12
Clean Room Exhaust Cleaner for Clean Room Production Facility Pneumatic Instrumentation Equipment Piping Equipment for Facilities Air Piping Line Water Piping Line Industrial water (Municipal water) Steam Deionized water/ Chemical liquids Compressed air Inert gas (Nitrogen, Argon, etc.) Tank Flow Switch Flow Switch Dryer Filter Filter Compressor Cooling Tower  Filter Compressor Room P-E07-9E

SMC Pneumatics in Process Automation

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Page 1: SMC Pneumatics in Process Automation

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Clean Room

Exhaust Cleanerfor Clean Room

Production FacilityPneumatic Instrumentation Equipment

Piping Equipment for Facilities

Air Piping Line

Water Piping Line

Industrial water(Municipal water)

Steam Deionized water/ 

Chemical liquids

Compressed air Inert gas

(Nitrogen, Argon,etc.)

Tank

Flow

Switch

FlowSwitch

Dryer

Filter

Filter

Compressor

CoolingTower   Filter

CompressorRoom

P-E07-9E

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For Pneumatic Control in

Process AutomationP  AP  A

Air Preparation Equipment

Detection Conversion Unit

Air Dryers Air Preparation Filters

Industrial Filters

Pressure Sensors Flow Sensors

Compressor

1

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In principle, SMC products cannot be used outdoors.

Factory AutomationF  AF  A

Pressure Control Equipment Piping Material

Operation Unit

Actuators

Fittings/S Couplers Tubing

Explosion-proofSpecifications

NAMUR Standards

Relay Electro-Pneumatic

Transducer

Booster relay

Electro-pneumatictransducer

Intrinsically safeexplosion-proof

Explosion proof(Flameproof)

IP67

 Stainless steel series

 Coil tube

 Double-layered tube

 Longer length tube

Lock-up valve

Lever type

Rotary type

Cylinder

with Positioner

Solenoid Valves Accessories Positioners

2

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wAftercoolerqAir Tank 

eMain Line Filter

Series ATTank capacity 

100 to 3000 L

Port size

15A (1/2) to 4B flange

Air-cooled Series HAAApplicable compressor 7.5 to 37 kW

Air flow capacity 1000 to 5700 L/min (ANR)

Water-cooled Series HAWApplicable compressor 2.2 to 110 kWAir flow capacity 300 to 18000 L/min (ANR)

Series AFFFiltration accuracy

3 µm (99% filtration efficiency)

Rated flow

300 to 45000 L/min (ANR)Port size

6A (1/8) to 4B flange

q w e r t y u

RefrigeratedAir Dryer

AftercoolerMist

Separator

i

Super MistSeparator

Air TankMicro MistSeparator

oOdor

Removal Filter

(Deodorization)

Flow SwitchMain Line

Filter

Refrigerant: R134a (HFC) R407C (HFC)

Ozone-depleting potential “0”

Series IDF 1E to 370DApplicable compressor 0.75 to 370 kW

Air flow capacity 0.10 to 65.0 m3 /min (ANR)

Series IDU 3E to 75EApplicable compressor 2.2 to 75 kW

Air flow capacity 0.32 to 12.4 m3 /min (ANR)

rRefrigerated Air Dryer

Series IDF 100FS/125FS/150FSDouble energy saving function series

Applicable compressor100, 125, 150 kW

Air flow capacity18.8 to 27.0 m3 /min (ANR)

tFlow Switch

Series PF2AMeasurement flow rate (L/min)

1 to 10, 5 to 50, 10 to 100, 20 to 20050 to 500, 150 to 3000300 to 6000, 600 to 12000

Port size 6A to 50A (1/8 to 2)

Series AMEFiltration accuracy

0.01 µm (99.9% filtration efficiency)

Rated flow200 to 12000 L/min (ANR)

Port size 6A to 50A (1/8 to 2)

iSuper Mist SeparatoruMicro Mist Separator

oOdor Removal Filter

Series AMF

Filtration accuracy0.01 µm (99.9% filtration efficiency)

Rated flow200 to 40000 L/min (ANR)

Port size 6A (1/8) to 6B flange

Series AMDFiltration accuracy

0.01 µm (99.9% filtration efficiency)

Rated flow200 to 40000 L/min (ANR)

Port size 6A (1/8) to 6B flange

Series AMFiltration accuracy

0.3 µm (99.9% filtration efficiency)

Rated flow300 to 12000 L/min (ANR)

Port size 6A to 50A (1/8 to 2)

yMist Separator

“Compressed Air” Line

Water Separator

Series AMGDehumidification rate 99%

Rated flow300 to 12000 L/min (ANR)

Port size 6A to 50A (1/8 to 2)

Water drop removal

Compressor

Pressure

accumulation,Pulsationattenuation

Particle separation/ 

Filtration

Pressure

accumulation,Pulsationattenuation

Flow rate detection

Water drop removal

Flow rate detection

Oil separation/ 

Filtration

Particle separation/ 

Filtration

Oil separation/ 

Filtration

Cooling,

Removing waterroughly

Dehumidification

Oil separation/ 

Filtration

DeodorizationDeodorization

Oil separation/ 

Filtration

Cooling,

Removing waterroughly

Dehumidification

Oil separation/ 

Filtration

Oil separation/ 

Filtration

3

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Production FacilityPneumatic Instrumentation Equipment/Piping Equipment for Facilities

Series KKAFluid

Air, Water

Port size6A to 50A (1/8 to 11/2)

S Couplers/Stainless Steel 304

Series LQFluid

Deionized water, Chemical liquids, etc.(Please contact SMC for details.)

Applicable tubing O.D.ø3 to ø25

Fluoropolymer Fittings

Clean One-touch Fittings

Series KPFluid

Air, N2, Water (Deionized water)(Please contact SMC for details.)

Applicable tubing O.D.ø4 to ø12

Series KFFluid

Air, Steam (Brass sleeve)

Air, Water (Resin sleeve)

Applicable tubing O.D.ø4 to ø12

Insert Fittings

Brass sleeve

Resin sleeve

Series KQG2Fluid

Air, Water, Steam

Applicable tubing O.D.ø3.2 to ø16

Stainless Steel 316 One-touch Fittings

Series KQ2Fluid

Air, Water

Applicable tubing O.D.ø2 to ø16

One-touch Fittings

Piping Equipment (Fittings and Tubing)

Series KKFluid Air, Water

Applicable tubing O.D. ø3.2 to ø16

Applicable hose I.D./ O.D. 5/8 to 11/16

Port size M5 to 25A (3/4)

Series KK130Fluid Air

Applicable tubing O.D. ø6 to ø12

Applicable hose I.D./ O.D. 5/8 to 11/16

Port size 6A to 15A (1/8 to 1/2)

S Couplers

Series H,DL,L,LLFluid

Air

Applicable tubing O.D.ø4 to ø12

Self-align Fittings

Series KQB2Fluid

Air, Water

Applicable tubing O.D.ø3.2 to ø16

Metal One-touch Fittings

Series KFG2Fluid

Air, Water, Steam

Applicable tubing O.D.ø4 to ø16

Stainless Steel 316 Insert Fittings

Series

T

TS

TU

TUS

TUH

TPH,TPS

TH

TD

TQ

TL

TLM

Air, Water, Inert gas,

Solvent

Length: Up to 500-meter rolls can be used, but the maximum roll length depends on tube

materials and external diameter. Please consult SMC for details. (Made to Order)

Note) Please contact SMC for details.

Series T

Tubing

500 m reel

Material

Nylon

Nylon (Soft Nylon)

Polyurethane

Polyurethane (Soft Polyurethane)

Polyurethane (Hard polyurethane)

Polyolefin-based resin

FEP (Fluoropolymer)

Modified PTFE (Soft Fluoropolymer)

Super PFA

PFA

Fluid

Air, Water

Air, Water Note)

Air, Water

Air

Air

Air, N2, Water (Deionized water)Note)

Air, Water, Inert gas

Air, Water, Inert gas

Deionized water, Chemical liquids, etc.Note)

Air, Water, Inert gas

O.D.

ø4 to ø16

ø4 to ø16

ø2 to ø16

ø4 to ø12

ø4 to ø12

ø4 to ø12

ø4 to ø12

ø4 to ø12

ø4 to ø12

ø4 to ø19

ø2 to ø25

Outer layer: Special nylon resin

Inner layer: Special fluoropolymer

4

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SMC Air Preparation System

HAW

Cooling

Separation, Filtration

Main Line

AT AFF

IDF

HAA orHAW

B

C

D

E

F

G

H

HAA orHAW

Dehumidification

IDU

Sub Line

12

3

4

5

6

7

   C   l  a  s  s

≤ 0.10

Not specifiedNot specified

Not specified

Not specified

Not specified

0.10 < d ≤ 0.5

100100000

Not specified

Not specified

Not specified

0.5 < d ≤ 1.0

11000

10000

Not specified

Not specified

1.0 < d ≤ 5.0

010

500

1000

20000

Max. number of particles/1 m3

Particle diameter d µm

NA

NA

Solid particle

Particlediameterµm

NA

≤ 5

≤ 40

Concen-tration

mg/m3

NA

≤ 5

≤ 10

12

3

4

Oil

mg/m3

≤ 0.01≤ 0.1

≤ 1

≤ 5

1

2

3

4

5

6

Moisture

Pressure dew point

At air pressure( of 0.7 MPa )°C

≤ –70

≤ –40

≤ –20

≤ +3

≤ +7

≤ +10

   C   l  a  s  s

   C   l  a  s  s

Indication: The degree of quality is indicated with 1, 4 and 2 for systems withsolid particle “class 1,” moisture “class 4” and oil “class 2.”

Application Moisture

Dewpoint

Moisturecontent

Impurity in compressed air

   S  y  s   t  e  m   n

  o .

   F   i   l   t  r  a   t   i  o  n

       C       l     e     a     n       l       i     n     e     s     s

   O

   i   l  o   d  o  r

   Q   u   a   l   i   t   y   g   r   a   d   e

   a   s

   s   y   s   t   e   m    (   2

   )

   O

   i   l  m   i  s   t

   d  e

  n  s   i   t  y   (   1   )

Water drop removal air

A  •

Air blowing (Simpleremoval of particles)Generalpneumatic tools

Dry air

Dry air

Dry clean air

Dry clean air

• Used for the sameapplications as A,when temperaturedrop in the middleof piping is large.

General pneumaticequipmentGeneral painting

High grade paintingSequence controlMeasurement deviceInstrumentationDrying and cleaning (Precision parts)Machine tools (Pneumatic bearing)

Without refrigerated airdryer on the sub lineBuilt-in with equipment(With machine tools, 3-Dmeasurement device, etc.)

Deodorant air

Low dew point clean air

Low dew point clean air(For clean room)

Stirring, transporting,drying and packagingFood industry (Exceptdirect blowing to foods)

Drying electric and electronic partsDrying a filling tankTransporting powdersOzone generatorLow temperature actuatedequipment

• Blowing semi-

conductor partsin the clean room

Note 1) When the inlet oil mist density (compressed air density) is approximately 30 mg/m3 (ANR) or less.Note 2) This describes the grade of compressed air quality based on ISO8573-1: 2001 (JIS B8392-1: 2003), which is the maximum quality grade for the system.

It varies, however, depending on the inlet air conditions.Note 3) Contact SMC since this can be manufactured as a special order (depending on the operating conditions).

3 µmFiltering

efficiency(  99%

)

0.3 µm

Filteringefficiency(  99.9%  )

0.01 µm

Filtering

efficiency

(  99.9%  )

0.01 µm

Filtering

efficiency

(  99.99%  )

Max.1 mg/m3

(ANR)

0.8 ppm

Max.0.1 mg/m3

(ANR)

0.08 ppm

Max.0.01 mg/m3

(ANR)

0.008 ppm

Max.0.004 mg/m3

(ANR)

0.0032 ppm

Max.0.004 mg/m3

(ANR)

0.0032 ppm

Max.0.01 mg/m3

(ANR)

0.008 ppm

Particles

with

0.3 µm

or more:100 or

less/ft3

(35 or

less/ 

10 L

(ANR))

Particles

with

0.1 µm

or more:0/6 L

Yes

Yes

No

No

3, -, -

3, 4, -3, 5, -3, 6, -

2, 4, 3

2, 5, 32, 6, 3

1, 4, 21, 5, 21, 6, 2

1, 4, 11, 5, 1

1, 6, 1

1, 1, 11, 2, 11, 3, 1

Atmosphericpressure dew point

6°C

0.7 MPaPressure dew point

40°C

Atmospheric

pressure

dew point

–14 to

–23°C

0.7 MPa

Pressure

dew point

15 to 3°C

Atmospheric

pressure

dew point

–30 to

–60°C

0.7 MPa

Pressure

dew point

–6 to

–42°C

7 g/m3

(ANR)

1.7 g/m3

(ANR)

to

0.8 g/m3

(ANR)

0.5 g/m3

(ANR)

to

0.02 g/m3

(ANR)

(3)

Description

Capacity

Air Tank 

AT HAA, HAW IDFAFF

Air Cooled Aftercooler

Water Cooled Aftercooler

Main LineFilter

Refrigerated Air Dryer

Representative model

Max. inlet airtemperature

Filtration(Filtering efficiency)

Outlet oil mistconcentration(Max.) (1)

Outletcleanliness

100°C 60°C

3 µm(99%)

50°C

Flow capacity(L/min (ANR))

1,000 to 5,700300 to 18,000

70°C70°C, 180°C(Varies by model)

300 to 42,000 100 to 65,000100 to 3,000 L

–17°CAt inlet temperature 35°C

IDU

80°C

320 to 12,500

–17°CAt inlet temperature 55°C

Air Tank 

Class 2pressurevessel

Main LineFilter

Not required when attachedto air compressors.

Dehumidification

Applicableair compressors:5.5 kW (7 hp)to 220 kW(300 hp)

HAA

HAW

RefrigeratedAir Dryer

Applicableair compressors:7.5 kW (10 hp)to 37 kW (50 hp)

Applicableair compressors:2.2 kW (3 hp)to 240 kW(320 hp)

Applicableair compressors:2.2 kW (3 hp)to 110 kW(150 hp)

Reciprocatingair compressor

Screw aircompressor

Outlet air pressuredew point10°C

(0.7 MPa, at 35°C)

Applicableair compressors:0.75 kW (1 hp)to 370 kW(500 hp)

Refrigerated Air Dryer

(High inlet airtemperature type)

Outlet air pressuredew point10°C(0.7 MPa, at 55°C)

Applicableair compressors:2.2 kW (3 hp) to75 kW (100 hp)

Oil con-centra-

tion

Atmospheric pressure

dew point [At inlet airpressure of 0.7 MPa]

Pulsation attenuation,Accumulation,

Cooling Select either Air CooledAftercooleror Water CooledAftercooler

AFF

Required even for screw compressorssince the piping of the oil-free type isrusted easily.

Not required when attachedto air compressors.

Air tank is not required for rotary screwcompressors since pulsation is small, butrequired when it is used to accumulate pressure.

Required for reciprocating air compressorssince carbon and tarry substances aregenerated at high temperatures.

5

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Production FacilityPneumatic Instrumentation Equipment/Piping Equipment for Facilities

A

B

C

D

E

F

G

H

Local line

AM

AMH

AMH IDG AME

AMF

AMF SFD

AMEAMDAM

AMH

AME

AME

AMD

AMDAM

IDG

IDG

AMD

AMH

AMH

AM ID

IDAM

AMG

AMG AMH AMD IDG AME AMFAM ID SFD

SFA/SFB/SFC

WaterSeparator

HeatlessAir Dryer

MistSeparator

Micro MistSeparator

with Pre-filter

Odor RemovalFilter

Micro MistSeparator

Super MistSeparator

Membrane Air DryerClean

Gas FilterClean

Air Filter

SFA, SFB, SFC

50°C, 55°C(Varies by model)

80°C, 120°C(Varies by models)

60°C 60°C 60°C50°C 50°C

300 to 12,000 80 to 780 200 to 12,000 200 to 40,000 10 to 1,000 200 to 12,000 200 to 40,000 26 to 300

45°C

100 to 50075 to 30050 to 150

0.3 µm(99.9%)

0.01 µm(99.9%)

0.01 µm(99.99%)

0.01 µm(99.9%)

Water drop removal ratio99%

0.01 µm(With 0.3 µm

pre-filter)

1 mg/m3 (ANR)

[ ≈ 0.8 ppm]

0.01 mg/m3 (ANR)

[ ≈ 0.008 ppm]

0.004 mg/m3

(ANR)[ ≈ 0.0032 ppm]

0.1 mg/m3 (ANR)

[ ≈ 0.08 ppm]

Particles with 0.3 µmor more: 100 or less/ft3

(35 or less/10 L (ANR))

0.01 µm(99.99%)

–30°C –50°CAt inlet temperature 35°C

–15°C –20°CAt inlet temperature 25°C

–40°C –60°CAt inlet temperature 25°C

Water Separator

Mist Separator

Micro MistSeparator

Micro MistSeparatorwith Pre-filter

With 0.3 µm pre-filter/ Integrated AM + AMD

MembraneAir Dryer

Super MistSeparator

Odor RemovalFilter

With oil saturationindicator

Atmospheric pressure dew point–15°C, –20°C(0.7 MPa, at 25°C)

CleanGas Filter

CleanAir Filter

MembraneAir Dryer

Atmospheric pressure dew point–40°C, –60°C(0.7 MPa, at 25°C)

HeatlessAir Dryer

Atmospheric pressure dew point–30°C, –50°C(0.7 MPa, at 35°C)

Filtration

Precision filtration

Water droplet separation

Separation, Filtration

Separation, Filtration

Separation, Filtration

Dehumidification

Dehumidification

Deodorization

Dehumidification

Particles with 0.1 µm

or more: 0/6 L

6

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Pressure SwitchMain Line Filter Filter Regulator

Positioner

Serial Communication Valve

Sanitary Valve Control

Flow Switch

q w e r t

y

Manifold withSupply Stop Valve

rFilter Regulator

wPressure Switch

eFlow Switch

tPositioner

Series ISGSet pressure range

0.1 to 1.0 MPaPort size

10A (3/8)

Series 1301/IW

Filtration accuracy5 µm

Set pressure range0.02 to 0.5 MPa

Port size8A (1/4)

Series IP Input current

4 to 20 mADCPort size

8A (1/4)

yReduced-wiring Fieldbus System (Serial Transmission System)

Series SY/VQC· DeviceNetTM

· CC-Link 

· PROFIBUS DP· AS-Interface

· CANopen

· EtherNet/IPTM

· CompoNetTM

· EtherCAT ® 

· PROFINET

qMain Line Filter

Series AFFFiltration accuracy

3 µm (95% filtered particle size)

Rated flow300 to 42000 L/min (ANR)

Port size6A (1/8) to 4B flange

Double-layered Tube for Instrumentation Device (single-tubed/double-tubed)

Trademark DeviceNet™ is a trademark of ODVA. EtherNet/IP™ is a trademark of ODVA. CompoNet™ is a trademark of ODVA.EtherCAT ®  is registered trademark and patented technology, licensed by Beckhoff Automation GmbH, Germany.

IN-241-

-

T0604 to T1075--- (X120, X121, X166)Double-layered tube with an external layer of vinyl chloride orpolyolefin to protect the inner tube-Double-tubed type (Color:black + black/black + white) and 300 m length are available.∗ If you need a different no. of tubes, different colors or lengths over

300 mm, please contact our sales representatives.

Explosion-proofSolenoid Valve

NAMUR StandardsSolenoid Valve

Outer layer:

Vinyl chloride orPolyolefin-based resin

Inner Special: Nylon

Explosion-proof Solenoid Valve

51-SY5000/7000/900050-VFE3000/500050-VPE500/700

NAMUR Standards Solenoid Valve

VFN2120N-X23VFN2120N-X36Air operated type

Solenoid valve for actuating a sanitary valve, etc.

Conforming to NAMUR standards

Manifold with Supply Stop Valve

SS5Y3-X460, SS5Y5-X4601SS5Y7-X460, SS5Y3-X2104The supply pressure can be stopped individually.Solenoid valve can be replaced without shuttingoff the supply pressure in case of emergency.

Pneumatic Instrumentation Equipment

Series PF2A

Measurement flow rate (L/min)1 to 10, 5 to 50, 10 to 100, 20 to 20050 to 500, 150 to 3000

300 to 6000, 600 to 12000

Port size6A to 50A (1/8 to 2)

Pressure adjustment

Particle separation/ 

Filtration

Pressure detection

Flow rate detection

Actuator control Reduced wiring

Particle separation/ 

Filtration

Pressure adjustment

Particle separation/ 

Filtration

Pressure detection

Flow rate detection

Actuator control Reduced wiring

Particle separation/ 

Filtration

7

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Element

q w e r

t

y

y

Pump

Cooling Tower(Cooling building)

<Air-cooled Refrigerated Type>

<Water-cooled Refrigerated Type>

Boiler

Installing extra cooling towers can be troublesome.The HRSH (air-cooled refrigerated type) can be

moved easily to wherever you need it, when you

need it. Cooling water is supplied from theattached hose.

wFlow SwitchqIndustrial Filter

ePressure Switch

t2 Port Valve (for Steam)

yCirculating Fluid Temperature Controller Thermo-cooler

Series PF3WMeasurement flow rate (L/min)

0.5 to 4, 2 to 16, 5 to 40

10 to 100, 50 to 250Port size

10A to 40A (3/8 to 1 1/2)

Series IFW5Set flow rate range (L/min)

1 to 10, 10 to 20, 20 to 50Port size

3/8 to 3/4

Series VXOrifice diameter

ø3 to ø50Port size

Thread: 6A to 50A (1/8 to 2)Flange: 32A to 50A

Series FG/FQ/FNNominal filtration accuracy

0.5 to 120 µmPort size

Thread: 10A to 50A (3/8 to 2)Flange: 25A to 150A (1B to 6B)

Series ISE80Rated pressure range

−0.100 to 2.000 MPaPort size

M5, 6A (1/8), 8A (1/4)

r2 Port Valve

Series HRSHSet temperature 5 to 35°C

Port size Rc1

Cooling capacity (60Hz) 10 to 25 kW  (air-cooled, water-cooled)

Series VNDOrifice diameter

ø7 to ø50Port size

Thread: 6A to 50A (1/8 to 2)Flange: 32F to 50F

Check Valve

INA-14-290 (Brass, Rc: 1/8)

XTO-674-

 (Brass, Rc: 1/4 to 1/2)INA-14- (All stainless steel, Rc: 1/4 to 1/2)

Series IF3Set flow rate range (L/min)

14 to 60, 20 to 1500

36 to 2600Port size

3/4, 1

This equipment supplies temperature-controlled water to the heat

source in a circular manner.

“Industrial Water (Municipal Water)” Line

Production FacilityPneumatic Instrumentation Equipment/Piping Equipment for Facilities

Particle separation/ 

Filtration

Flow rate detection

Pressure detection

Flow rate control Flow rate control

Cooling water

temperature control

Particle separation/ 

Filtration

Flow rate detection

Pressure detection

Flow rate control Flow rate control

Cooling water

temperature control

8

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Clean Air Module

N2 Bomb

q w e t

y

 

r

      N      i      t     r     o     g     e     n

w2 Port ValveqRegulator

tClean Gas Filter   yClean Air Module

Series VXOrifice diameter

ø3 to ø50Port size

Thread: 6A to 50A (1/8 to 2)

Flange: 32A to 50A

Series ISE

Rated pressure range−0.100 to 1.000 MPaPort size

M5, 6A (1/8), 8A (1/4)

Series SRHSet pressure range

0.05 to 0.7 MPaPort size

6A to 15A (1/8 to 1/2)

Series AP/AZ/AK

Series LLB

Filtration accuracy 0.01 µmPort size 8A to 10A (1/4 to 3/8)

rPressure Switch

Series SFFiltration accuracy

0.01 µmPort size

8A to 10A (1/4 to 3/8)

Piping Equipment

eFlow Switch

Series PF2A

Measurement flow rate (L/min)1 to 10, 5 to 50, 10 to 100, 20 to 200

50 to 500, 150 to 3000

300 to 6000, 600 to 12000

Port size6A to 50A (1/8 to 2)

Stainless Steel 316 Fittings: Series KQG2/KFG2Clean One-touch Fittings: Series KPFluoropolymer Tubing: Series TH/TL/TD/TLM/TQClean Tubing: Series TPH/TPS

“Inert Gas” “Clean Dry Air” Line

A flow switch, regulator, 2 port valve, restrictor,

and filter have been combined into a single unit.

Easily obtains clean air.

Pressure adjustment Fluid control

Pressure detection

Particle separation

 /Fil tra tionModularization

Flow rate detection

Pressure adjustment Fluid control

Pressure detection

Particle separation

 /Fil trat ionModularization

Flow rate detection

9

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q w e r t

r2 Port Valve

qPump   wRegulator

eFlow Switch

tRestrictor

SeriesSRFPort size

Integral fitting: Applicable tubing O.D.ø4 to ø19

Tube extension: 1/4" to 3/4"Set pressure range

0.02 to 0.4 MPa

Series LVPort size

Thread: (1/8 to 1) / 6A to 25AIntegral fitting: Applicable tubing O.D.

ø3 to ø25Tube extension: ø3 to ø25

Orifice diameterø2 to ø22

Series LVPApplicable tubing O.D.

16A, 20A, 25AOrifice diameter

ø16, ø22

Process Pump: SeriesPAFDischarge flow rate

1 to 45 L/minPort size

Thread: (3/8, 3/4)/10A, 20ATube extension: 1/2", 3/4"With nut: Connection

fitting size4 or 5(LQ1, LQ3)

Series PF2DMeasurement flow rate

0.4 to 40 L/minPort size

Tube extension: 3/8" to 3/4"

Series PF3WMeasurement flow rate (L/min)

10 to 100, 30 to 250Port size

PVC tubing O.D. 25A, 30A

Needle Valve: Series LVNPort size

Integral fitting: Applicable tubing O.D.  ø4 to ø12Orifice diameter

ø4.4 to ø10

Piping Equipment

Quick Drain Valve: Series LVWApplicable tubing O.D.

ø32 to ø89 (25A to 80A)

“Deionized Water/Chemical Liquids” Line

Fluoropolymer Fittings: Series LQFluoropolymer Tubing: Series TH/TL/TD/TLM/TQ

Production FacilityPneumatic Instrumentation Equipment/Piping Equipment for Facilities

Liquid discharge Pressure adjustment

Flow rate detection Liquid discharge

Flow rate adjustment

Liquid discharge Pressure adjustment

Flow rate detection Liquid discharge

Flow rate adjustment

10

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SMC'S GLOBAL MANUFACTURING, DISTRIBUTION

AND SERVICE NETWORK 

POLANDSMC Industrial Automation Polska Sp.z.o.o.ROMANIASMC Romania S.r.l.RUSSIASMC Pneumatik LLC.SLOVAKIASMC Priemyselná Automatizácia Spol s.r.o.SLOVENIASMC Industrijska Avtomatika d.o.o.SPAIN/PORTUGAL

SMC España S.A.SWEDENSMC Pneumatics Sweden ABSWITZERLANDSMC Pneumatik AGTURKEYSMC Pnömatik Sanayi Ticaret ve Servis A.S.U.K.SMC Pneumatics (U.K.) Ltd.

ASIACHINA <Beijing/Shanghai>SMC (China) Co., Ltd.CHINA <Guangzhou>SMC Pneumatics (Guangzhou) Ltd.HONG KONG <Hong Kong/South China>SMC Pneumatics (Hong Kong) Ltd.INDIASMC Pneumatics (India) Pvt. Ltd.MALAYSIASMC Pneumatics (S.E.A.) Sdn. Bhd.PHILIPPINESShoketsu SMC CorporationSINGAPORESMC Pneumatics (S.E.A.) Pte. Ltd. (Sales subsidiary)

SOUTH KOREASMC Pneumatics Korea Co., Ltd.

TAIWANSMC Pneumatics (Taiwan) Co., Ltd.THAILANDSMC (Thailand) Ltd.VIETNAMSMC Pneumatics (VN) Co., Ltd

NORTH AMERICACANADASMC Pneumatics (Canada) Ltd.MEXICO

SMC Corporation (Mexico), S.A. de C.V.U.S.A.SMC Corporation of America

SOUTH AMERICAARGENTINASMC Argentina S.A.BOLIVIASMC Pneumatics Bolivia S.r.l.BRAZILSMC Pneumaticos do Brasil Ltda.CHILESMC Pneumatics (Chile) S.A.COLOMBIASMC Colombia Sucursal de SMC Chile S.A.ECUADORASSISTECH CIA. LTDA.PERUIMPECO Automatizacion Industrial S.A.C.VENEZUELASMC Neumatica Venezuela S.A.

OCEANIAAUSTRALIASMC Pneumatics (Australia) Pty. Ltd.NEW ZEALANDSMC Pneumatics (N.Z.) Ltd.

EUROPE 

AUSTRIASMC Pneumatik GmbH (Austria)BELGIUMSMC Pneumatics N.V./S.A.BULGARIASMC Industrial Automation Bulgaria EoodCROATIASMC Industrijska Automatika d.o.o.CZECH REPUBLICSMC Industrial Automation CZ s.r.o.DENMARKSMC Pneumatik A/SESTONIASMC Pneumatics Estonia OÜFINLANDSMC Pneumatics Finland OyFRANCESMC Pneumatique SAGERMANYSMC Pneumatik GmbHGREECESMC Hellas E.P.E.HUNGARYSMC Hungary Ipari Automatizálási Kft.IRELANDSMC Pneumatics (Ireland) Ltd.ITALYSMC Italia S.p.A.KAZAKHSTANLLP “SMC Kazakhstan”LATVIASMC Pnuematics Latvia SIALITHUANIAUAB “SMC Pneumatics”NETHERLANDSSMC Pneumatics B.V.NORWAYSMC Pneumatics Norway AS