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Biaxial CdTe/CaF 2 lms growth on amorphous surface W. Yuan a, , F. Tang a , H.-F. Li a , T. Parker a , N. LiCausi b , T.-M. Lu a , I. Bhat b , G.-C. Wang a , S. Lee c a Department of Physics, Applied Physics and Astronomy, Rensselaer Polytechnic Institute,110, 8th St., Troy, NY 12180, USA b Department of Electrical, Computer and Systems Engineering, Rensselaer Polytechnic Institute,110, 8th St., Troy, NY 12180, USA c US Army Armament Research, Development and Engineering Center, Benét Labs, Watervliet, NY 12189, USA abstract article info Article history: Received 6 January 2009 Received in revised form 17 April 2009 Accepted 21 April 2009 Available online 3 May 2009 Keywords: Cadmium telluride Surface morphology Interfaces Heterostructures Reection high-energy electron diffraction Transmission electron microscopy Metal organic chemical vapor deposition A continuous and highly biaxially textured CdTe lm was grown by metal organic chemical vapor deposition on an amorphous substrate using biaxial CaF 2 nanorods as a buffer layer. The interface between the CdTe lm and CaF 2 nanorods and the morphology of the CdTe lm were studied by transmission electron microscopy (TEM) and scanning electron microscopy. Both the TEM and X-ray pole gure analysis clearly reveal that the crystalline orientation of the continuous CdTe lm followed the {111}b121N biaxial texture of the CaF 2 nanorods. A high density of twin faults was observed in the CdTe lm. Furthermore, the near surface texture of the CdTe thin lm was investigated by reection high-energy electron diffraction (RHEED) and RHEED surface pole gure analysis. Twinning was also observed from the RHEED surface pole gure analysis. © 2009 Elsevier B.V. All rights reserved. 1. Introduction The CdTe thin lm has attracted intense interest due to its applications in solar-cell fabrication [13], infrared detectors [4,5], gamma and X-ray detectors [6,7]. The most popular techniques for growing high quality CdTe thin lms are molecular-beam epitaxy and metal-organic vapor phase epitaxy on large single crystal substrates [8,9]. For example CdTe(100) lms were grown on GaAs(100) substrates by molecular beam epitaxy [8]. To grow CdTe thin lms on amorphous substrates, techniques such as hot wall epitaxy and closed-spaced vapor sublimation on glass substrates have been investigated [1012]. CdTe(111) lms were grown on transparent conductive oxide coated glass with about 100150 nm CdS lm as a buffer layer. Typically the CdTe lms grown on glass substrates are polycrystalline or nanocrystalline with completely random orienta- tions parallel to the surface. Growth of single crystal lms on amorphous substrates instead of on single crystal substrates is in general not possible. However, it is possible to grow biaxially oriented lms such as Mg and MgO on amorphous substrates [1315]. The biaxial layer is not exactly single crystal but has strongly preferred crystallographic orientations in both the out-of-plane and in-plane directions [15]. In this sense, biaxial lms can be considered as quasi single crystals.Biaxial buffer layers have been used to grow high T c superconductor lms to achieve a high critical current [16]. It was suggested that high quality semiconductor solar devices with biaxial crystal orientation may be fabricated if biaxial buffer layers are used [17,18]. Continuous CaF 2 lms have shown excellent property as a buffer layer for the growth of semiconductors such as Si [1921]. In a previous report, we showed that CaF 2 nanorods can be grown on the amorphous native oxide of a Si using oblique angle deposition and had a biaxial orientation of {111}b121N [22]. We also showed that a continuous CaF 2 lm grown with a normal incidence ux onto the CaF 2 nanorods retained the biaxial texture of CaF 2 nanorods. In this work, we report an approach of growing biaxially textured CdTe thin lms on isolated CaF 2 nanorods on amorphous substrates. The highly biaxially orientated CaF 2 nanorods served as a buffer layer for the growth of CdTe thin lm using the vertical low-pressure metal organic chemical vapor deposition (MOCVD) technique. The morphology, structure, and interface epitaxy of the CdTe thin lm with respect to the biaxial CaF 2 nanorods buffered layer were characterized by scanning electron microscopy (SEM), X-ray pole gure analysis, and transmission electron microscopy (TEM). The near surface texture of samples was investigated by reection high-energy electron diffrac- tion (RHEED) and RHEED surface pole-gure analysis. 2. Experimental details 2.1. Growth of CaF 2 nanorods and CdTe lm The biaxially textured CaF 2 nanorods were grown on the amorphous native oxide of a Si(100) wafer using oblique angle vapor deposition in a thermal evaporator. The experimental details for CaF 2 deposition are Thin Solid Films 517 (2009) 66236628 Corresponding author. Tel.: +1518 276 8387; fax: +1518 276 6680. E-mail address: [email protected] (W. Yuan). 0040-6090/$ see front matter © 2009 Elsevier B.V. All rights reserved. doi:10.1016/j.tsf.2009.04.052 Contents lists available at ScienceDirect Thin Solid Films journal homepage: www.elsevier.com/locate/tsf

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Thin Solid Films 517 (2009) 6623–6628

Contents lists available at ScienceDirect

Thin Solid Films

j ourna l homepage: www.e lsev ie r.com/ locate / ts f

Biaxial CdTe/CaF2 films growth on amorphous surface

W. Yuan a,⁎, F. Tang a, H.-F. Li a, T. Parker a, N. LiCausi b, T.-M. Lu a, I. Bhat b, G.-C. Wang a, S. Lee c

a Department of Physics, Applied Physics and Astronomy, Rensselaer Polytechnic Institute, 110, 8th St., Troy, NY 12180, USAb Department of Electrical, Computer and Systems Engineering, Rensselaer Polytechnic Institute, 110, 8th St., Troy, NY 12180, USAc US Army Armament Research, Development and Engineering Center, Benét Labs, Watervliet, NY 12189, USA

⁎ Corresponding author. Tel.: +1 518 276 8387; fax: +E-mail address: [email protected] (W. Yuan).

0040-6090/$ – see front matter © 2009 Elsevier B.V. Adoi:10.1016/j.tsf.2009.04.052

a b s t r a c t

a r t i c l e i n f o

Article history:Received 6 January 2009Received in revised form 17 April 2009Accepted 21 April 2009Available online 3 May 2009

Keywords:Cadmium tellurideSurface morphologyInterfacesHeterostructuresReflection high-energy electron diffractionTransmission electron microscopyMetal organic chemical vapor deposition

A continuous and highly biaxially textured CdTe film was grown by metal organic chemical vapor depositionon an amorphous substrate using biaxial CaF2 nanorods as a buffer layer. The interface between the CdTe filmand CaF2 nanorods and the morphology of the CdTe film were studied by transmission electron microscopy(TEM) and scanning electron microscopy. Both the TEM and X-ray pole figure analysis clearly reveal that thecrystalline orientation of the continuous CdTe film followed the {111}b121N biaxial texture of the CaF2nanorods. A high density of twin faults was observed in the CdTe film. Furthermore, the near surface textureof the CdTe thin film was investigated by reflection high-energy electron diffraction (RHEED) and RHEEDsurface pole figure analysis. Twinning was also observed from the RHEED surface pole figure analysis.

© 2009 Elsevier B.V. All rights reserved.

1. Introduction

The CdTe thin film has attracted intense interest due to itsapplications in solar-cell fabrication [1–3], infrared detectors [4,5],gamma and X-ray detectors [6,7]. The most popular techniques forgrowing high quality CdTe thin films are molecular-beam epitaxy andmetal-organic vapor phase epitaxy on large single crystal substrates[8,9]. For example CdTe(100) films were grown on GaAs(100)substrates by molecular beam epitaxy [8]. To grow CdTe thin filmson amorphous substrates, techniques such as hot wall epitaxy andclosed-spaced vapor sublimation on glass substrates have beeninvestigated [10–12]. CdTe(111) films were grown on transparentconductive oxide coated glass with about 100–150 nm CdS film as abuffer layer. Typically the CdTe films grown on glass substrates arepolycrystalline or nanocrystalline with completely random orienta-tions parallel to the surface.

Growth of single crystal films on amorphous substrates instead ofon single crystal substrates is in general not possible. However, it ispossible to grow biaxially oriented films such as Mg and MgO onamorphous substrates [13–15]. The biaxial layer is not exactly singlecrystal but has strongly preferred crystallographic orientations in boththe out-of-plane and in-plane directions [15]. In this sense, biaxialfilms can be considered as “quasi single crystals.” Biaxial buffer layershave been used to grow high Tc superconductor films to achieve a highcritical current [16]. It was suggested that high quality semiconductor

1 518 276 6680.

ll rights reserved.

solar devices with biaxial crystal orientation may be fabricated ifbiaxial buffer layers are used [17,18].

Continuous CaF2 films have shown excellent property as a bufferlayer for the growth of semiconductors such as Si [19–21]. In aprevious report, we showed that CaF2 nanorods can be grown on theamorphous native oxide of a Si using oblique angle deposition and hada biaxial orientation of {111}b121N [22]. We also showed that acontinuous CaF2 film grown with a normal incidence flux onto theCaF2 nanorods retained the biaxial texture of CaF2 nanorods. In thiswork, we report an approach of growing biaxially textured CdTe thinfilms on isolated CaF2 nanorods on amorphous substrates. The highlybiaxially orientated CaF2 nanorods served as a buffer layer for thegrowth of CdTe thin film using the vertical low-pressure metal organicchemical vapor deposition (MOCVD) technique. The morphology,structure, and interface epitaxy of the CdTe thin film with respect tothe biaxial CaF2 nanorods buffered layer were characterized byscanning electron microscopy (SEM), X-ray pole figure analysis, andtransmission electron microscopy (TEM). The near surface texture ofsamples was investigated by reflection high-energy electron diffrac-tion (RHEED) and RHEED surface pole-figure analysis.

2. Experimental details

2.1. Growth of CaF2 nanorods and CdTe film

The biaxially textured CaF2 nanorodswere grown on the amorphousnative oxide of a Si(100)wafer using oblique angle vapor deposition in athermal evaporator. The experimental details for CaF2 deposition are

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Table 1Growth conditions.

Description Time(min)

Temperature(°C)

Pressure(Pa)

Precursor(molar fraction)(10−4)

Total H2

flow (slm)

DMCd DETe

Nucleationgrowth layer

10 425 6.7×103 3.7 9.8 2.58

Annealing 30 600 2.7×104 0 56.3 0.45Faster growthlayer

110 425 6.7×103 6.1 16.0 1.58

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described elsewhere [22]. The CaF2 nanorods of ~700 nm height fromthe QCM reading were deposited onto the substrate under an obliqueangle of ~55° with respect to the substrate normal. The deposition ratewas ~0.3 nm/s as indicated by a water cooled QCM (quartz crystalmicrobalance). The QCM reading was calibrated using films depositedunder the normal incidence deposition.

ACdTefilmof ~2 μmwasgrownon theCaF2nanorodsusing averticallow-pressure (6.7×103 Pa) MOCVD reactor. The growth conditions aresummarized inTable 1. The dimethylcadmiumwasused as theCd sourceand kept at 2 °C and a diethylteluridewas used as the Te source and keptat 16 °C, with hydrogen as the carrier gas. After loading the CaF2nanorods sample into the reactor, the chamber was pumped down to apressure of ~1.3×102 Pa and then itwas slowly broughtup to thegrowthpressure of 6.7×103 Pawith a hydrogen flow rate of 2.58 slm (standardliter per min), while the temperature was raised to 425 °C. The tem-perature of the susceptorwas stabilized at 425 °C for 30min before CdTefilm growth. After that, a nucleation layer of CdTewas grownon the CaF2nanorods for 10min at 425 °C. Then the samplewas annealed at a highertemperature (600 °C) for 30min under Te over-pressure. A thicker CdTelayer was then grown for 110 min at 425 °C.

2.2. Characterization of CaF2 nanorods and CdTe film

The morphology of CdTe thin film and CaF2 nanorods were imagedby SEM (Carl Zeiss Supra SEM 1550). The microstructure and texture

Fig. 1.Morphologies of oblique angle vapor deposited CaF2 nanorods on native oxide covered(a) SEM plane view and (b) cross section view of ~1 μm thick CaF2 nanorods. The CaF2 vap(d) cross section view of the MOCVD grown CdTe on CaF2 nanorods. Features such as crack,CaF2 nanorods was labeled in (d). CdTe crystals were incorporated in the gaps of CaF2 nano

as well as the interface between CdTe and CaF2 were studied byTEM (model JEOL 2010, 200 kV). The preferred crystallographicorientation (also called “texture”) in the sample after CdTe growthwas characterized by X-ray diffraction (Bruker D8 Discover with a2D area detector and a Cu tube (1 mm collimator and a graphitemonochrometer)).

For characterization of surface texture of the CdTe film, wecollected RHEED patterns and performed RHEED surface pole figureanalysis [14,23,24]. In the RHEED experiment, the base pressure of thechamber was ~4×10−6 Pa. The electron gunwas operated at 9 kV and0.2 mA and the incident angle of electron beam on the sample surfacewas adjusted to less than 1°. The CdTe sample was mounted on anultra high vacuum step motor with a step size of 1.8°. The substratewas rotated azimuthally with a step size of 1.8° and a total of 200RHEED patterns covering 360° were collected for the construction ofsurface pole figures. The exposure time for each image was 7 s and thetotal collection time was about 24 min.

3. Results and discussions

3.1. Morphology and texture of CdTe film

Fig. 1(a) and (b) is the plane view and the cross section SEMimages of CaF2 nanorods grown at an oblique angle of ~55° on theamorphous oxide of Si substrate, respectively. The morphology of theCaF2 nanorods grown at 55° incident angle is similar to that of the CaF2nanorods grown at incident angle of ~65° [22]. Faceted CaF2 nanorodswere obtained with sharp tips and roof-tile like top surfaces as shownin Fig. 1(a). The length of the facet facing the flux is ~100 nm. Thediameter of the nanorods at the apex is ~5 nm while its diameter atthe lowest point of the facet is ~45 nm. A smaller incident angle of~55° was used in the current experiment in order to obtain largerdiameter CaF2 nanorods with smaller gaps in between. The densernanorods with smaller gapsmay allow CdTe to form a continuous film.In Fig. 1(b), the height of the CaF2 nanorods is ~1 μm. This value islarger than the 700 nm from the QCM reading. The reason is that thereare gaps between the CaF2 nanorods while the QCM reading was

Si(100) substrate and metal organic chemical vapor deposited CdTe on CaF2 nanorods.or flux had an angle of ~55° with respect to the substrate normal. (c) Plane view andpin hole and step in the CdTe grains were marked in (c). The structure of CdTe film androds.

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6625W. Yuan et al. / Thin Solid Films 517 (2009) 6623–6628

calibrated by films deposited by normal incident deposition. As shownin Fig. 1(b), the nanorods grown at incident angle of ~55° are tilted offthe substrate normal and away from the flux, making the flux-receiving plane almost perpendicular to the incident flux direction.Our previous study of CaF2 nanorods grown at an oblique angle of~65° with respect to substrate normal showed that the oblique angledeposited CaF2 nanorods exhibit {111}b121N biaxial texture [22]. TheCaF2 nanorods axes were nearly perpendicular to the amorphoussubstrate when the flux incident was at an angle of ~65° with respectto the substrate normal. The {111} plane was perpendicular to thenanorod axis while the b121N direction in the facet plane was nearlyperpendicular to the incident CaF2 flux direction [22]. Based on thesesimilar morphologies observed from ~55° and ~65° incident angleswe believe that these nanorods grown under ~55° exhibit the same{111}b121N texture as CaF2 nanorods grown at ~65° angle.

Fig. 1(c) and (d) shows the plane view and cross section SEMimages of the samples after the MOCVD growth of the CdTe film,respectively. In Fig. 1(c), submicron faceted grains with steps, pinholes and cracks were observed at the surface of CdTe film. The gapsbetween CaF2 nanorods allowed CdTematerial to grow into the gaps atthe initial stage of deposition. In later stage a continuous CdTe filmwasformed above the CaF2 nanorods as shown in Fig. 1(d).

Fig. 2(a) shows the CaF2 {111} pole figure. Only CaF2 (111) polewith very weak intensity was observed because CdTe film was grownon top of CaF2 nanorods. This (111) pole tilts away from the incidentflux labeled in Fig. 2(a) and is consistent with the tilted CaF2 [111] axis

Fig. 2. X-ray pole figure analysis showing the texture of CaF2 nanorods and CdTe film.(a) A {111} pole figure of CaF2 nanorods. (b) A {111} pole figure of CdTe film where theprimary and twin poles were labeled.

Fig. 3. TEM analysis of CdTe and CaF2 interface. (a) Bright field TEM cross sectionalimage, showing the CdTe grown on the CaF2 nanorods on oxide covered Si(100)substrate. The CaF2 nanorods pointed by inverse triangles appear brighter than CdTe.(b) High resolution TEM image of CdTe film around a CaF2 nanorod tip. Twin faults anddislocations were labeled by “T”s and “D”s, respectively. (c) The corresponding selectedarea electron diffraction pattern from the interface region of CaF2 nanorods and CdTefilm. The CaF2 diffraction spots indicated by the white triangles are weak. The two “T”slabeled indicate twin spots. White arrows indicate angular spread of the out-of-planeorientation of CdTe grains. (d) Calculated electron diffraction pattern of CdTe crystal.(e) Calculated electron diffraction pattern of CdTe crystal and its twin texture. Blue solidcircles represent the diffraction spots from CdTe while red open circles represent thediffraction spots from CdTe twin texture. Unit cell of CdTe is outlined by blue solid lines;Unit cell of CdTe twin texture is outlined by red dashed lines. (For interpretation of thereferences to colour in this figure legend, the reader is referred to theweb version of thisarticle.)

labeled in Fig. 1(b). Fig. 2(b) shows the CdTe {111} poles figure. Theoff-center CdTe (111) pole indicates that the CdTe film followed thebiaxial texture as shown by CaF2 {111} pole figure in Fig. 2(a). CdTe{111} twin poles with strong intensity were observed and labeled inFig. 2(b), indicating a high density of twin faults. Twin faults in theCdTe film were also observed by TEM and RHEED that will bedescribed later. The theoretical value of angular separation betweenadjacent b111N directions is 70.53°. The experiment measured angularseparation between two concentrated b111N pole positions, forexample the (111)¯ and (111) poles, shown in Fig. 2(b), is ~70.7°. Thisvalue is consistent with the theoretical value. Comparing Fig. 2(a)with Fig. 2(b), the CdTe film retains the biaxial nature of the CaF2nanorods, and the growth is nano-heteroepitaxial in nature, which arefurther supported by TEM analysis presented in the next section.

3.2. Microstructures of the CdTe film and CaF2 nanorods

We performed cross section TEM analysis to study the interfacebetween the CdTe film and the CaF2 nanorods. In the bright field cross

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Fig. 4. RHEED patterns from near surface region of CdTe at different azimuthal angles:(a) ϕ=0° (b) ϕ=80°, (c) ϕ=90°, where ϕ is the angle between the direction ofincident electron beam and the [101 ]̅ axis of CdTe film. When ϕ is 0°, the direction ofincident electron beam is perpendicular to the incident flux direction of CaF2. Intensityof some diffraction spots in (a) for example the (131) twin has a tail on the low take offangle side of the spot. Calculated RHEED pattern of CdTewith twin texture at (d) ϕ=0°,(e) ϕ=80° and (f) ϕ=90°. Blue solid circles are calculated diffraction spots from CdTeand open red circles are spots from the twin texture. (For interpretation of thereferences to colour in this figure legend, the reader is referred to theweb version of thisarticle.)

6626 W. Yuan et al. / Thin Solid Films 517 (2009) 6623–6628

section TEM image shown in Fig. 3(a), we labeled the Si substrate,silicon oxide, CaF2 nanorods and CdTe from the bottom up. Since theelectron mean free path is much longer in CaF2 than that in CdTe,the CaF2 appears brighter than CdTe with the same film thickness inthe TEM image as shown by the bright CaF2 tips in Fig. 3(a). Due to theincorporation of CdTe into the gaps between CaF2 nanorods, the CaF2nanorods structure is not well defined in Fig. 3(a) except for thenanorod tips marked by the inverse open triangles near the CdTe layer.In Fig. 3(a), the grain size in the first micron of CdTe film was a fewhundred nanometers and there was a high density of planar defects inthe CdTe grains: the grain boundaries occur when two grains meetwhile the twinning interfaces and stacking faults appear as parallellineswithin each grain shown in the TEM image. The parallel linewerealmost perpendicular to the rod axis of CaF2 because twin faults andstacking faults usually occur in the (111) plane of CdTe film; this wasfurther supported by TEM analysis and RHEED analysis presentedlater.

Fig. 3(b) shows a typical high resolution TEM image of CdTe filmaround the tip of a CaF2 nanorod, where a dashed curve was used tooutline the boundary of the CaF2 nanorod. The rounded boundary ofthe CaF2 nanorod tip was probably resulted from the annealing of thesample at 600 °C. Twin faults and dislocations were observed near theinterface between CdTe and CaF2; they were labeled by “T”s and “D”s,respectively. The twin faults often occur in epitaxial films, while largelattice mismatch between the epitaxial film and the substrateintroduces dislocations in the epilayer [25].

The lattice mismatch between CdTe and CaF2 is about 18.7%. Thislarge lattice mismatch will induce a large strain and consequentialdislocations at the interface. In Fig. 3(b), dislocations were formed atthe interface between CaF2 and CdTe layer, and they stoppedpropagating when the CdTe layer reached about 15 nm of thickness.The isolated tips of CaF2 may contribute to the relief of stress betweenCdTe and CaF2, since it was reported that if the islands formed (it is thesmall CdTe grain formed around the CaF2 tipwhen applied to our case)at the initial stage of growth arewidely separated, the stress caused bylatticemismatchmay be partially relieved before islands coalesce [25].It was also reported that the density of mismatch defects could besignificantly reduced if the substrate dimensions are reduced to thenanoscale [26,27].With isolated nanorod tips of CaF2, small stress-freeCdTe grains may form around the nanorod tips, and later these smallgrains merged into large columnar grains as shown in Fig. 3(a).

Fig. 3(c) shows the TEM diffraction pattern taken from the regionacross the interface of the CaF2 nanorods and CdTe film as shown inFig. 3(a). The diffraction spots from the CaF2 nanorods were labeled bywhite open triangles while the diffraction spots from the CdTe filmwere labeled by reciprocal lattice vectors (black arrows). The crystalorientations of CdTe phase in the real space were also labeled in Fig. 3(a) and (b). The diffraction patterns from the CdTe film and CaF2nanorods indicate that the CdTe film followed the crystal orientationand the biaxial texture of the CaF2 nanorods. A calculated b110Nelectron diffraction pattern of CdTe is shown in Fig. 3(d) to helpunderstand the diffraction pattern in Fig. 3(c). Also the calculateddiffraction pattern from CdTe twins is given in Fig. 3(e), where thediffraction spots from primary CdTe crystal are marked as blue solidcircles and the diffraction spots from CdTe twin are marked as redopen circles. The reciprocal unit cell of CdTe is outlined by blue solidlines and the reciprocal unit cell of CdTe twin with a [111] twin axis isoutlined by red dashed lines. Twinning in CdTe film was observedand the diffraction spots from the twin crystals are labeled by “T”s inFig. 3(c).

The direction of most twinning is along the axis direction of theCaF2 nanorods, which is parallel to the [111] direction as shown inFig. 3(b). Streaks in the diffraction image are mainly along the [111]direction, indicating that most planar defects occur in the (111) plane.This is consistent with the planar defects that mainly appear aslines perpendicular to the axis of CaF2 nanorods in Fig. 3(a). Many

diffraction spots with weak intensity were observed in Fig. 3(c). Someweak diffraction spots were from the CaF2 nanorods (white opentriangles) since CaF2 nanorods were wrapped by the CdTe crystals asshown in Figs. 1(d) and 3(b). Other weak diffraction spots may comefrom the CdTe crystals grown between the gaps of the CaF2 nanorods.In Fig. 3(c) diffraction spots are positioned along the Y-shapedbranches labeled by white arrows with an angular range of Y up toabout 15 degrees. This implies that the orientation of CdTe grainsat the interface has about 15 degrees out-of-plane dispersion. Thedifference in orientation among CdTe grains was also observed inFig. 3(a), where the parallel lines perpendicular to the [111] axis werenot exactly aligned in adjacent different grains.

3.3. Near surface structure of CdTe film

We used the short electron mean free path of electrons in RHEEDtransmission mode to probe the near surface texture. This allowed usto determine whether the near surface regime of the CdTe filmretained the biaxial texture of CaF2 nanorods.

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Fig. 5. (a) A plot of experimental intensity contour of {222} and {311} “composite” polefigures constructed from 200 RHEED patterns of CdTe film grown on CaF2 nanorods.(b) Calculated pole figure of {311}, {311} twin, {222} and {222} twin for CdTe crystal.(c) Superposition of calculated pole figures of {311}, {222}, and their correspondingtwins shown in (b).

6627W. Yuan et al. / Thin Solid Films 517 (2009) 6623–6628

3.3.1. RHEED patterns from CdTe filmFig. 4(a) shows the RHEED pattern when the incident electron

beam is along the [101]̅ axis of the CdTe film. We define ϕ as the anglebetween the incident electron beam and the [101]̅ axis of the CdTefilm. Fig. 4(b) and (c) shows the RHEED patterns of CdTe film taken atazimuthal angle ϕ=80° and ϕ=90°, respectively. When ϕ is 0°, thedirection of incident electron beam is perpendicular to the fluxdirection of CaF2 as shown in Fig. 4(a). In RHEED patterns, theshadowing edge is parallel to the surface of the CdTe film. The patternin Fig. 4(a) is not exactly perpendicular to the shadowing edge and isoff by about 15°, implying that the [111] direction of CdTe is off thesubstrate normal by about 15° in the regime near the surface. Since theincident electron beam and the [111] axis of CdTe are in the planenormal to the surface of CdTe film when ϕ is 90°, the RHEED patternshown in Fig. 4(c) is more symmetric.

Fig. 4(d)–(f) shows calculated RHEED patterns of the CdTe filmindicated by solid circles and its twin patterns indicated by opencircles at ϕ=0°, ϕ=80°, and ϕ=90°, respectively. We consider thetexture that follows the CaF2 {111}b121N texture as the primarytexture and the twin axis is along the [111] direction. However, whenwe compare the experimental RHEED patterns with the calculatedpatterns, most diffraction spots are from the twin texture of CdTe. Thereason why the twin texture dominated on the surface of CdTe filmneeds further investigation. The diffraction spot from the twin textureof (131) is labeled by (131)T in Fig. 4(a). The diffraction spots from theprimary texture may be too weak to be visible. Fig. 4(e) indicates thatthe diffraction spot of (113) shown in Fig. 4(b) is from the primarytexture of CdTe film, while diffraction spots of (220) and (022) arefrom the twin texture of the CdTe film. Fig. 4(f) shows a symmetricpattern consistent with the symmetric pattern observed in Fig. 4(c).

The diffraction spots in Fig. 4(a) have streaks or tails in some of thespots in the low take-off angle side of the diffraction spots. This onesided tail was also observed in InAs quantum dots that have facets ordome shapes and was explained as a result of the refraction effectunder glancing incidence of electron beam [28]. In our case the CdTefilm has a rough surface and is composed of crystals bound by facets.Steps are observed in the facets as shown in Fig. 1(c). In RHEED theelectron beam probes the highest surface features because of its shortmean free path. When the electron beam enters into a facet of ananoscale protruding part of the crystal (smaller than the electronmean free path and electrons can escape from the crystal withoutlosing energy), the inner potential of the crystal changes the refractedangle of the electron beam to a smaller angle toward the normal of thefacet face. If the refracted beam exits from the crystal through a facetwith a facet face angle (measured from the substrate normal) otherthan the angle of the facet where the electron beam enters from, theexit beam will deviate from the position of the Bragg diffraction andcontribute to the streak or tail in the lower take off angle side. Thedirection of this faint streak or tail is nearly perpendicular to thecorresponding facet face. Particularly, the tails in the [111] direction inthe RHEED pattern of the CdTe film suggested that the facetgenerating the refraction effect is mainly the (111) plane. The reasonwe observed a more obvious tail for the ϕ=0° case may be due to thefact that more facets face the incident electron beam grazingly at thisparticular azimuthal angle.

3.3.2. RHEED surface pole figure analysisThe traditional way to construct surface pole figures is to choose

one pole from one orientation relative to the sample. Our analysis ofRHEED surface pole figures from the 200 RHEED images measuredfrom the CdTe surface indicated that we had to use a “composite”surface pole figure. Fig. 5(a) shows the contour plot of a “composite”of experimental RHEED surface pole figures consisting of {311} and{222} poles and their corresponding twin poles. The flux was incidentfrom the left. There are two reasons why both {311} poles and {222}poles were presented in the “composite” RHEED pole figure. First, the

difference between the magnitudes of reciprocal lattice vectors of{311} and {222} is within 5% and {311} and {222} diffraction spots arealmost overlapped in the RHEED patterns. Second, as shown in Fig. 4

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6628 W. Yuan et al. / Thin Solid Films 517 (2009) 6623–6628

(a)–(c), some diffraction spots are broadened and have tails thatprevent a clear separation of poles. We did not analyze the {111} polefigure since the diffraction spots from {111} planes are very close to orblocked by the shadowing edge. Because of some spots being blockedby the shadowing edge, some poles will bemissing in the {111} surfacepole figure.

In order to understand the experimental RHEED surface pole figureshown in Fig. 5(a) in detail, we calculated individual pole figures of{311}, {311} twin poles, {222}, and {222} twin poles shown in Fig. 5(b).The labeled {311} poles, {311} twin poles are symmetric with respectto (222) pole shown in Fig. 5(c). This indicates that the twin axis isalong the [111] direction. A calculated “composite” RHEED surface polefigure that includes all four groups of poles is shown in Fig. 5(c). Whilecomparing the calculated pole figure in Fig. 5(c) to the experimentallyobserved pole figure in Fig. 5(a), we noticed that (131) pole wasmissing in the experimental pole figure shown in Fig. 5(a) due to itsweak intensity.

4. Conclusion

We report the characterization of surface and interface of the CdTethin film grown on the biaxial CaF2 nanorods. The CdTe film has a{111}b121N biaxial texture that almost followed the orientation andbiaxial texture of the CaF2 nanorods. Small CdTe grains first formedaround the CaF2 nanorod tips. Due to the isolated nanoscale tips, stresscaused by large lattice mismatch may be partially relieved before thesmall CdTe grains coalesce. These small grains later merged into largecolumnar grains. Planar defects were observed in the CdTe grains.

Acknowledgement

This work is supported in part by NSF no. 0506738. TP is supportedby the Department of Education GAANN fellowship. We would like tothank Dr. Churamani Gaire for the stimulating discussions.

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