© 2013

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MEMS Market Overview:

Steady Growth for MEMS in 2013

and BeyondMature & emerging applications ensure ~10% growth

MEMS Tech Seminar 2013- Castelleto Sept 26th -

Yves DEVIGNE

devigne@yole.fr

© 2013• 2

Fields of Research Activity

Founded in 1998, Yole Developpement is a global market, technology and strategy consulting company involved in :

Our research is performed by in-house personnel conducting open-ended discussions based on interviews of all players.

32 full time analysts with technical and marketing degrees

Primary research including over 3,500 interviews per year

Wafers and substrates

MEMS &

sensors

Photovoltaics

Advanced Packaging

Microfluidic

& Medical

Technologies

Power

Electronics

HB LED,

LED & OLED

Image sensors

© 2013• 3

Yole market forecast refining model

• Yole’s market forecast model is based upon the following elementary blocks:

Technical

requirements

Device data

(spec, size,

technologies)

Product

units forecasts

Wafer

units forecastsMaterials

Volume forecasts

Si Interposer

Dram

Std. Product

Units forecastsMarket

penetration %

Global end user markets Assumptions:

Yole

Développement

Sources: direct interviews

with Semiconductor &

Packaging fabs

Sources: direct interviews

with Semiconductor fabs

Equipment

units forecasts

© 2013• 4

UPDATE ON THE GLOBAL MEMS MARKET

© 2013• 5

Continued Strong Growth2012-2018 Forecast (in US$M)

Yole Developpement © March 2013

For complete data, consider our

reports:

© 2013• 6

2012-2018 Forecast (in Munits)

Yole Developpement © March 2013

For complete data, consider our

reports:

© 2013• 7

2012 MEMS Players Ranking Top 30

Yole Developpement © March 2013

© 2013• 8

MEMS FOR MOBILE

© 2013• 9

MEMS devices in volume in 2013:

• IMU combo

• Magnetometer

• MEMS microphones

• Pressure sensor

• Humidity + Temperature sensor

• BAW filters and duplexers

• Antenna tuner

Simplified View of TODAY (2013’s) Smart-

Phone BoardMEMS in red

© 2013• 10

New MEMS devices in volume in 2018?

• 9-axis combo

• Pressure + Humidity + T° combo

• More microphones!

• Silicon timing for XO / TCXO / 32kHz clock

• Antenna switching

• Gas / biochemical sensors

• Auto-focus

• MEMS mirrors

• Microspeaker

• Touchscreen?

• IR sensor?

Simplified View of TOMORROW (2018’s)

Smart-Phone BoardMEMS in red

Joystick?

UV sensor?

LIDAR?

Ultrasonic sensor?

Radiation sensor?

…

Energy harvesting?

© 2013• 11

Sampling

/ R&D

High

volume

Small

production

MEMS Value Proposition in Mobile Devices

DelfMEMS switch

Freescale pressure sensorPolight MEMS

autofocus

Sensirion Humidity

Sensor

AudioPixel microspeaker

Sand 9 MEMS

Oscillator

NextInput SoftTouch

interface

TI temperature sensor versus

a competing thermopile

sensor

Wispry antenna tuner on cell

phone board

Thermal imager MuOptics

Mirasol display

STM 9-axis

Knowles microphones

Scanning mirror from

Lemoptix

Improved

visual

experience

Navigation &

environment

sensing

Sound

quality

Better communication

performances

New tactile

interface

Infra red sensing

Increased battery lifetime

Nectar fuel cell

© 2013• 12

2012 2018 MEMS Market in Mobile ($M)

DelfMEMS switch

Freescale

pressure sensor

Sensirion

Humidity

Sensor

AudioPixel microspeaker

Sand 9 MEMS

Oscillator

NextInput SoftTouch

interface

TI temperature sensor versus

a competing thermopile

sensor

Wispry antenna tuner on cell

phone board

Thermal imager MuOptics

STM 9-axis

Knowles microphones

Navigation &

environment

sensing

Sound

quality

Better communication

performances

New tactile

interface

Infra red sensing

$388M (2012) $1166M (2018)$438M (2012)

$868M (2018)

$492M (2012)

$1691M (2018)

$0M (2012) $52M (2018)

$0M (2012)

NA (2018)

Polight MEMS

autofocus

Mirasol display

Scanning mirror from

Lemoptix

Improved

visual

experience

Increased battery lifetime

Nectar fuel cell

$11M (2012)

$1140M

(2018)

$0 (2012) NA (2018)

© 2013• 13

Key MEMS Players in Mobile

DelfMEMS switch

Freescale

pressure sensor

Sensirion

Humidity

Sensor

AudioPixel microspeaker

Sand 9 MEMS

Oscillator

NextInput SoftTouch

interface

TI temperature sensor versus

a competing thermopile

sensor

Wispry antenna tuner on cell

phone board

Thermal imager MuOptics

STM 9-axis

Knowles microphones

Navigation &

environment

sensing

Sound

quality

Better communication

performances

New tactile

interface

Infra red sensing

Polight MEMS

autofocus

Mirasol display

Scanning mirror from

Lemoptix

Improved

visual

experience

Increased battery lifetime

Nectar fuel cell

© 2013• 14

Successful Companies Are Still Large Leaders

in Distinct MEMS Categories

© 2013• 15

EXAMPLES OF NEW SUCCESSFUL

APPLICATIONS

© 2013• 16

Pressure and Humidity Sensors2 new killer apps!

• Pressure sensor now used in high

volume

– For GPS improvement today, and for

LBS services soon

• Humidity + temperature sensors are

also adopted in 2013

– Has reached the size, cost and

software requirements

Sensirion SHTC1 (2 x 2 x 0.8 mm)

- Digital humidity sensor integrated

in Samsung Galaxy S4

For complete data, consider our

reports:

© 2013• 17

Drivers for RF Tuners… and MEMS value proposition

Increasing

number of

bands and

antennas

LTECarrier

aggregation

Smaller

antennas for

smaller phones

Operators demand for

more users per BST

+ more data per user

• Very high Q

• Excellent linearity over wide frequency range

• Low loss

• High capacitor range

• Digital control, that can be integrated

• Low power consumption (electrostatic actuation)

MEMS value

proposition

Drivers for RF

tuners

© 2013• 18

Wispry strip down

Extract from the reverse costing report “Wispry RF MEMS Antenna Tuner”

(published in Jan. 2012)

the first RF MEMS in prod for cellphone

(Samsung / HV CMOS based)

© 2013• 19

Proliferation of RF tunersFirst Epcos close loop tuner on the market!

Covers 700 2.7GHz

© 2013• 20

DIVERSITY OF TECHNOLOGIES

© 2013• 21

Combos are Driving the Inertial Sensor Market

• Discrete sensors decline but will

still be used in some platforms

• 6-axis IMUs are the hottest market

since 2012

• Because of strong price pressure

and high adoption rate, the total

market will stabilize from 20150

200

400

600

800

1000

1200

1400

1600

1800

2000

2010 2011 2012 2013 2014 2015 2016 2017 2018

Mar

ket

($M

)

Inertial sensors for mobile phones and tablets - 2010-2018 market ($M)

MEMS accelerometers MEMS gyroscopes

Magnetometers 6DOF IMUs

6DOF E-compass 9DOF Combos

Yole développement © May 2013

For complete data, consider our

reports:

© 2013• 22

L3G4IS Dual Core GyroTeardown of Nokia Lumia 920

• This gyro is integrated in the camera module and is

able to provide both the image stabilization function

and the user interface function (replace the gyroscope

on the main board)

• Dual core approach. Large ASIC

© 2013• 23

InvenSense MPU-60503 separate structures

© 2013• 24

InvenSense MPU-9150Teardown

© 2013• 25

Summary

• MEMS industry is big and growing

• Strong market pull observed for sensors and actuators in cell

phones

• The market is not limited to a few devices. A new wave of MEMS is

coming!

• IP position is now critical in this highly competitive market

• Foundry model still difficult

• For complete data, consider our reports:

Thank you!

© 2013• 26

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