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SUMMARY OF 4” WAFER DATA Contamination Control Working Group February 26, 2014. 4” Wafer & 1” Optic Placement. Total Wafers Collected. Total Wafers Collected. Total Wafers Collected. Need more samples for analysis. Analysis Progress. Counting microscope setup altered & upgraded. - PowerPoint PPT Presentation
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SUMMARY OF 4” WAFER DATAContamination Control Working Group
February 26, 2014
Advanced LIGO
4” Wafer & 1” Optic Placement
G1400142-v1 2
Advanced LIGO
Total Wafers Collected
G1400142-v1 3
HAM1
HAM2
HAM3
HAM4
HAM5
HAM6
BSC1BSC2
BSC3
WBSC6*
WBSC9 /
LBSC4
WBSC10
/ LBSC5
Other
0
2
4
6
8
10
12
14
16
18Hanford
Livingston
Num
ber
of w
afer
s
Advanced LIGO
Total Wafers Collected
G1400142-v1 4
Horizontal Vertical0
5
10
15
20
25
30
35
40
45Hanford
Livingston
Orientation
Nu
mb
er o
f w
afer
s
Advanced LIGO
Total Wafers Collected
G1400142-v1 4
Horizontal Vertical0
5
10
15
20
25
30
35
40
45Hanford
Livingston
Orientation
Nu
mb
er o
f w
afer
s
Need more samples for analysis.
Advanced LIGO
Analysis Progress
• Counting microscope setup altered & upgraded.• Must re-scan older wafers.
G1400142-v1 5
Advanced LIGO
Analysis Progress
• Counting microscope setup altered & upgraded.• Must re-scan older wafers.
G1400142-v1 5
60
12
Any Scan Settings
Scanned Need to scan
42
30
New Scan Settings
Scanned Need to scan
Advanced LIGO
Analysis Progress
• Counting microscope setup altered & upgraded.• Must re-scan older wafers. Good start, there’s more work to do.
G1400142-v1 5
60
12
Any Scan Settings
Scanned Need to scan
42
30
New Scan Settings
Scanned Need to scan
Advanced LIGO
1E+0
1E+1
1E+2
1E+3
1E+4
1E+5
1E+6
1E+7
Particle diameter (µm)
Par
ticl
es p
er 0
.1 m
²
• log vs log2 graph
LBSC1 PCLs
G1400142-v1 6
Goal for vertical surfaces
Goal for horizontal surfaces
Advanced LIGO
1E+0
1E+1
1E+2
1E+3
1E+4
1E+5
1E+6
1E+7
Particle diameter (µm)
Par
ticl
es p
er 0
.1 m
²
LBSC1 PCLs
G1400142-v1 6
502
Floor below ITMY (Vertical)+Y edge of chamber
344
June – Sept 20131 cycle (pump down & vent)
No work
Advanced LIGO
1E+0
1E+1
1E+2
1E+3
1E+4
1E+5
1E+6
1E+7
Particle diameter (µm)
Par
ticl
es p
er 0
.1 m
²
LBSC1 PCLs
G1400142-v1 6
502
Floor below ITMY (Vertical)+Y edge of chamber
344
June – Sept 20131 cycle (pump down & vent)
No work
Floor below ITMY (Vertical)
166200
Floor below ITMY
Sept – Nov 20131 cycle
*Work is unknown*
Advanced LIGO
Mar – June 20130 cycles
Heavy work & foot traffic
LBSC2 PCLs
G1400142-v1 7
276
Floor below BS
1E+0
1E+1
1E+2
1E+3
1E+4
1E+5
1E+6
1E+7
Particle diameter (µm)
Par
ticl
es p
er 0
.1 m
²
Advanced LIGO
Mar – June 20130 cycles
Heavy work & foot traffic
LBSC2 PCLs
G1400142-v1 7
1E+0
1E+1
1E+2
1E+3
1E+4
1E+5
1E+6
1E+7
Particle diameter (µm)
Par
ticl
es p
er 0
.1 m
²
276
Floor below BS
June – Sept 20131 cycle
No work
Floor below BS (Vertical)
1,958
Advanced LIGO
Mar – June 20130 cycles
Heavy work & foot traffic
LBSC2 PCLs
G1400142-v1 7
1E+0
1E+1
1E+2
1E+3
1E+4
1E+5
1E+6
1E+7
Particle diameter (µm)
Par
ticl
es p
er 0
.1 m
²
276
Floor below BS
June – Sept 20131 cycle
No work
Floor below BS (Vertical)
1,958
Sept – Nov 20131 cycle
*Work is unknown*
Floor below BSFloor below BS (Vertical)
218233
Advanced LIGO
Mar – June 20130 cycles
Heavy work & foot traffic
LBSC2 PCLs
G1400142-v1 7
1E+0
1E+1
1E+2
1E+3
1E+4
1E+5
1E+6
1E+7
Particle diameter (µm)
Par
ticl
es p
er 0
.1 m
²
276
Floor below BS
June – Sept 20131 cycle
No work
Floor below BS (Vertical)
1,958
Sept – Nov 20131 cycle
*Work is unknown*
Floor below BSFloor below BS (Vertical)
218233
1E+0
1E+1
1E+2
1E+3
1E+4
1E+5
1E+6
1E+7
Particle diameter (µm)
Par
ticl
es p
er 0
.1 m
²
-Y edge of chamber
491
-Y edge of chamber
830
Advanced LIGO
Mar – June 20130 cycles
Heavy work & foot traffic
LBSC2 PCLs
G1400142-v1 7
1E+0
1E+1
1E+2
1E+3
1E+4
1E+5
1E+6
1E+7
Particle diameter (µm)
Par
ticl
es p
er 0
.1 m
²
276
Floor below BS
June – Sept 20131 cycle
No work
Floor below BS (Vertical)
1,958
Sept – Nov 20131 cycle
*Work is unknown*
Floor below BSFloor below BS (Vertical)
218233
1E+0
1E+1
1E+2
1E+3
1E+4
1E+5
1E+6
1E+7
Particle diameter (µm)
Par
ticl
es p
er 0
.1 m
²
-Y edge of chamber
491
-Y edge of chamber
830
1E+0
1E+1
1E+2
1E+3
1E+4
1E+5
1E+6
1E+7
Particle diameter (µm)
Par
ticl
es p
er 0
.1 m
²
-Y edge of chamber
-Y edge of chamber
276
Floor below BS
Floor below BS (Vertical)
1,958
Floor below BSFloor below BS (Vertical)
218233 491 830
Advanced LIGO
LBSC3
G1400142-v1 8
1E+0
1E+1
1E+2
1E+3
1E+4
1E+5
1E+6
1E+7
Particle diameter (µm)
Par
ticl
es p
er 0
.1 m
²
Floor below ITMX (Vertical)+X edge of chamber
402
395
June – Sept 20131 cycle No work
Sept – Nov 20131 cycle
*Work is unknown*
Advanced LIGO
LBSC3
G1400142-v1 8
1E+0
1E+1
1E+2
1E+3
1E+4
1E+5
1E+6
1E+7
Particle diameter (µm)
Par
ticl
es p
er 0
.1 m
²
Floor below ITMX (Vertical)+X edge of chamber
402
395
June – Sept 20131 cycle No work
Floor below ITMX (Vertical)
153 337
Floor below ITMX
Sept – Nov 20131 cycle
*Work is unknown*
Advanced LIGO
WBSC Chambers
G1400142-v1 9
1E+0
1E+1
1E+2
1E+3
1E+4
1E+5
1E+6
1E+7
Particle diameter (µm)
Par
ticl
es p
er 0
.1 m
²
Feb – Oct 20131 cycle
Work in adjacent chambers
WBSC1 – Floor below ITMY
230
Oct – Nov 20131 cycle
No work?
WBSC3 – Floor below ITMX
316
April – Oct 20131 cycle
Heavy work over wafer
WBSC2 – Floor below baffle?
598
Advanced LIGO
WBSC Chambers
G1400142-v1 9
1E+0
1E+1
1E+2
1E+3
1E+4
1E+5
1E+6
1E+7
Particle diameter (µm)
Par
ticl
es p
er 0
.1 m
²
Feb – Oct 20131 cycle
Work in adjacent chambers
WBSC1 – Floor below ITMY
230
Oct – Nov 20131 cycle
No work?
WBSC3 – Floor below ITMX
316
April – Oct 20131 cycle
Heavy work over wafer
WBSC2 – Floor below baffle?
598
Need more samples to determine trends.
Advanced LIGO
LHAM2 History
G1400142-v1 10
Pump down #1(doors close)
Pump down #2
Vent (doors open)
Vent Pump down #3
Vent
Pump down #4
Vent
Advanced LIGO
LHAM2 History
G1400142-v1 10
Aug '12
Sep '1
2
Oct '1
2
Nov '1
2
Dec '1
2
Jan '1
3
Feb '1
3
Mar
'13
Apr '13
May
'13
Jun '1
3
Jul '
13
Aug '13
Sep '1
3
Oct '1
3
Nov '1
3
Pump down #1(doors close)
Pump down #2
Vent (doors open)
Vent Pump down #3
Vent
Pump down #4
Vent
1 cycleMedium work
(PRM, ISS PD array, PR3 gluing)
1 cycleLight work
(IO baffles installed)
1 cycleNo work
Med. work
Medium work
(PRM, ISS PD array, PR3 gluing)
1 cycleMinimal work
1 cycleLight work
(PR2/PR3 baffles)
Advanced LIGO
LHAM2 History
G1400142-v1 10
Aug '12
Sep '1
2
Oct '1
2
Nov '1
2
Dec '1
2
Jan '1
3
Feb '1
3
Mar
'13
Apr '13
May
'13
Jun '1
3
Jul '
13
Aug '13
Sep '1
3
Oct '1
3
Nov '1
3
1 cycleMedium work
(PRM, ISS PD array, PR3 gluing)
1 cycleLight work
(IO baffles installed)
1 cycleNo work
Med. work
Medium work
(PRM, ISS PD array, PR3 gluing)
1 cycleMinimal work
1 cycleLight work
(PR2/PR3 baffles)
First clean – basic wipe down.Estimated ~ 1 hour.
Big clean – multiple wipe downs over a 2 week period.
1-1.5 hrs per chamber. Wiped all horizontal & vertical surfaces, top & inside of ISI, underneath support tubes, etc.
Advanced LIGO
Aug '1
2
Sep '1
2
Oct '12
Nov '1
2
Dec '1
2
Jan '
13
Feb '1
3
Mar
'13
Apr '1
3
May
'13
Jun '
13
Jul '1
3
Aug '1
3
Sep '1
3
Oct '13
Nov '1
3
LHAM2
G1400142-v1 11
1E+0
1E+1
1E+2
1E+3
1E+4
1E+5
1E+6
1E+7
Particle diameter (µm)
Par
ticl
es p
er 0
.1 m
²
Advanced LIGO
Aug '1
2
Sep '1
2
Oct '12
Nov '1
2
Dec '1
2
Jan '
13
Feb '1
3
Mar
'13
Apr '1
3
May
'13
Jun '
13
Jul '1
3
Aug '1
3
Sep '1
3
Oct '13
Nov '1
3
LHAM2
G1400142-v1 11
1E+0
1E+1
1E+2
1E+3
1E+4
1E+5
1E+6
1E+7
Particle diameter (µm)
Par
ticl
es p
er 0
.1 m
² +X end of table, on mass
293
+X end of table, on mass
424
In front of MC1 & MC3
322
+X end of table, on mass *not sealed
188*
Advanced LIGO
Aug '1
2
Sep '1
2
Oct '12
Nov '1
2
Dec '1
2
Jan '
13
Feb '1
3
Mar
'13
Apr '1
3
May
'13
Jun '
13
Jul '1
3
Aug '1
3
Sep '1
3
Oct '13
Nov '1
3
LHAM2
G1400142-v1 11
1E+0
1E+1
1E+2
1E+3
1E+4
1E+5
1E+6
1E+7
Particle diameter (µm)
Par
ticl
es p
er 0
.1 m
² +X end of table, on mass
293
+X end of table, on mass
424
In front of MC1 & MC3
322
+X end of table, on mass *not sealed
188*
1E+0
1E+1
1E+2
1E+3
1E+4
1E+5
1E+6
1E+7
Particle diameter (µm)
Par
ticl
es p
er 0
.1 m
²
In front of PR3
In front of PR3
In front of PR3In front of PR3
218817280 268
Advanced LIGO
Aug '1
2
Sep '1
2
Oct '12
Nov '1
2
Dec '1
2
Jan '
13
Feb '1
3
Mar
'13
Apr '1
3
May
'13
Jun '
13
Jul '1
3
Aug '1
3
Sep '1
3
Oct '13
Nov '1
3
LHAM2
G1400142-v1 11
1E+0
1E+1
1E+2
1E+3
1E+4
1E+5
1E+6
1E+7
Particle diameter (µm)
Par
ticl
es p
er 0
.1 m
² +X end of table, on mass
293
+X end of table, on mass
424
In front of MC1 & MC3
322
+X end of table, on mass *not sealed
188*
1E+0
1E+1
1E+2
1E+3
1E+4
1E+5
1E+6
1E+7
Particle diameter (µm)
Par
ticl
es p
er 0
.1 m
²
In front of PR3
In front of PR3
In front of PR3In front of PR3
218817280 268
1E+0
1E+1
1E+2
1E+3
1E+4
1E+5
1E+6
1E+7
Particle diameter (µm)
Par
ticl
es p
er 0
.1 m
²
In front of PR3
In front of PR3
In front of PR3In front of PR3
Near PR3, N door (Vertical)NW corner of tableN side of table (Vertical)
218817280 268
105218
192
Advanced LIGO
LHAM2 Story
G1400142-v1 12
Aug '12
Sep '1
2
Oct '1
2
Nov '1
2
Dec '1
2
Jan '1
3
Feb '1
3
Mar
'13
Apr '13
May
'13
Jun '1
3
Jul '
13
Aug '13
Sep '1
3
Oct '1
3
Nov '1
3
Pump down #1(doors closed)
Pump down #2
Vent (doors open)
Vent Pump down #3
Vent
Pump down #4
Vent
1 cycleMedium work
280 - 817
1 cycleLight work
322
1 cycleNo work
293
Med. Work
188*
Medium work
218 - 268
1 cycleMinimal work
105
1 cycleLight work
192 - 218
Advanced LIGO
Summary
• Cleaning as you go works!– Refer to LIGO-G1301249
G1400142-v1 13
Advanced LIGO
Summary
• Cleaning as you go works!– Refer to LIGO-G1301249
• Upcoming…– Compiling WHAM data
G1400142-v1 13
Advanced LIGO
Summary
• Cleaning as you go works!– Refer to LIGO-G1301249
• Upcoming…– Compiling WHAM data– 1” optic counts & damage plan
G1400142-v1 13
Advanced LIGO
Summary
• Cleaning as you go works!– Refer to LIGO-G1301249
• Upcoming…– Compiling WHAM data– 1” optic counts & damage plan– Trips to LHO to continue CC support– Opportunity for another round of data when ITM’s
open in April at LHO
G1400142-v1 13
Advanced LIGO
Relevant Documents
• LIGO-F1200021 Advanced LIGO Particulate Sample Form (updated)
• LIGO-T1300014 Aligo, BSC Flooring + HAM ISI, Witness Sample Placement Guidelines
• LIGO-E1201096 Contamination Sample Handling – How to receive, use, send, buy, and store samples
G1400142-v1 14
