utmost4_users1

8/15/2019 utmost4_users1

1/271

Silvaco, Inc.

4701 Patrick Henry Drive, Bldg. 2 May 12, 2015

Santa Clara, CA 95054

Phone: (408) 567-1000

Web: www.silvaco.com

Utmost IVUser’s Manual

http://www.silvaco.com/http://www.silvaco.com/


2/271

2 Utmost IV User’s Manual

The information contained in this document is subject to change without notice.

Silvaco, Inc. MAKES NO WARRANTY OF ANY KIND WITH REGARD TO THISMATERIAL, INCLUDING, BUT NOT LIMITED TO, THE IMPLIED WARRANTY

OF FITNESS FOR A PARTICULAR PURPOSE.

Silvaco, Inc. shall not be held liable for errors contained herein or for incidental or

consequential damages in connection with the furnishing, performance, or use of this

material.

This document contains proprietary information, which is protected by copyright laws of the

United States. All rights are reserved. No part of this document may be photocopied,

reproduced, or translated into another language without the prior written consent of Silvaco,

Inc.

AccuCell, AccuCore, Athena, Athena 1D, Atlas, Blaze, C-Interpreter, Catalyst AD, Catalyst

DA, Clarity RLC, Clever, Clever Interconnect, Custom IC CAD, DeckBuild, DevEdit,DevEdit 3D, Device 3D, DRC Assist, Elite, Exact, Expert, Expert C++, Expert 200,

ExpertViews, Ferro, Gateway, Gateway 200, Giga, Giga 3D, Guardian, Guardian DRC,

Guardian LVS, Guardian NET, Harmony, Hipex, Hipex C, Hipex NET, Hipex RC,

HyperFault, Interconnect Modeling, IWorkBench, Laser, LED, LED 3D, Lisa, Luminous,

Luminous 3D, Magnetic, Magnetic 3D, MaskViews, MC Etch & Depo, MC Device, MC

Implant, Mercury, MixedMode, MixedMode XL, MultiCore, Noise, OLED, Optolith,

Organic Display, Organic Solar, OTFT, Quantum, Quantum 3D, Quest, RealTime DRC, REM

2D, REM 3D, SEdit, SMovie, S-Pisces, SSuprem 3, SSuprem 4, SDDL, SFLM, SIPC, SiC,

Silvaco, Silvaco Management Console, SMAN, Silvaco Relational Database, Silos,

Simulation Standard, SmartSpice, SmartSpice 200, SmartSpice API, SmartSpice Debugger,

SmartSpice Embedded, SmartSpice Interpreter, SmartSpice Optimizer, SmartSpice RadHard,

SmartSpice Reliability, SmartSpice Rubberband, SmartSpice RF, SmartView, SolverLib,

Spayn, SpiceServer, Spider, Stellar, TCAD Driven CAD, TCAD Omni, TCAD Omni Utility,

TCAD & EDA Omni Utility, TFT, TFT 3D, Thermal 3D, TonyPlot, TonyPlot 3D, TurboLint,

Universal Token, Universal Utility Token, Utmost III, Utmost III Bipolar, Utmost III Diode,

Utmost III GaAs, Utmost III HBT, Utmost III JFET, Utmost III MOS, Utmost III MultiCore,

Utmost III SOI, Utmost III TFT, Utmost III VBIC, Utmost IV, Utmost IV Acquisition

Module, Utmost IV Model Check Module, Utmost IV Optimization Module, Utmost IV

Script Module, VCSEL, Verilog-A, Victory, Victory Cell, Victory Device, Victory Device

Single Event Effects, Victory Process, Victory Process Advanced Diffusion & Oxidation,

Victory Process Monte Carlo Implant, Victory Process Physical Etch & Deposit, Victory

Stress, Virtual Wafer Fab, VWF, VWF Automation Tools, VWF Interactive Tools, and Vyper

are trademarks of Silvaco, Inc.All other trademarks mentioned in this manual are the property of their respective owners.

Copyright © 1984 - 2015, Silvaco, Inc.

Notice


3/271

Style Conventions

Font Style/Convention Description Example

• This represents a list of items or

terms.

• Bullet A

• Bullet B

• Bullet C

This represents a set of directions

to perform an action.

To open a door:

This represents a sequence of

menu options and GUI buttons to

perform an action.

FileOpen

Courier This represents the commands,

parameters, and variables syntax.

HAPPY BIRTHDAY

Times Roman Bold This represents the menu options

and buttons in the GUI.

File

New Century Schoolbook

ItalicsThis represents the variables of

equations.

x + y = 1

Note:This represents the additional

important information. Note: Make sure you save often whenworking on a manual.


1.

2.

3.

1. Unlock the door by inserting

the key into keyhole.

2. Turn key counter-clockwise.

3. Pull out the key from thekeyhole.

4. Grab the doorknob and turn

clockwise and pull.

How to Read this Manual


4/271


Chapter 1

Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12Chapter 2

Getting Started . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 152.1 Installing the Firebird Database Server . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 162.2 Configuring Firewall for Firebird Database Server . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 172.3 Creating a Database . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 172.4 Upgrading your Utmost IV Database Version . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 182.5 Connecting to a Database from Utmost IV. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 192.6 Setting Up the SmartView Viewer for Utmost IV . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21

Chapter 3

Databases and Projects . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 223.1 Opening a Database . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 243.2 Closing a Database. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 243.3 Logging Into and Out of a Database . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 253.4 Changing the User Password for a Database . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 253.5 Creating a New Project. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 263.6 Opening a Project . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 273.7 Modifying the Project Permissions. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 273.8 Importing a Project . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 283.9 Exporting a Project. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 303.10 Reading Project Parts from Existing Projects . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31

Chapter 4Datasets . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32

4.1 Dataset Keys . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 334.2 Editing a Dataset. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 344.3 Modifying the Dataset Permissions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 394.4 Deleting Datasets . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 404.5 Importing Datasets . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 414.6 Exporting Datasets . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 454.7 Writing a Dataset out to CSV Format . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 46

Chapter 5

Managing the Database . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 475.1 Deleting Projects and Datasets. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 495.2 Changing the Owner of Projects and Datasets . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 495.3 Changing the Permissions of Projects and Datasets . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 505.4 Unlocking Projects and Datasets . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 51

Chapter 6

Acquisition Module. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 52

Table of Contents


5/271


Table of Contents

6.1 Defining Temperatures. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 546.2 Defining the Wafer Map . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 55

6.2.1 Defining the Header, Batch and Wafer Information . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 556.2.2 Defining the Die Selection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 566.2.3 Defining the Group Selection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 62

6.3 Defining Devices. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 66

6.4 Defining Extractions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 696.5 Defining Variables. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 696.6 Defining Hardware . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 70

6.6.1 Editing the Controller . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 716.6.2 Editing an Instrument . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 746.6.3 Editing the Scanner Instrument . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 756.6.4 Editing the Noise Instrument . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 76

6.7 Defining Connections. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 776.7.1 Manual Ground Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 78

6.8 The Model Library. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 786.9 The Device Subset . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 796.10 The Measurement Setup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 80

6.10.1 Defining the Node Names . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 826.10.2 Defining a Sweep . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 836.10.3 Defining a Constant . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 856.10.4 Defining the Mirror . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 866.10.5 Defining the Iterator . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 876.10.6 Defining the Iteratee Sweep . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 886.10.7 Defining a Pulse . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 896.10.8 Defining a Target . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 906.10.9 Defining the LCR Source . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 906.10.10 Defining the LCR Target . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 916.10.11 Defining a Port . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 91

6.10.12 Defining the Noise Target . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 926.10.13 Defining a Function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 926.10.14 Defining a Plot . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 946.10.15 Common Device Nodes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 95

6.11 The Extraction Setup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 966.12 Acquiring Data using the Measurement Sequence . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 96

6.12.1 Selecting Measurement Mode or Simulation Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 976.12.2 Combining the Device Subset and the Measurement Setup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 976.12.3 Combining the Device Subset and the Extraction Setup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 976.12.4 Running the Measurement Sequence . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 986.12.5 Capacitance Calibration and De-embedding . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 996.12.6 Generating a Script Version of the Measurement Sequence . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 101

6.13 The Measured Datasets . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 101

Chapter 7

Optimization Module. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1027.1 Creating and Managing Searches . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1047.2 Searching for Datasets in the Database . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1087.3 Sorting Datasets . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1107.4 Displaying Dataset Plots in the Viewer. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 111


6/271


Table of Contents

7.4.1 Displaying Plots from Datasets with Multiple Sweeps . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1127.4.2 Displaying Additional Information about the Dataset in the Viewer . . . . . . . . . . . . . . . . . . . . . . . . . . . 117

7.5 Defining the Netlist for Simulation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1237.5.1 Compact Model SPICE Netlist . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1247.5.2 Macro Model Netlist . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1257.5.3 Reading from an External Model Library . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 126

7.5.4 Exporting the Netlist . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1277.6 The Model Library. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 128

7.6.1 Creating a New Model Card . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1297.6.2 Copying a Model Column . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1307.6.3 Changing a Model Card . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1307.6.4 Duplicating a Model Card . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1317.6.5 Deleting a Model Card . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1317.6.6 Clearing the Model Library . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1317.6.7 Importing Model Cards . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1327.6.8 Importing Model Params . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1347.6.9 Exporting Model Cards . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1367.6.10 Exporting Model Params . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 138

7.6.11 Exporting Model Library to Spayn . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1407.6.12 Inserting Model Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1427.6.13 Renaming a Model Parameter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1427.6.14 Editing Model Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1427.6.15 Deleting Model Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1427.6.16 Marking and Unmarking Model Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1437.6.17 Using an Expression to Define a Model Parameter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 144

7.7 Defining Extractions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1467.8 Defining Variables. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1487.9 Comparing Measured and Simulated Data. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1497.10 Error Calculation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 150

7.10.1 Linear and Logarithmic Data . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1517.10.2 Data Floor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1527.10.3 Effect of Boxes on Error Calculation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1527.10.4 Outlier Removal . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1537.10.5 Displaying the Error on the Viewer . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 153

7.11 Using Rubberband to Explore and Modify Model Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1547.11.1 Selecting a Parameter to Rubberband . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1547.11.2 Modifying Parameter Values . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1557.11.3 Saving the Parameter Modifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1557.11.4 De-selecting a Parameter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1557.11.5 Reverting to the Last Saved Model Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1557.11.6 Optimizing Model Parameters from Rubberband . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 156

7.12 Optimizing the Model Parameters from the Viewer. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1567.13 The Dataset Subset. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1577.14 The Optimization Setup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 158

7.14.1 Choosing an Optimizer . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1587.14.2 Defining the Optimization Target Data . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1597.14.3 Choosing the Model Parameters to Optimize . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 160

7.15 The Extraction Setup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1617.16 Automation Using the Optimization Sequence . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 162

7.16.1 Combining the Dataset Subset and Extraction Setup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 162


7/271


Table of Contents

7.16.2 Combining the Dataset Subset and Optimization Setup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1627.16.3 Displaying the Data for the Optimization Step . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1657.16.4 Running the Optimization Sequence . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1667.16.5 Changing the Current Position in the Sequence . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1667.16.6 Inserting a Pause in the Sequence . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1667.16.7 Using Rubberband from the Optimization Sequence . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 166

7.16.8 Generating a Script Version of the Optimization Sequence . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1677.17 Reporting. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 168

7.17.1 Automated Report Document Generation using the Sequence . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1687.17.2 Automatic Plot File Generation using the Sequence . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 169

Chapter 8

Developing your own SPICE Model using Verilog-A. . . . . . . . . . . . . . . . . . . . . . . . . . 1718.1 Writing the Verilog-A Module Code. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 172

8.1.1 The Module Definition . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1738.1.2 The Electrical Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1738.1.3 The Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1738.1.4 Variables for internal Use . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1748.1.5 The Analog Code Section . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1748.1.6 Adding Capacitance into a Verilog-A Model . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 175

8.2 Adding a Verilog-A Model Card into the Model Library . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1758.3 Adding a Verilog-A Element into the Netlist. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1778.4 Rubberbanding your Verilog-A Model with SmartSpice . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1798.5 Combining Verilog-A Models and other SPICE Models . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 180

Chapter 9

Script Module . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1829.1 Running a Script Directly . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1839.2 Running a Script using the Command Line Interface . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 183

9.3 Automatically Creating a Script from a Project . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1839.4 Silvaco.Utmost4 Object Commands . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1849.4.1 getDataFromSimulation2 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1849.4.2 makeAttribute . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1859.4.3 makeDevice . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1859.4.4 makeDeviceNode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1869.4.5 makeExtraction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1869.4.6 makeModelLibrary . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1869.4.7 makeNetlist . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1879.4.8 makeVariable . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1879.4.9 openCurrentWorkingDirectory . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1879.4.10 openDatabase . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 188

9.4.11 openDirectory . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1889.4.12 optimize3 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1889.4.13 releaseLicenses . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1899.4.14 system . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1899.4.15 writeToFile . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 190

9.5 Database Object Commands . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1919.5.1 readDataSets . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1919.5.2 readProject . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 191


8/271


Table of Contents

9.5.3 saveDataSets . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1919.5.4 saveProject . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 192

9.6 Directory Object Commands . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1939.6.1 capImportFromTCADLogfile . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1939.6.2 dcImportFromTCADLogfile . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1939.6.3 getPath . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 194

9.6.4 readDataSets . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1949.6.5 readProject . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1949.6.6 saveDataSets . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1959.6.7 saveProject . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1959.6.8 sparImportFromTCADLogfile . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 196

9.7 DataSet Object Commands . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1979.7.1 addAttribute . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1979.7.2 addFunction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1979.7.3 addPlot . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1989.7.4 exportToTCADLogfile . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1989.7.5 extract . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1999.7.6 getAttrVal . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 199

9.7.7 getKeyVal . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2009.7.8 getMeasData . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2009.7.9 getSimData . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2019.7.10 getSweepLen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2019.7.11 remove . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2029.7.12 setKeys . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2029.7.13 simulate . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2039.7.14 writeCSVFile . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 203

9.8 Project Object Commands. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2049.8.1 getConnection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2049.8.2 getDataSubset . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 204

9.8.3 getDataSubsetNames . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2049.8.4 getDevice . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2059.8.5 getDevices . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2059.8.6 getDeviceNames . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2059.8.7 getDeviceSubset . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2059.8.8 getDeviceSubsetNames . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2069.8.9 getExtraction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2069.8.10 getExtractions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2069.8.11 getExtractionNames . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2069.8.12 getHardware . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2079.8.13 getMeasSetup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2079.8.14 getMeasSetupNames . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 207

9.8.15 getModelLibrary . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2079.8.16 getNetlist . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2089.8.17 getNetlistOfDevice . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2089.8.18 getOptimSetup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2089.8.19 getOptimSetupNames . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2089.8.20 getSearch . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2099.8.21 getSearchNames . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2099.8.22 getSimulationCol . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2099.8.23 getTemperatures . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 209


9/271


Table of Contents

9.8.24 getType . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2109.8.25 getVariable . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2109.8.26 getVariables . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2109.8.27 getVariableNames . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2109.8.28 getWaferMap . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2119.8.29 setModelLibrary . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 211

9.8.30 setVariables . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2119.9 Search Object Commands . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 212

9.9.1 appendSearch . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2129.10 Netlist Object Commands . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 213

9.10.1 getSearch . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2139.11 ModelLibrary Object Commands. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 214

9.11.1 addCard . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2149.11.2 addParameter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2149.11.3 deleteCard . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2159.11.4 deleteParameter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2159.11.5 exportModelCard . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2169.11.6 exportModelCardToSSF . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 217

9.11.7 generateBinnedModel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2179.11.8 getCardNames . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2189.11.9 getCardType . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2189.11.10 getParamNames . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2199.11.11 getValue . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2199.11.12 hasCard . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2209.11.13 hasParameter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2209.11.14 importModelCards . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2209.11.15 importModelParams . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2219.11.16 renameCard . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2229.11.17 setValue . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 222

9.12 Extraction Object Commands . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2239.12.1 getName . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2239.13 Variable Object Commands . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 224

9.13.1 getExpr () . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2249.13.2 getName () . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 224

9.14 DataSubset Object Commands . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2259.14.1 apply . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 225

9.15 OptimSetup Object Commands. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2269.15.1 getOptimizerType . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 226

9.16 Hardware Object Commands. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2279.16.1 measure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2279.16.2 measureWithOpen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 228

9.16.3 measureWithShort . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2299.16.4 measureWithOpenAndShort . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2309.16.5 proberContact . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2319.16.6 proberInit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2319.16.7 proberHome . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2319.16.8 proberLoad . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2319.16.9 proberMove . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2329.16.10 proberNoContact . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2329.16.11 scannerClear . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 232


10/271


Table of Contents

9.16.12 scannerConnect . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2339.16.13 thermalSet . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2339.16.14 verify . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 234

9.17 WaferMap Object Commands . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2359.17.1 getBatchName . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2359.17.2 getDieNames . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 235

9.17.3 getWaferNames . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2359.18 DeviceSubset Object Commands . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 236

9.18.1 apply . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2369.19 Device Object Commands . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 237

9.19.1 getGroupName . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2379.19.2 getName . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 237

9.20 DeviceNode Object Commands. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2389.20.1 getName . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2389.20.2 getPins . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 238

9.21 Attribute Object Commands . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2399.21.1 getName . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2399.21.2 getValue . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 239

Chapter 10

Model Check Module . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24010.1 Setting Up a Simulation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24210.2 The Model Library. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24310.3 Creating a Characteristic Plot . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24310.4 Creating an Extraction Plot . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24510.5 Running the Model Check Sequence . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24710.6 Exploring Your Device Model . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 248

Appendix A

Optimization Algorithms . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 249A.1 Least Squares Levenberg-Marquardt Optimization Algorithm (LM) . . . . . . . . . . . . . . . . . . . . . . . . . . . 251A.2 Hooke-Jeeves Optimization Algorithm (HJ) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 252A.3 Simulated Annealing Optimization Algorithm (SA). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 254A.4 Parallel Tempering Optimization Algorithm (PT) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 256A.5 Genetic Optimization Algorithm (GA). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 258A.6 Differential Evolution Optimization Algorithm (DE) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 260A.7 Hybrid Optimization Algorithm (HY). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 262

Appendix B

Converting Data from ICCAP, BSIMPro, ProPlus, and Atlas . . . . . . . . . . . . . . . . . . . 263B.1 Adding Missing Key Information . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 265

B.2 The Utmost IV Data File Header . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 265B.3 Adding an Attribute . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 265B.4 Adding a Function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 266B.5 Adding a Plot . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 266B.6 Converting ICCAP data with 3 Sweeps into Multiple 2 Sweep Datasets. . . . . . . . . . . . . . . . . . . . . . . . 266B.7 Correcting Polarity in BSIMPro Data . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 267B.8 Automating the Conversion of Multiple Files . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 268


11/271

Chapter 1Introduction


12/271

Introduction


Utmost IV provides an easy to use, database-driven environment for the measurement of

semiconductor devices and the generation of accurate high quality SPICE models and

macromodels for analog, mixed-signal, and RF applications. Important features of Utmost IV

include the following.

• Support for all technologies and types of device.

• Fully integrated macro-model sub-circuit support of any complexity.• Family of advanced optimization algorithms for both local and global optimization.

• A relational database to help organize your work.

• Fully flexible measurement setup conditions.

• Fully automated measurement sequence.

• Open instrument drivers written in JavaScript scripting language can be modified or

copied by customers who want to write their own.

• Easy to import measured data from other sources.

• High speed interface to SmartSpice simulator for fast and accurate results.

• Parallel SmartSpice gives even faster simulation for multi-CPU computers.

• Support for other simulators (HSPICE, SPECTRE, and ELDO).

• Unlimited multi-target optimization and rubberband optimization.

• Optimization sequence for automated model extraction.

• Direct parameter extraction can be included within the sequence.

• Script module JavaScript language provides easy automation and customization.

Utmost IV consists of four modules as shown in the figure below.

Figure 1-1 Utmost IV Architecture


13/271

Introduction


Acquistion Module

This module is used to measure physical devices directly, using various types of electrical test

equipment. These measured results (referred to as "datasets") are stored directly in the

database. It is also possible to generate datasets from TCAD simulations or from other SPICE

simulations. This is particularly useful when comparing two SPICE models, or when

converting from one SPICE model type to another.

Optimization Module

This module is used to extract and optimize SPICE model parameters to obtain an accurate fit

between simulated and measured device characteristics. The datasets stored in the database

are used as targets for the model extraction. Compact, macro (subcircuit), and verilog models

can be generated for all device types.

Script Module

This module provides a scripting interface, which allows you to write your own custom

JavaScript based scripts to measure, extract, optimize, and store the results.

Model Check Module

This module provides a simple tool to explore and test your existing MOSFET device models.A simple GUI interface allows you to display characteristic curves or plot extracted

characteristics, such as threshold voltage versus device length. This module can be used

without the need to create and interface to the database, making it ideal for quickly checking

your legacy models.

Each of these modules is described in this manual.


14/271

Chapter 2Getting Started


15/271

Installing the Firebird Database Server Getting Started


Utmost IV uses a relational database to organize and store your work. Before getting started

and actually using Utmost IV, a database server must be started and a new database created as

described below. For full details of the SRDB database management application, please refer

to the SRDB User's Manual.

2.1 Installing the Firebird Database ServerLinux

Once the software package is installed into the local installation directory, the Firebird

database server can be configured and the server can be started. To do this, log into the server

machine as the root user and type the following command:

'firebird -install'

Windows

Run the installation executable and follow the on screen instructions. When you install the

software, you should also select and install the firebird database server at the same time as

shown below.

Figure 2-1 Installing the Firebird Database Server on Windows


16/271

Configuring Firewall for Firebird Database Server Getting Started


2.2 Configuring Firewall for Firebird Database Server

If you are having problems connecting to your firebird database server from another machine

on your network, your firewall may be blocking communications. Firebird uses port 3050 to

communicate and this port must not be blocked by your firewall. If you are having difficulties

connecting to the database server, you should consult your system administrator.

2.3 Creating a Database

To create a database you must use the SRDB utility. On Linux, you can run this utility by

typing 'srdb' in the terminal window. On Windows, you can double-click on the SRDB

shortcut to run the utility.

Now, connect to the database server using the following command:

'login '

This will prompt you for the database server password, which is initially set to 'simucad'.

Use the following command to create a database.

'create ut4 '

Note: Silvaco recommends that the database location exists locally on the database server machine. This willreduce network traffic and speed up database access.

You will now need to create some Utmost IV users as follows. First connect to the newly

created database and then add as many users as required.

'connect '

'create user '

In order to use the database manager tool described in Chapter 5 Managing the Database, you

will need to set the superuser password as follows.'password superuser '

When you are finished, simply enter the command 'quit' to exit the SRDB application.

Now the software is installed, a database server is running, and a database and user are

created. You are now ready to use the Utmost IV software.


17/271

Upgrading your Utmost IV Database Version Getting Started


2.4 Upgrading your Utmost IV Database Version

When upgrading to a more recent version of Utmost IV, it will sometimes be necessary to

upgrade the version of your Utmost IV database. This is done using the SRDB utility. On

Linux, you can run this utility by typing 'srdb' in the terminal window. On Windows, you

can double-click on the SRDB shortcut to run the utility.

Now, connect to the database server using the following command:

'login '

This will prompt you for the database server password, which is initially set to 'simucad'.

Before you upgrade your database, we strongly recommend that you backup your database

using the following command.

'backup '

Once you have backed up your database, you are ready to upgrade your database to a later

version using the following command.

'upgrade ut4

'

Note: Once you have upgraded the database to a higher version number, you will not be able to connect to it usingolder versions of Utmost IV.

When you are finished, simply enter the command 'quit' to exit the SRDB application.


18/271

Connecting to a Database from Utmost IV Getting Started


2.5 Connecting to a Database from Utmost IV

To run Utmost IV on Linux, type 'utmost4' into the command terminal. To run Utmost IV

on Windows, simply double click the Utmost IV shortcut in the Shortcuts folder. When

Utmost IV is run for the first time, an empty Utmost IV main window will open as shown

below.

Figure 2-2 Utmost IV Main Window when Run for the First Time

The first thing we would like to do is to gain access to the database that was created earlier. To

do this, select FileOpen Database or click on the toolbar icon to open the database.

Once you do this, a dialog will appear and you should select the database server and the

database you wish to open.

Figure 2-3 Open Database Dialog

Once you select the database you are interested in, you will have to login to this databaseusing a valid database user and password.


19/271

Connecting to a Database from Utmost IV Getting Started


Figure 2-4 Database Login Dialog

Once you have successfully logged into the database, you will see the new database available

in the Utmost IV main window as shown below.

Figure 2-5 Utmost IV Main Window after Logging into New Database

If you are not the first user of the database, there may already be projects in the database and

the main window will appear similar to the figure shown below.

Figure 2-6 Utmost IV Main Window after Logging into Database with Existing Projects


20/271

Setting Up the SmartView Viewer for Utmost IV Getting Started


Note: If you are having problems connecting to your firebird database server from another machine on yournetwork, see Section 2.2 Configuring Firewall for Firebird Database Server.

2.6 Setting Up the SmartView Viewer for Utmost IV

If you have not used SmartView before and display data from Utmost IV, the plot will be

similar to the one shown below.

Figure 2-7 A Plot Displayed Using the Default SmartView Preferences

It is recommended that you set the SmartView preferences to those suitable for Utmost IV. To

do this, select EditPreferences from the SmartView menu. In the Preferences dialog, go to

the Manage Preferences section and change your preferences to Utmost IV default

preferences. For further details, please refer to the SmartView User’s Manual.

Note: You should exit SmartView and restart for all of the new settings to be active.

https://dynamic.silvaco.com/dynamicweb/jsp/downloads/DownloadManualsAction.do?req=silen-manuals&nm=smartspice&nm=smartview&nm=modelshttps://dynamic.silvaco.com/dynamicweb/jsp/downloads/DownloadManualsAction.do?req=silen-manuals&nm=smartspice&nm=smartview&nm=modelshttps://dynamic.silvaco.com/dynamicweb/jsp/downloads/DownloadManualsAction.do?req=silen-manuals&nm=smartspice&nm=smartview&nm=modelshttps://dynamic.silvaco.com/dynamicweb/jsp/downloads/DownloadManualsAction.do?req=silen-manuals&nm=smartspice&nm=smartview&nm=models


21/271

Chapter 3Databases and Projects


22/271

Databases and Projects


The main window is used to connect to and to organize the many databases and projects that

are available to the Utmost IV user.

When Utmost IV is started, the main window will open and will remember and display all of

the databases on which you have previously been working. In order to interact with one of

these databases, you must log in with a valid user name and password. You can log into many

databases at the same time. Once you are logged into a database, you can then create new

projects, copy projects from one database to another, or even delete projects.

This chapter will describe how you can perform all of these actions and more from the main

window.

Figure 3-1 The Utmost IV Main Window


23/271

Opening a Database Databases and Projects


3.1 Opening a Database

To interact with a database, you need to open the database into the Utmost IV work area by

selecting FileOpen Database or clicking on the toolbar icon . Once you do this, a

dialog will appear and you should select the database server and the database you wish to

open.

Figure 3-2 Open Database Dialog

Once you open the database you are interested in, you then have to login to the database using

a valid database user name and password. For convenience, Utmost IV will automatically prompt you to login to the database after you have opened it into the work area.


3.2 Closing a Database

To close a database and remove it from the main Utmost IV work area, select FileClose

Database. The database will still exist on the database server, however, it will not be shown

in your work area when you restart Utmost IV.

Note: Databases that you recently closed will sti ll be available in the FileRecent Databases menu.

Note: You will be prompted to save any modified projects to prevent loss of data.


24/271

Logging Into and Out of a Database Databases and Projects


3.3 Logging Into and Out of a Database

Once a database is shown in the work area, it is now possible to log into this database using a

valid database user name and password by selecting the database of interest and selecting

FileLogin or by simply double clicking on the database name. Once you have logged into a

database, you will be able to work with the projects inside.


When you finish the work, you can log out of the database by selec ting the database in the

work area and selecting FileLogout.

Note: Logging out of a database does not remove the database from the work area.

Note: You will be prompted to save any modified projects to prevent loss of data.

3.4 Changing the User Password for a Database

Once you have logged into the database, you can change your password. To do this, select the

database and select FileChange Password. This will open up the dialog shown below.

Figure 3-5 Change Password Dialog

Note: You must close all projects in the database before you are able to change the password.


25/271

Creating a New Project Databases and Projects


3.5 Creating a New Project

Projects are used to store and organize your work. To create a new project, select FileNew

Project or click on the toolbar icon in the main Utmost IV window. This will open the

new project dialog. This is where you enter the name for your new project and select which

type of project you wish to create from the available list. You should also select who will be

allowed to read and to modify your project once it is created.

Figure 3-6 New Acquistion Project Dialog

Note: You cannot remove the read or modify permissions for either the project owner or the superuser.


26/271

Opening a Project Databases and Projects


3.6 Opening a Project

If you have permission to modify an existing project, you can open and lock this project by

selecting FileOpen Project or clicking on the toolbar icon . This will open up the

project window for editing and will lock the project so that no other user may make changes

to it.

If you do not have permission to modify the project, but have read permission, you can still

open the project in a Read-Only mode by selecting FileOpen Read Only or clicking on

. In this mode, you will not have an exclusive lock on the project but will be working on a

copy of the project from the database. You will not be allowed to save the Read-Only project.

You may make modifications to the project and select FileSave As to save to a new project

name.

Note: Even if another user has opened and locked a project, you can still open the project in a Read-Only mode.

This will allow you to edit a copy of the project.

3.7 Modifying the Project Permissions

Only the owner may change the project permissions. To do this, select the project and select

EditPermissions or click on the toolbar icon . .

Figure 3-7 Project Permissions Dialog

Note: If you are not the project owner, you will only be able to view the permissions.

Note: You cannot change the permissions of a project you have already opened.


27/271

Importing a Project Databases and Projects


3.8 Importing a Project

Projects can be stored by exporting them to an external file as described in

Section 3.9 Exporting a Project. To import a project from an existing project file, select the

database and then select File ImportProject from the menu.

In the import wizard, you must first select the file containing the project you wish to import,

then click on the Next button.

Figure 3-8 Selecting the Project File for Import

Note: The software will check the external file to make sure it contains a valid Utmost IV project once you press the

Next button.


28/271

Importing a Project Databases and Projects


Once the project file has been verified, then you need to input the new name for this project

and to select who will be able to read and to modify it.

Figure 3-9 Selecting the New Project Name and Permissions

Note: You cannot change the type of an already existing project.

If you select a project name, which already exists in the database, then the following error

message will be displayed and you must select a different name for your project.

Figure 3-10 Duplicate Project Names are not Allowed


29/271

Exporting a Project Databases and Projects


3.9 Exporting a Project

To export a project, select the project and then select FileExportProject from the menu.

This will open up a dialog in which you can select a location and a name for the project file

you wish to create.

Figure 3-11 Project Export Dialog


30/271

Reading Project Parts from Existing Projects Databases and Projects


3.10 Reading Project Parts from Existing Projects

Rather than creating each project every time, it is sometimes convenient to reuse parts of

another project that has already been created. This can be done from an open project window

by selecting FileRead From Project that will open the dialog below.

Figure 3-12 Selecting a Project from the Database

From this dialog, you should select the project from which you want to read. This will open

the dialog below that allows you to select the parts of the project that you can import and then

reuse.

Figure 3-13 Selecting Project Parts from the Project to Import


31/271

Chapter 4Datasets


32/271

Dataset Keys Datasets


A dataset contains a single device measurement. As well as containing the measured data

itself, the dataset also contains all of the information about how that measurement was

performed.

4.1 Dataset Keys

A dataset is uniquely defined by six key fields, those fields are as follows.

• Device Name

• Temperature

• Batch Name

• Wafer Name

• Die Name

• Measurement Setup Name

You cannot have two datasets with the same unique identifying keys in the same database.

Any attempt to save or import a dataset whose keys match an already existing dataset will

cause the existing dataset to be overwritten.


33/271

Editing a Dataset Datasets


4.2 Editing a Dataset

To view and modify a single dataset, select the dataset from the dataset selector area of the

project and then select DatasetEdit from the menu.

Figure 4-1 The General Tab of the Dataset Editor

From the General tab, you can modify many of the information fields for the dataset and you

can modify the list of device attributes and their values.

Note: If you do not have permissions to modify the dataset, a read only copy of the dataset will be displayed.


34/271



Figure 4-2 The Data Tab of the Dataset Editor

From the Data tab, you can view the measurement conditions and can view and edit the

measured data directly. In addition, the calculated data from any functions defined in the

dataset can be viewed.


35/271



Figure 4-3 The Analysis Tab of the Dataset Editor

From the Analysis tab, the list of functions which is defined for the dataset may be modified

directly. You can also change the list of plots which are defined.

For a more detailed description of dataset functions, see Section 6.10.13 Defining a Function.


36/271



Figure 4-4 The AC Data Tab of the Dataset Editor

Note: There will only be an AC Data tab for datasets with measurement type AC or AC_TABLE.

From the AC Data tab, you can view the measured s parameter data for AC dataset types.

You can also view the y, z, h, g, gamma parameter data and any AC data calculated from

functions in your dataset. For convenience, you can display the complex AC data as

rectangular (real/imaginary) or as polar (magnitude/phase) format.


37/271



Figure 4-5 The Noise Data Tab of the Dataset Editor

From the Noise Data tab, you can view and edit the measured noise data for NOISE dataset

types.

Note: There will only be a Noise Data tab for datasets with measurement type NOISE and NOISE_TABLE.


38/271

Modifying the Dataset Permissions Datasets


4.3 Modifying the Dataset Permissions

Only the dataset owner can change the dataset permissions. To change the dataset

permissions, select the dataset, then select DatasetPermissions from the menu.

Figure 4-6 Changing the Dataset Permissions

Note: You cannot remove the read or modify permissions for the dataset owner or for the superuser.


39/271

Deleting Datasets Datasets


4.4 Deleting Datasets

From the dataset selector area, select all of the datasets you want to delete, then select

DatasetDelete from the menu.

Figure 4-7 Delete Dataset Dialog

Note: You can only delete datasets for which you have modify permission.

Note: Once a dataset is deleted, i t cannot be recovered except from your database backup.


40/271

Importing Datasets Datasets


4.5 Importing Datasets

Utmost IV can directly import two different data file formats, these are the legacy format

from Utmost III and the new more flexible Utmost IV data file format. Data from other

formats can easily be converted (as described in Appendix B Converting Data from ICCAP,

BSIMPro, ProPlus, and Atlas) and then imported directly into Utmost IV.

Note: The default file name extension for Utmost III logfiles is .log and for the Utmost IV data files is .uds.

To import a dataset, select the database in the main Utmost IV window and then select

FileImportDatasets from the menu.

In the import wizard, you must first select the file containing the datasets you wish to import,

then click on the Next button.

Figure 4-8: Selecting the Data File for Import

Note: The software will check the external file to make sure it contains either a valid Utmost III logfile or a validUtmost IV data file once you press the Next button.


41/271



When importing Utmost III logfiles, an additional page in the wizard will be displayed. This

page allows you to modify certain fields for all the datasets that will be imported into the

database.

Figure 4-9: Modifying Dataset Information from Utmost III logfiles

Note: This additional page will not be displayed when importing Utmost IV data files.


42/271



Once the external file has been verified, you must then select which datasets you wish to

import into the database. If a dataset cannot be imported into the database, you will be unable

to select this dataset and a short explanation will be given.

Note: If a dataset already exists in the database, the Import button will change name to become an Overwritebutton. If you chose to permanently overwrite the datasets already in the database, there is no way to

recover the older datasets, except from your database backups.

Note: If you do not wish to overwrite any data, then click on the New Only button to select only datasets from thefile which do not already exist in the database.

Figure 4-10: Selecting the Datasets to Import


43/271



Once you select to import or overwrite datasets a progress bar will be displayed. Once the

import is complete, you can then click on Start if you wish to import another file or click on

the Finish button.

Figure 4-11: Showing the Progress of Dataset Import


44/271

Exporting Datasets Datasets


4.6 Exporting Datasets

To export datasets, select the datasets you want to export in the dataset selector area, then

select DatasetExport Datasets from the project menu.

Figure 4-12 Selecting the File Name for Dataset Export

Note: If the file already exists, its contents will be overwritten during the export.


45/271

Writing a Dataset out to CSV Format Datasets


4.7 Writing a Dataset out to CSV Format

From the Dataset Selector area, select the dataset you want to write out to CSV format, then

select DatasetWrite CSV File from the menu. You can also choose to write out the

simulated data as well as the measured data for this dataset.

Figure 4-13 Writing Dataset to CSV Format


46/271

Chapter 5Managing the Database


47/271

Managing the Database


The database manager allows a special superuser database user to manage projects and

datasets that exist in the database. To open the database manager, select FileDatabase

Manager and you will then be prompted to enter the superuser password.

Figure 5-1 Database Manager Login Dialog

Note: You cannot open the database manager if you have already logged into the database.

The database manager dialog allows the superuser to view and select all of the projects and

datasets in the database. You can select whether you want to view projects or datasets.

Figure 5-2 The Database Manager Window Showing the Projects View

If you edit the search criteria, you will be able to easily find the objects you are interested in.

The search editor dialog is shown below.


48/271

Deleting Projects and Datasets Managing the Database


Figure 5-3 Searching for Projects in the Database Manager

Once you have found and selected the objects you wish to manage, then you can perform a

number of actions. You can delete objects, change the owner of the objects, change the

objects permissions, and unlock the objects.

5.1 Deleting Projects and Datasets

The database manager dialog allows the superuser to select many projects or datasets at thesame time and delete all of them permanently from the database.

Note: Once deleted from the database, these objects cannot be recovered, except from your database backups.

5.2 Changing the Owner of Projects and Datasets

The database manager allows the superuser to select many projects or datasets at the same

time and change the owner of these objects. The owner is the only user other than the

superuser who is allowed to change the permissions of an object.


49/271

Changing the Permissions of Projects and Datasets Managing the Database


5.3 Changing the Permissions of Projects and Datasets

The database manager allows the superuser to select many projects or datasets at the same

time and change the permissions of these objects.

Note: All selected objects must be owned by the same user in order to change permissions.

Note: If a single object is selected, the current permissions for that object are shown when the change permissiondialog is opened.

Note: If more than one object is selected, then the default permissions will be shown when the change

permissions dialog is opened.

Figure 5-4 Changing Permissions on Multiple Objects


50/271

Unlocking Projects and Datasets Managing the Database


5.4 Unlocking Projects and Datasets

If the selected projects or datasets are locked by a database user, the unlock button will be

enabled. To unlock the objects, select the locked projects or datasets, and click on the unlock

button in the database manager dialog.

Note: Under normal circumstances, objects should never be unlocked manually using the database managerdialog. Be careful when unlocking objects as these may currently be in use by the database users.


51/271

Chapter 6Acquisition Module


52/271


53/271

Defining Temperatures Acquisition Module


6.1 Defining Temperatures

To define the temperatures at which the measurements will be made, select Setup

Temperature from the project menu or click on the toolbar icon . This dialog allows you

to define and enable multiple temperature values.

Figure 6-2 Defining Measurement Temperatures

Note: All temperatures are in Celsius.


54/271

Defining the Wafer Map Acquisition Module


6.2 Defining the Wafer Map

The wafer map is where you define the physical location of the devices for which you intend

to acquire datasets. To open the Wafer Map Dialog, select SetupWafer Map or click on the

toolbar icon.

The wafer map dialog is split into three sections:• The General section

• The Die Selection section

• The Group Selection section

6.2.1 Defining the Header, Batch and Wafer Information

The General section allows you to describe some background information, the name of the

batch that is being measured, and one or more wafers that are to be measured.

Figure 6-3 General Section of Wafer Map Dialog


55/271

Defining the Wafer Map Acquisition Module


Field Description

Header Information This table contains several fields (Customer, Product, Process,

Operator, Station, Comment, Fabrication Date, User Date, and

Dubious Flag), which will be stored in each of the datasets that will beacquired.

Batch Name This is the batch name of the data being acquired.

Wafer List You can enter the names and enable one or more wafers to be measured.

You can also enter the wafer cassette slot number where the wafer is

located.

Note: Even if you are acquiring data by simulation, the same information will be used by the measurementsequence and will be stored in the acquired datasets.

Note: All dimensions in the wafer map are in meters.

6.2.2 Defining the Die Selection

Defining a die allows you to step around a wafer and perform the entire sequence of

measurements on each die. The Die Selection section allows you to define and select one or

more die which will be measured. The locations of these die can be defined in a xy grid

pattern or in a completely arbitrary way. When defining the die locations using the xy grid,

the die can be viewed and selected using either the Die Map or the Die List. These two are

ways to view the same information, changes to the Die List apply to the Die Map, and vice

versa. To define arbitrary locations for the die, you should use the Drop In type.

Note: The home die defines the die location where you will set the wafer to before starting the measurement

sequence.

Defining the Die Selection using the Die Map

The Die Map is used when defining the die locations using the xy grid and when you want to

select and view the die locations graphically. To enable or disable a die, you simply click on

its drawn location. To select a die as the home die, select this die and then press the Set Home

Die button.

To define the layout of the die using the xy grid, you specify the following parameters in the

die layout table.

Field Description

Wafer Diameter The diameter of the wafer.

Die Size X The size of the die in the X direction.

Die Size Y The size of the die in the Y direction.

Layout This represents how the grid is aligned to the center of the wafer.


56/271

Defining the Wafer Map

Documents

utmost4_users1