Triggers

Targets

Experimental realisation

Metrologicalapplication ofbasic science& technology

Enablingscience &

technology

2005 2010 2015 2020

Dimensional metrology as enabling technology for long-term fundamental researchResearch into fundamental constants, basic physics and future space science missions are critically dependent on dimensional metrology at levels of accuracy far exceeding those available

Precision dilatometry & stability measurements@ <10-9 level

Enabling new determination of kB @ 10-6

Ultra stable materials and position metrology in cryogenic environments

Higher power, reduced waveband fs comb technology

Nano radian angle metrology

Enabling new definition of kg @ 2*10-8 level based on fundamental constants

Enabling progress of research into further fundamental constants and basic physics e.g.: G, h/m, (ST)EP…

Enabling space metrology and positioning capabilities @ 10-15

Existing procedures, instruments and light sources for precision interferometry & long-range metrology.

Micro/Nano thruster positioning capability

New ultra stable materials Improved temperature metrology

Prismatic ultra-stable reference artefacts

Extended range (> 100 mm) high accuracy µCMM

3D metrology on artefacts: - pressure piston/cylinder area: ur < 10 nm - sphere resonator < 1 ppm- diaphragm area U < 10-5

Specimen adapted interferometerPrecision velocity interferometer

Surface layer characterization

X-ray & opt. interferometry @ 3*10-9

High speed simultaneous fringe fractioning & counting on multi-

kg @ 1*10-8 kB @ 10-7

Improved instrumentation for dimensional measurements

kg @ 1*10-9

Dilatometry & stability @ <10-10 level

length interferometry at the pm level

Surface effects

Ultra stable structures for nano processing

Triggers

Targets

Experimentalrealisation

Metrologicalapplication ofbasic science& technology

Enablingscience &

technology

2005 2010 2015 2020

Dimensional metrology for advanced manufacturing technologiesCost effective sustainable manufacturing of innovative products with structures down to 10 µm and up to 10 m, facing requirements of increased complexity, normative requirements, higher measuring speed and reduced tolerances

Short range dimensionalmetrology 0.01 mm < L< 10 mm U < 0.05 µm

Probe-surface interaction including soft surfaces

Automatic uncertainty evaluation (virtual instruments)

3D-Segmentation and evaluation of large data files

Numerical artefacts – software datasets

Influences of environment (refractive index, temperature, vibrations, dust,…)

Existing procedures, sensor principles, ...

Dimensional metrology < 10 m in measuring room (U < 10-7) in production environment (U < 10-6)

Measuring instruments for short rangeunder industrial conditions

Advanced traceability methods for in-process metrology

Measuring instruments in labs for complex and freeform geometries

Next generation of sensors and measuring instrumentation(Computer Tomography , indoor-GPS, Laser tracker, Laser

interferometer, incremental scales, rangefinders/ADMS)

Multi-parametric results from high resolution point clouds

Measuring instruments for 10 m-range under industrial conditions

Artefacts for small objects or those with non-cooperative surfaces

U < 0.01 µm U < 0.005 µm

Fast and precise positioning (mechatronics, PZT motors,stick slip, DC, advanced servo controls

New materials, advanced computers and IT, ...

Research facilities for metrology in non-laboratory environment

Triggers

Targets

Experimental realisation

Metrologicalapplication ofbasic science& technology

Enablingscience &

technology

2005 2010 2015 2020

Long range dimensional metrologyResearch into large scale production, global monitoring and waste management depend critically on dimensional parameters being measured or controlled to levels of accuracy that are currently unachievable over longer ranges (L > 10 m up to several km)

Existing metrology for long range 1D/2D: Laser trackers, ADM, total stations, µGPS, ..

Precision total stations with up to 1 km range

Metrological class precision laser trackers

Long range calibrated terrestrial baselines

Long range free air refractometer

Large scale coordinate metrology test & comparison facility

10-7 1D accuracy over long range in air

Traceable verification of global mapping systems at 10-6

New light sources, e.g.:Higher power, reduced waveband fs comb technology

10-8 1D accuracy over long range in air

10-6 3D accuracy inlarge scale production

10-7 3D accuracy in large scale production

Precision 3D measuring instruments and sensors up to 100 m range

Advanced 3D measuring instruments up to 100 m

Multi-wavelength interferometry

Refractive index metrology over extended ranges

Advanced refractometer

Multi-wavelength ADM/ refractometry

High speed simultaneous fringe fractioning and counting on multi wavelengths

Triggers

Targets

Experimental realisation

Metrologicalapplication ofbasic science& technology

Enablingscience &

technology

2005 2010 2015 2020 2025

Dimensional metrology for micro-nano technologyEuropean micro- and nano-technology is reaching increasing levels of miniaturisation and encountering new issues of health, production feasibility, quality and efficiency; for control and manuf. on µm/nm-scale metrology is needed!

Traceable 2D(3D) metrology at sub-nm accuracy over sub-mm range

Traceable 2D(3D) metrology at (sub)-nm acc. over several 100 mm range

Nanoparticles: traceable counting, size, shape and distribution on 1 nm accuracy level

Multi probe 2D(3D) instrumentation over longer range

Improved Nano fabrication (top down & bottom up)

New sensors/probes

Traceable instrumentation for micro&nano-particles

Single probe 2D(3D) instrumentation with mm range

Nano force metrology

Instrumentation for multi-parametrical characterization of new functional nano-materials

Modelling of functional properties dependent on material and dimension

Existing high resolution microscopy, position measurement, probes, data evaluation and micro/nano-fabrication methods (top-down)

Correlation of local and global particle metrology methods

Improved & new high resolution microscopy methods

Cross calibration of sensors

Nanostructured standardsover several 100 mm range

2D(3D) positioning capabilities; self calibration

Stable materials/structures & design principles, vacuum bearing technology, vacuum thermal metrology

X-ray/optical interferometry, linear encoders

Nanoparticle standards

Probe surface interaction modelling

Nanostandards over sub-mm range

New technologies and materials (short wavelength lasers, nanotubes, …)