44
Thermal Tuning Thermal Tuning Wanted and unwanted…

Thermal Tuning Wanted and unwanted…. Origin of Temperature Dependence Temperature coefficient of the excitonic bandgap –Dominant effect (-4.6 x 10 -4

Embed Size (px)

Citation preview

Page 1: Thermal Tuning Wanted and unwanted…. Origin of Temperature Dependence Temperature coefficient of the excitonic bandgap –Dominant effect (-4.6 x 10 -4

Thermal TuningThermal Tuning

Wanted and unwanted…

Page 2: Thermal Tuning Wanted and unwanted…. Origin of Temperature Dependence Temperature coefficient of the excitonic bandgap –Dominant effect (-4.6 x 10 -4

Origin of Temperature DependenceOrigin of Temperature Dependence

• Temperature coefficient of the excitonic bandgap– Dominant effect (-4.6 x 10-4 eV/ºC)– Electron-phonon interactions are main cause of

shrinking energy gap with increasing temperature

• Thermal expansion coefficient– Secondary effect (2.5 x 10-6/ºC)

• Temperature dependence of silicon refractive index depends on wavelength – Near-IR: dn/dT~ 2 x 10-4 K-1

– Visible: dn/dT ~ 4 x 10-4 K-1

Consider silicon first…

Page 3: Thermal Tuning Wanted and unwanted…. Origin of Temperature Dependence Temperature coefficient of the excitonic bandgap –Dominant effect (-4.6 x 10 -4

Temperature Dependence of Temperature Dependence of Various Materials in Near-IRVarious Materials in Near-IR

• dn/dT silica ~ 1 x 10-5 K-1

• dn/dT InP ~ 1 x 10-4 K-1

• dn/dT silicon ~ 1.83 x 10-4 K-1

• dn/dT GaAs ~ 2.6 x 10-4 K-1

• dn/dT polymer ~ 1 x 10-3 K-1

Page 4: Thermal Tuning Wanted and unwanted…. Origin of Temperature Dependence Temperature coefficient of the excitonic bandgap –Dominant effect (-4.6 x 10 -4

Thermo-Optic Effect depends on Q-factorThermo-Optic Effect depends on Q-factor

1530 1535 1540 1545 1550 1555

0

20

40

60

80

100

Tra

nsm

issi

on (

%)

Wavelength (nm)

Q = 1250

n = 0.01Si: 50ºCInP: 100ºCGaAs: 40ºCdB = 10.6(in near IR)

Page 5: Thermal Tuning Wanted and unwanted…. Origin of Temperature Dependence Temperature coefficient of the excitonic bandgap –Dominant effect (-4.6 x 10 -4

1530 1535 1540 1545 1550 1555

0

20

40

60

80

100

Tra

nsm

issi

on (

%)

Wavelength (nm)

Q = 2750

n = 0.01Si: 50ºCInP: 100ºCGaAs: 40ºCdB = 10.6dB = 17.3

Thermo-Optic Effect depends on Q-factorThermo-Optic Effect depends on Q-factor

Page 6: Thermal Tuning Wanted and unwanted…. Origin of Temperature Dependence Temperature coefficient of the excitonic bandgap –Dominant effect (-4.6 x 10 -4

The higher the Q-factor, the more sensitive the PBG device is to temperature variations

n = 0.001n = 0.01n = 0.1

100 1000 10000

0

10

20

30

40

50

60

dB a

tten

uatio

n

Q factor

Silicon500ºC50ºC5ºC

Thermo-Optic Effect depends on Q-factorThermo-Optic Effect depends on Q-factor

Page 7: Thermal Tuning Wanted and unwanted…. Origin of Temperature Dependence Temperature coefficient of the excitonic bandgap –Dominant effect (-4.6 x 10 -4

Let’s look at some examples

Page 8: Thermal Tuning Wanted and unwanted…. Origin of Temperature Dependence Temperature coefficient of the excitonic bandgap –Dominant effect (-4.6 x 10 -4

Si Photonic Crystal Waveguide MicrocavitySi Photonic Crystal Waveguide Microcavity

• Fabricated in SOI with 340nm Si core and 3000nm silica cladding

• Design = 1.53m (hole diameter = 250nm)

• Coupling to microcavity improved by size-graded holes along input and output channel WGs

H.M.H. Chong and R.M. De La Rue,

IEEE Photonics Technol. Lett. 16, 1528 (2004).

Page 9: Thermal Tuning Wanted and unwanted…. Origin of Temperature Dependence Temperature coefficient of the excitonic bandgap –Dominant effect (-4.6 x 10 -4

• Integrated microheater– PECVD silica deposited

on top of microcavity– Nichrome thin film

heater evaporated on top and connected to two probe pads with nichrome bottom layer and gold top layer

– Heater width = 300nm

• TE-pol light end fire coupled into WG using microscope objective

Si Photonic Crystal Waveguide MicrocavitySi Photonic Crystal Waveguide Microcavity

Page 10: Thermal Tuning Wanted and unwanted…. Origin of Temperature Dependence Temperature coefficient of the excitonic bandgap –Dominant effect (-4.6 x 10 -4

Si Photonic Crystal Waveguide MicrocavitySi Photonic Crystal Waveguide Microcavity

5nm shift, T=160ºC

~7 dB attenuationQ~500

Switching time expected to be

submillisecond

9.2 mW

Heat dissipation in silica core seems to be a problem

Page 11: Thermal Tuning Wanted and unwanted…. Origin of Temperature Dependence Temperature coefficient of the excitonic bandgap –Dominant effect (-4.6 x 10 -4

• AlGaAs/GaAs heterostructure grown by MBE with three layers of InAs quantum dots in core as internal light source– Hole spacing = 220nm

• InP/InGaAsP heterostructure grown by MOVPE with two GaInAsP quantum wells in core layer as light source– Hole spacing = 440nm

GaAs and InP Photonic Crystal MicrocavityGaAs and InP Photonic Crystal Microcavity

GaAs

InP

B. Wild et al., Appl. Phys. Lett. 84, 846 (2004)

Page 12: Thermal Tuning Wanted and unwanted…. Origin of Temperature Dependence Temperature coefficient of the excitonic bandgap –Dominant effect (-4.6 x 10 -4

• Samples mounted on Peltier stage using silver paste (range: 20-76°C)

• GaAs photonic crystal PL peak at 1000nm with Q~900 showed 4.5nm red shift for T=56°C

• Measured d/dT=8 x 10-2 nm/°C

• Calculated d/dT=9 x 10-2 nm/°C (based on dneff/dT=3.5 x 10-4 /°C)

GaAs and InP Photonic Crystal MicrocavityGaAs and InP Photonic Crystal Microcavity

Page 13: Thermal Tuning Wanted and unwanted…. Origin of Temperature Dependence Temperature coefficient of the excitonic bandgap –Dominant effect (-4.6 x 10 -4

• InP photonic crystal Fabry-Perot mode at 1564nm with Q~310 showed 5nm red shift for T=56°C

• Measured d/dT=9 x 10-2 nm/°C

• Calculated d/dT=10 x 10-2 nm/°C (based on dneff/dT=2 x 10-4 /°C)

GaAs and InP Photonic Crystal MicrocavityGaAs and InP Photonic Crystal Microcavity

Due to large thermal conductivity of III-V semiconductors, difficult to exploit temperature tuning

Page 14: Thermal Tuning Wanted and unwanted…. Origin of Temperature Dependence Temperature coefficient of the excitonic bandgap –Dominant effect (-4.6 x 10 -4

Photonic Crystal LaserPhotonic Crystal Laser

• 19 air holes removed from 2D triangular photonic crystal lattice in InGaAsP

• Undercut (V-shaped groove in SEM) to form membrane

• Optically pumped with 865nm VCSEL

• Multimode fiber collects light and connects to optical spectrum analyzer

P.T. Lee, et al., Appl. Phys. Lett. 81, 3311 (2002).

Page 15: Thermal Tuning Wanted and unwanted…. Origin of Temperature Dependence Temperature coefficient of the excitonic bandgap –Dominant effect (-4.6 x 10 -4

Photonic Crystal LaserPhotonic Crystal Laser

• Mounted on copper and fixed onto Peltier thermal electric cooler with heat sink

• Thermistor monitors temperature

• Emission at 1.55m, FWHM =200nm Q ~ 10!!!

Emission wavelength shifts ~ 0.5Å/K

1.5 nm

Page 16: Thermal Tuning Wanted and unwanted…. Origin of Temperature Dependence Temperature coefficient of the excitonic bandgap –Dominant effect (-4.6 x 10 -4

Photonic Crystal LaserPhotonic Crystal Laser

• Interesting to note that threshold pump power increases significantly as temperature increases

• Issue for practical applications

Page 17: Thermal Tuning Wanted and unwanted…. Origin of Temperature Dependence Temperature coefficient of the excitonic bandgap –Dominant effect (-4.6 x 10 -4

Thermal tuning is not always a desirable effect

Page 18: Thermal Tuning Wanted and unwanted…. Origin of Temperature Dependence Temperature coefficient of the excitonic bandgap –Dominant effect (-4.6 x 10 -4

Laser for WDM

Laser

Detector

Transmission medium

0

0.2

0.4

0.6

0.8

1

1.5 1.55 1.6

Wavelength (m)

Tra

nsm

issi

on

Page 19: Thermal Tuning Wanted and unwanted…. Origin of Temperature Dependence Temperature coefficient of the excitonic bandgap –Dominant effect (-4.6 x 10 -4

Laser for WDM

Laser

Detector

Transmission medium

0

0.2

0.4

0.6

0.8

1

1.5 1.55 1.6

Wavelength (m)

Tra

nsm

issi

on

Page 20: Thermal Tuning Wanted and unwanted…. Origin of Temperature Dependence Temperature coefficient of the excitonic bandgap –Dominant effect (-4.6 x 10 -4

Laser for WDM

Laser

Detector

Transmission medium

0

0.2

0.4

0.6

0.8

1

1.5 1.55 1.6

Wavelength (m)

Tra

nsm

issi

on

Page 21: Thermal Tuning Wanted and unwanted…. Origin of Temperature Dependence Temperature coefficient of the excitonic bandgap –Dominant effect (-4.6 x 10 -4

The higher the Q-factor, the more sensitive the PBG device is to temperature variations

Q factor

Q = 6000PC laser sensor

Channel drop filter

Q = 45,000Nanocavity in 2-D

PC slab

Applications:

n = 0.001n = 0.01n = 0.1

100 1000 10000

0

10

20

30

40

50

60

dB a

tten

uatio

nHow Significant is the Thermal Drift?

Page 22: Thermal Tuning Wanted and unwanted…. Origin of Temperature Dependence Temperature coefficient of the excitonic bandgap –Dominant effect (-4.6 x 10 -4

Porous silicon 1-D PBG microcavities

Page 23: Thermal Tuning Wanted and unwanted…. Origin of Temperature Dependence Temperature coefficient of the excitonic bandgap –Dominant effect (-4.6 x 10 -4

Achieving Temperature Insensitivity

Exploit mismatch of coefficient of thermal expansion between Si and oxide Coat silicon walls with oxide (thermal evaporation) Silicon ~ 2.5 x 10-6 K-1

Oxide ~ 0.5 x 10-6 K-1

PP

nT

T

nn

Reflectance shift due to refractive index change

+ +/-

How can a controlled pressure change be introduced?

Page 24: Thermal Tuning Wanted and unwanted…. Origin of Temperature Dependence Temperature coefficient of the excitonic bandgap –Dominant effect (-4.6 x 10 -4

Porous Silicon PBG Microcavity

Investigate temperature dependence of two different size scale porous silicon microcavities

Pore size ~ 20 nmSilicon walls ~ 5 nm

Pore size ~ 150 nmSilicon walls ~ 50 nm

Mesopores Macropores

Page 25: Thermal Tuning Wanted and unwanted…. Origin of Temperature Dependence Temperature coefficient of the excitonic bandgap –Dominant effect (-4.6 x 10 -4

Porous Silicon PBG Microcavity

Investigate temperature dependence of two different size scale porous silicon microcavities

Mesopores Macropores

Page 26: Thermal Tuning Wanted and unwanted…. Origin of Temperature Dependence Temperature coefficient of the excitonic bandgap –Dominant effect (-4.6 x 10 -4

1

1.5

2

2.5

3

3.5

0 20 40 60 80 100

Effective Medium Approximation

Estimates refractive index of porous silicon

M f(porosity, nSi, npore)

For a given wavelength, an increase in porosity results in a decrease in refractive index

Bruggeman approximation

Porosity (%)

Effe

ctiv

e in

de

x

Air in pores, = 1500 nm

Page 27: Thermal Tuning Wanted and unwanted…. Origin of Temperature Dependence Temperature coefficient of the excitonic bandgap –Dominant effect (-4.6 x 10 -4

Porous Silicon PBG Microcavity

Investigate temperature dependence of two different size scale porous silicon microcavities

Mesopores Macropores

HP = 75%, n ~ 1.44

LP = 50%, n ~ 2.16

HP = 80%, n ~ 1.34

LP = 70%, n ~ 1.60

Page 28: Thermal Tuning Wanted and unwanted…. Origin of Temperature Dependence Temperature coefficient of the excitonic bandgap –Dominant effect (-4.6 x 10 -4

Porous Silicon PBG Microcavity

Investigated temperature dependence of porous silicon microcavity (1-D PBG with defect)

1000 1400 18000

20

40

60

80

100

Re

flect

an

ce (

%)

Wavelength (nm)650 700 750 800 8500

10

20

30

40

Re

flect

an

ce (

%)

Wavelength (nm)

Mesopores Macropores

visiblenear IR

Page 29: Thermal Tuning Wanted and unwanted…. Origin of Temperature Dependence Temperature coefficient of the excitonic bandgap –Dominant effect (-4.6 x 10 -4

How Serious is the Problem?

Mesoporous silicon microcavity temperature dependence

dndT

silicon

cannot be neglected

~ 3 nm redshift for 100°C

30 40 50 60 70 80 90 100

0.0

0.5

1.0

1.5

2.0

2.5

3.0

Res

onan

ce r

edsh

ift (

nm)

Temperature (ºC)

experiment

simulation

Page 30: Thermal Tuning Wanted and unwanted…. Origin of Temperature Dependence Temperature coefficient of the excitonic bandgap –Dominant effect (-4.6 x 10 -4

1300 1320 1340 1360

70

75

80

85

90

95

100

Ref

lect

ance

(%

)

Wavelength (nm)

25ºC

Q ~ 1700

> 10 dB> 10 dB80ºC

~ 2.8 nm

How Serious is the Problem?Mesoporous silicon microcavity

Page 31: Thermal Tuning Wanted and unwanted…. Origin of Temperature Dependence Temperature coefficient of the excitonic bandgap –Dominant effect (-4.6 x 10 -4

How Serious is the Problem?

Mesoporous and macroporous silicon microcavity temperature dependence

30 40 50 60 70 80 90 100

Res

onan

ce s

hift

(meV

)

Temperature (ºC)

-7-6-5-4-3-2-101

Mesopores (near IR)dn/dT ~ 2 x 10-4 K-1

Macropores (visible)dn/dT ~ 4 x 10-4 K-1

SimulationExperiment

Experiment

Page 32: Thermal Tuning Wanted and unwanted…. Origin of Temperature Dependence Temperature coefficient of the excitonic bandgap –Dominant effect (-4.6 x 10 -4

Surface Treatment

Outer layers of silicon rods converted to oxide by

annealing (300-1100°C) in O2

Higher temperatures during anneal lead to thicker oxides

Page 33: Thermal Tuning Wanted and unwanted…. Origin of Temperature Dependence Temperature coefficient of the excitonic bandgap –Dominant effect (-4.6 x 10 -4

“Passive” Oxidation-Induced ShiftResonance permanently shifts to shorter wavelengths

when silicon converted into silicon dioxide

1100 1200 1300 1400 1500

50

60

70

80

90

100

Ref

lect

ance

(%

)

Wavelength (nm)

Native oxide

400ºC

900ºC

Active shift

Page 34: Thermal Tuning Wanted and unwanted…. Origin of Temperature Dependence Temperature coefficient of the excitonic bandgap –Dominant effect (-4.6 x 10 -4

Experimental Setup for Active Tuning

Resistors = Heat Source

Thermistor = Temperature Measurement Tool

Al PSi

back front

Page 35: Thermal Tuning Wanted and unwanted…. Origin of Temperature Dependence Temperature coefficient of the excitonic bandgap –Dominant effect (-4.6 x 10 -4

Temperature Effect on ReflectanceO

xide thickness

20 30 40 50 60 70 80 90 100-0.002

-0.001

0.000

0.001

0.002

0.003

0.004 900ºC

400ºC

300ºC native oxide

Re

flect

an

ce s

hift

(e

V)

Temperature (ºC)

Mesoporous Silicon Microcavities

Note: oxidation time ~ 10 min

Page 36: Thermal Tuning Wanted and unwanted…. Origin of Temperature Dependence Temperature coefficient of the excitonic bandgap –Dominant effect (-4.6 x 10 -4

native oxide

Temperature Effect on ReflectanceO

xide thickness

20 40 60 80 100-0.008

-0.006

-0.004

-0.002

0.000

0.002

0.004

900ºC

Re

flect

an

ce s

hift

(e

V)

Temperature (ºC)

Macroporous Silicon Microcavities

1000ºC

1100ºC

Note: oxidation time ~ 10 min

Page 37: Thermal Tuning Wanted and unwanted…. Origin of Temperature Dependence Temperature coefficient of the excitonic bandgap –Dominant effect (-4.6 x 10 -4

Porous Silicon PBG Microcavity

Pore size ~ 20 nmSilicon walls ~ 5 nm

Pore size ~ 150 nmSilicon walls ~ 50 nm

Mesopores Macropores

Page 38: Thermal Tuning Wanted and unwanted…. Origin of Temperature Dependence Temperature coefficient of the excitonic bandgap –Dominant effect (-4.6 x 10 -4

Understanding Temperature Insensitivity

PP

nT

T

nn

Reflectance shift due to refractive index change

+ +/-

X-ray analysis to determine pressure change

Pressure Increase

Strain Increase

For silicon:dn/dP = -10-5 MPa-1

Page 39: Thermal Tuning Wanted and unwanted…. Origin of Temperature Dependence Temperature coefficient of the excitonic bandgap –Dominant effect (-4.6 x 10 -4

Unoxidized mesoporous silicon

microcavity

Increasing temperature

Decreasing strain(decreasing pressure)

34.78 34.82 34.86

0.0

0.5

1.0

(S)

85°C

45°C

25°C

Inte

nsity

(a.

u.)

(degrees)

(P)

X-ray Analysis of Strain

Page 40: Thermal Tuning Wanted and unwanted…. Origin of Temperature Dependence Temperature coefficient of the excitonic bandgap –Dominant effect (-4.6 x 10 -4

Temperature Effect on Strain

20 30 40 50 60 70 80 90-4

-2

0

2

4

6

8

10

a/a

) (x

10-4)

Temperature (°C)

Native oxide

PP

nT

T

nn

Mesoporous silicon microcavity

Page 41: Thermal Tuning Wanted and unwanted…. Origin of Temperature Dependence Temperature coefficient of the excitonic bandgap –Dominant effect (-4.6 x 10 -4

Inte

nsit

y (a

.u.)

degrees)

25C(P) (S)

34.80

0.0

0.3

0.6

40C

80C

34.75 34.85

X-ray Analysis of Strain

Slightly oxidized mesoporous silicon

microcavity

Increasing temperature

Increasing strain(increasing pressure)

Page 42: Thermal Tuning Wanted and unwanted…. Origin of Temperature Dependence Temperature coefficient of the excitonic bandgap –Dominant effect (-4.6 x 10 -4

Temperature Effect on Strain

20 30 40 50 60 70 80 90-4

-2

0

2

4

6

8

10

a/a

) (x

10-4)

Temperature (°C)

Native oxide

Temperature insensitive

Slightly oxidized

More heavily oxidized

PP

nT

T

nn

Mesoporous silicon microcavity

Page 43: Thermal Tuning Wanted and unwanted…. Origin of Temperature Dependence Temperature coefficient of the excitonic bandgap –Dominant effect (-4.6 x 10 -4

Pressure & Temperature Effect on Refractive Index

Pressure effect compensates temperature effect on refractive index

400°C in O2 leads to temperature insensitive mesoporous silicon PBG

20 30 40 50 60 70 80 90-4

-2

0

2

4

6

8

10

a

/a)

(x10

-4)

Temperature (°C)

as-anodized

Temperature insensitive

Slightly oxidized

More heavily oxidized

20 40 60 80 100-2

-1

0

1

2

3

4

900ºC

400ºC

300ºC native oxide

Ref

lect

ance

shi

ft (

meV

)

Temperature (ºC)

Mesoporous silicon microcavity

1000°C in O2 leads to temperature insensitive macroporous silicon PBG

Page 44: Thermal Tuning Wanted and unwanted…. Origin of Temperature Dependence Temperature coefficient of the excitonic bandgap –Dominant effect (-4.6 x 10 -4

Temperature Insensitivity – A General Method

Extension to silicon-based 2-D and 3-D PBG structures Requires longer oxidation times at high

temperatures

Other materials systems Idea of using pressure as compensating

effect still valid Application of method may be slightly more

complicated