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Ronald LiptonCPAD 2019Dec. 10 2019
Tracking and Timing with Induced Current Detectors
12/10/2019 Ronald Lipton
Introduction
There has been increasing interest in fast timing as well as “intelligent” detector systems. I would like to present some ideas for alternate designs of such systems looking at how technology for silicon-based detectors might evolve. This is a talk about the future - next generation of collider experiments.
We focus on capability enabled by new technologies that provide small pixels with low capacitance and sophisticated processing• 3D integration of sensors and electronics• Monolithic active devices• Semiconductor substrate engineering
2
12/10/2019 Ronald Lipton
Some Basics - time resolution
• The rule of thumb for the time resolution of a system dominated by jitter is:
• slew rate (dV/dt) is related to the inverse amplifier rise time, CL is the load capacitance td and ta are the detector and amplifier rise times and gm is the input transistor transductance - related to input current, and A is a characteristic of the amplifier. • Fast timing -> large S/N, fast amp, small load capacitance• There are tradeoffs available
3
σ t ~σ noise∂V∂t
⎛⎝⎜
⎞⎠⎟ ~ tr
NoiseSignal
⎛⎝⎜
⎞⎠⎟
σ n2 =
CL2 4ktA( )gmta
Front end noise
σ t ~CL
gmta
ta2 + td
2
Signal
Jitter Time resolution
12/10/2019 Ronald Lipton
More Basics - Signal Development• Signal induced by moving charges
depends on work done by circuit. The charge induced on an electrode depends on the coupling between the moving charge and the electrode (Ramo’s theorem)• We usually work with simple parallel plate
systems• In a multi-electrode system the induced
current on an electrode depends on the velocity of the charge and the value of the effective “weighting” field• Weighting field is calculated with 1 V on
measuring elected, 0 V on others• There are fast transient induced currents
on neighbor electrodes that integrate to zero - can we use them?
4
i = −q!Ew ×
!v
Qs = i dt = q!Ew∫∫ d!x
Q1→2 = q(Vw2 −Vw1)
12/10/2019 Ronald Lipton
3D Integration and small pixels
Fermilab has been involved the development of 3D sensor/ASIC integration for almost a decade and have demonstrated (with industrial partners):• Hybrid bonding technology • Oxide bonding with imbedded metal
through silicon vias (TSV)• Bond pitch of 4 microns• First 3-tier electronics-sensor stack• Small pixels with ADC, TDC (24 microns)• Small TSV capacitance (~7 ff)• The noise in hybrid bonded VIPIC 3D
assembly is almost a factor of two lower than the equivalent conventionally bump bonded parts due to lower Cload
50"
50"
100"
150"
200"
250"
300"
350"
400"
450"
500"
25" 30" 35" 40" 45" 50" 55" 60" 65"
Coun
ts'
noise'(electrons)'
Unbonded"
Bump"bonded"
Fusion"Bonded"
.5mmsensor(BNL)
34micronhigh2-tierVICTRchip
12/10/2019 Ronald Lipton
Methodology
We explore simple systems with various pixel sizes, detector thickness and pulse shapes• Build a (Silvaco) TCAD (2D or 3D) detector
model• Inject a Qtot=4 fc pulse• Extract the capacitance and pulse shapes at
the electrodes• Inject the resulting pulse into a SPICE model
of a generic 65nm charge sensitive amplifier including noise
• Analyze the characteristics of the resulting output pulses
• For angled track studies I use simple op amp with defined bandwidth model with adjustable bandwidth
6
3D 9 pixel model
Pulses from “x-ray” at~100μ200μ thick detector
y=2E-18x2 +1E-16x+1E-15
0
5E-15
1E-14
1.5E-14
2E-14
2.5E-14
3E-14
0 20 40 60 80 100 120
200MicronThickDetector
Farads/micron
TCAD Simulation
Pixel Pitch (microns)Ca
paci
tanc
e (f
arad
s)
12/10/2019 Ronald Lipton
Simple Example - X-RaysSuppose an application requires fast timing on high energy x-rays• Usually we would like thin detectors for fast timing,
but thin detectors imply low efficiency - can we use induced currents to achieve time resolution in a thick detector?
7
InitialCurrent Spike
Central pixel
Corner neighbor 0 collected charge
Edge neighbor (diffusion collected charge)
12/10/2019 Ronald Lipton
Pulse Shapes - 200 micron detector Χ-ray 2D Simulation
8
2ns 2ns
2ns2ns
z=10
z=190z=100
Central Electrode
z=10z=100
z=190
Central = n
n+1
n+2
n+3
12/10/2019 Ronald Lipton
hEntries 25Mean 104.5Std Dev 0.0204
/ ndf 2χ 0.4421 / 2Constant 2.457± 9.179 Mean 0.0± 104.5 Sigma 0.00445± 0.02177
104 104.2 104.4 104.6 104.8 1050
2
4
6
8
10h
Entries 25Mean 104.5Std Dev 0.0204
/ ndf 2χ 0.4421 / 2Constant 2.457± 9.179 Mean 0.0± 104.5 Sigma 0.00445± 0.02177
Timing histogram
E1
X-Ray With Noise at 185/200 micron depth• Apply a constant threshold of E1~10 mV, E4~130 mV• Tabulate time at threshold crossing including noise• Edge pixel can provide a “start” time stamp if needed
9
Edge pixel
Edge pixel σ~ 30ps
Central pixelCentral pixel σ~ 22ps
730 mV
850 mV
720 mV10 ns
12/10/2019 Ronald Lipton
Example - MIP in a 50 micron Detector
10
hEntries 26Mean 102.3Std Dev 0.01593
/ ndf 2c 0.6285 / 1Constant 3.24± 12.34 Mean 0.0± 102.3 Sigma 0.00311± 0.01657
102 102.1 102.2 102.3 102.4 102.5 102.6 102.70
2
4
6
8
10
12
hEntries 26Mean 102.3Std Dev 0.01593
/ ndf 2c 0.6285 / 1Constant 3.24± 12.34 Mean 0.0± 102.3 Sigma 0.00311± 0.01657
Timing histogram
σ~16ps
σ~25 micron pitch, 50 microns thick 200 V, sensor potential distribution Pulse on central pixel
2ns
Amplifier output with noise, 20ff load
Threshold
12/10/2019 Ronald Lipton
Comments
The 20-30 ps resolution will be degraded in a real systemHowever:• All pixels with spacing small compared to depth will have similar signals ~ 16
pixels for a 25x200 micron sensor x 4 in (uncorrelated) time resolution • The central pixel will see a large signal within a few ns of the leading edge -
initial thresholds can be set low and signals latched only if a central pixel fires at a higher threshold
• The pattern of pixels will provide depth and slope information• Multiple thresholds or more sophisticated processing can give a time walk
correction• These results are for n-on-p with maximum field at the top. n-on-n sensors
have a maximum field at the bottom. The field profiles can be adjusted to suit the application by varying the applied bias
11
12/10/2019 Ronald Lipton
Pattern Recognition
Collider based experiments have to deal with increasingly complex events• HL LHC with ~200 interactions per
crossing• The CMS experiment is addressing this with stacked sensor arrays to
distinguish low from moderate momentum tracks• Can we do this in a single sensor?
• Muon collider experiments with huge decay backgrounds• Muon collider studies use timing - fall x 100 short• Backgrounds are from various absorber surfaces/angles• We can use the pattern of electrode signals to distinguish between
signal and background tracks signaturesTo get a feeling for this we use a 25 micron pitch electrode geometry in a ~300 micron thick sensor.
12
CMS “Pt module”
12/10/2019 Ronald Lipton
Charge Motion Visualization
13
.1 ns
2 ns1.5 ns
1.0 ns.5 ns
2.5 ns
electrons
holes
30 degree track, n on n, maximum field at bottom.
12/10/2019 Ronald Lipton
MIPs at various angles
14
0 Deg
30 Deg20 Deg
10 Deg
10ns
10ns10ns
10ns
Cur
rent
(Arb
. Uni
ts)
Cur
rent
(Arb
. Uni
ts)
Cur
rent
(Arb
. Uni
ts)
Cur
rent
(Arb
. Uni
ts)
Transient time. Transient time.
12/10/2019 Ronald Lipton
Time resolution and Pattern Recognition
15
E2
0.00E+00
2.00E-06
4.00E-06
6.00E-06
8.00E-06
1.00E-05
1.20E-05
1.40E-05
0.00E+00 2.00E-09 4.00E-09 6.00E-09 8.00E-09 1.00E-08 1.20E-08 1.40E-08
E4
1ns
Iin
2ns
0.00E+00
2.00E-07
4.00E-07
6.00E-07
8.00E-07
1.00E-06
1.20E-06
1.40E-06
1.60E-06
1.80E-06
2.00E-06
0.00E+00 2.00E-09 4.00E-09 6.00E-09 8.00E-09 1.00E-08 1.20E-08 1.40E-08
Electrode 6
Iin
2ns
1ns
Long drift• some collected charge• dominated by induced current• difficult to measure secondary peakMedium drift• Dominated by collected chargeShort drift• collected charge similar
to induced current• Induced and collected
signals merge
E4 E6
•
12/10/2019 Ronald Lipton
A look at angular resolution• To try to get a feeling for what time and pulse
height resolution is needed we look at 10 and 20 degree tracks
• 1 nanosecond rise time is assumed• Lowest threshold defines time resolution and
provides induced current t0
• Other thresholds provide time structure and shape of secondary peak
16
-1.00E-06
0.00E+00
1.00E-06
2.00E-06
3.00E-06
4.00E-06
5.00E-06
6.00E-06
0.00E+00 5.00E-09 1.00E-08 1.50E-08 2.00E-08
Sig
(Arb
Uni
ts)
Time (sec)
20 Deg TrackE2E3E4E5E6
-1.00E-06
0.00E+00
1.00E-06
2.00E-06
3.00E-06
4.00E-06
5.00E-06
6.00E-06
0.00E+00 5.00E-09 1.00E-08 1.50E-08 2.00E-08
Sign
al (A
rb U
nits
)
Time (Sec)
10 Degree TrackE2
E3
E4
E5
E6
0.00E+00
2.00E-07
4.00E-07
6.00E-07
8.00E-07
1.00E-06
0.00E+00 5.00E-09 1.00E-08 1.50E-08 2.00E-08
Sig
(Arb
Uni
ts)
Time (sec)
20 Degree TrackE2E3E4E5E6
ToT end Threshold
ToT start Threshold
12/10/2019 Ronald Lipton
Time over Threshold• This simple case seems to work, time stamps reflect pulse shape• Slope indicates difference in charge drift among electrodes• Clear cutoff in signal for 10 degree track• Consistent start times (particle impact at 1 ns)
17
• 300ps error bars to guide the eye
0
1E-09
2E-09
3E-09
4E-09
5E-09
6E-09
7E-09
8E-09
9E-09
-60 -40 -20 0 20 40 60
Tim
e (S
ec)
Electrode Position (microns)
Time over threshold20 Deg Tend20 Deg, Tstart10 Deg, Tstart10 Deg Tend
12/10/2019 Ronald Lipton
Comments
Patterns of hits on pixels in “thick” detectors can provide a wealth of information - but the devil is in the details• S/N and bandwidth are crucial• Information is in the first 10 ns• This means power • The more information about the waveforms the better• Time over Threshold (TOT) with multiple threshold points• Requires transresistance amplifier
• Simple diode arrays are more radiation hard than LGADs, but radiation will affect internal fields and charge collection
• We also need to process and transmit that information - this implies “intelligent” pixels where the information in a field of pixels can be processed and decisions made
18
σ t ~CL
gmta
ta2 + td
2
Signalf ~ gm gm ∼ Id
12/10/2019 Ronald Lipton
More Work (for someone …)
This work is very much at a conceptual stageDetails will need to be understood to validate the concept and understand it’s range of application
To Do: • Define an overall toy->serious algorithm• What is the angular resolution as a function of bandwidth?• How do Landau fluctuations affect the reconstruction?• What is the overall time resolution?• Implement a realistic transimpedance amplifier in 65 nm and access power
requirements• Re-acquire hybrid bonding technology for sensor/readout integration• Access optimal detector thickness and depletion fields
Build something
19
12/10/2019 Ronald Lipton
Prospects
Fast timing in small pixels and thin detectors - most technologies have been demonstrated• Thin sensors (8” wafers)• Time of arrival (demonstrated with LGADs)• fine pitch bonding (3D hybrid bonding)• Chip to wafer bonding (dead regions?)The use of induced currents• Small signal/noise, large bandwidth• Power consumption• Assembly geometry and size• Data processing - intelligent pixels to
select hits around a central core• Data bandwidth
Vendors - The basic hybrid bonding technology is now licensed to several foundries (inc MIT-LL, Sandia, IZM), used in cell phone cameras many
20
VICTR& VIP&VIP&
VIPIC& VIPIC&
12/10/2019 Ronald Lipton
Conclusions
I have discussed some possible applications of small pixels enabled by emerging technologies.• It is one way of addressing some of the extreme challenges of future
experiments (FCC, Muon Collider, EIC …)• Fast timing• Radiation hard• Complex event topologies • I have presented toy models without engineering detailTo do more, a specific application and real engineering is needed• What power is needed? Cooling mass? Support geometry• Amplifier/discriminator design• Design of the digital tiers• Area to be deployed? Coverage? Cost? - What Experiment?
21
12/10/2019 Ronald Lipton
Chip to Wafer
22
DBIbondingofROICs(VICTR,VIPIC,VIP)toBNLsensorwafer
ExposeTSVs,patternTopaluminum
Wafer-wafer3DBond
OxidebondHandlewafer
ExposesensorsideTSVs, patternDBIstructures
DBIbondROICchipstosensorwafer(RTpick+Place)
Grindandetchtoexposetopconnections
12/10/2019 Ronald Lipton
Integrator Circuit
23
12/10/2019 Ronald Lipton
Implementation
24
25µ
Digitaltierprocesses afieldofpixels
Analogelectronicstierwithdiscriminatorstimingandmemory
12/10/2019 Ronald Lipton
Time resolution of a thick detector
• We use the TCAD/SPICE simulation chain to model an x-ray in the thicker detector going into a 65nm charge sensitive amplifier
25
Electrode1– smallpulse, butfastriseDepositatZ=185– notescalesarenotequal
Electrode3– DepositatZ=25
Edge pixel peak at 25 mV, 2 ns 0 total charge collected
Central pixel peak at 1V, 12 ns
100ns110ns
12/10/2019 Ronald Lipton
Pixel Capacitance
A detector with low capacitance can provide excellent time resolution:
Before this improvement is realized other effects will dominate including charge deposition variations. Power considerations will limit front-end current which will reduce transistor transductance However with “spare” margin we can become more adventurous
26
y=2E-18x2 +1E-16x+1E-15
0
5E-15
1E-14
1.5E-14
2E-14
2.5E-14
3E-14
0 20 40 60 80 100 120
200MicronThickDetector
Farads/micron
σ t ,pixel
σ t ,LGAD
∼Cpixel
CLGAD
× 1GainLGAD
≥102 × 120∼ 5
σ t ∼1gm, gm ∼ Id
α(α ~ 1)
TCAD Simulation
TSV Test Structure
Pixel Pitch (microns)
Cap
acita
nce
(fara
ds)
12/10/2019 Ronald Lipton
Hybrid Bonding Vendors (2019)
27
Vendor Wafer Diam Wafer-Wafer Die-Wafer TSV
Sony -
NHanced 8” ✓ ✓ ~1 um?
Teledyne Dalsa 6”, 8” ✓ ~5 um
Sandia 6”->8” developing ✓ no
IZM 12” ✓ no ~5 um
Raytheon 8” ✓ -