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Final Project Presentation for "MEMS"
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Thermal Actuated Bidirectional Gear
BY
CHRIS LANEY
SATYABH MISHRA
Introduction
� MEMS Bidirectional Gear are robust in nature.
It uses Thermal Actuation.� It uses Thermal Actuation.
� Large output Force, Stictionless Motion and Small Area.
� Reliable over a long period of time, in Millions of Cycles.
Design
� Specifications
� Bi-directionality Of Gear
� Achieved by thermal actuators
� 3 Thermal Actuators Used to Actuate and rotate the Gears.
� Performance
� Frequency ~300Hz
� Optimized using square wave DC signal
� The DC Signal can be controlled using a PWM IC or using a Simple Vpulse Signal with (Ton/Ttotal) as the Duty Cycle.
SANDIA AutoCAD Design
3D View
SANDIA AutoCAD Design
2D Cut Viewshowing Tunnel
SANDIA 3D Model
SANDIA 3D Model
SANDIA 3D Model
Tunnel View
ANSYS Design Test
� Maximum Displacement=22.154 Micro Meter
ANSYS Design Test
� Maximum Von Mises Stress of 4399
ANSYS Animation
Advantages
� The Gear can be rotated in Clock and Anti-Clockwise Direction.
� Very Low Stiction
� Improved Displacement
� It uses Thermal Actuation
� Large Life Cycle and High Temperature Range.
Point of Concern
� Hard to Design and Fabricate on Chip.
� Difficult to Align all the Chevron Actuators together.
� Gear is Connected with the help of bar. High Frequency Cooling and Heating can lead to Connection Error.
� Change in Direction : The Gear and Actuator needs to Cool Down , and move to their Original Shape and Position.
References
� Sandia Report : Compliant Thermo Mechanical MEMS Actuator LDRD #52553
� R. Cragun and L.L. Howell, “Linear Thermo mechanical Microactuators,”Microelctromechanical Systems (MEMS), at the 1999 ASME International Mechanical Engineering Congress and Exposition, ASME International Mechanical Engineering Congress and Exposition, pp. 181-188, November, 199
QUESTIONS?