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S u p e r i o r a c c u r a c y a n d r e l i a b i l i t y i n c o m p a c t d e s i g n s
The Pirani FamilyF r o m a t m o s p h e r e t o h i g h v a c u u m
w i t h o n e f a m i l y
Family Overview
32
psG550 FamilYpcG550 FamilYpirani or pirani & capacitancE comBination GauGE
The massive variety of options and the unique combination of a Pirani and a capacitance sensor cell, qualifi es as the most advanced vacuum instrument from atmosphere to high vacuum pressure measurement
• Single Pirani or Pirani Capacitance sensor option• Fully ceramic coated version• Replaceable plug and play replacement sensor unit
psG500 FamilYpirani stanDarD GauGE
The PSG500 series holds up the same outstanding performance like his bigger brother PxG55x. The compact design makes this gauge the most economical unit in the family.
• All stainless steel measuring cell • Streamlined design• Replaceable sensor unit
pGD400 FamilYpirani GauGE DisplaY
The PGD400 display unit in combination with a PSG5xx gauge series is a very attractive, low cost of ownership solution to measure and visualize vacuum pressure from atmosphere to the high vacuum range.
• Selectable measurement unit• One free adjustable set point• Low cost rack / bench top device
inFicon pirani FamilYaDVantaGEs at a GlancE
• Single Pirani or Pirani & Capacitance combination sensor
• Available with Tungsten, Nickel or fully ceramic coated sensor unit
• Gas-type independent above 10 mbar
• High accuracy and reproducibility at atmosphere
• Versatile of mounting orientation
• Low cost pressure read out display unit and gauge combination
In the measurement range, between 100mbar (75 Torr) and atmosphere where heat transfer devices (as Pirani and convection enhanced Pirani) lose sensitivity, and have a non linear gas-type-dependent behaviour the capacitance diaphragm technology supplies accurate, gas-type and fl ow independent measurement values up to 1500 mbar (1125 Torr).
pcG FamilY pirani FamilY
Accuracy
Accuracy at ATMAccuracy at ATM50%
ATM100 mbar
10-3 mbar
5-4 mbar
50%
50%
PIRANI15%
Accuracy
Accuracy at ATMAccuracy at ATM2.5%
ATM100 mbar
950 mbar
50%
2.5%5%
PIRANICDG15%
10-3 mbar
5-4 mbar
Accuracy
Accuracy at ATMAccuracy at ATM50%
ATM100 mbar
10-3 mbar
5-4 mbar
50%
50%
PIRANI15%
Accuracy
Accuracy at ATMAccuracy at ATM2.5%
ATM100 mbar
950 mbar
50%
2.5%5%
PIRANICDG15%
10-3 mbar
5-4 mbar
Gas-typeindependent
ArAir, O2, CO, N2
He
103
p [mbar]
peff [mbar]
102
102
100
10-1
10-2
10-3
10-410-410-3 10-2 10-1 100 101 102 103
Pirani sensor
Crossoverrange
Capacitivediaphragm
sensor
ArCO2
Freon 12
Xe
Kr
Water vapor
Air, O2, CO, N2
HeH2 Nep [mbar]
peff [mbar]
101
100
10-1
10-2
10-310-3 10-2 10-1 100 101
p [mbar] p [mbar]
psG550 FamilY
www.inficon.com [email protected] Due to our continuing program of product improvements, specifications are subject to change without notice.
tibb03e1 ©2011 INFICON
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