TIA-NMEMS Facility Operation and

Green Sensor Network

Ryutaro Maeda Research Center of

Ubiquitous MEMS and Micro Engineering

(UMEMSME), AIST

Contents

TIA (Tsukuba Innovation Arena)

Introduction

Facility & Management Policy-MNOIC establishment

Power Management

Application of Wireless Networked Sensing for Green and Safety

National project of Green sensor network

15companies, AIST, TIT, U-Tokyo, U-Shinshu

UMEMSME 3

Basic

Japanese Company

In the past

University

Japanese Company University

At present

Japanese Company University

Facility for prototyping for

High volume production

Application

Government research institutes

Government research institutes

TIA Provides Services to Industry

Government research institutes

TIA (Tsukuba Innovation Arena) 500 M US$ investment in 2009-2010

6 Core Research Domains

Power Electronics

Integrated R&D frame from SiC wafer , d evice

to power system

Nano - Material Safety

Integrative data center and research frame for nano - material safety.

Carbon Nanotubes

R&D framework of CNT mass

production and CNT composites for

wide applications.

Nano - Green

R&D framework for green innovation

driven by nanotechnology

N - MEMS High - value - added

MEMS and mass production

integrated N - MEMS

Nanoelectronics

・ Nano CMOS

・ Sillicon - photonics

・ Carbon - electronics

・ Backend device

・ New material

・ Advanced lithography(EUVL)

3 Core Infra - structure

Nanodevice Research Foundry

･ Prototype device (45 - 65nm CMOS and N-MEMS, etc.) fabrication and evaluation (φ200-300mm)

･ SiC power device fabrication and evaluation

Nanotech Open User Facilities

Open user research facilities in AIST

and NIMS ( nanocharacterization ,

nanoprocessing etc)

Networking School of Nanotechnology

Graduate school function through

cooperation of University of Tsukuba

and partnering universities .

● Green and Safety Management

● Established MNOIC for HV prototyping and LV Production

● Invite SMEs of Polishing, Electroplating, etc.

２G Existing 4 inch Line

筑波研究学園都市

2A ３F

New Investment: ３D (３５１㎡）8inch MEMS and 12 inch Integration ３F(６０㎡) Bonding and Testing, ２A(８４㎡）Evaluation ３B（１５４㎡）Green Testing

３D ３B

TIA-SCR TIA-N-MEMS

Facility Feature Detail

National Institute of Advanced Industrial Science and Technology（AIST） 6

6

AIST after the earthquake

Many apparatuses (not anchored) moved.

4-in MEMS line, labo room

EB wtiter: moved.

partly damaged.

RIE gas line: bent. Racks: moved.

caster lock didn't work.

Mar. 14 Mar. 14 Mar. 14

National Institute of Advanced Industrial Science and Technology（AIST） 7

7

CO2 monitoring system for 4-in facility

Wireless

Sensor terminals

Data servers

EPC meters

Water flowmeters

Gas flowmeters

Particle counters

Analog meters

(temp, humid, pres,..)

4-in foundry cleanroom Wireless (400MHz, 10mW)

LAN

LAN

(66)

(7)

(4)

(12)

(5)

(2)

• Introduced in 2010 by

Takahashi san

• Manifacturer: Omron

National Institute of Advanced Industrial Science and Technology（AIST） 8

8

Analysis of records (Aug. - Feb.)

0

10000

20000

30000

40000

50000

60000

70000

80000

90000

100000

Aug-10 Sep-10 Oct-10 Nov-10 Dec-10 Jan-11 Feb-11

Ele

ctri

c P

ow

er C

on

sum

ptio

n (k

Wh

)

Apparatuses

Air conditioning

Total EPC by month

Apparatuses

Air conditioner (AC)

90 MWh

(avg. 125 kw)

• Apparatuses: 30 MWh/month, constant

• AC: 30-60 MWh/month

• Total: 60-90 MWh/month (5~10% of AIST east)

10 MWh/month

= avg. 14 kW

National Institute of Advanced Industrial Science and Technology（AIST） 9

9

Analysis of records (Aug. - Feb.)

0

10000

20000

30000

40000

50000

60000

70000

Aug-10 Sep-10 Oct-10 Nov-10 Dec-10 Jan-11 Feb-11

Ele

ctri

c P

ow

er C

on

sum

ptio

n (k

Wh

) Hot water pump

Boiler

Chiller 2

Chiller 1

AHU controllers

AHU-3 (wet process)

AHU-2 (dry process)

AHU-1 (litho)

Outlet AHU

AC EPC by month

• AHU fans: 20 MWh/month, constant

• Cooling: 6-35 MWh/month, temperature dependent

• Heating (gas boiler): 4 MWh/month, constant

AHU fans

Cooling

Heating, humidity

AHU: Air Handling Unit

10 MWh/month

= avg. 14 kW

National Institute of Advanced Industrial Science and Technology（AIST） 10

10

Analysis of records (Aug. - Feb.)

Chiller (1+2) EPC vs outside temperature

0

10

20

30

40

50

60

70

-10 -5 0 5 10 15 20 25 30 35 40

Outside temperature (C)

Ele

ctri

c P

ow

er C

on

sum

ptio

n (k

W)

8/17/10

9/9/10

10/23/10

2/2/11

3 kW/C

• Linear to outside temp. above 20C.

• Slope ~3 kW/C

National Institute of Advanced Industrial Science and Technology（AIST） 11

11

Analysis of records (Aug. - Feb.)

Apparatus EPC by month

0

5000

10000

15000

20000

25000

30000

35000

Aug-10 Sep-10 Oct-10 Nov-10 Dec-10 Jan-11 Feb-11

Ele

ctri

c P

ow

er C

on

sum

ptio

n (k

Wh

)

Draft (develop)

Draft (acid, organic)

Water purifier

Spray coater

PSA (CVD)

Plasma CVD

Sputter#2

Sputter#1

SEM

RIE

DRIE STS#2

DRIE STS#1

Oxidation

Aligner

Baking furnace

Stepper

EB writer

Room light, sockets

Vacuum pump

PFC abatement

Compressor

• Total: 25-30 MWh/month, constant

• Several apparatuses of 3-8 MWh/month provide most of EPC (avg. 4-11 kW)

5 MWh/month

= avg. 7 kW

National Institute of Advanced Industrial Science and Technology（AIST） 12

12

Trials from Apr. to May

Chiller power reduction: temperature setting up

0

10

20

30

40

50

60

70

-10 -5 0 5 10 15 20 25 30 35 40

Outside temperature (C)

Ele

ctri

c P

ow

er C

on

sum

ptio

n (k

W)

8/17/10

9/9/10

10/23/10

2/2/11

5/10/11

5/11/10

5/12/11

5/13/11

5/16/11

5/17/11

Room temp. 23.0C

Room temp. 27.0C

• EPC reduction ~10 kW

• Too warm for human with clean suit => 26.0C

National Institute of Advanced Industrial Science and Technology（AIST） 13

Prototype of Wireless Power Sensor

Specifications -Sensing

Power : 0~1000 W

Temperature: -10℃～+65℃

-Wireless Communication

Frequency: 2404 MHz ~ 2420 MHz

Transmission Power: 1 mW

Data Communication: Packet-type

-Powering

Battery: 1.5 V, Button-type

(LR44, SR44, SR48, etc)

Life-time: 60 days (LR44, 0.5 sec sampling)

Clamp-on Type AC

Current Sensor

CTL-6-S32-8F-CL [1]

- Dimensions (mm): 18W x 25H x 18t

- Windng (Turn): 800

- Current Range (Recommended): 10 mA – 15 A

MCU

C8051F930 [2]

- Supply Voltage: 0.9 – 1.8 V (One-cell mode

operation)

- Built-in dc-dc converter with 1.8 – 3.3 V output

(65 mW max)

- Typical sleep mode current < 0.1 mA- 10-Bit Analog to Digital Converter

Transceiver IC

nRF24L01 [3]

- 2.4-2.5 GHz ISM band

- Minimum supply voltage: 1.9 V

- Supply current in TX mode @ 0dBm output

power: 11.3 mA- Supply current in Power Down mode: 900 nA

RF-IC

MCU

Tmep. Sensor

Average Power Consumption: 10 mW （10 sec sampling）

ULP

CREST

Example of Sensor Installation

Wireless Sensor Nodes

Single-phase AC (200V) Three-phase AC (200V)

National Institute of Advanced Industrial Science and Technology（AIST） 15

611.3 607.8

（09年） （10年）

610.1 621.1

（09年） （10年）

539.9 604

（09年） （10年）

550.6 596.3

（09年） （10年）

505.2 535.7

（09年） （10年）

577.3 578.3

（09年） （10年）

EPC reduction at Tokyo area CVS

◆Without GSN ◆With GSN

▲8％差

111.9%

▲8.1%差

9月度

▲8%差

108.3％

7月度

8月度

7月度

▲5.8%差

9月度 103.8%

106.0％ 100.2％

▲99.4％ 8月度

▲8.7%差 507.1 524.9

（09年） （10年）

103.5% 10月度

560.9 531.7

（09年） （10年）

10月度 94.8%

▲7.1 %差 514.8 472.4

(09年) (10年)

474.9 469.9 (09年) (10年)

98.9％ 91.8% 11月度 11月度

National Institute of Advanced Industrial Science and Technology（AIST） 16

Green sensor network

CVS

Energy saving by operation monitoring

likes to install a system of 10 sensor nodes +receiver less than 30 US$ (now 40 $) to 14,000 stores

Further cost reduction (Integration test, PKG)

Clean Room

On demand operation - Particle detection

Data Center

On demand operation – Thermal detection

National Institute of Advanced Industrial Science and Technology（AIST） 17

G-MEMS For Global

Monitoring of Environment and Management of

Society

Hetero Integrated MEMS

Power management

Particle control Health care

Bio sensing

Security

MEMS for Our Better Life

Internet Web

serve

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