4M Network of Excellence

TNO Industrial Technology

4M Network of Excellence Subtask 11.1bNon-silicon, low-cost physical sensors

Feb 18, 2005, TU Wien

4M Network of Excellence 2

Demonstrator TNO: Low-cost pressure sensor

• Micromachined pressure sensors • Commercially available• Typically fabricated in silicon high volume applications

because of high cost of production facilities

• Low cost pressure sensor based on materials and

processes commonly applied in microelectronics• First prototypes have been built and are being tested in the

actual application.• Initially intended for a military application, but expected to be

applicable in other fields as well.

Feb 18, 2005, TU Wien

4M Network of Excellence 3

Low cost pressure sensor prototype• Mounted on LTCC substrate with

standard metallisations (AgPd)

• Different sensor membrane materials:

LTCC, copper, stainless steel

• Standard interconnection techniques

(soldering)

• Built as an autonomous sensor with its

own interface and power electronics.

Protected from environment by Kovar

housing.