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Sustainability Program ‐ Version 02/ Update 2013 ‐
Semiconductor Metrology Systems
Dear valued partners, Innovation, trusted partnerships as well as sustainability in all our business processes are the foundation of our success. In 2012 we published our first ZEISS SMS sustainability report to emphasize our strength in these areas and to give our partners, employees and the public a deep insight in our company. Since then we made huge efforts in developing our business in terms of sustainability. We implemented certain sustainability projects with already visible results and set challenging targets to reduce consumptions and emissions. We are pleased that our customers and partners honored that e.g. by granting us the Intel Preferred Quality Supplier Award (PQS) and the successful management system audits in 2013. We are now publishing our first sustainability report. It contains two additional indicators: Labor and Human Rights. Visualizing more indicators related to the sustainability of our specific business will further increase transparency and makes our engagement measurable. I would like to thank all employees, customers and business partners for their cooperation and efforts assuring that ZEISS SMS will continue to be a reliable partner.
Dr. Oliver Kienzle Managing Director Carl Zeiss SMS GmbH
Table of contents
1. Introduction to the SMS sustainability program ....................................................................................................................................................................... 4 2. Semiconductor Metrology Systems .......................................................................................................................................................................................... 6 3. Metrics, Trends and Results .................................................................................................................................................................................................... 10
3.1. Environment ...................................................................................................................................................................................................................... 10
3.2. Labor, Human Rights, Health & Safety ............................................................................................................................................................................... 12
3.3. Sustainability Projects – Achievements (first report) .......................................................................................................................................................... 14 4. Summary ................................................................................................................................................................................................................................ 18
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1. Introduction to the SMS sustainability program
To be more comprehensive and transparent for our stakeholders, we are committed to sustainability reporting. Within this Document, we showcase our achievements and challenges and provide detailed information about our actions in terms of sustainability. This also contains the first report based on our sustainability program, first published in September 2012. ZEISS – A sustainable company1 The sparing use of resources is of central importance in product development at ZEISS: care is always taken to maximize energy efficiency in the company’s instruments and to minimize material usage through innovative production processes and equipment. With its products, ZEISS supports sustainability in many different sectors: the company develops intelligent measuring systems that are utilized for quality inspection in the energy, automotive and aerospace industries. These systems are used, for example, to test the quality of large wind turbine components and thus ensure a high level of efficiency. ZEISS is also working on the enhancement of alternative drive technologies and the ongoing development of electromobility. ZEISS is involved in various projects in the field, e.g. the optimization of production systems for powerful battery systems.
ZEISS – Portfolio
Innovation is a way of life at Carl Zeiss. The company has stood for innovation for more than 160 years. The research and development teams work intensively to constantly expand the company’s technology leadership. The ownership structure of Carl Zeiss AG – with the Carl Zeiss Foundation as the sole shareholder – ensures that investments in innovations can be made with vision and foresight. Each fiscal year, a significant percentage of the company’s overall revenue is being invested in research and development activities. ZEISS plays an active role in society. The company focuses on sustainability – whether environmental protection and energy strategies, commitment to society at the company’s sites or supporting educational and scientific projects and institutions. ZEISS is very committed to regional dedication at the company’s sites. The Group therefore created the Carl Zeiss Promotion Fund. Based on the concept of “with society, for society and in the midst of society”, the fund sponsors social, youth, cultural and amateur sports projects. For fiscal year 2011/12, for example, ZEISS provided over 500,000 euros to the fund. Boards of trustees at the sites, comprised of cultural, political and societal representatives decide on how the funds will be used. The Promotion Fund will be expanded to projects in Göttingen and Wetzlar from fiscal year 2012/13.
1 Annual Report 2011/2012
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Business Principles Corporate Code of Conduct ZEISS is committed to perfect solutions, special services and highest standards, not only in technological terms. Also with regard to the "rules" of good and fair behavior ‐ we strive for outstanding results.
In 2007, ZEISS adopted a corporate code of conduct, defining basic rules for all business activities. This code has proved to be effective. For complying with the code’s principles, ZEISS is being rewarded everyday ‐ with business confidence and a high reputation of its brand. It is our firm belief that a sustainable economic success is inseparable connected to our conduct. After five years, we have revised the code of conduct. Some aspects such as product safety and protection of personal data have been sharpened and the code is now embedded into the corporate policies and guidelines.
We would like to invite you to discover our code ‐ to learn more about us and our culture. Pease visit us at www.zeiss.com/smt Sustainable use of resources The sustainable use of resources and environmental protection are very important to ZEISS. The company emphasizes the respectful treatment of the environment. A systematic environmental management system ensures compliance with this directive in business operations.
Carl Zeiss SMT – Code of Conduct
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2. Semiconductor Metrology Systems The strategic business unit Semiconductor Metrology Systems (SMS) is part of the Semiconductor Manufacturing Technology (SMT) business group of ZEISS. As a leading global supplier of both metrology and manufacturing equipment ZEISS SMS focuses on a key component in semiconductor manufacturing process, the photomask. ZEISS SMS develops, manufactures and distributes advanced mask solutions along the mask manufacturing chain empowering our customers in the mask making industry to develop and manufacture zero‐defect‐ and in‐specification‐photomasks. We provide innovative solutions and spend in average more than 25% of our net sales in research and development.
Carl Zeiss SMT – Organizational Structure
All our solutions are focused on optimizing the performance of a photomask. Our customer’s benefit is manifold:
‐ an out of specification photomask can be brought back into specification avoiding costly an resource consuming remanufacturing,
‐ our tools enable to achieve specifications which could not be reached without them enabling to produce next generation photomasks
‐ the wafer fab benefits obtaining a widened process window which gives higher yields and better performance of the electronic devices.
The design and manufacturing of our tools follow the highest standards in safety and environmental requirements determined in the guidelines of ZEISS and German law.
MeRiT® HR II
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SMS Product Portfolio
The systems developed and manufactured by Carl Zeiss SMS play an important role in enabling the Semiconductor Industry to continuously introduce new electronic products that perform better than previous generations and use less energy per electronic function. Also, by producing more powerful chips the S/C industry contributes to improve the quality of life of people world‐wide by introducing affordable communication, by generating new devices and technologies in medical treatment and health care and by enabling our economies to grow.
In the process flow of mask manufacturing our tools reduce the need for remanufacturing of photomasks which are out of specifications. By this function our tools inherently serve to save costs, material and resources and thereby positively contribute to sustainability.
ZEISS SMS solutions along the mask manufacturing chain
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Commitment to Sustainability Being aware of its responsibility, ZEISS is supporting a multitude of environmental and social related projects.
Girl’s day
To arouse the interest of girls in technical professions, the girl’s day was brought into being. Children get the chance of getting to know the fields of activity of the enterprise.
Carl Zeiss Energie GmbH
In October 2013, the Carl Zeiss Energie GmbH was founded. With this new legal entity, a lasting improvement of energy efficiency shall be reached. ZEISS also starts the sensitization of the employees with the campaign “Energie bei Zeiss” and a roadshow.
Fight against blindness
Since 2002 ZEISS is a sponsor of the “VISION 2020 – The Right to Sight”, a global campaign under leadership of World Health Organization (WHO) and International Agency for The Prevention of Blindness (IAPB). The campaign is aiming on improving medical supply in economically poor regions to overcome avoidable blindness until 2020.
Education Programs
ZEISS supports the professional development of its employees by offering comprehensive and practical training solutions to sharpen existing knowledge or upgrade ones skill set.
SMS as part of ZEISS – Some fields of Dedication to Sustainability
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The SMS is focusing its improvement efforts on chosen core areas, e.g. ethics‐related trainings and assessments. To convey the significance of ethical behavior for the brand, an extensive program of compliance trainings was finished in 2013. In addition, SMS is regularly performing the EICC‐ON Risk Assessment to quantify its compliance to the international recognized code of conduct of the Electronic Industry Citizenship Coalition.
Electronic Industry Citizenship Coalition The Electronic Industry Citizenship Coalition (EICC) establishes standards to ensure that working conditions in the electronics industry supply chain are safe, that workers are treated with respect and dignity, and that business operations are environmentally responsible. A common Code of Conduct defines operating principles and provides guidance in five critical areas of Corporate Social Responsibility performance: Labor, Health and Safety, Environment, Management System, Ethics.
EICC Code of Conduct Elements
Committed to the Code’s principles and willing to uphold its standards, SMS successfully finished an extensive self‐assessment process in FY 2011/2012 . The result confirmed our conformity to the EICC Code of Conduct.
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3. Metrics, Trends and Results
3.1. Environment
Measuring and reducing the environmental footprint In 2011, Carl Zeiss SMS GmbH initiated a common sustainability project, involving the Zeiss Business Units located at the Jena facility: ‐ Carl Zeiss SMS GmbH ‐ Carl Zeiss Jena GmbH ‐ Carl Zeiss Meditec AG ‐ Carl Zeiss Microscopy GmbH.
The projects goal is to measure and reduce the environmental footprint of the production activities of these ZEISS units. The following aspects were considered as essential to describe the units impact on environment: ‐ CO2 emissions ‐ energy consumption ‐ composition/amount of waste ‐ water consumption ‐ solvents
To focus on efficiency‐based parameters, the consumption and emission data for all of these aspects were put in relation to the sum of hours of production at Jena site. Comparing the evaluation of the last two years, changes are recognizable. Nevertheless, the data base is today too small to analyze a long‐term trend.
Energy and Water Consumption The water consumed at ZEISS’ Jena Site is provided by a municipal water supplier which is serving 20.000 real estates; sourcing two‐thirds of the water from the ground (45 wells, 5 springs). The water is sourced from the Ohra‐Talsperre, a reservoir located in the Thuringian Forest. The consumption of ZEISS’ production site Lichtenhain in Jena is not significant (less than 5% of the volume). Before channeling used water into the local water treatment plants through the public sewer systems, an appropriate pretreatment is being realized. At the Jena facility, 21,18 liter of water were consumed to realize one hour of production. Compared to 2011 level, the amount did not change significantly.
The energy consumption raised by 10%, mainly caused by the usual changes of the weather conditions. The course of air humidity and temperature are influencing the need for energy of the central acclimatization system of this site.
20,26 21,18
0
5
10
15
20
25
2011 2012 2013 2014 2015 2016 2017
water consumption(liter per productive hour, site Jena)
target corridor: water consumption water consumption factor [l/h]
16,6518,24
0
5
10
15
20
2011 2012 2013 2014 2015 2016 2017
energy consumption(kWh per productive hour, site Jena)
target corridor: energy consumption
energy consumption factor [kWh/h]
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Waste management Waste is systematically sorted. All office materials are selected and used with environmental aspects in mind. And the path followed by the product to the customer’s doorstep is also carefully monitored: every day, experts in the company seek the best solutions for packaging and transportation. Higher production volumes caused a raise of disposed oil‐water‐emulsion, effecting the quantity of hazardous waste in 2012. Also, parts of the building were reconstructed, which temporarily caused an increased amount of non‐hazardous waste. Emissions Production at Carl Zeiss plants in Jena creates emissions, most notably CO2 and solvents (volatile organic carbon compounds, or VOCs) released in the cleaning shops.
CO2 emission CO2 emissions are calculated as an equivalent of the thermal energy consumed by all of the tenants at the Jena building, including Non‐ZEISS companies. In 2012, CO2 emissions from thermal energy decreased by 17% at Jena, mostly caused by a change in utilization of the cold machines in the acclimatization system. Solvents Benchmarks show that cleaning technology for optical manufacturing has already reached a very high standard, and as a result further reductions of emissions are scarcely possible. Nevertheless, the amount decreased in all solvents categories. We will strive to reduce the low level of VOC emissions achieved to date even further wherever possible.
0,20 0,22
0,12 0,13
0,00
0,05
0,10
0,15
0,20
0,25
2011 2012 2013 2014 2015 2016 2017
waste (kg per productive hour, site Jena)
target corridor: waste non‐hazardous [g/h] target corridor: waste hazardous [g/h]
waste non‐hazardous [g/h] waste hazardous [g/h]
4.523
3.765
0500100015002000250030003500400045005000
2011 2012 2013 2014 2015 2016 2017
CO2 emission (metric tons, site Jena)
target corridor: CO2 emission CO2 emission site Lichtenhain [t]
22,31 21,25
10,499,60
39,5438,16
0,0
20,0
40,0
2011 2012 2013 2014 2015 2016 2017
solvents(kg per productive hour, site Jena)
target corridor: solvents consumtion target corridor: waste (recycled)target corridor: air/water emission waste (recycled) [g/h]air/water emission [g/h] consumed solvents factor [g/h]
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3.2. Labor, Human Rights, Health & Safety
ZEISS is caring for its people. From home office regulations to different employment types to support for employees with elder‐care responsibilities ‐ ZEISS is providing a flexible work environment that support the work/life needs to different employees. Developed with feedback from stakeholders, the SMS started to transform their Corporate Responsibility Report according to the international reporting standard of the Global Reporting Initiative (GRI). We are now expanding our Report by adding indicators which are related to Human Rights and Labor. This year, we are publishing our data the first time. Labor and Human Rights data are SMS specific and cover our facilities in Jena, Oberkochen, Rossdorf and Karmiel (Israel). Develop the talents needed Since 2009, SMS’ workforce increased significantly. This reflects the quick growth of our business. It also indicates a raising need for training, especially with regard to our new employees. To cover this additional need, the SMS division almost doubled the efforts in training compared to 2011 levels. In average, 12 hours per employee were invested for expanding the knowledge base. Most of the trainings were organized by Campus, the internal training program of ZEISS SMT. It provides varied and interesting courses on current technologies and developments, processes and methods. To support knowledge transfer, the speakers are usually ZEISS employees.
The composition of contract and employment types did not change significantly. Due to the knowledge‐intensive technologies in our business environment, the rate won’t change fundamentally.
130171 192
224
0
33
7
0
50
100
150
200
250
2009 2010 2011 2012
total workforce
Total Number of Employees external workforce
(as per December, 31st ‐ excluding worldwide service teams)
0,67
4,16 4,86
11,71
0
2
4
6
8
10
12
14
16
2009 2010 2011 2012
average hours of training
128166
188216
2 5 4 80 3 3 70
50
100
150
200
2009 2010 2011 2012
type of contract
permanent temporary external workforce
129167 186 215
14
69
0
50
100
150
200
250
2009 2010 2011 2012
employment type
full‐time part‐time
(excluding external workforce)
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Striving for zero incidents Health and safety performance is a key measure of our organization’s duty of care. Low injury and absentee rates are generally linked to positive trends in staff morale and productivity. Carl Zeiss SMS GmbH is striving for zero incidents. Our Indicator will show whether health and safety management practices are resulting in fewer occupational health and safety incidents.
Human Rights
We have not identified any operations with significant risk for child labor or forced or compulsory labor.
0,00
2,56
0,00
2,00
4,00
6,00
8,00
10,00
12,00
FY 10/11 FY 11/12
SMS' Total Recorded Injury Rate (TRI)
[way‐to‐work accidents]
TRI = LTI + MTC (acc. to ILO‐standard)
LTI (LTI ‐ Lost Time Injuries) = (quantity of way‐to‐work‐accidents which caused absence > 1 day / working hours) * 106MTC (MTC ‐Medical Treatment Cases) = (quantity of way‐to‐work‐accidents which caused absence < 1 day / working hours) * 106
5,63
2,56
0,00
2,00
4,00
6,00
8,00
10,00
12,00
FY 10/11 FY 11/12
SMS' Total Recorded Injury Rate (TRI)
[occupational injuries]
TRI = LTI + MTC (acc. to ILO‐standard)
LTI (LTI ‐ Lost Time Injuries) = (quantity of work related injuries which caused absence > 1 day / working hours) * 106MTC (MTC ‐Medical Treatment Cases) = (quantity of work related injuries which caused absence < 1 day / working hours) * 106
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3.3. Sustainability Projects – Achievements (first report) To continuously improve the sustainability of our business activities, several improvement projects were started in August 2012. They relate to different aspects of sustainability, e.g. Management System, Labor, Health & Safety and Environment. All of the projects are owned by the SMS.
Project 1: Implementing and updating a Business Recovery Plan statusSMS is implementing a Business Recovery Plan which defines a set of emergency measures for all sites of the SMS. Following the plan ensures the ability to deliver and service our products which ensures business continuity in case of disruptive events. The project consists of different sub targets such as a specific risk analysis, the definition of emergency procedures and training elements. Twice a year, the target achievement is being reviewed. Target 2012/2013 3 completed BCP´s incl. roll out for Jena, Rossdorf and Karmiel until Q IV/2013 Sub targets & measures 2012/2013: sub target 1 ‐ Realization of a business continuity plan for three of four SMS sites sub target 2 ‐ realize actions defined in the stage plan BRP (per locations) sub target 3 ‐ Training 100% of risk‐class‐I‐Manager in emergency procedures and processes until 12/2012 (initial training done) sub target 4 ‐ Emergency drill for management team (incl. site managers) until QII/2013 The number of tool orders made an expansion of our industrial capacities necessary. At the moment, the SMS is taking huge efforts to reorganize and expand the clean room production area. Regarding sub target #4, an emergency drill was successfully performed at site Jena in October 2013. The roll‐out to the other sites will be realized during the upcoming FY. After finishing the roll‐out, BCP‐ audits will be realized to verify the implementation. For 2014, the following program is defined: Target 2013/2014: BCP roll out completed and implemented Sub targets & measures 2013/2014: sub target 1 ‐ Emergency drill for management team (site managers) Rossdorf until QIV/2014 sub target 2 ‐ Training 100% of risk‐class‐II and III‐Manager in emergency procedures and processes until 09/2014 (yearly instruction in future) sub target 3 ‐ BCP‐Audits (Jena, Rossdorf, Karmiel) – 2015 sub target 4 ‐ Realization of follow up workshops (lessons learned) after the 3th. BCP‐Audit
sub target 1 sub target 2 sub target 3 sub target 4
sub target 1 sub target 2 sub target 3 sub target 4
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Project 2: Continuous Reduction of overtime of specialists statusAn effective and efficient recruiting process is supporting the reduction of overtime. Goal of project 2 is the reduction of the average time to hire new employees. Target 2012/2013: average hiring time 3,75 months until Sept. 2013 Sub targets & measures in 2012/ 2013: sub target 1 ‐ optimize the recruitment process sub target 2 ‐ focus on pre‐selection by HR and manager (phone interviews, check of references) to improve quality sub target 3 ‐ competency based interviews sub target 4 ‐ focus on clear milestones and deadlines for HR as well as for the managers in the process to increase speed) The hiring time was reduced successfully. We further strive to optimize our process, setting challenging goals for the upcoming months: Target 2013/2014: average hiring time 3 months until Sept. 2014 Sub targets & measures in 2013/2014: sub target 1 ‐ review and optimization of the process sub target 2 ‐ focus active sourcing approach to keep “pipeline” of candidates filled
sub target 1 sub target 2
sub target 3 sub target 4
sub target 1 sub target 2
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Project 3: Realize Supplier‐Sustainability‐Program status To develop SMS’ supply chain in terms of sustainability, a specific supplier sustainability program is being realized. Target 2012/2013: ‐ realize a sharing of experiences / workshops regarding the sustainability program of the SMS with chosen Managed Suppliers Sub targets & measures in 2012/2013: sub target 1 ‐ realization of 2 supplier‐sustainability‐assessments in FY2012/2013 sub target 2 ‐ embedding of a Managed Supplier into a common SMS‐supplier‐sustainable‐design‐development project In 2013/2014, we continue to develop our supply chain by further communicating sustainability expectations and performing assessments to our vendors. Based on conducted pilot assessments in 2013 and benchmarking visits, the supplier sustainability program will be refined. Changes of the assessment scope might be necessary, therefore a specific number of assessments is going to be defined within 2014. Target 2013/2014: continue to develop supply chain in terms of sustainability
Sub targets & measures 2014: sub target 1 ‐ EICC based questionnaire: acknowledgement for all managed suppliers; target approval rate of > 70% within 2014 sub target 2 ‐ refinement of supplier sustainability program and further roll out sub target 3 ‐ definition an appropriate number of sustainability assessments within 2014 sub target 4 (from previous fiscal year) ‐ embedding of a Managed Supplier into a common SMS‐supplier‐sustainable‐design‐development project
sub target 1 sub target 2 open
sub target 1 sub target 2 sub target 3 sub target 4
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Project 4: Develop SMS‐Tools with sustainable content > 5% until 2015 status For our company to grow and secure its growth in the future, it needs to embed sustainability into our products. Appropriate indicators need to be developed to identify the impact of our tools in terms of the environment. SMS is focusing on the energy efficiency of its products and a sustainable product and packaging design. Energy efficiency of products Measuring and analyzing the energy consumption of our tools and components during the production process is very much depending on the degree of capacity utilization at our customers sites. High production activity required a temporal moving of this project. In QI/2014 we will further look for project partners to monitor the energy consumption of our tools during the production process at the facility of a customer. Sustainable product & packaging design The Substitution Principle in sustainability is the maxim that processes, services and products should, wherever possible, be replaced with alternatives which have a lower impact on the environment. Following this principle, the SMS is analyzing the content of its products to identify such alternatives. The amount and type of packaging material is also part of this research.
Target 2012/2013: define the 5 important key sustainable performance indicators for the new SMS‐product generation until QIII/2013 Sub targets & measures in 2012/2013: subtarget 1 ‐ definition of common sustainability requirements for design, packaging and energy efficiency (metrics: accordance with CEA‐requirements; technical feasibility) subtarget 2 ‐ common kick‐off meeting within SCM/Q/R&D and managed/ preferred suppliers of CZ SMT group at the next supplier day (Oct. 2013); start of research groups involving both parties to investigate further component‐related sustainability projects Target 2013/2014: Realizing a sustainable content of 5% at common SMS‐supplier‐development‐projects for the new tool generation Sub targets & measures in 2013/2014: subtarget 1 ‐ realization of pre‐project with important SMS customer to measure and analyze the consumption of tools and components in the production cycle (metric: achievement of the project goals/compliance to budget and time targets) subtarget 2 main project of SMS R&D‐department with chosen managed suppliers, involving chosen components for tools of the new generation until QIII 2015 subtarget 3 ‐ Follow up with customer: lessons learned about CIP‐measures for prospective common sustainability projects subtarget 4 ‐ creating KPI’s (after baseline evaluation)
sub target 1 open
sub target 2 open
sub target 1
sub target 2
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4. Summary
With publication of this 2nd version of the sustainability program we confirm the content of our sustainability program and emphasize our aim of realizing it. The results of our first review, described in chapter 4, show that a further progress must be obtained on almost all subject areas.
‐ The definition and improvement of supplier related requirements in terms of sustainable design, packaging and energy efficiency must be continued.
‐ A common sustainable‐design‐project with one of our suppliers could not be realized.
‐ The supplier sustainability program needs to be refined.
Nevertheless, many improvements have been implemented.
‐ Metrics, trends and targets for consumptions and emissions were defined at the Jena site; first analysis were made.
‐ Additional indicators for Labor, Human Rights and Health & Safety were included, following the GRI‐format.
‐ Nearly all sustainability related improvement projects were finished in time.
The next reporting about the sustainability program is planned in November 2014. In the meantime, we will continue to increase the meaningfulness of our indicators. The SMS will furthermore pursue sustainability within the ZEISS group.
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Copyright © 2013 Carl Zeiss SMS GmbH
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