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Supplementary Information
a Interdisciplinary Graduate School of Engineering Sciences, Kyushu University, Fukuoka 816-
8580, Japan
b CNT Application Research Center, AIST, Tsukuba 305-8565, Japan
c Nanomaterials Institute, AIST, Tsukuba 305-8565, Japan
d Global Innovation Center (GIC), Kyushu University, Fukuoka 816-8580, Japan
e School of Science and Technology, Kwansei Gakuin University, Hyogo 669-1337, Japan
Synthesis of sub-millimeter single-crystal grains of
aligned hexagonal boron nitride on epitaxial Ni film
Alexandre Budiman Taslim,a Hideaki Nakajima,b Yung-Chang Lin,c Yuki Uchida,a
Kenji Kawahara,d Toshiya Okazaki,b Kazu Suenaga,c Hiroki Hibino,e and Hiroki Ago*a,d
- 1 -
Electronic Supplementary Material (ESI) for Nanoscale.This journal is © The Royal Society of Chemistry 2019
(a) Cu/sapphire (b) Cu-Ni/sapphire
[Cu]/([Cu]+[Ni]) = 52%
Gas flow(c)
[Cu]/([Cu]+[Ni]) = 38%[Cu]/([Cu]+[Ni]) = 9%
Cu-Ni
a-Al2O3 (0001)
10 mm10 mm10 mm
50 mm200 mm
Figure S1. (a) Optical micrograph of the Cu(111) surface after the CVD at 1050 ºC. Severe evaporation
of Cu makes rough surface with many pits reaching to the underlying sapphire substrate. (b) SEM image
of the Cu-Ni(111) surface after the CVD at 1050 ºC. A number of very small h-BN grains were observed.
(c) Schematic of the Cu-Ni surface after the CVD and the SEM images taken at the marked positions. The
initial Cu concentration, i.e. [Cu]/([Cu]+[Ni]), of the alloy film is ~80%. The concentration of Cu was
strongly dependent on the substrate position, indicating the significant evaporation of Cu from the alloy
film during the CVD process. The spatial distribution of Cu concentration suggests that the Cu evaporation
is enhanced by the borazine vapor. (d) Optical micrograph of the Ni(111) surface after the CVD at 1100 ºC,
which shows clean and flat surface.- 2 -
(d) Ni/sapphire
200 µm
Figure S2. Atomic model of aligned h-BN grains on the Ni(111) surface.
- 3 -
0°- 180°0°- 0°
Figure S3. Comparison of the grain size of monolayer h-BN grown by thermal CVD method.
- 4 -
500
300
100
La
tera
l s
ize
(µ
m)
1 32
Reference no.
4 5 6 This
work
4 Q. Wu et al., Sci. Rep. 5,16159 (2015)5 S. Caneva et al., Nano Lett. 15, 1867 (2015)6 Y. Ji et al., ACS Nano 11, 12057 (2017)
1 S. Caneva et al., Nano Lett. 16, 1250 (2016)2 J. Yin et al., Small 11, 4497 (2015)3 G. Lu et al., Nat. Commun. 6, 6160 (2015)
400
200
Figure S4. (a) BF-LEEM and (b) PEEM images of the same h-BN grain shown in Figure 3a. Due to
large grain size, both images are composed of multiple view images. The LEEM images at the central
area of (a) are omitted. Fields-of-view are 40 mm and 100 mm for BF-LEEM and PEEM images,
respectively.
- 5 -
(a) (b)
Figure S5. (a) BF-LEEM image and corresponding diffraction patterns. The h-BN grain is different
from that shown in Figure 3a. (b) Electron reflectivity curves taken at h-BN and Ni surfaces of the
grain shown in (a).
- 6 -
(a)
2
2
1
1
33
4
4
5
5
Ni h-BN
1 µm
(b)
Energy (eV)
Inte
nsity (
arb
. u
nit)
20 mm
200 300 400 500 600
C
ou
nts
Energy loss (eV)
Figure S6. EELS spectrum collected from the sample shown in Figure 4d.
B K edge
N K edge
- 7 -
100 µm
(a) (b)
100 µm
(c)
100 µm
Figure S7. Influence of N2 gas added during the h-BN growth. The concentration of N2 gas: (a) 0 vol%,
(b) 10 vol%, and (c) 25 vol%.
- 8 -
Figure S8. AFM images of Ni(111) surface after annealing H2 gas at 1000 Pa (a) and 30 Pa (b). The
Ni annealed at 30 Pa shows rougher surface than that annealed at 1000 Pa, strongly suggesting Ni
evaporation at the low pressure (30 Pa). The RMS value was measured for the whole scanned area. (c)
SEM image of the Ni(111) surface after the CVD performed at 30 Pa. As the rough Ni surface
increased the nucleation density, the Ni surface was fully covered with h-BN after the CVD under the
standard condition (10 min at 1100 ºC).
(b)
100 mm
(c)
(a)
- 9 -
0 nm
3 nm
2 µm 0 nm
3 nm
2 µm
RMS = 0.57 nm RMS = 0.69 nm