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Vacuum Pump Isolation (VPI) Valve

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  • INSTRUCTION MANUAL

    Vacuum Products Division

    Vacuum PumpIsolation (VPI) Valve

    Manual No. 699912117Revision FDecember 2012

  • Vacuum Pump Isolation (VPI) Valve

    Copyright 2012Agilent, Inc.

    Vacuum PumpIsolation (VPI) Valve

    Dust-Off is a registered trademark of Falcon Safety Products, Inc.Krytox is a registered trademarks of DuPont.TriScroll is a trademark of Agilent, Inc.Viton is a registered trademark of DuPont Dow Elastomers.Apiezon L is a registered trademark of M & I Materials.

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    Contents

    Warranty ............................................................................................................................................ 9Warranty Replacement and Adjustment ...................................................................................... 9Hazard and Safety Information .................................................................................................. 10Contacting Agilent ...................................................................................................................... 11

    Section 1. Introduction ..................................................................................................................... 131.1 Description ........................................................................................................................... 131.2 Operating Principles.............................................................................................................. 131.3 Operation Sequence ............................................................................................................. 141.4 Technical Specifications ....................................................................................................... 16

    Section 2. Installation ....................................................................................................................... 172.1 Electrical .............................................................................................................................. 172.2 Installing VPI Valve to Agilent TriScroll Vacuum Pump..................................................... 18

    2.2.1 TriScroll 300, 320, 600, and 620 .................................................................................. 182.2.2 Wiring ........................................................................................................................... 182.2.3 TriScroll 300, 600 Inverter............................................................................................ 20

    2.3 Mechanical............................................................................................................................ 22

    Section 3. Service ............................................................................................................................ 233.1 Disassembly ......................................................................................................................... 233.2 Repair of Sub-Assemblies .................................................................................................... 24

    3.2.1 Piston/Diaphragm Sub-Assembly ................................................................................ 243.2.2 Nose Piece O-ring Replacement.................................................................................. 25

    3.3 Reassembly .......................................................................................................................... 263.4 Troubleshooting .................................................................................................................... 27

    3.4.1 VPI Valve Cannot Be Pumped Down to High Vacuum ................................................ 273.4.2 VPI Valve Leaks in Closed Position ............................................................................. 273.4.3 VPI Valve Closes Too Slowly....................................................................................... 283.4.4 VPI Valve Opens Too Slowly or Not Completely ......................................................... 283.4.5 VPI Valve Fails to Open ............................................................................................... 283.4.6 Closing Causes Large Burst of Air into System ........................................................... 283.4.7 Solenoid Valve is Hot ................................................................................................... 29

    3.5 Factory Repair ...................................................................................................................... 303.6 Replacement Parts ............................................................................................................... 31

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    Figures

    1 Operating Sequence ............................................................................................................ 142 Single Phase Motor Electrical Connections ......................................................................... 193 Three Phase Motor Electrical Connections.......................................................................... 194 VPI Application in TriScroll 300, 600 Inverter Pumps .......................................................... 205 Installation Diagram ............................................................................................................. 226 Assembly View and Replacement Parts .............................................................................. 237 Assembly View and Replacement Parts .............................................................................. 26

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    Tables

    1 Technical Specifications ..................................................................................................... 162 Operating Voltages ............................................................................................................. 173 VPI Valve Installation Data ................................................................................................. 184 Replacement Parts/Kits ...................................................................................................... 31

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    Warranty

    Products manufactured by Seller are warranted against defects in materials and workmanship for twelve (12) months from date of shipment thereof to Customer, and Sellers liability under valid warranty claims is limited, at the option of Seller, to repair, to replace, or refund of an equitable portion of the purchase price of the Product. Items expendable in normal use are not covered by this warranty. All warranty replacement or repair of parts shall be limited to equipment malfunctions which, in the sole opinion of Seller, are due or traceable to defects in original materials or workmanship. All obligations of Seller under this warranty shall cease in the event of abuse, accident, alteration, misuse, or neglect of the equipment. In-warranty repaired or replaced parts are warranted only for the remaining unexpired portion of the original warranty period applicable to the repaired or replaced parts. After expiration of the applicable warranty period, Customer shall be charged at the then current prices for parts, labor, and transportation.

    Reasonable care must be used to avoid hazards. Seller expressly disclaims responsibility for loss or damage caused by use of its Products other than in accordance with proper operating procedures.

    Except as stated herein, Seller makes no warranty, express or implied (either in fact or by operation of law), statutory or otherwise; and, except as stated herein, Seller shall have no liability under any war-ranty, express or implied (either in fact or by operation of law), statutory or otherwise. Statements made by any person, including representatives of Seller, which are inconsistent or in conflict with the terms of this warranty shall not be binding upon Seller unless reduced to writing and approved by an officer of Seller.

    Warranty Replacement and Adjustment

    All claims under warranty must be made promptly after occurrence of circumstances giving rise thereto, and must be received within the applicable warranty period by Seller or its authorized representative. Such claims should include the Product serial number, the date of shipment, and a full description of the circumstances giving rise to the claim. Before any Products are returned for repair and/or adjust-ment, written authorization from Seller or its authorized representative for the return and instructions as to how and where these Products should be returned must be obtained. Any Product returned to Seller for examination shall be prepaid via the means of transportation indicated as acceptable by Seller. Seller reserves the right to reject any warranty claim not promptly reported and any warranty claim on any item that has been altered or has been returned by non-acceptable means of transportation. When any Product is returned for examination and inspection, or for any other reason, Customer shall be responsible for all damage resulting from improper packing or handling, and for loss in transit, notwith-standing any defect or non-conformity in the Product. In all cases, Seller has the sole responsibility for determining the cause and nature of failure, and Sellers determination with regard thereto shall be final.

    If it is found that Sellers Produc