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The Plasma Physics and Radiation Technology master programme is managed by three groups organizing the four main themes:
o Equilibrium and Transport in Plasmas(Prof. M.C.M. van de Sanden)
o Elementary processes in Gasdischarges(Prof. G.M.W. Kroesen)
o Coherence and Quantum Technology (Prof. K.A.H. van Leeuwen)
The master track Plasma Physics and Radiation Technology
The track embraces subjects such as:
o the generation of plasma’s (including Nuclear Fusion),
o plasma-surface interaction (e.g. plasma deposition, plasma etching, etc.),
o plasma-accelerators,
o laser cooling techniques and atomic optics
o ion beam applications.
An important characteristic of the master track is the fundamental approach of the themes as well as the research into new applications of this broad field of research.
General outline of the Master programme
1st year60 ECTS
11 optional courses33 ECTS
Multidisciplinary project8 ECTS
ExternalAssignment19 ECTS
2nd year60 ECTS
Graduation project60 ECTS
optional courses: each student has to choose a well-balanced set of courses to a total of at least 33 ECTS points (about 11 courses);
interdisciplinary project of 8 ECTS points (6 weeks);external assignment project of 19 ECTS points (12
weeks) usually outside TU/e;
graduation project of 60 ECTS points (1 year).
3P230 Nuclear Fusion N.J. Lopes Cardozo
3P160 Advanced Plasma Physics M.C.M. van de Sanden
3N260 Physics of High Temperature Plasmas T.J. Schep
3P100 Molecular collisons H.C.W. Beijerinck
3P140 Lasers in physical experiments H.C.W. Beijerinck
3P190 Laser cooling: theory and experiment E.J.D. Vredenbregt
Numerical Simulation of Plasmas J.J.A.M. van der Mullen
3P200 Ellipsometry G.M.W. Kroesen
Gas discharges M. Haverlag
Kosmophyisics J.J.A.M. van der Mullen
3P110 Introduction to Plasma Physics R.A.H. Engeln
Plasma processing: science and applications W.M.M. Kessels
3P220 Molecuul-oppervlak-interactie en vacuümtechniek M.C.M. van de Sanden
3K100 Optics of charge particles J. Botman
3K110 Physics of Particle accelerators J. Botman
3K120 Nuclear Analysis techniques L. van Ijzendoorn
3K140 Radio-isotopes and ionizing radiation P. Mutsaerts
Conversion of electron energy to radiation M. van der Wiel
Master track courses:
The three research programmes :
Equilibrium and Transport in Plasmas (Prof. M.C.M. van de Sanden/Prof. D.C. Schram)Expanding plasmas and molecule formation Plasma surface interaction and atomistic simulationsPlasma synthesis of thin films, nanostructures, and devicesNuclear Fusion (Rijnhuizen)
Elementary processes in Plasmas (Prof. G.M.W. Kroesen)Non-equilibrium effectsPlasma modelling and Self-organisation in plasmasLighting, environmental applicationsBiomedical Applications
Coherence and Quantum Technology (Prof. K.A.H. van Leeuwen)Ultrahigh-gradient electron accelerator concepts Nanostructure fabrication by laser manipulationAtom optics/atom interferometry with ultracold atomsAtom traps: ultracold plasmas and BEC’s
Coherence & Quantum Technology (CQT)
Ultra-Cold Electron & Ion Beams:
• Laser cooling & trapping;• Femtosecond (10-15 s) laser physics;• Ultra-low temperature (0.001 - 10 kelvin) plasmas;• Femtosecond electron microscopy;• Sub-nanometer ion beam drilling & milling.
Edgar Vredenbregt, Jom Luiten, Peter Mutsaers
• Extreme states of matter: Ultra-cold & ultra-hot, plasmas & gases;• Laser Manipulation of atoms, electrons and ions;• Atom, electron & ion beams for femto-nano science & engineering.
Theory of Quantum Gases:
• Atoms trapped in an optical lattice;• Superfluidity of ultra-cold (nano-kelvin) Fermi and Bose gases;• Quantum Plasmas & Beams.
Servaas Kokkelmans
Plasma Laser Wakefield Acceleration:
• Tera-watt “light bullet” laser physics;• Extreme high-energy-density plasmas;• Giga-electron-volt acceleration in a few cm.
Seth Brussaard
Standinglight wave
Atom beam
Substrate
Nano Brush:
• Manipulation of atomic beams with light;• Atom lithography;• Deposition of magnetic nano-structures.
Ton van leeuwen
EPG
• Elementary Processes in Gas Discharges
• Staff:– Prof.dr.ir. G.M.W. Kroesen– Prof.dr. J.J.A.M. van der Mullen– Dr.ir. W.W. Stoffels– Dr.ir. E.M. van Veldhuizen– Prof.dr. U. Ebert– Prof.dr. M. Haverlag
Elementary Processes in Gas Discharges (EPG)
• Light and photons: Efficient lamps and EUV sources• Environmental technology: using plasmas for air / water cleaning• Biomedical technology: sterilisation; new medical treatments• New energy sources: hydrogen technology; dusty plasmas
Plasmas:Plasmas:Heaven and earthHeaven and earth
Plasmas in lab and industry (1)Plasmas in lab and industry (1)
Plasmas in lab and industry (2)Plasmas in lab and industry (2)
Prof. dr.ir. Richard van de Sanden Dr. Richard Engeln
Dr.ir. Erwin Kessels Dr. Adriana Creatore
(8 postdocs; 15 PhD students; 8-12 BSc/MSc students; 5 technicians)
Science & Technology of Plasma & Materials
Processinghttp://www.phys.tue.nl/pmp
Research activities Physics and chemistry of
plasma & materials processing
Micro- and nano-engineering of functional
materials
Advanced plasma and surface diagnostics
Plasma chemistryIon/radical densities/fluxesEnergy distribution fcts.Plasma surface interaction
Plasma enhanced CVD
Dry etchingPlasma-assisted ALDThin films & devices
EllipsometryNonlinear surface spectroscopyNovel surface diagnostics(Laser) based gas phase
diagnostics
PMT
H2
LN2
VUV mono
L W
BS
MM
plasma
W
S
WM
M
Nd:YAGTHG
Dye (C440)
BBO
M
M
220 nm
to pump
to pump
440 nm
PMT
NO cell
Research issues: Plasma-materials processing
Low temperatures
More freedom and larger parameter spaceo Precursors, Material
propertieso Plasma-assisted ALD
(conformal TiN diffusion barriers, tunnel barriers)
Reactive species created in gas phaseo Higher reactivity o Process independent of
substrateo High throughput/large area processing (e.g. solar cells)
o Compatibility with substrates/devices
o Organic and polymer devices (encapsulation of OLEDs)
rf plasma
Self-bias/Ion bombardment
o Manipulation of ion energy distribution function
o Novel synergistic effects
o Etching of high-aspectratio structures: ion/neutral synergism