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The Basic Concept of the Gas Filter. 技術研討資料. 主講人 : 龍仁生. How do gas filters work ? Basic requirements of gas filter Filter material comparison Filter lifetime recommendation Case study How to choose a suitable filter ? Filter technology trend Summary. Content. - PowerPoint PPT Presentation
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創新需求需求再造
The Basic Concept of the Gas Filter
主講人 : 龍仁生
技術研討資料
創新需求需求再造
Content
How do gas filters work ? Basic requirements of gas filter Filter material comparison Filter lifetime recommendation Case study How to choose a suitable filter ? Filter technology trend Summary
Mykrolis 台灣分公司‧微電子事業處
創新需求需求再造
How do Gas Filters Work
Particle capture mechanismsImpactionInterceptionDiffusionElectrostatic
MPPS (Most Penetrating Particle Size) Nature of gas
Mykrolis 台灣分公司‧微電子事業處
創新需求需求再造
MILLIPORE Mykrolis 台灣分公司‧微電子事業處
How do Gas Filters Work
DiffusionInertialImpaction
GravitationalSettling Interception
FiberCross
Section
FluidStreamlines
ElectrostaticDeposition
創新需求需求再造
Mykrolis 台灣分公司‧微電子事業處
Theoretical Plot illustrating the Most Penetrating Particle
Size Concept
10
Capture byInterception
Capture byDiffusion
CombinesCapture byInterception
andDiffusion
MostPenetratingParticle Sizeat 50 cm sec.
10
10
10
10
10
10
10
10
10
10
10
10
10
.01 .02 .03 .06 .1 .2 .3Particle Diameter, m
-28
-26
-24
-22
-20
-18
-16
-14
-12
-10
-8
-6
-4
-2
Fra
ctio
nal P
enet
ratio
n
創新需求需求再造
MILLIPORE Mykrolis 台灣分公司‧微電子事業處
Particle Capture on Nickel Membrane
Particles
3m
創新需求需求再造
Mykrolis 台灣分公司‧微電子事業處
Log Reduction Value
LRV = Log10 (inlet Cp / outlet Cp)
Example:– Inlet Cp = 1 x 10^6 particles / ft3–Outlet Cp = 1 particle / ft3–LRV = 6–99.9999% efficient– fractional penetration = 1 x10^-6
創新需求需求再造
Basic requirements of gas filter
High retention- The ability to retain all particles,down to the smallest size.
Downstream cleanliness- The ability not to add anything ( particles or volatiles (moisture, others))to the gas stream.
High corrosion resistance- The ability to withstand in a corrosive environment.
Fast gas displacement- The ability to displace gas quickly.
Mykrolis 台灣分公司‧微電子事業處
創新需求需求再造
Filter Membrane Comparison
Materials
Of
Membrane
Shedding
Retention
(LRV) Outgasing
Gas
Displacement
Corrosion
Resistance
Nickel Excellent >10.8 Excellent Excellent Good
SUS316L Excellent 6.2 Good Excellent Fair
PTFE Good >10.8 Poor Poor N/A
Ceramic Fair 7.8 Fair Poor N/A
Mykrolis 台灣分公司‧微電子事業處
創新需求需求再造
Filters Lifetime Recommendation
• Specialty Gas (Cl2, HBr, SiH4, DCS…) < 2 Years
• Inert Gas (N2, H2, O2, He…)< 5 Years
Mykrolis 台灣分公司‧微電子事業處
創新需求需求再造• No.1 Upstream
SEM and EDS• No.2 Upstream
SEM and EDS
Mykrolis 台灣分公司‧微電子事業處
創新需求需求再造• No.1 downstream
SEM and EDS• No.2 downstream
SEM and EDS
Mykrolis 台灣分公司‧微電子事業處
創新需求需求再造• No.1 Housing SEM
and EDS (corroded)
• No.2 Housing SEM and EDS (corroded)
Mykrolis 台灣分公司‧微電子事業處
創新需求需求再造
How to Choose a Suitable Filter
• Compatibility (Corrosive / Inert)Corrosive: Ni / PTFE
Inert : Ni / PTFE / SS• Retention N
i / PTFE > SS• Gas flow rate in need • Considering Inlet pressure• Fitting (VCR, Swaglok, Butt weld, IGS(Surface
Mount))
Mykrolis 台灣分公司‧微電子事業處
創新需求需求再造
Filter Technology Trend
• Improve Process uptime & Wafer defects.
• Overall Process control: Particles, Moisture, Oxygen,Impurity…etc.
• Our best suggestion is both of Filter & Purifier can improve process uptime & overcome wafer defects.
Mykrolis 台灣分公司‧微電子事業處
創新需求需求再造
The Role of Purifier
• Purifier play a role of remove impurities (Oxygen, Moisture,CO2…etc)
• Moisture is one factor cause corrosion on component & piping to process chamber.(Especially, Corrosive gas)
• Moisture & Impurity can affect the process uptime & wafer defects.
Mykrolis 台灣分公司‧微電子事業處
創新需求需求再造
Summary Gas filter key filtrate mechanism : diffusion &
interception Cleanliness becomes most important All-Metal gas filters are the technology trend Routine filter change out is the key to high
quality particle performance Purifier can enhance gas filter performance
and lifetime
Mykrolis 台灣分公司‧微電子事業處