Thermco Model 2400, 2600 & 2800 Furnaces

Characterised Processes:

• SiliconNitride(standard)

• SiliconNitride(lowstress)

•RampedTempPolysilicon

•UniformgrainPolysiliccon

•TEOS

•VLTO

•BPSG

•HightemperatureOxide(HTO)

•DryOxide

•WetOxide

•POCl3orBBr3

•Forminggasanneal

•H2anneal(with100%H2)

•Hightemperaturedrivein

•Alloyorlowtempanneal

•H2anneal(with100%H2)

ApplicationsThermco’sModel2400,2600and2800MiniDiffusionFurnacesaredesignedtoaccomodateuptofour-processchambersandusedforprocessingSemiconductor,PV,LED,NanoandMEMSsubstratesupto200mmindiameter.Thedifferencebetweenthemodelnumbersissimplythemaximumwafersizecapabilitywith2400having100mm,2600having150mmand2800having200mm.ThefurnacemainframeiscompatibletoThermco2000seriesminiloadstationsandsourcecabinetswhilsttheconstructionisthesamehighqualityasourfullsizeproductionsystems.Thesystemsofferareducedfootprintandsmallerloadsize,idealforextracapacityorR&Dapplications.

Control SystemThefurnaceiscontrolledbytheindustryleadingThermcoTMXcontroller,recognisedasoneofthemostflexibleandreliablefurnacecontrolsystemsavailablewithaninstalledbaseofthousandsofunits.TheTMXPCcontrollercombinesthetriedandtrustedrecipeandsystemcontrolformatsofearliergenerationTMXproductsthatcustomerslikedbutwithnewupdatedandveryreliablePCbasedhardwareandimprovedgraphicfunctions.ThesystemcomprisesoneMUXcomputerforrecipegenerationandstatusoverviewandonecontrolcomputerpertube.

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Model 2400, 2600& 2800 Mini Furnaces

Physical DescriptionMaterials and constructionThefurnacemainframeisconstructedofweldedandformedcoldrolledsteel,paintedwithindustrialgradewaterbaseenamelpaint.Partsandcomponentsthataresubjectedtoelevatedtemperaturesareconstructedfromstainlesssteel.Arefractoryblanketmaterialwithareflectivecoatingisusedontheinsidewallsofthestructuretoreducethetemperatureoftheouterskintoambientlevels.

TypeRorTypeBspikethermocouplesareusedtosensetheelementtemperatureandfeedthesignalbacktothetemperaturecontrolsystem.Specialclampbracketsaredesignedtoholdthethermocou-plesintheproperlocationandsealthethermocoupleholeinthecanister.Specialdust-stopcollarsandendplatesareusedtoachieveathermalsealbetweentheprocesstubeandthevestibuleendblocksateachendofthecanister.

Eachtubelevelwillincludea12inchx12inchroundorsquarestainlesssteel,exhaustedscavengerboxattheloadendofthefurnace.Thescavengerboxhascontinuouslyweldedseamsandispassivatedtoreducesusceptibilitytocorrosion.Thescavengerboxwillbeconnectedtoanindividuallyexhaustedplenum.Eachplenumwillincludeanadjustabledamperanddifferentialpressuregaugeforadjustingandreadingscavengerexhaustpressure.

Overall Dimensions* Furnace Loadstation SourceCabinet

L1650mm L1650mm L1403mmD737/1169/1469mm(24/26/28) D980mm D914mmH2279mm(2404) H1943mm(2404) H2259mm(2404)H2650mm(2604) H2349mm(2604) H2554mm(2604)H2699mm(2804) H2699mm(2804) H2699mm(2804)

General Layout of Components

Thelowerframeareaofthefurnacecontainstheelementisolationtransformers,powercircuitbreakers,SCRfiringcircuits,heatsinkmodules,coolingfans,andelectricalpowercabling.Theupperchamberareahousestheelementcanistersandelementsupportstructurealongwiththepowercablesandthermocouplewireandjunctionterminals.Thewatercooledheatexchangerthatcoolsthefurnaceairbeforeitisreturnedtotheroomislocatedinthetopofthechamberarea.250CFMelectricalfantypeblowersarelocatedintheboxareaabovetheheatexchangerandprovidetheforcethatpullstheairthroughthefurnacefromthelowerareaupthroughthecanisterareaandoutthetopthroughtheheatexchanger.Compatible Modules

-LaminarFlowLoadStationModule,Model5000LS

-BoatLoaderMechanisms,ModelsD1andD2

-Gas/SourceCabinetModule,Model5000SC -TMXComputerControlModule,ModelTMXPCandPCMux *dimensionsmaychangeduringfinalengineeringortomeetcustomersspecification

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PC-MUX control system with SPC

Operations GUI

ThePC-MUXisafourthgenerationdesignofthewellknownTMXcontrollerandwasdevelopedbyThermcoSystemsinresponsetocustomerrequestsforaPCbasedplatformwithhighreliabilityandextendedfunctionality.Featuresinclude:

• HighreliabilityindustrialPChardware.• RAID5harddrivebackupprovidingsystem securityinaharddrivefailcondition.• GraphicalUserInterface(GUI)withsinglescreenmanagementofallmajorfunctions.• Extendedrecipefunctionality.• Datacollectionofallprocessvariablesand systemevents.• BackwardcompatibilitywithpreviousTMX generationsandrecipetransfercapability.• Sophisticatedstatisticalprocesscontrol(SPC) dataanalysisincluding:

» SPCcalculationofMean,Min/MaxandStd Deviations.» TrendChartsshowingrepeatabilityofprocess.» Controlchartswithautomaticalarm/holdif processoutofspec.» Overlay(envelope)controlchartwith automaticalarm/hold.» Paretoanalysisofsystemevents.» Histogramofsystemevents.

Captionifnecessary

Batch Data Plot

Control Chart (SPC)

Control Chart (SPC)

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ThermcoSystemsSpringGardensWashington,WestSussexRH203BS,UnitedKingdom

T. +44(0)1903891700F. +44(0)1903893888E. info@tetreon.comW. thermcosystems.com

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Peformance Specs

Operating Temperature Range:

50°Cto1200°Cstandard

Uniformheatedzonewithupto15.0litresperminutegasflow,dependingon wafer load size and shielding/bafflingatloadendofprocesstube.

Furnaceflattemperaturezoneforallthreemodels is upto12”(305mm)dependingonactualtemperature:

Thermco 2604 Diffusion Furnace

24/2600 series 750-1250°C 12”(305mm) 300-750°C 10”(254mm)2800 series 750-1200°C 12”(305mm) 300-750°C 10”(254mm)

Cold Start Ramp Rate:Averageramp-uprateis15°Cperminute.

Cool Down Rate:Furnacewillcoolfrom1200to900°Catalinearrateofatleast3°Cperminute.

Long Term Stability:Furnacetemperaturewillbestablewithin±0.25°Corbetter.

Recovery:Witha7,500gramload,typicalflatzonerecoveryat900°Coccurswithin18minutes.

Fast Response:Stepchangesof100°Ccanbemadewithnochangeincontrolsettingsandminimaleffectinuniformheatedzone

Tube Interaction:±0.1°Cinteractionbetweentubesbecauseofthecompensatedtemperaturethermocouplejunctionandauniquedirectconvectioncoolingsystem.

Facility RequirementsPower:440/460/480volts,3phase.60Hzor380/400/415volts,3phase,50Hz.Control:120volts,1phase,50/60Hzbycustomeroptionaltrans-former.Water:8GPMat60°F

Power System:Maximumreliabilitywithsecondaryoperated,zero-crossoverfiredSCRpowercontrollers.HighlyefficientdirectconvectionorforcedaircoolingofallSCRs.