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Spontaneous Formation of Atomic Ordering in InGaN alloys within Nanowire Heterostructures Steffi Y. Woo(1), Matthieu Bugnet(1), Hieu P. T. Nguyen(2,3), Zetian Mi(2) and Gianluigi A. Botton(1) 1. Department of Materials Science and Engineering, Brockhouse Institute for Materials Research, and Canadian Centre for Electron Microscopy McMaster University, Hamilton, ON L8S 4L7, Canada 2. Department of Electrical & Computer Engineering, McGill University, Montreal, QC H3A 0E9, Canada 3. Current address: Department of Electrical and Computer Engineering, New Jersey Institute of Technology, University Heights, Newark, New Jersey 07102, United States Ternary InGaN alloys have been sought after for the application of various optoelectronic devices spanning a large spectral range between the UV and IR, including light-emitting diodes (LEDs), and laser diodes, and detectors. The large difference in cationic radii is responsible for the non-ideal mixing, and established as the cause for various phase separation, surface segregation, and chemical ordering processes commonly observed in nitride alloys. Growth in a nanowire (NW) geometry can circumvent these processes that would otherwise lead to compositional fluctuations within InGaN alloys, by providing enhanced strain relaxation at free surfaces. Atomic-level chemical ordering in wurtzite InGaN and AlGaN epilayers, describing preferential site occupancy of the cation sublattice by the group III atoms, has been reported mostly with a 1:1 periodicity along the [0001] growth direction [1]. Reports of atomic ordering in ternary III-V alloys (including cubic III-As and III-P) in general have remained limited to planar thin films; its prevalence within NWs has not been explored. In this work, InGaN/GaN multiple dot-in-a-wire nanostructures grown on Si(111) by molecular beam epitaxy were developed to achieve more controlled light emission across the entire visible spectrum [2], and characterized using aberration-corrected scanning transmission electron microscopy (STEM). High-angle annular dark-field (HAADF) Z-contrast imaging shows the InGaN quantum dots (QDs) with atypical oscillating HAADF image intensity at the atomic-level along the c-axis growth direction, exhibiting alternating bright/dark atomic-planes within the QDs. Electron diffraction patterns obtained from the QDs show the presence of otherwise forbidden superlattice reflections, unambiguously confirming the presence of bilayer atomic ordering [1]. In addition, atomic-resolution elemental mapping using electron energy-loss spectroscopy shows significant In-enrichment in alternating c-planes matching the maxima in the HAADF signal, with a deviation from the local mean composition by >25%. Corresponding annular bright-field imaging enables the visualization of light elements like N, and was used to directly deduce the NWs as N-face polar. It also indicates that the In-atoms have a preferential occupation at the lower-coordination site along a pyramidal surface facet, which is the first experimental evidence validating the existing theoretical structure model for ordered InGaN layers [3]. The role of a faceted growth front and the local strain state on the growth surface-induced alloy ordering, and the effects of ordering on optical properties for deep visible wavelength applications will also be discussed. [1] Ruterana et al. (1998) APL 72, 1742. [2] Nguyen et al. (2012) Nano Lett. 12, 1317. [3] Northrup et al. (1999) APL 74, 2319. Keywords: nanowires, InGaN, quantum dots, high-resolution electron microscopy Figure. (a) HAADF image showing the atomic-level oscillatory image intensity within the bulk and the “tails” of the InGaN QDs, and (b) integrated intensity line profile from the boxed region. (c) Model of ordered InGaN from the preferential incorporation of In at the reduced N-coordination site (two-fold coordinated, N=2) along a {10-1-1} surface facet.

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Page 1: Spontaneous Formation of Atomic Ordering in InGaN alloys within Nanowire …csstc2015.ca/wp-content/uploads/2014/03/WOO_Steffi_Y_c26.pdf · 2016. 1. 26. · of a faceted growth front

Spontaneous Formation of Atomic Ordering in InGaN alloys within Nanowire Heterostructures Steffi Y. Woo(1), Matthieu Bugnet(1), Hieu P. T. Nguyen(2,3), Zetian Mi(2) and Gianluigi A. Botton(1) 1. Department of Materials Science and Engineering, Brockhouse Institute for Materials Research, and

Canadian Centre for Electron Microscopy McMaster University, Hamilton, ON L8S 4L7, Canada 2. Department of Electrical & Computer Engineering, McGill University, Montreal, QC H3A 0E9, Canada 3. Current address: Department of Electrical and Computer Engineering, New Jersey Institute of Technology,

University Heights, Newark, New Jersey 07102, United States

Ternary InGaN alloys have been sought after for the application of various optoelectronic devices spanning a large spectral range between the UV and IR, including light-emitting diodes (LEDs), and laser diodes, and detectors. The large difference in cationic radii is responsible for the non-ideal mixing, and established as the cause for various phase separation, surface segregation, and chemical ordering processes commonly observed in nitride alloys. Growth in a nanowire (NW) geometry can circumvent these processes that would otherwise lead to compositional fluctuations within InGaN alloys, by providing enhanced strain relaxation at free surfaces. Atomic-level chemical ordering in wurtzite InGaN and AlGaN epilayers, describing preferential site occupancy of the cation sublattice by the group III atoms, has been reported mostly with a 1:1 periodicity along the [0001] growth direction [1]. Reports of atomic ordering in ternary III-V alloys (including cubic III-As and III-P) in general have remained limited to planar thin films; its prevalence within NWs has not been explored.

In this work, InGaN/GaN multiple dot-in-a-wire nanostructures grown on Si(111) by molecular beam epitaxy were developed to achieve more controlled light emission across the entire visible spectrum [2], and characterized using aberration-corrected scanning transmission electron microscopy (STEM). High-angle annular dark-field (HAADF) Z-contrast imaging shows the InGaN quantum dots (QDs) with atypical oscillating HAADF image intensity at the atomic-level along the c-axis growth direction, exhibiting alternating bright/dark atomic-planes within the QDs. Electron diffraction patterns obtained from the QDs show the presence of otherwise forbidden superlattice reflections, unambiguously confirming the presence of bilayer atomic ordering [1]. In addition, atomic-resolution elemental mapping using electron energy-loss spectroscopy shows significant In-enrichment in alternating c-planes matching the maxima in the HAADF signal, with a deviation from the local mean composition by >25%. Corresponding annular bright-field imaging enables the visualization of light elements like N, and was used to directly deduce the NWs as N-face polar. It also indicates that the In-atoms have a preferential occupation at the lower-coordination site along a pyramidal surface facet, which is the first experimental evidence validating the existing theoretical structure model for ordered InGaN layers [3]. The role of a faceted growth front and the local strain state on the growth surface-induced alloy ordering, and the effects of ordering on optical properties for deep visible wavelength applications will also be discussed.

[1] Ruterana et al. (1998) APL 72, 1742. [2] Nguyen et al. (2012) Nano Lett. 12, 1317. [3] Northrup et al. (1999) APL 74, 2319. Keywords: nanowires, InGaN, quantum dots, high-resolution electron microscopy

Figure. (a) HAADF image showing the atomic-level oscillatory image intensity within the bulk and the “tails” of the InGaN QDs, and (b) integrated intensity line profile from the boxed region. (c) Model of ordered InGaN from the preferential incorporation of In at the reduced N-coordination site (two-fold coordinated, N=2) along a {10-1-1} surface facet.