STATUS IN THE CLEAN ROOMDevice production

Until 29-06-12

CMP Litho+Etching #1(marks+crosses)

Litho+Etching #2 (channels)

Bonding Litho+Etching #3 (holes)

Dicing @ CERN

3961 14.05.12 23.05.12

3772 14.05.12 15.05.12

3850 14.05.12 15.05.12 23.05.12 29.05.12 29.05.12 30.05.12

3917 14.05.12 15.05.12 23.05.12 29.05.12 29.05.12 30.05.12

3776 14.05.12 15.05.12 15.05.12 16.05.12 23.05.12 23.05.12

20478 7.06.12 7.06.12 8.06.12 Problems after the piranha…

20476 No (BS not polished) 8.06.12 22.06.12 28.06.12(mask 1+ mask 3)

28.06.12 29.06.12

LHCb – Snake design

525 um thick! SS polished

NA62 – Frame 2Litho+Etching #1(marks+crosses)

Litho+Etching #2 (channels)

Bonding Litho+Etching #3 (holes)

Dicing @ CERN

3448 24.04.12 29.05.12 29.05.12 30.05.12 01.06.12 05.06.12

3625 24.04.12 29.05.12 01.06.12 04.06.12 Ready for dicing

3645 23.05.12

3446 23.05.12

3627 23.05.12

3624 23.05.12

20473 No 12.06.12 12.06.12 12.06.12(mask 1+ mask 3)

12.06.12 13.06.12

20474 No 12.06.12 26.06.12 28.06.12(mask 1+ mask 3)

28.06.12Ready for dicing

Oxide +Nitride....

525 um thick! SS polished

20475 and 20477 broken!

2 devices glued from Jerome

Channels too deep

NA62 – Frame 3 – new masks

Channels: 300 x 100um + 50um walls

Litho+Etching #1(marks+crosses)

Litho+Etching #2 (channels)

Bonding Litho+Etching #3 (holes)

Dicing @ CERN

20471 26.06.12Ready for etching

20470 28.06.12 28.06.12 28.06.12(mask 1+ mask 3)Ready for etching

NA62 – Frame 3

525 um thick! SS polished

NA62 – Pillars test

Litho+Etching #1 Bonding @ CERN

20472 22.06.12(70 µm of etching)

26.06.12 27.06.12

Filling with Araldite 2020

STRANGE BEHAVIOURTime (s) Temperature (°C) Voltage (V) Current (mA)

0 350 0 0 350 1163 2.0

23 min 350 1163 1.3 (stable) 350 997 0.7 (stable) 350 0 0

27 min 0

New one to be made!

NA62 – Dual Pyrex

New masks:- Add alignment objects- Position of the flats ?