TST S and D

vacuum

TST S and DTurboradial BlowersTURBOSTREAMSingle-Stage and Dual-Stage

C18

173.03.02Excerpt from theLeybold Vacuum Full Line Catalog 2005Product Section C18Edition May 2005

C018

Contents

GeneralTURBOSTREAM Blowers for the Laser Industry . . . . . . . . . . . . . . . . C18.03

ProductsTurboradial Blowers

TURBOSTREAM TST S (single-stage) . . . . . . . . . . . . . . . . . . . . . . C18.06

TURBOSTREAM TST D (dual-stage) . . . . . . . . . . . . . . . . . . . . . . C18.10

Leybold Vacuum Full Line Catalog 20052

Turboradial Blowers

Leybold Vacuum Full Line Catalog 2005 C18

General Turboradial Blowers

3

Beginning in 1988, theTURBOSTREAM technology was in-troduced by Leybold Vacuum GmbH.Since that time improvements havebeen worked out and implementedtogether with our customers on acontinual basis. This was very muchfacilitated by the modular concept ofthe units, which also today puts us ina position where we are able to fulfilyour future requirements as to a tai-lor-made solution.

TURBOSTREAM Blowers for the Laser Industry

Today the unique TURBOSTREAMrange from Leybold is capable ofimproving the capabilities of yourLaser system both at the Lasermanufacturer and the end user withregard to:

� Quality

� Productivity

� Compactness

� Efficiency

� Reliability and

� Saving of costs

Just see how this works for you!

TURBOSTREAM Blower

and Fast-flow CO2 LaserThe CO2 containing gas mixturewhich maintains in the resonator thelaser effect is discharged from theresonator in the hot state and iscooled in the heat exchanger. Afterthe gas has passed through theTURBOSTREAM, the gas is cooledonce more in the downstream heatexchanger before it is returned backinto the resonator.

Gas circulation in a fast axial flow CO2 laser with TURBOSTREAM blower

1 Resonator2 Laser mirror3 Power supply4 TURBOSTREAM blower5 SOGEVAC vacuum pump6 Control valve / roughing line7 Metering orifice and bypass valve8 Fresh gas supply9 Heat exchanger

C18

General


Turboradial Blowers

Design PrincipleThe gas flows via the inlet flange (1)into the pump chamber of the blower.There it is radially accelerated by therotating blade wheel (2) and isdeflected via diffuser (4) into theducts (5).

The gas then leaves theTURBOSTREAM through the outletflanges (3).

The TURBOSTREAM blower is drivenby a 3-phase motor (8). Blade wheel

Cross-section of a TURBOSTREAM blower, left upper half: with shroud; right upper half: with pump chamber housing

01 Inlet flange02 Blade wheel03 Outlet flanges04 Diffuser05 Ducts06 Ball bearings07 Shaft08 Motor09 Cooling coils10 Oil pump11 Oil supply system12 Connection for vacuum

pump13 Motor housing14 Sealing gap15 Shroud for

TST S 1000 S, S 1500 S16 Pump chamber housing for

TST S 1500, S 2500

(2) and motor rotor are located onone shaft (7). The stator of the motorhas been built into the motor housing(13). The two hybrid ball bearings (6)of the shaft are oil-lubricated. An oilpump (10) feeds the oil through theshaft to the bearings. The motorhousing of the TURBOSTREAM iswater-cooled (9).

Pump chamber housing and motorhousing are separated by a wear-freesealing gap.

Pump chamber housing and motorhousing are separated by a wear-freesealing gap. To prevent smallamounts of oil mist from entering thepump chamber via the gap (14), asmall quantity of gas is constantlyextracted (12) from the motor housingby the vacuum pump of the lasersystem. This ensures a steady gasflow from the pump chamber to themotor housing, reliably excluding theentry of oil into the pump chamber.


General Turboradial Blowers

5

Supplied EquipmentDepending on customerrequirements the mechanicalinterface to the resonator can bedesigned either as a pump chamberhousing or a shroud. The pumpchamber housing completelymatches the contour of the bladewheel. Only the intake piping and thetwo gas discharge pipings need tobe provided for integrating thisblower flow-wise in the resonatorcircuit. The shroud version of theblower utilises for a partial section ofthe blade wheel the matchingstructures provided by the system.This arrangement of “resonator / TURBOSTREAM with shroud” canthus be more compact.

� Generally all TURBOSTREAMblowers are equipped with avibration sensor (GUARD) whichmonitors the ball bearings. Theelectrical connection betweenvibration sensor and frequencyconverter is provided by aconnecting cable which is laidseparately.

The COMBIVERT respectively theTST.Drive DC must be installed in anelectrical cabinet. It is short-circuitproof, can sustain short circuits toground and is protected againstoverloading. It is provided with a 5 digit display for displaying theoperating status, has a floatingcontact for error status and isequipped with a connector for thePTC resistor which monitors themotor temperature.

The GUARD vibration sensor issupplied with power from thefrequency converter. The error statusgenerated when the GUARD comesinto action is evaluated by thefrequency converter and results in aninterruption of the power supply tothe TURBOSTREAM blower and anerror message on the frequencyconverter.

The drive of the TURBOSTREAMblower and the COMBIVERTrespectively the TST.Drive DC areperfectly matched to each other.

� The TURBOSTREAM is equippedwith an integrated motortemperature monitoring facility(PTC) which will protect the motoragainst overheating in case themotor cooling facility fails becauseof an inadequate supply of coolingwater, for example.

� Some versions of theTURBOSTREAM are equippedwith an oil level monitoring facilitywhich automates regularmonitoring of the oil level.

Electric Power SupplyThe TURBOSTREAM blower issupplied with power from a separatefrequency converter, theCOMBIVERT, respectively theTST.Drive DC unit. TURBOSTREAMblower and COMBIVERT respectivelythe TST.Drive DC are connected toeach other by a connecting cableand by a PTC monitoring cable.

C18 Leybold Vacuum Full Line Catalog 20056

Turboradial Blowers

TURBOSTREAM TST S (single-stage)

Advantages to the User� High flow rate at small size

� Pump chamber free of hydrocarbons

� Non-wearing seal for the pumpchamber

� Low gas exchange rates

� Pump sections in contact with themedium are made of a specialcorrosion resistant aluminium alloy

� Prefect integration in gas lasersystems

� Simple to operate, minimum maintenance requirements

� Low-vibration and low-noise operation

� Gas flow free of pulsations

� Reliable and rugged owing to oillubricated hybrid ball bearings

� Motor protection via built-in PTCresistor

� Water cooled motor casing

� Vibration sensor for monitoring thebearings

� Free of non-ferrous metals, including the cooling water circuit


Turboradial Blowers

7

Dimensional drawing for the TURBOSTREAM TST S with pump chamber housing (left), with shroud (right)

TST S 1500 S 2500 DN1 160 ISO-F 160 ISO-FDN2 100 ISO-F 100 ISO-Fa 200,5 250b 423 423c 5 5ø d 420 420ø d1 170 170ø d2 145 145ø d3 200 200e1 M 8 x 15 M 8 x 15e2 M 10 x 18 M 10 x 18h 355 357h1 77.5 77.5h2 210 210h3 128.5 128.5h4 19 19

e2

DN1

d3

b

h2

h3

k

d1

a

h

h1

f

g

d

i

h4

h2

d1

a h

h3

h1

h

d

e1

c

DN2

2d

4

48°

48°

A B413

144,572*

Ø 175

Ø 370

184

Ø 4068 x Ø 9

Dimensional drawing for the TURBOSTREAM S 3500 SNG with shroud, oil level sensor and GUARD

TST S 1000 SN S 1500 SN/SG/SNXa 250 250d 320 320ø d1 170 170f 167.5 167.5g 280 280h 322.5 325h1 77.5 77.5h2 207 207h3 97.5 100i 99.5 111k 10.0 12.5h4 19 19

View A - B


Turboradial Blowers

Technical Data

Pumping speed

(max. volume flow rate within the

specified operating range) m3 x h-1 (cfm)

Compression ratio 1), max.

Permissible intake pressure 1), max.

mbar (Torr)

Nominal speed rpm

Cooling water connections, inside thread

Cooling water flow, min.

at a max. admission temperature of 30 °C

(approx. 6 bar (4.5 x 103 Torr)) l x h-1

Evacuation connection as an angled

fitting for the hose mm (in.)

Minimum extraction rate

at the motor casing 2) l x h-1

Maximum extraction rate


Noise level at zero throughput 3) dB(A)

Gas admission flange 4) DN

Gas discharge flange (2 pieces) 4) DN

Weight

with pump chamber housing kg (lbs)

with shroud kg (lbs)

800 to 1500 1400 to 2100 1900 to 3000 2500 to 5800

(472 to 885) (824 to 1236) (1118 to 1766) (1472 to 3415)

1 : 1.35 1 : 1.45 1 : 1.35 1 : 1.6

120 (90) 120 (90) 120 (90) 120 (90)

41400 44040 39000 40020

G 3/8" G 3/8" G 3/8" G 3/8"

80 110 120 300

(180 for SNX version)

Elbow union Elbow union Elbow union Straight union

8/6 (0.31/0.24) 8/6 (0.31/0.24) 8/6 (0.31/0.24) 10/8 (0.39/0.31)

80 80 80 80

400 400 400 400

≤ 56 ≤ 56 ≤ 56 ≤ 56

– 160 ISO-F 160 ISO-F –

– 100 ISO-F 100 ISO-F –

– 56 (123.6) 56 (123.6) –

26 (57.4) 26 (57.4) – 50 (116.3)

TURBOSTREAM TSTS 1000 S1500 S 2500 S 3500

Technical Data

Main supply voltage, 50/60 Hz V AC

Power consumption kVA

Main fuse rating max. A

Permissible ambient temperature °C

(°F)

Cooling

Type of protection to DIN 40 050 IP

Weight kg (lbs)

1) For laser gas 70 % He, 25 % H2, 5 % CO22) Gas consumption referred to operating pressure3) To DIN 45 6354) Only for the models with pump chamber housing

305 - 500 305 - 500 305 - 500 360 - 500

4.1 8.3 11 22.2

3 x 10 3 x 20 3 x 25 3 x 50

0 to +45 0 to +45 0 to +45 0 to +45

(+32 to +113) (+32 to +113) (+32 to +113) (+32 to +113)

air air air water

20 20 20 20

14 (30.9) 19 (41.8) 31 (68.4) 21 (46.2)

COMBIVERT10.F4 (6 A) 13.F4 (12 A) 14.F4 (16,5 A)

TST.Drive DC


Turboradial Blowers

9

Ordering Information

TURBOSTREAMS 1000 SN (with shroud and oil level sensor)S 1500 (with pump chamber housing) S 1500 SN (with shroud and oil level sensor)S 1500 SG

(with shroud and vibration sensor)S 2500 (with pump chamber housing) S 3500 SNG; 3.7/2.5 m cable (with Shroud,

oil level sensor and vibration sensor)S 3500 SNG; 3.7/3.2 m cable (with Shroud,

oil level sensor and vibration sensor)

Hybrid bearing sensorGuard 2 (retrofit kit)

with 2.5 m cableGuard 3+ (retrofit kit)

with 2.5 m cablewithout cable

Cable for Guard 3+ (without cable)2.5 m3.2 m

Motor/PTC cable set for COMBIVERT2.5 m4.0 m

10.0 m

Metering orificeDN 16 KF, approx. 08 NL x h-1

DN 16 KF, approx. 26 NL x h-1

Oil level sensor (retrofit kit)with 2.0 m cablewith 3.7 m cable

TURBOSTREAM oilTST oil F 12 600 mlTST oil 22 600 ml

Rotary vane vacuum pump SOGEVAC SV 16 SL

with Motor for 220 - 240 V / 380 - 415 V, 50 Hzwith Motor for 208 - 230 V / 440 - 460 V, 60 Hz

Rotary vane vacuum pump SOGEVAC SV 25 SL

with Motor for 220 - 240 V / 380 - 415 V, 50 Hzwith Motor for 208 - 230 V / 440 - 460 V, 60 Hz

Part No. 858 69 – – –– Part No. 858 70 – –– Part No. 858 79 – –

–Part No. 858 77 – –

– – Part No. 858 80 –

– – – Part No. 880 004

– – – Part No. 880 005

Part No. 858 03 Part No. 858 03 Part No. 858 03 –

– – – Part No. 896 202– – – Part No. 896 201

– – – Part No. 870 000 136– – – Part No. 870 000 137

– – – Part No. 870 000 101Part No. 858 54 Part No. 858 54 Part No. 858 54 –Part No. 858 56 Part No. 858 56 Part No. 858 56 –

Part No. 858 01 Part No. 858 01 Part No. 858 01 upon requestPart No. 896 152 Part No. 896 152 Part No. 896 152 upon request

Part No. 119 99 Part No. 119 99 Part No. 119 99 Part No. 119 99upon request upon request upon request upon request

Part No. 896 102 Part No. 896 102 Part No. 896 102 –– – – Part No. 896 112

Part No. 109 01 21 Part No. 109 01 21 Part No. 109 01 21 Part No. 109 01 21

Part No. 109 03 51 Part No. 109 03 51 Part No. 109 03 51 Part No. 109 03 51

TURBOSTREAM TSTS 1000 S1500 S 2500 S 3500


COMBIVERT with motor-filter.006 A.012 A16.5 A (for more powerful motor)TST.Drive DC 32 A (water-cooled)

upon request – – –– Part No. 858 78 – –– – upon request –– – – Part No. 894 011

COMBIVERT10.F4 13.F4 14.F4(6 A) (12 A) (16.5 A)

TST.Drive DC


Turboradial Blowers

Ø 240

232

31

110

45°

4 x M8 x 14

10

BA

DN 63 ISO-F

133

250,5

456

45°

430

137

434

4 x M10 x 18

200

DN 160 ISO-F

11

Ø 230

TURBOSTREAM TST D (dual-stage)

The dual-stage TURBOSTREAM D 2500 is a market-orientated development based on our wellproven single-stage series.

Dimensional drawing for the TURBOSTREAM TST D 2500 NG

Advantages to the User� High flow rate at small size

� Pump chamber free of hydrocarbons

� Non-wearing seal for the pumpchamber

� Low gas exchange rates

� Pump sections in contact with themedium are made of a specialcorrosion resistant aluminium alloy

� Prefect integration in gas lasersystems

� Simple to operate, minimum maintenance requirements

� Low-vibration and low-noise operation

� Gas flow free of pulsations

� Reliable and rugged owing to oillubricated hybrid ball bearings

� Motor protection via built-in PTCresistor

� Water cooled motor casing

� Vibration sensor for monitoring thebearings

� Free of non-ferrous metals, including the cooling water circuitfor cooling the motor


Turboradial Blowers

11

Technical Data

Pumping speed

(max. volume flow rate within the

specified operating range) m3 x h-1 (cfm)

Compression ratio 1), max.

Permissible intake pressure 1), max.

mbar (Torr)

Nominal speed rpm

Cooling water connections, inside thread

Cooling water flow, min.

at a max. admission temperature of 30 °C

(approx. 6 bar (4.5 x 103 Torr)) l x h-1

Extraction connection at the motor

housing for connecting a vacuum pump

as a small flange DN

Minimum extraction rate


Maximum extraction rate


Noise level at zero throughput 3) dB(A)

Gas admission flange 4) DN

Gas discharge flange (2 pcs.) 4) DN

Weight kg (lbs)

1800 to 2800 (1062 to 1648)

1 : 1.8

120 (90.)

40200

G 3/8"

300

16 KF

80

400

≤ 60

160 ISO-F

63 ISO-F

80 (176.6)

TURBOSTREAM TSTD 2500 G

Technical Data

Main supply voltage, 50/60 Hz V AC

Power consumption kVA

Main fuse rating, max. A

Permissible ambient temperature °C (°F)

Cooling

Sype of protection to DIN 40 050 IP

Weight kg (lbs)

1) For laser gas 70 % He, 25 % H2, 5 % CO22) Gas consumption referred to operating pressure3) To DIN 45 6354) Only for the models with pump chamber housing

305 - 500 305 - 500

23 23

3 x 50 3 x 50

0 to +45 (32 to +113) 0 to +45 (32 to +113)

water air

20 20

43 (94.8) 38 (83.8)

COMBIVERT16.F4 (33 A)

C18

Turboradial Blowers



TURBOSTREAM

with pump chamber housing,

vibration sensor, metering orifice and

motor cable, 2.5 m long

Vibration sensor

Guard 2 (retrofit kit)

with 2.5 m cable

Guard 3+ (retrofit kit)

with 2.5 m cable

without cable

Cable for Guard 3+ (without cable)

2.5 m

3.2 m

Motor/PTC cable set for COMBIVERT

2.5 m

4.0 m

Metering orifice



Oil level sensor with 2 m long cable

(retrofit kit)

TURBOSTREAM oil

TST oil 22 600 ml

Rotary vane vacuum pump

SOGEVAC SV 16SL

with Motor for 220 - 240 V / 380 - 415 V, 50 Hz


Rotary vane vacuum pump

SOGEVAC SV 25SL



Part No. 877 011

Part No. 858 03

Part No. 896 202

Part No. 896 201

Part No. 870 000 136

Part No. 870 000 137

Part No. 120 40

Part No. 858 08

Part No. 858 01

Part No. 896 152

Part No. 119 99

Part No. 896 112

Part No. 109 01 21

Part No. 109 03 21

TURBOSTREAM TSTD 2500 G

COMBIVERT with motor-filter

33 A, air cooled

33 A, water cooledPart No. 120 30Part No. 897 413

Ordering Information COMBIVERT16.F4 (33 A)


Turboradial Blowers

13

Notes

vacuumLeybold Vacuum GmbHBonner Strasse 498D-50968 ColognePhone: +49-221 347-0Fax: +49-221 [email protected] w w w . l e y b o l d . c o m

P.R. China

Leybold Vacuum (Tianjin) International Trade Co., Ltd.Beichen Economic Development Area (BEDA),No. 8 Western Shuangchen RoadTianjin 300400, ChinaSales and Service:Phone: +86-22-2697 0808Fax: +86-22-2697 4061Fax: +86-22-2697 [email protected]

Leybold Vacuum (Tianjin)Equipment Manufacturing Co., Ltd.Beichen Economic Development Area (BEDA),No. 8 Western Shuangchen RoadTianjin 300400, ChinaPhone: +86-22-2697 0808Fax: +86-22-2697 4061Fax: +86-22-2697 [email protected]

Leybold Vacuum (Tianjin) International Trade Co., Ltd.Beijing Branch:1-908, Beijing Landmark Towers8 North Dongsanhuan RoadChaoyang DistrictBeijing 100004, ChinaSales and Service:Phone: +86-10-6590-7607Fax: +86-10-6590-7622

Leybold Vacuum (Tianjin) International Trade Co., Ltd.Shanghai Branch:Add: No. 33, 76 Futedong SanRd., Waigaoqiao FTZ , Shanghai 200131, ChinaSales and Service:Phone: +86-21-5064-4666Fax: [email protected]

Leybold Vacuum (Tianjin)Guangzhou Branch:Add: G/F,#301 Building, 110 Dongguangzhuang Rd.Tianhe District, Guangzhou 510610, ChinaSales:Phone: +86-20-8723-7873Phone: +86-20-8723-7597Fax: [email protected]

India

Leybold Vacuum India Pvt Ltd.A-215 Road No. 30MIDC Wagle Industrial EstateThane(W) - 400 604 MaharashtraIndiaSales and Service:Phone: +91-22-2581 2929Fax: +91-22-2581 [email protected]

Netherlands

Leybold Vacuum Nederland B.V.Computerweg 7NL-3542 DP UtrechtSales and Service: Phone: +31-346-58 39 99 Fax: +31-346-58 39 90 [email protected]@leybold.com

Spain

Leybold Vacuum España S.A.C/. Huelva, 7E-08940 Cornella de Llobregat (Barcelona)Sales: Phone: +34-93-666 46 16Fax: +34-93-666 43 [email protected] Service: Phone: +34-93-666 49 51Fax: +34-93-685 40 10

Sweden

Leybold Vacuum Scandinavia ABBox 9084SE-40092 GöteborgSales and Service: Phone: +46-31-68 84 70 Fax: +46-31-68 39 39 [email protected]/delivery address:Datavägen 57BSE-43632 Askim

Switzerland

Leybold Vacuum Schweiz AGLeutschenbachstrasse 55CH-8050 ZürichSales: Phone: +41-1-308 40 50 Fax: +41-1-302 43 73 [email protected]: Phone: +41-1-308 40 62 Fax: +41-1-308 40 60

USA

Leybold Vacuum USA Inc.5700 Mellon RoadExport, PA [email protected]: Eastern & Central time zonesPhone: +1-724-327-5700Fax: +1-724-733-1217Pacific, Mountain, Alaskan & Hawaiian time zonesPhone: +1-480-752-9191Fax: +1-480-752-9494Service: Phone: +1-724-327-5700Fax: +1-724-733-3799

Belgium

Leybold Vacuum Nederland B.V.Belgisch bijkantoorLeuvensesteenweg 542-9AB-1930 ZaventemSales: Phone: +32-2-711 00 83 Fax: +32-2-720 83 38 [email protected]: Phone: +32-2-711 00 82 Fax: +32-2-720 83 38 [email protected]

France

Leybold Vacuum France S.A.7, Avenue du QuébecZ.A. de Courtaboeuf, B.P. 42F-91942 Courtaboeuf CedexSales and Service: Phone: +33-1-69 82 48 00 Fax: +33-1-69 07 57 38 [email protected]

Leybold Vacuum France S.A.Valence Factory640, Rue A. Bergès - B.P. 107 F-26501 Bourg-lès-Valence CedexPhone: +33-4-75 82 33 00 Fax: +33-4-75 82 92 69 [email protected]

Great Britain

Leybold Vacuum UK Ltd.Waterside Way, Plough LaneGB-London SW17 0HBSales: Phone: +44-20-8971 7000 Fax: +44-20-8971 7001 [email protected]: Phone: +44-20-8971 7030 Fax: +44-20-8971 7003 [email protected]

Italy

Leybold Vacuum Italia S.p.A.8, Via Trasimeno I-20128 MilanoSales: Phone: +39-02-27 22 31 Fax: +39-02-27 20 96 41 [email protected]:Phone: +39-02-27 22 31 Fax: +39-02-27 20 96 41 [email protected]

Field Service BaseZ.I.Le CapanneI-05021 Acquasparta (TR)Phone: +39-0744-93 03 93Fax: +39-0744-94 42 [email protected]

Leybold Vacuum GmbHBonner Strasse 498 D-50968 ColognePhone: +49-221-347 1234 Fax: +49-221-347 1245 [email protected]

Leybold Vacuum GmbHSales Area North/EastBranch office BerlinBuschkrugallee 331. ObergeschossD-12359 BerlinPhone: +49-30-435 609 0 Fax: +49-30-435 609 10 [email protected]

Leybold Vacuum GmbHSales Area South/SouthwestBranch office MunicKarl-Hammerschmidt-Strasse 38D-85609 Aschheim/DornachPhone: +49-89-357 33 90 Fax: +49-89-357 33 933 [email protected]@leybold.com

Leybold Vacuum GmbHSales Area WestBranch office CologneEmil-Hoffmann-Straße 43D-50996 Cologne-SuerthPhone: +49-221-347 1270 Fax: +49-221-347 1291 [email protected]

Leybold Vacuum GmbHService CenterEmil-Hoffmann-Straße 43D-50996 Cologne-SuerthPhone: +49-221-347 1439 Fax: +49-221-347 1945 [email protected]

Leybold Vacuum GmbHMobile after sales serviceEmil-Hoffmann-Straße 43 D-50996 Cologne-SuerthPhone: +49-221-347 1765 Fax: +49-221-347 1944 [email protected]

Leybold Vacuum Dresden GmbHZur Wetterwarte 50, Haus 304D-01109 DresdenService: Phone: +49-351-88 55 00 Fax: +49-351-88 55 041 [email protected]

Japan

Leybold Vacuum Japan Co., Ltd.Head OfficeTobu A.K. Bldg. 4th Floor23-3, Shin-Yokohama 3-chomeKohoku-ku, Yokohama-shiKanagawa-ken 222-0033Sales:Phone: +81-45-4713330Fax: +81-45-4713323

Leybold Vacuum Japan Co., Ltd.Osaka Branch OfficeMURATA Bldg. 7F2-7-53, Nihi-MiyaharaYodogawa-ku Osaka-shi 532-0004Sales:Phone: +81-6-6393-5211Fax: +81-6-6393-5215

Leybold Vacuum Japan Co., Ltd.Tsukuba Technical S.C.Tsukuba Minami Daiichi Kogyo Danchi21, Kasumi-no-Sato, Ami-machi, Inashiki-gunIbaraki-ken, 300-0315Service:Phone: +81-298-89-2841Fax: +81-298-89-2838

Korea

Leybold Vacuum Korea Ltd.#761-4, Yulkeum-ri,SungHwan-eup, Cheonan-CityChoongchung-Namdo,330-807, KoreaSales:Phone: +82-41-580-4420Fax: +82-41-588-3737Service:Phone: +82-41-580-4415Fax: +82-41-588-3737

Singapore

Leybold Vacuum Singapore Pte Ltd.No.1, International Business Park,B1-20B, The SynergySingapore 609917Sales and Service:Phone: +65-66652910Fax: [email protected]

Taiwan

Leybold Vacuum Taiwan Ltd.No 416-1, Sec. 3Chung-Hsin Rd., Chu-TungHsin-Chu, Taiwan, R.O.C.Sales and Service:Phone: +886-3-5833988Fax: +886-3-5833999

Germany Europe Asia

America

HotlineSales: +49-221-347 1234Service: +49-221-347 [email protected]@leybold.com

LV_0

7325

_200

5

05

.05

Sales and Service Net Worldwide

Documents

TST S and D