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Documents are only to be used and distributed completely and unchanged. It is strictly the users´ responsibility to check carefully the validity of this document with respect to his product. Manual-no.: 999226 // 07/07/2017 Technology for Vacuum Systems Pirani/Cold Cathode Vacuum Gauge Head MPT 100 MPT 200 Notes concerning the operation of the vacuum gauge heads MPT 100 / MPT 200 with the vacuum gauge DCP 3000

Technology for Vacuum Systems - VACUUBRAND · Technical data of vacuum gauge heads MPT 100 / MPT 200 Type MPT 100 Measuring principle combined vacuum gauge head comprising two components:

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Page 1: Technology for Vacuum Systems - VACUUBRAND · Technical data of vacuum gauge heads MPT 100 / MPT 200 Type MPT 100 Measuring principle combined vacuum gauge head comprising two components:

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Documents are only to be used and distributed completely and unchanged. It is strictly the users´ responsibility to check carefully the validity of this document with respect to his product. Manual-no.: 999226 // 07/07/2017

Technology for Vacuum Systems

Pirani/Cold Cathode Vacuum Gauge Head

MPT 100MPT 200

Notes concerning the operation of the vacuum gauge heads MPT 100 / MPT 200

with the vacuum gauge DCP 3000

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➨ DANGER indicates a hazardous situation which, if not avoided, will re-sult in death or serious injury.

☞ WARNING indicates a hazardous situation which, if not avoided, could result in death or serious injury.

• CAUTION indicates a hazardous situation which, if not avoided, could result in minor or moderate injury.

NOTICE is used to address practices not related to personal injury.

Danger for persons with cardiac pacemaker.

Warning! Magnetic field.

NOTICE

After sales service: Contact your local dealer or call +49 9342 808-5500.

Trademark index:VACUU•LAN® (US-Reg.No 3,704,401), VACUU•BUS®, VACUU•CONTROL®, Peltronic®, VARIO® (US-Reg.No 3,833,788), VACUUBRAND® (US-Reg.No 3,733,388) and also the shown company logos are registered trademarks of VACUUBRAND GMBH + CO KG in Germany and/or other countries.

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ContentsSafety information ......................................................................................................4

General information ............................................................................................................................4Intended use ......................................................................................................................................4Connecting the device .......................................................................................................................5Ambient conditions ............................................................................................................................5Operating conditions .........................................................................................................................5Safety during operation .....................................................................................................................6

Technical data .............................................................................................................7 Wetted materials of vacuum gauge heads MPT 100 / MPT 200 .......................................................7 Technical data of vacuum gauge heads MPT 100 / MPT 200 ...........................................................7

Use and operation ......................................................................................................9 Notes on operation ............................................................................................................................9 Connecting and starting operation ....................................................................................................9 Notes on operation ..........................................................................................................................10 Operating mode display via LED (only MPT 200) ........................................................................... 11 Connecting several pressure transducers ....................................................................................... 11 Configuration of a gauge head MPT 100 / MPT 200 ....................................................................... 11 Automatic switching between vacuum gauge head MPT 100 / MPT 200 and pressure transducer VSK 3000 .........................................................................................................................................12

Troubleshooting .......................................................................................................13Accessories ..............................................................................................................15Cleaning the MPT 100 / MPT 200 .............................................................................16

Important notes concerning bake-out ..............................................................................................16Calibration in the factory .........................................................................................17Readjustment of the vacuum gauge head .............................................................18Repair - Maintenance - Return - Calibration ...........................................................19Health and safety clearance form ...........................................................................20EC Declaration of Conformity..................................................................................21

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General information

To operate the vacuum gauge head MPT 100 / MPT 200, a vacuum gauge DCP 3000 is required!

If using a different controller, order the instructions for use of the MPT 100 / MPT 200 from VACUUBRAND.

Read this manual and the manual of the vacuum gauge DCP 3000 carefully be-fore installing or operating the equipment. Observe the instructions contained in these manuals.Remove all packing material from the packing box. Remove the product from its packing box and retain all packaging until the equipment is inspected and tested. Inspect the equipment promptly and carefully.If the equipment is damaged, notify the supplier and the carrier in writing within three days. Retain all packing material for inspection. State the item number of the product together with the order number and the supplier’s invoice number. Failure to check and give notice of damage will void any and all warranty claims for those deficiencies. Store the equipment in dry and non-corrosive conditions if the equipment is not used immediately.

☞ Do not use any damaged equipment.

Intended use

☞ Ensure that the individual components are only connected, combined and oper-ated according to their design and as indicated in the instructions for use. Use only original manufacturer’s spare parts and accessories. Otherwise the safety and performance of the equipment, as well as the electromagnetic compatibility of the equipment might be reduced.

The CE mark may be voided if not using original manufacturer’s spare parts.

☞ Comply with all notes on correct vacuum and electrical connections, see section ”Use and operation”.

☞ If installing the device into a cabinet or a housing check maximum temperature. Install an external automatic ventilation system if necessary. Ensure that the maximum permitted gas temperature at the sensor head (see ”Technical data”) is not exceeded.

MPT 100: The device is designed for ambient and gas temperatures at the vacuum gauge

head connection of +10°C to +40°C at continuous operation. MPT 200: The device is designed for ambient and gas temperatures at the vacuum gauge

head connection of +5°C to +60°C at continuous operation.

NOTICE

Safety information

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Use the equipment only as intended, that is, for measurement of vacuum in vessels designed for that purpose. Any other use will automatically invalidate all warranty and liability claims. Remain aware of safety and risks.

Connecting the device

☞ Do not permit any uncontrolled pressurizing (e.g., make sure that pipelines cannot become blocked) to avoid a risk of bursting!

• Comply with maximum permissible pressures at the gauge head, see section ”Technical data”.

• Connect the vacuum gauge head gas tight to the vacuum application.

• Consider possible reactions of the process media due to the heat generated by the product.

• When working with residues, aggressive or condensable media, install a gas washing bottle if necessary.

Remove the protective cover and keep. Connect the vacuum gauge head via small flange to the vacuum application. The vacuum gauge head may be mounted in any orientation, though an orientation is to be preferred in which condensate cannot flow towards the measuring chamber.

Switch off the DCP 3000 before connecting the MPT 100 / MPT 200 via VACUU•BUS cable to the vacuum gauge.

Allow the equipment to equilibrate to ambient temperature if you bring it from cold environment into a room prior to operation. Notice if there is water condensation on cold surfaces.Soiling and damage will affect the function of the vacuum gauge head.

Comply with all applicable and relevant safety requirements (regulations and guidelines). Implement the required actions and adopt suitable safety meas-ures.

Ambient conditions

• Adopt suitable measures in case of differences from recommended conditions, e.g., using the equipment outdoors, or in an atmosphere of conductive pollution or external condensation.

To the best of our knowledge the equipment is in compliance with the requirements of the applicable EC-directives and harmonized standards (see ”Declaration of Con-formity”) with regard to design, type and model. Directive EN 61010-1 gives in detail the conditions under which the equipment can be operated safely (see also IP de-gree of protection).

Operating conditions

➨ The devices are not suitable for applications which involve dangerous or ex-plosive gases or explosive or flammable mixtures.

NOTICE

NOTICE

NOTICE

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• Ensure that the materials of the vacuum gauge head’s wetted parts are compat-ible with the substances in the vacuum system, see section “Technical data”.

Safety during operation

➨ Adopt suitable measures to prevent the release of dangerous, toxic, explosive, corrosive, noxious or polluting fluids, vapours and gases.

☞ Prevent any part of the human body from coming in contact with the vacuum.

☞ Attention: Maximum pressure reading: 1*103 mbar. Pressure values above 1000 mbar can not be displayed. Danger of unnoticed overpressure! Risk of bursting!

☞ Attention! Magnetic field.

☞ Persons with active body aids (e.g. cardiac pacemakers) must keep a minimum safety distance of approx. 10 cm (4in) to the magnetic unit of the MPT 100 / MPT 200 (see also safety symbols on the vacuum gauge head).

Electronic equipment is never 100% fail-safe. This may lead to an ill-defined sta-tus of the equipment or of other connected devices. Provide appropriate protective measures to allow for the possibility of failure and malfunction. The protective meas-ures must also allow for the requirements of the respective application.

Maintenance and repair

The vacuum gauge head itself is maintenance-free.

A damp cloth may be used to clean the vacuum gauge head at the outside. Ensure that the MPT 100 / MPT 200 is first disconnected from the vacuum gauge DCP 3000.

➨ Note: The equipment may be contaminated with harmful or dangerous substanc-es, which have been processed during operation. Ensure that the equipment is completely decontaminated before maintenance commences. Take adequate precautions to protect people from the effects of dangerous substances if con-tamination has occurred. Use appropriate protective clothing, safety goggles and protective gloves.

The vacuum gauge head is not prepared for customer repair. Return the vacuum gauge head to the factory for repair.

Vacuum gauge head failures due to contamination are not covered by the warranty.

Returned products will not be repaired until the completed “Health and safety clear-ance form“ has been received. In order to comply with laws (occupational, health and safety regulations, safety at work law and regulations for environmental protection) components and measuring instruments can only be returned when certain procedures (see section ”Repair - Maintenance - Return - Calibration”) are followed.

NOTICE

NOTICE

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Technical data

Technical data of vacuum gauge heads MPT 100 / MPT 200

Type MPT 100

Measuring principlecombined vacuum gauge head comprising two

components: thermal conductivity according to Pi-rani and cold cathode tube; dependent on gas type

Measuring range (absolute) 1*103 mbar - 5*10-9 mbar (7.5*102 Torr - 3.7*10-9 Torr)

Repeatability(in percent of displayed value)

1*100 mbar - 1*10-7 mbar: (7.5*10-1 Torr - 7.5*10-8 Torr): ±5%

Measurement uncertainty (in percent of displayed valueat constant temperature)

1*102 mbar - 1*10-2 mbar: (7.5*101 Torr - 7.5*10-3 Torr):

1*10-2 mbar - 1*10-7 mbar: (7.5*10-3 Torr - 7.5*10-8 Torr):

±15%

±25%

Maximum permissible pressure at vacuum gauge head (absolute) 1.5 bar (1125 Torr)

Leak rate 1*10-9 mbar l/s

Measuring cycle 40 ms

Maximum permissible temperature of gaseous media at measurement connection

continuous operation: 40°C, for short periods (less than 5 minutes) up to 80°C

Maximum permissible temperature during bake-out

max. 180°C (without electronics and magnetic unit)

Ambient temperature range (operation) +10°C to +40°C

Ambient temperature range (storage) -10°C to +60°C

Permissible relative atmospheric moisture during operation (no condensation) 30% to 85%

Maximum permissible installation altitude above mean sea level 2000 m

Range of supply voltage(via VACUU•BUS cable) 24 VDC

Max. power consumption (supply) 2.5 W

Degree of protection according to IEC 529 IP 40

Weight 580 g

Dimensions L x W x H 144 mm x 85 mm x 53 mm

Vacuum connection small flange KF DN 25

Internal volume of measurement chamber 9.5 cm3

Cable length approx. 2.0 m

Wetted materials of vacuum gauge heads MPT 100 / MPT 200

Wetted materials tungsten, stainless steel, nickel, molybdenum, glass, ceramics (MPT 100)

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We reserve the right for technical modification without prior notice!

Type MPT 200

Measuring principlecombined vacuum gauge head comprising two

components: thermal conductivity according to Pi-rani and cold cathode tube; dependent on gas type

Measuring range (absolute) 1*103 mbar - 5*10-9 mbar (7.5*102 Torr - 3.7*10-9 Torr)

Repeatability(in percent of displayed value)

1*101 mbar - 1*10-2 mbar: (7.5*100 Torr - 7.5*10-3 Torr):

1*10-2 mbar - 1*10-8 mbar: (7.5*10-3 Torr - 7.5*10-9 Torr):

±2%

±7%

Measurement uncertainty (in percent of displayed valueat constant temperature)

1*103 mbar - 1*102 mbar: (7.5*102 Torr - 7.5*101 Torr):

1*102 mbar - 1*101 mbar: (7.5*101 Torr - 7.5*100 Torr):

1*101 mbar - 2*10-3 mbar: (7.5*100 Torr - 1.5*10-3 Torr):

2*10-3 mbar - 1*10-8 mbar: (1.5*10-3 Torr - 7.5*10-9 Torr):

±50%

±30%

±10%

±25%

Maximum permissible pressure at vacuum gauge head (absolute) 1.5 bar (1125 Torr)

Measuring cycle 10 ms

Maximum permissible temperature of gaseous media at measurement connection

continuous operation: 60°C, for short periods (less than 5 minutes) up to 80°C

Maximum permissible temperature during bake-out

max. 180°C (without electronics and magnetic unit)

Ambient temperature range (operation) +5°C to +60°C

Ambient temperature range (storage) -40°C to +65°C

Permissible relative atmospheric moisture during operation (no condensation) 30% to 85%

Maximum permissible installation altitude above mean sea level 2000 m

Range of supply voltage(via VACUU•BUS cable) 24 VDC

Max. power consumption (supply) 3 W

Degree of protection according to IEC 529 IP 54

Weight 555 g

Dimensions L x W x H 138 mm x 66 mm x 53 mm

Vacuum connection small flange KF DN 25

Cable length approx. 2.0 m

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Use and operation

Notes on operation

Gas Correction factor cold cathode Correction factor Pirani

Air / N2 - 1.00

CO2 0.74 0.89

H2 2.39 0.58

He 5.93 1.02

Ne 3.50 -

Ar 0.80 1.59

Kr 0.60 -

Xe 0.41 -

The vacuum gauge head MPT 100 / MPT 200 consists of two components: one cold cathode sensor and one Pirani sensor. The pressure measurement is dependent on the gas type. The vacuum gauge head is factory-set for operation with air / N2.

Use the following correction factors when working with other gases in the pressure range below 0.1 mbar:

Connecting and starting operation

Vacuum connection:➨ Remove the protective cover and keep. ➨ Connect the vacuum gauge head via small flange to the vacuum application.

☞ The vacuum gauge head may be mounted in any orientation, though an orienta-tion in which condensate cannot get into the measuring chamber is to be pre-ferred.

☞ Avoid contamination (oil/oil mist) of the measurement chamber when generating the vacuum with an oil-filled vacuum pump.

☞ Do not mount the vacuum gauge head directly at the oil-sealed pump. Use only vacuum lines with a sufficient diameter.

☞ Inside a vacuum system the vacuum might not be uniform (e.g., in case of evaporation). Therefore choose carefully the position where to connect the vacuum gauge head.

☞ Condensate and deposits in the measuring chamber falsify the measurement result. ☞ Soiling and damage affect the function of the vacuum gauge head.☞ If residues occur or when working with aggressive or condensable substances, install a gas washing

bottle in front of the vacuum gauge head MPT 100 / MPT 200.

Electrical connection / VACUU•BUSVoltage supply and readout of the vacuum gauge head via VACUU•BUS line by the vacuum gauge DCP 3000. Maximum cable length inside buildings: 30m. Extension cable VACUU•BUS 2m: order-no. 612552.

NOTICE

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Notes on operation

➨ Connect the cable to the vacuum gauge head‘s serial in-terface (MPT 100) or to its RS-485 socket (MPT 200) and to one of the VACUU•BUS sockets (1) at the rear of the vacuum gauge DCP 3000.

Attention: Do not cant when assembling or removing plug connections! Comply with correct positioning of the plug.

☞ Only connect/disconnect the cable to/from the vacuum gauge head when it is off circuit. Separate the DCP 3000 from mains.

➨ Switch the DCP 3000 on.

When switching on the DCP 3000, a connected vacuum gauge head MPT 100 / MTP 200 is automati-cally detected. The vacuum gauge head is displayed as active sensor in the status line of the vacuum gauge as MPT 1. The pressure reading is indicated in exponential notation over the whole measuring range.

Once all cables are connected, the vacuum gauge head MPT 100 / MPT 200 is ready to operate. Allow the gauge head a stabilization time of approx. 5-10 minutes to meet its specifications. Even in case of the vacuum gauge being switched off, the MPT 100 / MPT 200 stays ready for operation. To de-energize the vacuum gauge head, unplug either its VACUU•BUS line or the power supply of the vacuum gauge.

The interior of the vacuum gauge head is highly sensitive! Do not insert fingers or tools into the measuring chamber.

☞ The measured pressure is dependent on the gas type (see ”Notes on operation”).

Max. permitted pressure at the pressure transducer: 1.5 bar (absolute).☞ Attention: Maximum pressure reading: 1*103 mbar. Pressure values above 1000

mbar are not displayed. Risk of unnoticed overpressure. Risk of bursting!

NOTICE

Depending on technical version the connections of the VACUU•BUS cables are equipped with a nib.

When connecting the VACUU•BUS connections to the rear side of the vacuum gauge position the nib (1) of the VACUU•BUS connection in the notch (2) of the vacuum gauge connections.

1

2

(1)

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Connecting several pressure transducers

From software version 2.03 (DCP 3000) at most one MPT 100 or MPT 200 vacuum gauge head can be connected to the DCP 3000 vacuum gauge. From software version 2.22 (DCP 3000) up to four MPT 100 / MPT 200 vacuum gauge heads can be connected to the DCP 3000 vacuum gauge. However, it is possible to additionally connect several external pressure transducers VSK 3000 or VSP 3000 simultaneously to the DCP 3000. Only the readings of one pressure transducer are displayed at a time. ☞ The VACUU•BUS address of the active and displayed pressure transducer is shown in the upper left

corner (status line). The readings of all pressure transducers are shown in the ”Sensors” menu (see instructions for use of DCP 3000).

☞ Each pressure transducer requires an individual address (VSK 1 to VSK 4 / MPT 1 to MPT 4 (replac-ing gauge heads VSP 3000 if connected) / VSP 1 to VSP 4) to communicate with the DCP 3000.

☞ Factory set each pressure transducer is set to address “1”. To use several pressure transducers it is necessary to configure the transducer appropriately.

Configuration of a gauge head MPT 100 / MPT 200➨ Remove the rubber plug from the address switch at the gauge head.➨ Use a small screw driver to adjust the address switch to „1“, „2“, „3“ or „4“.☞ The other addresses are not configured for use with the vacuum gauge DCP 3000.➨ Insert rubber plug.

MPT 100 MPT 200

Operating mode display via LED (only MPT 200)

Status of LED Meaning

LED off no or insufficient power supply

LED green on valid measurement, sensor component for low pressure range is active

LED green flashing valid measurement, sensor component for high pressure range is active

LED yellow on unit function is O.K., but due to internal operations (e.g., during ad-justment) no valid measuring values will be displayed temporarily

measuring range: overrange / underrange

LED red on software or unit malfunction

LED green/yellow/red off (1s) one-off: LED test after reset

LED red/green flashing software update in progress

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Automatic switching between vacuum gauge head MPT 100 / MPT 200 and pres-sure transducer VSK 3000

If both a vacuum gauge head MPT 100 / MPT 200 and a pressure transducer VSK 3000 are connected to the DCP 3000 vacuum gauge, the DCP 3000 automatically displays the readings of the pressure transducer more suitable in the current pressure range.This requires both pressure transducers to be configured to corresponding VACUU•BUS addresses (i.e. VSK x and MPT x). If the two VACUU•BUS addresses do not correspond (i.e. VSK x and MPT y), an automatic switching between pressure transducers is not possible. It then is necessary to reconfigure the address of one pressure transducer in order to enable automatic switching (see section ”Configura-tion of a gauge head MPT 100 / MPT 200”, or section ”Reconfiguring the pressure transducer” in the instructions for use of the DCP 3000 vacuum gauge to reconfigure the VSK 3000).

Switchover points between vacuum gauge head MPT 100 / MPT 200 and pressure transducers VSK 3000:In case of decreasing pressure: Switching from VSK 3000 to MPT 100 / MPT 200 at a pressure of 1 mbar.In case of increasing pressure: Switching from MPT 100 / MPT 200 to VSK 3000 at a pressure of 5 mbar.

Switchover point of the vacuum gauge head MPT 100 / MPT 200The switchover range between Pirani sensor and cold cathode sensor is between 2.1 x 10-3 mbar and 1.0 x 10-3 mbar. Switching over is carried out automatically. In case of very fast pressure decrease it is possible that there is no pressure reading until the cold cathode starts measurement.

The active pressure transducer is shown in the status line. Furthermore, the reading of a VSK 3000 is always displayed in decimal notation, the reading of a MPT 100 / MPT 200 in exponential notation.

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Troubleshooting

Fault Possible cause Remedy❑ No display. ➨ Power supply (wall plug) not

plugged in, no power avail-able?

✔ Plug in power supply, con-nect cable of power supply (wall plug) to DCP 3000. Switch on device. Check mains fuse.

➨ DCP 3000 switched off? ✔ Switch device on.

➨ Power supply (wall plug) not connected to DCP 3000?

✔ Connect cable of power sup-ply (wall plug) to DCP 3000.

➨ Other causes (device defec-tive)?

✔ Contact local distributor.

❑ Malfunction of gauge head (warning triangle and display are flashing).

➨ MPT 100 / MPT 200 not con-nected?

✔ Plug the MPT 100 / MPT 200 into the socket of the DCP 3000.

➨ MPT 100 / MPT 200 or con-necting cable defective?

✔ Replace MPT 100 / MPT 200 or connecting cable if neces-sary.

➨ Cold cathode not started? ✔ Wait for starting of the cold cathode and allow for the stabilization time. Clean the gauge head, if necessary.

➨ Address of the MPT 100 / MPT 200 changed?

✔ Remove rubber plug from the address switch and set the address to «1». Insert rubber plug.

❑ The pressure reading is too high in the high vacuum range.

➨ Vacuum gauge head not cor-rectly adjusted, cold cathode does not start?

✔ Adjust vacuum gauge head MPT 100 / MPT 200 under vacuum.

➨ Vacuum gauge head contami-nated?

✔ Clean the gauge head.

➨ Type of gas not considered? ✔ Comply with correction fac-tors.

❑ The pressure reading is too low at atmospheric pressure.

➨ Vacuum gauge head not cor-rectly adjusted?

✔ Readjust vacuum gauge head correctly at atmospheric pressure.

➨ Vacuum gauge head contami-nated?

✔ Clean the gauge head.

➨ Deviation within the range of the measurement uncertainty?

✔ Use pressure transducer VSK 3000 (see accessories).

❑ Displayed pressure value is fluctuating.

➨ Pressure fluctuations due to the set-up of the vacuum system?

✔ No measuring fault. Check and change set-up of the vacuum system if necessary.

➨ Plug of the cable to the vacu-um gauge head not correctly plugged in?

✔ Plug the cable correctly into the socket at the rear of the DCP 3000.

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Fault Possible cause Remedy❑ Displayed pressure value

is fluctuating.➨ The MPT 100 / MPT 200 was

exposed to a significant pres-sure change?

✔ Allow for a stabilization time of 5-10 minutes.

➨ The vacuum gauge head MPT 100 / MPT 200 is still in the stabilization phase?

✔ Allow for a stabilization time of 5-10 minutes.

➨ Pressure measurement at a pressure above 50 mbar?

✔ Deviation within the range of the measurement uncertain-ty. Use pressure transducer VSK 3000 (see accessories).

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Accessories

Pressure transducer VSK 3000, capacitive, ceramic diaphragm sensor 1080-0.1 mbar ...........636657Vacuum gauge DCP 3000 (without wall plug power supply) ........................................................636155Wall plug power supply (for DCP 3000) .....................................................................................612090Connecting cable Sub-D / VACUU•BUS (for MPT 100) .............................................................636124Connecting cable RS-485 / VACUU•BUS (for MPT 200) ............................................................635618Venting valve VBM-B / KF 16 or hose nozzle 6/10mm, 24 V= ....................................................674217Y-type adapter VACUU•BUS ........................................................................................................636656Extension cable VACUU•BUS, 2m ..............................................................................................612552Wall bushing VACUU•BUS ..........................................................................................................636153Cable RS 232C, 9-pole, Sub-D .....................................................................................................637837Digital-I/O-Module VACUU•BUS (fault indicator) .........................................................................636228Analog-I/O-Module VACUU•BUS (analog voltage output of vacuum reading) ...................................................................................636229

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Cleaning the MPT 100 / MPT 200

NOTICE

The vacuum gauge DCP 3000 itself is maintenance free.In case of contamination inside the vacuum chamber (oil, particles, etc.) the vacuum gauge head may be contaminated as well. Contamination of the vacuum gauge head or deposits will influence the ac-curacy of measurement and/or the adjustment.

Attention: The interior of the vacuum gauge head is highly sensitive! Do not insert fingers or tools into the measuring chamber. Never use a spiky or sharp-edged tool to clean the vacuum gauge head!

Clean a contaminated vacuum gauge head as follows:➨ Ensure that the vacuum gauge head is off circuit, disconnect the VACUU•BUS cable. Dismount the

vacuum gauge head from the vacuum chamber.➨ Fill the measurement chamber with a neutral solvent (e. g. benzene) and allow sufficient cleaning

time. Observe all regulations concerning usage and disposal of solvents!➨ Drain the solvent and dispose of in accordance with regulations, repeat cleaning if necessary.➨ Rinse the measurement chamber several times with alcohol in order to remove all solvent residues.➨ Allow the vacuum gauge head to dry, readjust if necessary.

Important notes concerning bake-out

Maximum permissible bake-out temperature of the entire vacuum gauge head MPT 100 / MPT 200: 60°C☞ In case of bake-out temperatures > 60°C, the electronics and the magnetic unit of

the vacuum gauge head MPT 100 / MPT 200 could be damaged during bake-out!➨ For bake-out temperatures > 60°C, always remove the electronics and the mag-

netic unit from the sensor head. Bake out only the sensor head. Pay attention to maximum permissible bake-out temperatures, see ”Technical data”.

☞ Persons with active body aids (e.g. cardiac pacemakers) must keep a minimum safety distance of approx. 10 cm (4in) to the magnetic unit of the MPT 100 / MPT 200 (see also safety symbols on the vacuum gauge head).

Dismounting the electronics and the magnetic unit:☞ Pay attention to the components‘ assignments to each other, do not interchange.➨ Loosen both set screws (fixating the sensor head to the housing of the electro-

nics) at the housing edges with a 2 mm wide Allen key. ➨ Pull off the housing with the electronics from the sensor head.➨ Remove the magnetic unit from the sensor head.

➨ Bake out the sensor head.

Mounting the electronics and the magnetic unit:➨ Put the magnetic unit onto the sensor head.☞ Mind the guidance provided by the given groove.➨ Mount the electronics at the sensor head.☞ Mind the guidance provided by the given groove.➨ Tighten the set screws (2 mm wide Allen key). Pay attention to a concise position

between sensor head and magnetic unit.

NOTICE

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Calibration in the factory

DAkkS calibration vacuum gauge DCP 3000 with external pressure transducer .......................900215

Control of measuring equipment

The VACUUBRAND DAkkS calibration laboratory is accredited by the Deutsche Akkreditierungss-telle GmbH (national accreditation body of the Federal Republic of Germany) for the measurable vari-able pressure in the pressure range from 7.5*10-4 Torr to 975 Torr (10-3 mbar to 1300 mbar) in accordance with the general criteria for the operation of testing laboratories defined in the DIN EN ISO/IEC 17025:2000 series of standards (accreditation number D-K-15154-01).The DAkkS is signatory to the multilateral agreements of the European cooperation for Accreditation (EA) and of the International Laboratory Accreditation Cooperation (ILAC) for the mutual recognition of calibration certificates.

Rely on calibration in the VACUUBRAND calibration laboratory: - To meet the requirements of the DIN ISO 9000ff and 10012 series of standards regarding the calibra-

tion of inspection, measuring and test equipment at specified intervals. - To document that the vacuum gauges calibrated are traceable to national standards of the PTB

(Physikalisch-Technische Bundesanstalt; German national institute for science and technology and the highest technical authority of the Federal Republic of Germany for the field of metrology and certain sectors of safety engineering).

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The vacuum gauge head MPT 100 / MPT 200 has been adjusted in the works. De-pending on the process and/or on accuracy requirements, check the adjustment and readjust if necessary (e.g. in case of contamination, different orientation, extreme temperatures, etc.). For readjustment, the device has to be adjusted both at atmos-pheric pressure and under vacuum.

➨ For readjustment, install the vacuum gauge head in the same orientation in which it will be operated later on at the application.

➨ Allow the vacuum gauge head a period of minimum 5-10 minutes to stabilize.

If no adjustment is possible in the current pressure range, ”---- mbar” is displayed.

Adjustment at atmospheric pressure

An adjustment at atmospheric pressure is only possible in the upper pressure range.Vent the vacuum gauge head MPT 100 / MPT 200 and/or the vacuum system with air or N2. Make sure that the gauge head is at atmospheric pressure. Allow the vacuum gauge head a period of minimum 10 minutes to stabilize at this pressure.➨ In function ”Configuration” select the menu item ”Adjust-

ment” (see instructions for use of DCP 3000).☞ The reading is automatically adjusted to ”1000 mbar”. This

value is fix and can not be changed.➨ Press the selection knob to confirm.

Adjustment under vacuum

Manual adjustment:Evacuate the vacuum gauge head MPT 100 / MPT 200 to a pressure below 1*10-5 mbar (e.g., by applying a high vacuum pump). Allow the vacuum gauge head a period of minimum 10 minutes to stabilize at this pressure.➨ In function ”Configuration” select the menu item ”Adjust-

ment” (see instructions for use of DCP 3000).☞ The reading is automatically adjusted to ”zero”. This value

is fix and can not be changed.➨ Press the selection knob to confirm.

1000 mbar

0 mbar

Readjustment of the vacuum gauge head

NOTICE

An automatic adjustment of the Pirani sensor is run automatically, when the following conditions apply simultaneously:- the pressure measured by the cold cathode is < 5*10-5 mbar.- the measured value of the Pirani sensor does not change for one minute and does also not deviate

too much from the most recent calibration value.

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Every employer (user) is held responsible for the health and safety of his employ-ees. This also applies to service personnel performing repair, maintenance, return or calibration.The health and safety clearance form informs the contractor about any possible contamination of the device and forms the basis for the risk assessment. In case of devices which have been in contact with biological substances of risk level 2 contact the VACUUBRAND service absolutely before dispatching the device. These devices have to be completely disassembled and decon-taminated by the user prior to shipment. Do not return devices which have been in contact biological substances of risk level 3 or 4. These devices cannot be checked, maintained or repaired. Also decontaminated devices must not returned to VACUUBRAND due to a residual risk.The same conditions apply to on-site work.

No repair, maintenance, return or calibration is possible unless the correctly completed health and safety clearance form is returned. Devices sent are re-jected if applicable. Send a completed copy of the health and safety clearance form to us in advance. The declaration must arrive before the equipment. Enclose a second completed copy with the product.

Remove all components from the device that are no original VACUUBRAND compo-nents. VACUUBRAND will not be responsible for lost or damaged components that are no original components. Drain the device completely of fluids and residues. Decontaminate the device. Close all openings airtight especially if using substances hazardous to health. To expedite repair and to reduce costs, please enclose a detailed description of the problem and the product’s operating conditions with every product returned.If you do not wish a repair on the basis of our quotation, the device may be returned to you disassembled and at your expense.In many cases, the components must be cleaned in the factory prior to repair.For cleaning we use an environmentally friendly water based process. Unfortunately the combined attack of elevated temperature, cleaning agent, ultrasonic treatment and mechanical stress (from pressurised water) may result in damage to the paint. Please mark in the health and safety clearance form if you wish a repaint at your expense just in case such a damage should occur. We will also replace parts for cos-metic reasons at your request and at your expense.

Before returning the devicePack the device properly, if necessary, please order original packaging materials at your costs.Mark the package completelyEnclose the completed health and safety clearance form.Notify the carrier of any possible contamination if required.

Scrapping and waste disposalDispose of the equipment and any components removed from it safely in accordance with all local and national safety and environmental requirements. Particular care must be taken with components and waste oil which have been contaminated with dangerous substances from your processes. Do not incinerate fluoroelastomer seals and O-rings. You may authorize us to dispose of the equipment at your expense. Otherwise we return the device at your expense.

Repair - Maintenance - Return - Calibration

IMPORTANT

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Health and safety clearance form

Health and safety clearance form

1. Device (Model): ..................................................................................................................................................

2. Serial no.: ...........................................................................................................................................................

3. Reason for return / malfunction: ......................................................................................................................... ............................................................................................................................................................................4. Has the device been used in a copper process step (e.g., semiconductor production): ☐ yes ☐ no

5. Substances (gases, liquids, solids, biological material, e. g. bacteria, viruses) in contact with the device / which have been pumped:

............................................................................................................................................................................

............................................................................................................................................................................

............................................................................................................................................................................

............................................................................................................................................................................ 6. Risk level of the used biological material: ☐ none ☐ 1 ☐ 2* ☐ 3** ☐ 4** * Contact the VACUUBRAND service absolutely before dispatching the device. ** Devices which have been in contact with biological substances of risk level 3 or 4 cannot be checked, main-

tained or repaired. Also decontaminated devices must not returned to VACUUBRAND due to a residual risk.

7. Radioactive contamination: ☐ yes ☐ no

8. Prior to return to the factory the device has been decontaminated: ☐ yes ☐ no Descriptionofthedecontaminationmethodandthetest/verificationprocedure: ............................................................................................................................................................................

............................................................................................................................................................................9. All parts of the device are free of hazardous, harmful substances: ☐ yes ☐ no

10. Protective measures required for service staff: ............................................................................................................................................................................11. If the paint is damaged, we wish a repaint or a replacement of parts for reason of appearance (repaint and replacement at customer’s expense): ☐ yes ☐ no

12. Legally binding declaration We assure for the returned device that all substances, which have been in contact with the device are listed in

section 5 and that the information is complete and that we have not withheld any information. We declare that all measures - where applicable - have been taken listed in section “Repair - Maintenance - Return - Calibration”. By our signature below, we acknowledge that we accept liability for any damage caused by providing incom-plete or incorrect information and that we shall indemnify VACUUBRAND from any claims as regards damages from third parties. We are aware that as expressed in § 823 BGB (Public Law Code of Germany) we are directly liable for injuries or damages suffered by third parties, particularly VACUUBRAND employees occupied with handling/repairing the product. Shipping of the device must take place according to regulations.

Name: .................................................................. Signature: ...........................................................................

Job title: ................................................................... Company’s seal:

Date: ........................................................................

Release for repair grant by VACUUBRAND (date / signature): ................................................................................................................... Protective measures: ☐ Protective gloves, safety goggles ☐ Hood ☐ External cleaning

VACUUBRAND GMBH + CO KGAlfred-Zippe-Straße 4 97877 Wertheim - Germany

T +49 9342 808-5660 F +49 9342 808-5666E-Mail: [email protected]

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Hersteller / Manufacturer / Fabricant: Pfeiffer-Vacuum GmbH · Berliner Strasse 43 · 35614 Asslar · Germany

Hiermit erklärt der Hersteller, dass das Gerät konform ist mit den Bestimmungen der Richtlinien:Hereby the manufacturer declares that the device is in conformity with the directives:Par la présente, le fabricant déclare, que le dispositif est conforme aux directives:

2014/30/EU2011/65/EU

Pirani/Kaltkathode Messröhre / Pirani/Cold Cathode Vacuum Gauge Head / Jauge Pirani/cathode froide:Typ / Type / Type: MPT 100 / MPT 200Artikelnummer / Order number / Numéro d‘article: PT R35 120 / PT R40 140VACUUBRAND Artikelnummer / Order number / Numéro d‘article:683176 / 683177Seriennummer / Serial number / Numéro de série: Siehe Typenschild / See rating plate / Voir plaque signalétique

Angewandte harmonisierte Normen / Harmonized standards applied / Normes harmonisées utilisées:DIN EN 61010-1:2011, IEC 61010-1:2010 (Ed. 3), DIN EN 61326-1:2013, DIN EN 50581:2013

Bevollmächtigter für die Zusammenstellung der technischen Unterlagen / Person authorised to compile the technical file / Personne autorisée à constituer le dossier technique:Dr. J. Dirscherl · VACUUBRAND GMBH + CO KG · Alfred-Zippe-Str. 4 · 97877 Wertheim · Germany

EG-KonformitätserklärungEC Declaration of Conformity

Déclaration CE de conformité

. . . . . . . . . . . . . . . . . . . . . . . . . . . . Ort, Datum / place, date / lieu, date

Wertheim, 07.07.2017

. . . . . . . . . . . . . . . . . . . . . . . . . . . .(Dr. F. Gitmans)Geschäftsführer / Managing Director / Gérant

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . (Dr. J. Dirscherl)Technischer Leiter / Technical Director / Directeur technique

ppa.

VACUUBRAND GMBH + CO KGAlfred-Zippe-Str. 4 · 97877 WertheimT +49 9342 808-0 · F +49 9342 [email protected] - www.vacuubrand.com

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Disclaimer: Our technical literature is only intended to inform our customer. The validity of general em-pirical values and results obtained under test conditions for specific applications depend on a number of factors beyond our control. It is therefore strictly the users’ responsibility to very carefully check the validity of application to their specific requirements. No claims arising from the information provided in this literature will, consequently, be entertained.

VACUUBRAND GMBH + CO KG-Technology for Vacuum Systems-

© 2017 VACUUBRAND GMBH + CO KG Printed in Germany

Alfred-Zippe-Str. 4 - 97877 WertheimTel.: +49 9342 808-0 - Fax: +49 9342 808-5555E-Mail: [email protected]: www.vacuubrand.com