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Thermal TuningThermal Tuning
Wanted and unwanted…
Origin of Temperature DependenceOrigin of Temperature Dependence
• Temperature coefficient of the excitonic bandgap– Dominant effect (-4.6 x 10-4 eV/ºC)– Electron-phonon interactions are main cause of
shrinking energy gap with increasing temperature
• Thermal expansion coefficient– Secondary effect (2.5 x 10-6/ºC)
• Temperature dependence of silicon refractive index depends on wavelength – Near-IR: dn/dT~ 2 x 10-4 K-1
– Visible: dn/dT ~ 4 x 10-4 K-1
Consider silicon first…
Temperature Dependence of Temperature Dependence of Various Materials in Near-IRVarious Materials in Near-IR
• dn/dT silica ~ 1 x 10-5 K-1
• dn/dT InP ~ 1 x 10-4 K-1
• dn/dT silicon ~ 1.83 x 10-4 K-1
• dn/dT GaAs ~ 2.6 x 10-4 K-1
• dn/dT polymer ~ 1 x 10-3 K-1
Thermo-Optic Effect depends on Q-factorThermo-Optic Effect depends on Q-factor
1530 1535 1540 1545 1550 1555
0
20
40
60
80
100
Tra
nsm
issi
on (
%)
Wavelength (nm)
Q = 1250
n = 0.01Si: 50ºCInP: 100ºCGaAs: 40ºCdB = 10.6(in near IR)
1530 1535 1540 1545 1550 1555
0
20
40
60
80
100
Tra
nsm
issi
on (
%)
Wavelength (nm)
Q = 2750
n = 0.01Si: 50ºCInP: 100ºCGaAs: 40ºCdB = 10.6dB = 17.3
Thermo-Optic Effect depends on Q-factorThermo-Optic Effect depends on Q-factor
The higher the Q-factor, the more sensitive the PBG device is to temperature variations
n = 0.001n = 0.01n = 0.1
100 1000 10000
0
10
20
30
40
50
60
dB a
tten
uatio
n
Q factor
Silicon500ºC50ºC5ºC
Thermo-Optic Effect depends on Q-factorThermo-Optic Effect depends on Q-factor
Let’s look at some examples
Si Photonic Crystal Waveguide MicrocavitySi Photonic Crystal Waveguide Microcavity
• Fabricated in SOI with 340nm Si core and 3000nm silica cladding
• Design = 1.53m (hole diameter = 250nm)
• Coupling to microcavity improved by size-graded holes along input and output channel WGs
H.M.H. Chong and R.M. De La Rue,
IEEE Photonics Technol. Lett. 16, 1528 (2004).
• Integrated microheater– PECVD silica deposited
on top of microcavity– Nichrome thin film
heater evaporated on top and connected to two probe pads with nichrome bottom layer and gold top layer
– Heater width = 300nm
• TE-pol light end fire coupled into WG using microscope objective
Si Photonic Crystal Waveguide MicrocavitySi Photonic Crystal Waveguide Microcavity
Si Photonic Crystal Waveguide MicrocavitySi Photonic Crystal Waveguide Microcavity
5nm shift, T=160ºC
~7 dB attenuationQ~500
Switching time expected to be
submillisecond
9.2 mW
Heat dissipation in silica core seems to be a problem
• AlGaAs/GaAs heterostructure grown by MBE with three layers of InAs quantum dots in core as internal light source– Hole spacing = 220nm
• InP/InGaAsP heterostructure grown by MOVPE with two GaInAsP quantum wells in core layer as light source– Hole spacing = 440nm
GaAs and InP Photonic Crystal MicrocavityGaAs and InP Photonic Crystal Microcavity
GaAs
InP
B. Wild et al., Appl. Phys. Lett. 84, 846 (2004)
• Samples mounted on Peltier stage using silver paste (range: 20-76°C)
• GaAs photonic crystal PL peak at 1000nm with Q~900 showed 4.5nm red shift for T=56°C
• Measured d/dT=8 x 10-2 nm/°C
• Calculated d/dT=9 x 10-2 nm/°C (based on dneff/dT=3.5 x 10-4 /°C)
GaAs and InP Photonic Crystal MicrocavityGaAs and InP Photonic Crystal Microcavity
• InP photonic crystal Fabry-Perot mode at 1564nm with Q~310 showed 5nm red shift for T=56°C
• Measured d/dT=9 x 10-2 nm/°C
• Calculated d/dT=10 x 10-2 nm/°C (based on dneff/dT=2 x 10-4 /°C)
GaAs and InP Photonic Crystal MicrocavityGaAs and InP Photonic Crystal Microcavity
Due to large thermal conductivity of III-V semiconductors, difficult to exploit temperature tuning
Photonic Crystal LaserPhotonic Crystal Laser
• 19 air holes removed from 2D triangular photonic crystal lattice in InGaAsP
• Undercut (V-shaped groove in SEM) to form membrane
• Optically pumped with 865nm VCSEL
• Multimode fiber collects light and connects to optical spectrum analyzer
P.T. Lee, et al., Appl. Phys. Lett. 81, 3311 (2002).
Photonic Crystal LaserPhotonic Crystal Laser
• Mounted on copper and fixed onto Peltier thermal electric cooler with heat sink
• Thermistor monitors temperature
• Emission at 1.55m, FWHM =200nm Q ~ 10!!!
Emission wavelength shifts ~ 0.5Å/K
1.5 nm
Photonic Crystal LaserPhotonic Crystal Laser
• Interesting to note that threshold pump power increases significantly as temperature increases
• Issue for practical applications
Thermal tuning is not always a desirable effect
Laser for WDM
Laser
Detector
Transmission medium
0
0.2
0.4
0.6
0.8
1
1.5 1.55 1.6
Wavelength (m)
Tra
nsm
issi
on
Laser for WDM
Laser
Detector
Transmission medium
0
0.2
0.4
0.6
0.8
1
1.5 1.55 1.6
Wavelength (m)
Tra
nsm
issi
on
Laser for WDM
Laser
Detector
Transmission medium
0
0.2
0.4
0.6
0.8
1
1.5 1.55 1.6
Wavelength (m)
Tra
nsm
issi
on
The higher the Q-factor, the more sensitive the PBG device is to temperature variations
Q factor
Q = 6000PC laser sensor
Channel drop filter
Q = 45,000Nanocavity in 2-D
PC slab
Applications:
n = 0.001n = 0.01n = 0.1
100 1000 10000
0
10
20
30
40
50
60
dB a
tten
uatio
nHow Significant is the Thermal Drift?
Porous silicon 1-D PBG microcavities
Achieving Temperature Insensitivity
Exploit mismatch of coefficient of thermal expansion between Si and oxide Coat silicon walls with oxide (thermal evaporation) Silicon ~ 2.5 x 10-6 K-1
Oxide ~ 0.5 x 10-6 K-1
PP
nT
T
nn
Reflectance shift due to refractive index change
+ +/-
How can a controlled pressure change be introduced?
Porous Silicon PBG Microcavity
Investigate temperature dependence of two different size scale porous silicon microcavities
Pore size ~ 20 nmSilicon walls ~ 5 nm
Pore size ~ 150 nmSilicon walls ~ 50 nm
Mesopores Macropores
Porous Silicon PBG Microcavity
Investigate temperature dependence of two different size scale porous silicon microcavities
Mesopores Macropores
1
1.5
2
2.5
3
3.5
0 20 40 60 80 100
Effective Medium Approximation
Estimates refractive index of porous silicon
M f(porosity, nSi, npore)
For a given wavelength, an increase in porosity results in a decrease in refractive index
Bruggeman approximation
Porosity (%)
Effe
ctiv
e in
de
x
Air in pores, = 1500 nm
Porous Silicon PBG Microcavity
Investigate temperature dependence of two different size scale porous silicon microcavities
Mesopores Macropores
HP = 75%, n ~ 1.44
LP = 50%, n ~ 2.16
HP = 80%, n ~ 1.34
LP = 70%, n ~ 1.60
Porous Silicon PBG Microcavity
Investigated temperature dependence of porous silicon microcavity (1-D PBG with defect)
1000 1400 18000
20
40
60
80
100
Re
flect
an
ce (
%)
Wavelength (nm)650 700 750 800 8500
10
20
30
40
Re
flect
an
ce (
%)
Wavelength (nm)
Mesopores Macropores
visiblenear IR
How Serious is the Problem?
Mesoporous silicon microcavity temperature dependence
dndT
silicon
cannot be neglected
~ 3 nm redshift for 100°C
30 40 50 60 70 80 90 100
0.0
0.5
1.0
1.5
2.0
2.5
3.0
Res
onan
ce r
edsh
ift (
nm)
Temperature (ºC)
experiment
simulation
1300 1320 1340 1360
70
75
80
85
90
95
100
Ref
lect
ance
(%
)
Wavelength (nm)
25ºC
Q ~ 1700
> 10 dB> 10 dB80ºC
~ 2.8 nm
How Serious is the Problem?Mesoporous silicon microcavity
How Serious is the Problem?
Mesoporous and macroporous silicon microcavity temperature dependence
30 40 50 60 70 80 90 100
Res
onan
ce s
hift
(meV
)
Temperature (ºC)
-7-6-5-4-3-2-101
Mesopores (near IR)dn/dT ~ 2 x 10-4 K-1
Macropores (visible)dn/dT ~ 4 x 10-4 K-1
SimulationExperiment
Experiment
Surface Treatment
Outer layers of silicon rods converted to oxide by
annealing (300-1100°C) in O2
Higher temperatures during anneal lead to thicker oxides
“Passive” Oxidation-Induced ShiftResonance permanently shifts to shorter wavelengths
when silicon converted into silicon dioxide
1100 1200 1300 1400 1500
50
60
70
80
90
100
Ref
lect
ance
(%
)
Wavelength (nm)
Native oxide
400ºC
900ºC
Active shift
Experimental Setup for Active Tuning
Resistors = Heat Source
Thermistor = Temperature Measurement Tool
Al PSi
back front
Temperature Effect on ReflectanceO
xide thickness
20 30 40 50 60 70 80 90 100-0.002
-0.001
0.000
0.001
0.002
0.003
0.004 900ºC
400ºC
300ºC native oxide
Re
flect
an
ce s
hift
(e
V)
Temperature (ºC)
Mesoporous Silicon Microcavities
Note: oxidation time ~ 10 min
native oxide
Temperature Effect on ReflectanceO
xide thickness
20 40 60 80 100-0.008
-0.006
-0.004
-0.002
0.000
0.002
0.004
900ºC
Re
flect
an
ce s
hift
(e
V)
Temperature (ºC)
Macroporous Silicon Microcavities
1000ºC
1100ºC
Note: oxidation time ~ 10 min
Porous Silicon PBG Microcavity
Pore size ~ 20 nmSilicon walls ~ 5 nm
Pore size ~ 150 nmSilicon walls ~ 50 nm
Mesopores Macropores
Understanding Temperature Insensitivity
PP
nT
T
nn
Reflectance shift due to refractive index change
+ +/-
X-ray analysis to determine pressure change
Pressure Increase
Strain Increase
For silicon:dn/dP = -10-5 MPa-1
Unoxidized mesoporous silicon
microcavity
Increasing temperature
Decreasing strain(decreasing pressure)
34.78 34.82 34.86
0.0
0.5
1.0
(S)
85°C
45°C
25°C
Inte
nsity
(a.
u.)
(degrees)
(P)
X-ray Analysis of Strain
Temperature Effect on Strain
20 30 40 50 60 70 80 90-4
-2
0
2
4
6
8
10
a/a
) (x
10-4)
Temperature (°C)
Native oxide
PP
nT
T
nn
Mesoporous silicon microcavity
Inte
nsit
y (a
.u.)
degrees)
25C(P) (S)
34.80
0.0
0.3
0.6
40C
80C
34.75 34.85
X-ray Analysis of Strain
Slightly oxidized mesoporous silicon
microcavity
Increasing temperature
Increasing strain(increasing pressure)
Temperature Effect on Strain
20 30 40 50 60 70 80 90-4
-2
0
2
4
6
8
10
a/a
) (x
10-4)
Temperature (°C)
Native oxide
Temperature insensitive
Slightly oxidized
More heavily oxidized
PP
nT
T
nn
Mesoporous silicon microcavity
Pressure & Temperature Effect on Refractive Index
Pressure effect compensates temperature effect on refractive index
400°C in O2 leads to temperature insensitive mesoporous silicon PBG
20 30 40 50 60 70 80 90-4
-2
0
2
4
6
8
10
a
/a)
(x10
-4)
Temperature (°C)
as-anodized
Temperature insensitive
Slightly oxidized
More heavily oxidized
20 40 60 80 100-2
-1
0
1
2
3
4
900ºC
400ºC
300ºC native oxide
Ref
lect
ance
shi
ft (
meV
)
Temperature (ºC)
Mesoporous silicon microcavity
1000°C in O2 leads to temperature insensitive macroporous silicon PBG
Temperature Insensitivity – A General Method
Extension to silicon-based 2-D and 3-D PBG structures Requires longer oxidation times at high
temperatures
Other materials systems Idea of using pressure as compensating
effect still valid Application of method may be slightly more
complicated