-MVFConnection flange UFC034Main unit material Austenitic stainless steelGasket material Disk seal： polyimide resin ＊1Allowable baking temperature ˚C ≦200(at stopped) ˚F ≦392Pressure range Pa 1.0×10-8 to 1.0×105 (abs)

Torr 7.5×10-11 to 760 (abs)mbar 1.0×10-10 to 1.0×103 (abs)

Leak rate Pa・m3/s ≦6.7×10-11 ＊2Torr・L/s ≦5.0×10-10 ＊2mbar・L/s ≦6.7×10-10 ＊2

Allowable ambient ˚C 5 to 40temperature ˚F 41 to 104Open/close operation principle ManualBellows lifespan 10000

6-dia. 4.4

UFC034UFC034seat surfaceside

dia. 30

69.234.634.6

33

258

1866

84Li

ft 1.

5

dia. 5.5 holes×4

(dia

. 33.

8)

(dia

. 33.

8)

2818

38 50

PCD25.97

Dimensions

VUH series

VUH-MVF

11

Ultra-High Vacuum Valve 10AIV/VLV Series

Ultra-High Vacuum Valve (Air Inlet Valve) 10AIV Series

＊1 O-ring permeability is not included in the leak volume.

＊1: conductance: calculated valve using molecular flow, 20 ˚C (68 F̊), and air

SpecificationsItem Model 10AIV 10AIV-FM 10AIV-FConnection flange dia.15 UFC034-FH UFC070-FHMain unit material Stainless steelGasket material FPMAllowable baking temperature ˚C ≦150(at stopped) ˚F ≦302Pressure range Pa 1.0×10-7 to 1.0×105 (abs)

Torr 7.5×10-10 to 760 (abs)mbar 1.0×10-9 to 1.0×103 (abs）

Leak rate Pa・m3/s ≦7.0×10-11 ＊1Torr・L/s ≦5.25×10-10 ＊1mbar・L/s ≦7.0×10-10 ＊1

Allowable ambient ˚C 5 to 40temperature ˚F 41 to 104Open/close operation principle Manual

(unit: mm)

Model

ItemFlange specification Flange diameter Surface interval Total height Bolt center Hole quantity/diameter Weight

dia. D L H dia. C N-dia. B kg10AIV － Refer to external dimension diagram 0.310AIV-FM UFC034-FH 33.8 47 94 27 6-4.4 0.3 10AIV-F UFC070-FH 69.3 48.3 95.3 58.7 6-6.8 0.6

dia.

10

(hos

e po

rt)

dia. 14.9

dia. 10.5

dia.

10

(hos

e po

rt)

dia.

5

55

43

90

dia. 30

dia. DN-dia. B

dia.

5

dia. 14.9

55

L

H

dia. C

dia. 30

Dimensions

10AIV-F/FM10AIV

Variable Leak Valve VLV-3D Manual Valve

＊1 Values when gas introduction pressure is 0.2 kg/cm 2G.＊2 Values when gas introduction pressure is atmospheric pressure.

SpecificationsItem Model VLV-3DConnection flange UFC034Main unit material Austenitic stainless steel,

AL alloy, copper + Ni platingGasket material －Allowable baking ˚C ≦150temperature (at stopped) ˚F ≦302Pressure range Pa 1.0×10-9 to 1.0×105 (abs)

Torr 7.5×10-12 to 1.0×760 (abs)mbar 1.0×10-11 to 1.0×103 (abs)

Flow rate adjustment Pa・m3/s 10-8 to 1.0×10-4

range ＊1 Torr・L/s 7.5×10-8 to 7.5×10-4mbar・L/s 10-7 to 1.0×10-3

Leak rate ＊2 Pa・m3/s ≦7.0×10-11

Torr・L/s ≦5.25×10-10

mbar・L/s ≦7.0×10-10

Allowable ambient ˚C 5 to 40temperature ˚F 41 to 104Open/close operation principle Manual

51

UFC034Vacuum side

UFC034Atmosphere side

9030 47

167

3115

4-dia. 9

7550 17

dia.

33.

8

Handle

5028

96

9070

Dimensions

10AIV series

VLV-3D

ULVAC, Inc. Components Division www.ulvac.co.jp/eng

Overseas Sales in Japan TEL +81-467-89-2261

USA : ULVAC Technologies, Inc. TEL +1-978-686-7550 PHILIPPINES : ULVAC Singapore Philippines Branch TEL +63-2-828-7700GERMANY : ULVAC GmbH TEL +49-89-960909-0 VIETNAM : ULVAC Singapore Vietnam Representative Office TEL +84-8-62556762CHINA : ULVAC (SHANGHAI) Trading Co.,Ltd. TEL +86-21-6127-6618 THAILAND : ULVAC (THAILAND) LTD TEL +66-2-312-4447TAIWAN : ULVAC TAIWAN, Inc. TEL +886-3-579-5688 MALAYSIA : ULVAC MALAYSIA SDN. BHD. TEL +60-3-5121-4700KOREA : ULVAC KOREA, Ltd. TEL +82-31-683-2922 INDIA : ULVAC, Inc., India Branch TEL +91-40-27007006SINGAPORE : ULVAC SINGAPORE PTE LTD TEL +65-6542-2700

This catalog is subject to change without notice. This catalog is published in order to sell this product in overseas. Please see Japanese catalog when purchasing in Japan. 2196E/2013101000TL

＊1 □: A(mm) or B(inch) ＊2 H: Manual, P: Compressed air drive ＊3 ( ): Valve closed. Cylinder part should less than 60˚C (140˚C)＊4 VUGP-200,250: Incompatible with reverse pressure. (Vacuum/high vacuum valve compatible are 100A or less. More than 6B are compatible as an option.)

◆: Standard stock ◇: Made to order ＊1 UFC are ULVAC standard stainless steel knife-edge metal seal flanges.

Speci f icat ions

Connect ion Method

Series＊1

Applicable pressure range

Valve type Drive method＊2 Main unit material Axis seal

methodBonnet seal material

Disk seal material

Maximum bakeout temperture ˚C / ˚F

＊3

Reverse pressure (pressure differential：0.1MPa)compatiblity ＊4

Atmosphericpressure

10−5Pa10−7Torr10−7mbar

10−7Pa10−9Torr10−9mbar

10−9Pa10−11Torr10−11mbar

VLH-U□ L model valve H SS400 + nickel plating O-ring Nitrile rubber Nitrile rubber 60/140 ○VLH-U□S L model valve H SUS304 O-ring Flourine rubber Flourine rubber 120/248 ○VLP-U□ L model valve P SS400 + nickel plating O-ring Nitrile rubber Nitrile rubber 60/140 ○VLP-U□S L model valve P SUS304 O-ring Flourine rubber Flourine rubber 120/248 ○VLP-U□A L model valve P Aluminum alloy O-ring Flourine rubber Flourine rubber 120/248 ○VTP-U□A T model valve P Aluminum alloy O-ring Flourine rubber Flourine rubber 120/248 ○VLH-US-□KF L model valve H SUS304 O-ring Flourine rubber Flourine rubber 120/248 ○VLP-US-□KF L model valve P SUS304 O-ring Flourine rubber Flourine rubber 120/248 ○VAH-U□ Gate model valve H Aluminum alloy O-ring Nitrile rubber Nitrile rubber 60/140 ○VAP-U□ Gate model valve P Aluminum alloy O-ring Nitrile rubber Nitrile rubber 60/140 ○VULH-□F L model valve H SUS304 Bellows Flourine rubber Flourine rubber 150/302 ○VULH-□KF L model valve H SUS304 Bellows Flourine rubber Flourine rubber 150/302 ○VULP-□F L model valve P SUS304 Bellows Flourine rubber Flourine rubber 150/302 ○VULP-□KF L model valve P SUS304 Bellows Flourine rubber Flourine rubber 150/302 ○VUGH-□F Gate model valve H SUS304 Bellows Flourine rubber Flourine rubber 150/302 ○VUGP-□F Gate model valve P SUS304 Bellows Flourine rubber Flourine rubber 150/302 ○10AIV Leak valve H SUS304 O-ring Flourine rubber Flourine rubber 150/302 ○VULH-□CM L model valve H SUS304 Bellows Metal Flourine rubber 150(200)/302(392) ○VULP-□CM L model valve P SUS304 Bellows Metal Flourine rubber 150(200)/302(392) ○VUGH-□CS Gate model valve H SUS304 Bellows Metal Flourine rubber 150(200)/302(392) ○VUGP-□CS Gate model valve P SUS304 Bellows Metal Flourine rubber 150(200)/302(392) ○VUH Other H SUS304 Bellows Metal Metal 200(250)/392(482) ○VUH-MVF Other H SUS304 Bellows Welded structure Polyimide resin 200/392 ○VLV-3D Variable leak valve H SUS304 Bellows Welded structure Metal 150/302 ○

Flange Vacuum flange Flange coupling UFC flange ＊1

otherModel VF NW (KF) 034 070 070 114 152 203 253 306

A (mm) 20 25 40 50 65 80 100 150 200 250 300 350 400 500 550 900 1300 16 25 40 50 10 25 40 65 100 150 200 250B (inch) 3/4 1 1 1/2 2 2 1/2 3 4 6 8 10 12 14 16 20 22 36 52 3/4 1 1 1/2 2 3/8 1 1 1/2 2 1/2 4 6 8 10VLH-U□ ◆ ◆ ◆ ◆ ◆ ◆ ◇ ◇ ◇ ◇VLH-U□S ◆ ◆ ◆ ◆ ◆ ◆ ◇ ◇ ◇ ◇VLP-U□ ◆ ◆ ◆ ◆ ◆ ◆ ◇ ◇ ◇ ◇ ◇ ◇ ◇ ◇ ◇ ◇VLP-U□S ◆ ◆ ◆ ◆ ◆ ◆ ◇ ◇ ◇ ◇ ◇ ◇ ◇ ◇ ◇ ◇VLP-U□A ◇ ◇ ◇VTP-U□A ◇ ◇VLH-US-□KF ◆ ◆ ◆VLP-US-□KF ◆ ◆ ◆VAH-U□ ◇ ◇VAP-U□ ◇ ◇VULH-□F ◆ ◆ ◆ ◆ ◇ ◇ ◇VULH-□KF ◆ ◆ ◆VULP-□F ◆ ◆ ◆ ◆ ◇ ◇ ◇VULP-□KF ◆ ◆ ◆VUGH-□F ◆ ◆ ◆ ◇ ◇ ◇VUGP-□F ◆ ◆ ◆ ◇ ◇ ◇10AIV ◆ ◆VULH-□CM ◆ ◆ ◆ ◆ ◆ ◇ ◇ ◇VULP-□CM ◆ ◆ ◆ ◆ ◆ ◇ ◇ ◇VUGH-□CS ◆ ◆ ◆ ◇ ◇ ◇VUGP-□CS ◆ ◆ ◆ ◇ ◇ ◇VUH ◆ ◆ ◆ ◇VLV-3D ◆

Vacuum Valve Series