Spectral Measurement Solutions forIndustry and Research

• Fluorescence Spectroscopy

• Gas Analysis

• Plasma Process Monitoring

• Film Thickness Measurement

• Photoluminescence Measurement

• Quantum Yield Measurement

• Fluorescence Lifetime Measurements

• Time-Resolved Spectroscopy

• Time-Resolved Absorption

Spectrum Analysis

Hamamatsu Photonics offers a comprehensive range of products for spectroscopic applications,

covering the UV, Visible and Infrared regions for Industrial, Analytical, Research and OEMs. Our

solutions range from mini-spectrometers and large steady-state spectrometers to gated CCD

spectrometers and ultra-fast streak cameras. All products are built in-house and we can offer

standard or customized component and system based solutions.

Applications include:

Compact CCD-Spectrometers

The compact spectrometers of the PMA series are multichannel

spectrographs that can deliver up to 50 full spectra per second,

each with more than 1000 spectral channels. The devices can be

easily operated with any PC, come fully calibrated and require no

special know-how from the user. They are also used as OEM

devices in industrial environments.

Industrial end-users / Industrial OEM / Research

Plasma Process Monitoring

The Multiband Plasma Monitor (MPM) is a compact device for

the real-time monitoring of plasma etch processes in

semiconductor fabrication and other industrial plasma

applications. It combines sensitive multichannel optical emission

spectroscopy (OES) hardware with extremely powerful data

analysis software and can be operated via a network.

Applications include advanced endpoint control, in-situ detection

of abnormal plasma phenomena, optimization of new processes,

continuous monitoring of chamber condition, optimization of

cleaning cycles, and others.

CCD/CMOS Image Sensors for Spectroscopy

Hamamatsu offers a wide range of advanced image sensors

for spectral measurement applications covering a broad

wavelength range from UV to NIR. In addition to offering

different window materials and filter combinations, we also

offer custom parts on request.

The range of image sensors includes Back-thinned CCDs (for

UV-VIS-NIR), Front-illuminated CCDs (for VIS-NIR), CMOS and

InGaAs (NIR), offering the following features:

Amp array

PPS(passive-pixel sensor)

APS(Active-pixel sensor)

CMOS

S10453 seriesS11637/S12198 series

S1011X series, S390X,S8377/S8378 series

S11638S11639

Binning

RG (resistive gate)

Interline

CCD

S7030 series, S10420-01 series,S10140 series, S11071 series

S11155-2048-01S11156-2048-01

S11151-2048

IR-enhanced S11490

Type Type No. Main Features

Type Type No. Main Features

UV

UV

UV

IR

UV

UV

UV

Highresp.

Highresp.

Highresp.

Highresp.

Highresp.

Highspeed

Highspeed

Highspeed

Highspeed

WDR GLR

GLR

GLR

5V

5V

5V

ES

ES

ES

Lowcost

Lowcost

WDR TEcooled

GLRWDRGLR

GLRWDR GLR

GLRWDR

UV Sensitivity NIR Sensitivity High Sensitivity High-speed Wide dynamic range Good linearity

+5 V single power supply Electronic shutter function TE-cooled type available Low cost

PRELIMINARY FOR OCT

PRELIMINARYBURIED TYPE

PRELIMINARY

• High Quantum Efficiency

• Low noise

• High S/N

• High linearity

• Wide dynamic range

• High-speed readout

Industrial end-users / Industrial OEM

Film Thickness Measurement The Optical NanoGauge is a thickness measurement system based on

spectral interferometry. It operates by purely optical, non-contact,

non-destructive means. The product excels by its high precision

and sensitivity as well as robust use of integrated multiple

analysis methods. We can offer configuration for macro as well

as micro measurements. These features make the product

applicable to a very wide range of materials and applications.

Laboratory / Research

Compact and low cost mini-spectrometers

These are thumb-sized, ultra-compact spectrometer heads developed

by our advanced MOEMS technology. A CMOS image sensor integrated

with an entrance slit is combined with a grating formed on a convex

lens by nano-imprint. They have a package that is easy to be mounted

on a circuit board, so it can be used like a sensor. Features include:

• Thumb size: 27.6mm x 13mm x 16.8mm

• Weight: 9g

• Spectral response range:

340 nm to 750 nm (C10988MA-01)

640 nm to 1050 nm (C11708MA)

• Spectral resolution:

14 nm (C10988MA-01)

20 nm (C11708MA)

• Installation into mobile measurement

equipment

Hamamatsu offers various types of mini-spectrometers designed for

spectral detection in the ultraviolet to the near infrared region – 200

nm – 2550 nm. These include compact and low-cost models, high-

sensitivity models (containing a back-thinned CCD image sensor), and

cooled models with low noise.

Mini-spectrometers can be used in diverse applications including

chemical analysis, colour measurement, environmental measurement

as well as process control on production lines. Hamamatsu also

provides OEM models designed for installation into portable

measuring devices.

The mini-spectrometers cover a wide spectral

response range and provide:

• High-precision measurements

• High throughput

• Ease of use

• Flexibility in measurement setups

• Compact size

• USB connectivity

• Bundled software package

(DLL, device driver, and sample software)

Ultra-compact spectrometers C10988MA-01

and C11708MA for VIS and SW-NIR

Research

Quantaurus Series

The Quantaurus series are compact instruments for measuring the properties of

photoluminescent materials. The new Quantaurus-Tau measures fluorescence lifetimes

as short as 100 ps and the new Quantaurus-QY measures quantum yields faster and

easier than the traditional relative method. The combination of these two instruments

enables a comprehensive characterization of light emitting materials such as fluorescent

probes, LED phosphors, organic metal complexes, OLED materials and quantum dots.

The Quantaurus series can be used to analyse materials in thin film, powder, solid or

liquid form. Liquid samples can be cooled down to -196°C.

The new Quantaurus-QY, based on the established technology of our C9920-02 system, is

a compact instrument for measuring the photoluminescence quantum yield of light

emitting materials. It performs absolute measurements and does not require known

reference standards, as typically needed for the traditional relative method.

Operation is simple and intuitive and the system is fully software controlled. A motorized

mono-chromator allows for easy choice of excitation wavelengths. The ultrasensitive CCD

sensor records the full emission spectrum. The dedicated software offers various analysis

functions including absolute quantum yield measurements, excitation wavelength

dependence, photo-luminescence spectra, photoluminescence excitation spectra, and

calculation of colour co-ordinates.

The Quantaurus-QY comes in two versions featuring different wavelength ranges. The

standard model (C11347-11) covers wavelengths from 300 nm to 950 nm and the NIR

model (C11347-12) covers the region from 400 nm to 1100 nm.

The Quantaurus-Tau is a compact system for routine measurements of fluorescence

lifetimes from sub-nanoseconds to milliseconds with single-photon-counting sensitivity.

Seven pulsed LEDs allow for sample excitation from 280 nm to 630 nm. The two available

models cover a spectral range from 300 nm to 800 nm (C11367-11) and from 380 nm to

1030 nm (C11367-12). As the whole system is software controlled, operation is simple

and intuitive. The dedicated software includes a variety of measurement and analysis

functions and allows fitting of up to 5 exponentials. Furthermore, Quantaurus-Tau

features optional add-ons for performing phosphorescence measurements.

Research

Streak Systems

Several commercial systems are available dedicated for

fluorescence emission measurements, allowing measurements

from the sub-ps to the ms domains.

Just like in conventional photon-counting, the streak method also

records single photons, giving excellent measurement statistics

and large dynamic range, which is important for good data

analysis. Unlike other methods, however, a streak system can

count photons even when there are many photons in a single

fluorescence pulse and records all wavelengths simultaneously.

Recent systems have been even further improved in terms of

repetition rates and sensitivity, complying with even the most

demanding applications.

Many different models cover a wide spectral range from the UV to

the NIR (115 to 1650 nm).

Streak technology has been established for many years as a high-end method for time-resolved spectroscopy.

Streak-based systems offer two major benefits: the unsurpassed temporal resolution, reaching into the sub-ps domain, and

the "2-dimensionality" of the method, yielding superior detection efficiency.

Ultra-Fast Lifetime

Spectrofluorometers

The PicoXspeC system is a streak-based fluorescence spectroscopy

system with sample excitation in the X-ray regime, which is made

possible by employing a special X-ray source emitting short X-ray

pulses of only a few tens of picoseconds duration.

This allows the study of materials used for scintillation and similar

applications without using radioactive substances for excitation.

The system is very compact and fits easily on a table top.

Picosecond X-ray Induced Fluorescence System

www.hamamatsu.com

Main Products

Compact CCD-Spectrometers

Plasma Process Monitoring

CCD/CMOS Image Sensors for Spectroscopy

Film Thickness Measurement

Compact and low cost mini-spectrometers

Ultra-compact spectrometers C10988MA-01 and C11708MA

for VIS and SW-NIR

Quantaurus Series

Quantaurus-QY / Quantaurus-Tau

Streak Systems

Ultra-Fast Lifetime Spectrofluorometers

Picosecond X-ray Induced Fluorescence System

June 2014