STATUS IN THE CLEAN ROOMDevice production

Until 12-06-12

CMP Litho+Etching #1(marks+crosses)

Litho+Etching #2 (channels)

Bonding Litho+Etching #3 (holes)

Dicing @ CERN

3961 14.05.12 23.05.12

3772 14.05.12 15.05.12

3850 14.05.12 15.05.12 23.05.12 29.05.12 29.05.12 30.05.12

3917 14.05.12 15.05.12 23.05.12 29.05.12 29.05.12 30.05.12

3776 14.05.12 15.05.12 15.05.12 16.05.12 23.05.12 23.05.12

20478 7.06.12 7.06.12 8.06.12

20476 No (BS not polished) 8.06.12 Ready for bonding12.06.12 Piranha

LHCb – Snake design

525 um thick! SS polished

LHCb – Snake designSEM PICTURES

NA62 – Frame 2Litho+Etching #1(marks+crosses)

Litho+Etching #2 (channels)

Bonding Litho+Etching #3 (holes)

Dicing @ CERN

3448 24.04.12 29.05.12 29.05.12 30.05.12 01.06.12 05.06.12

3625 24.04.12 29.05.12 01.06.12 04.06.12 Ready for dicing

3645 23.05.12

3446 23.05.12

3627 23.05.12

3624 23.05.12

20473 No 12.06.12 12.06.12 12.06.12(mask 1+ mask 3)

12.06.12 13.06.12

20474 No 12.06.12 Ready for bonding12.06.12 Piranha

Oxide +Nitride....

525 um thick! SS polished

20475 and 20477 broken!

2 devices glued from Jerome

Channels too deep

NA62 – Dual BananaLitho+Etching #1(marks+pool)

Litho+Etching #2 (manifolds+channels)

Litho+Etching #3 (channels)

Bonding Litho+Etching #4 (big pool)

Dicing @ CERN

044 02.03.12 15.03.12 16.03.12 11.05.12 14.05.12 16.06.12 16.06.12

045 05.03.12 29.05.12 30.05.12 01.06.12 07.06.12

046 05.03.12 29.05.12 30.05.12

Surface not clean….CMP cracks!!

DRY ETCHING with 601Starts to de-bond!!! SEM PICTURES

Pool 380 um OK!!

before after

Dirty on the backside..

NA62 – Dual Banana 044 SEM PICTURES

Channels:

Pool:

KOH inside channels: