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8/21/2019 SMC Pneumatics in Process Automation
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Clean Room
Exhaust Cleanerfor Clean Room
Production FacilityPneumatic Instrumentation Equipment
Piping Equipment for Facilities
Air Piping Line
Water Piping Line
Industrial water(Municipal water)
Steam Deionized water/
Chemical liquids
Compressed air Inert gas
(Nitrogen, Argon,etc.)
Tank
Flow
Switch
FlowSwitch
Dryer
Filter
Filter
Compressor
CoolingTower Filter
CompressorRoom
P-E07-9E
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For Pneumatic Control in
Process AutomationP AP A
Air Preparation Equipment
Detection Conversion Unit
Air Dryers Air Preparation Filters
Industrial Filters
Pressure Sensors Flow Sensors
Compressor
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In principle, SMC products cannot be used outdoors.
Factory AutomationF AF A
Pressure Control Equipment Piping Material
Operation Unit
Actuators
Fittings/S Couplers Tubing
Explosion-proofSpecifications
NAMUR Standards
Relay Electro-Pneumatic
Transducer
Booster relay
Electro-pneumatictransducer
Intrinsically safeexplosion-proof
Explosion proof(Flameproof)
IP67
Stainless steel series
Coil tube
Double-layered tube
Longer length tube
Lock-up valve
Lever type
Rotary type
Cylinder
with Positioner
Solenoid Valves Accessories Positioners
2
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wAftercoolerqAir Tank
eMain Line Filter
Series ATTank capacity
100 to 3000 L
Port size
15A (1/2) to 4B flange
Air-cooled Series HAAApplicable compressor 7.5 to 37 kW
Air flow capacity 1000 to 5700 L/min (ANR)
Water-cooled Series HAWApplicable compressor 2.2 to 110 kWAir flow capacity 300 to 18000 L/min (ANR)
Series AFFFiltration accuracy
3 µm (99% filtration efficiency)
Rated flow
300 to 45000 L/min (ANR)Port size
6A (1/8) to 4B flange
q w e r t y u
RefrigeratedAir Dryer
AftercoolerMist
Separator
i
Super MistSeparator
Air TankMicro MistSeparator
oOdor
Removal Filter
(Deodorization)
Flow SwitchMain Line
Filter
Refrigerant: R134a (HFC) R407C (HFC)
Ozone-depleting potential “0”
Series IDF 1E to 370DApplicable compressor 0.75 to 370 kW
Air flow capacity 0.10 to 65.0 m3 /min (ANR)
Series IDU 3E to 75EApplicable compressor 2.2 to 75 kW
Air flow capacity 0.32 to 12.4 m3 /min (ANR)
rRefrigerated Air Dryer
Series IDF 100FS/125FS/150FSDouble energy saving function series
Applicable compressor100, 125, 150 kW
Air flow capacity18.8 to 27.0 m3 /min (ANR)
tFlow Switch
Series PF2AMeasurement flow rate (L/min)
1 to 10, 5 to 50, 10 to 100, 20 to 20050 to 500, 150 to 3000300 to 6000, 600 to 12000
Port size 6A to 50A (1/8 to 2)
Series AMEFiltration accuracy
0.01 µm (99.9% filtration efficiency)
Rated flow200 to 12000 L/min (ANR)
Port size 6A to 50A (1/8 to 2)
iSuper Mist SeparatoruMicro Mist Separator
oOdor Removal Filter
Series AMF
Filtration accuracy0.01 µm (99.9% filtration efficiency)
Rated flow200 to 40000 L/min (ANR)
Port size 6A (1/8) to 6B flange
Series AMDFiltration accuracy
0.01 µm (99.9% filtration efficiency)
Rated flow200 to 40000 L/min (ANR)
Port size 6A (1/8) to 6B flange
Series AMFiltration accuracy
0.3 µm (99.9% filtration efficiency)
Rated flow300 to 12000 L/min (ANR)
Port size 6A to 50A (1/8 to 2)
yMist Separator
“Compressed Air” Line
Water Separator
Series AMGDehumidification rate 99%
Rated flow300 to 12000 L/min (ANR)
Port size 6A to 50A (1/8 to 2)
Water drop removal
Compressor
Pressure
accumulation,Pulsationattenuation
Particle separation/
Filtration
Pressure
accumulation,Pulsationattenuation
Flow rate detection
Water drop removal
Flow rate detection
Oil separation/
Filtration
Particle separation/
Filtration
Oil separation/
Filtration
Cooling,
Removing waterroughly
Dehumidification
Oil separation/
Filtration
DeodorizationDeodorization
Oil separation/
Filtration
Cooling,
Removing waterroughly
Dehumidification
Oil separation/
Filtration
Oil separation/
Filtration
3
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Production FacilityPneumatic Instrumentation Equipment/Piping Equipment for Facilities
Series KKAFluid
Air, Water
Port size6A to 50A (1/8 to 11/2)
S Couplers/Stainless Steel 304
Series LQFluid
Deionized water, Chemical liquids, etc.(Please contact SMC for details.)
Applicable tubing O.D.ø3 to ø25
Fluoropolymer Fittings
Clean One-touch Fittings
Series KPFluid
Air, N2, Water (Deionized water)(Please contact SMC for details.)
Applicable tubing O.D.ø4 to ø12
Series KFFluid
Air, Steam (Brass sleeve)
Air, Water (Resin sleeve)
Applicable tubing O.D.ø4 to ø12
Insert Fittings
Brass sleeve
Resin sleeve
Series KQG2Fluid
Air, Water, Steam
Applicable tubing O.D.ø3.2 to ø16
Stainless Steel 316 One-touch Fittings
Series KQ2Fluid
Air, Water
Applicable tubing O.D.ø2 to ø16
One-touch Fittings
Piping Equipment (Fittings and Tubing)
Series KKFluid Air, Water
Applicable tubing O.D. ø3.2 to ø16
Applicable hose I.D./ O.D. 5/8 to 11/16
Port size M5 to 25A (3/4)
Series KK130Fluid Air
Applicable tubing O.D. ø6 to ø12
Applicable hose I.D./ O.D. 5/8 to 11/16
Port size 6A to 15A (1/8 to 1/2)
S Couplers
Series H,DL,L,LLFluid
Air
Applicable tubing O.D.ø4 to ø12
Self-align Fittings
Series KQB2Fluid
Air, Water
Applicable tubing O.D.ø3.2 to ø16
Metal One-touch Fittings
Series KFG2Fluid
Air, Water, Steam
Applicable tubing O.D.ø4 to ø16
Stainless Steel 316 Insert Fittings
Series
T
TS
TU
TUS
TUH
TPH,TPS
TH
TD
TQ
TL
TLM
Air, Water, Inert gas,
Solvent
Length: Up to 500-meter rolls can be used, but the maximum roll length depends on tube
materials and external diameter. Please consult SMC for details. (Made to Order)
Note) Please contact SMC for details.
Series T
Tubing
500 m reel
Material
Nylon
Nylon (Soft Nylon)
Polyurethane
Polyurethane (Soft Polyurethane)
Polyurethane (Hard polyurethane)
Polyolefin-based resin
FEP (Fluoropolymer)
Modified PTFE (Soft Fluoropolymer)
Super PFA
PFA
Fluid
Air, Water
Air, Water Note)
Air, Water
Air
Air
Air, N2, Water (Deionized water)Note)
Air, Water, Inert gas
Air, Water, Inert gas
Deionized water, Chemical liquids, etc.Note)
Air, Water, Inert gas
O.D.
ø4 to ø16
ø4 to ø16
ø2 to ø16
ø4 to ø12
ø4 to ø12
ø4 to ø12
ø4 to ø12
ø4 to ø12
ø4 to ø12
ø4 to ø19
ø2 to ø25
Outer layer: Special nylon resin
Inner layer: Special fluoropolymer
4
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SMC Air Preparation System
HAW
Cooling
Separation, Filtration
Main Line
AT AFF
IDF
HAA orHAW
B
C
D
E
F
G
H
HAA orHAW
Dehumidification
IDU
Sub Line
12
3
4
5
6
7
C l a s s
≤ 0.10
Not specifiedNot specified
Not specified
Not specified
Not specified
0.10 < d ≤ 0.5
100100000
Not specified
Not specified
Not specified
0.5 < d ≤ 1.0
11000
10000
Not specified
Not specified
1.0 < d ≤ 5.0
010
500
1000
20000
Max. number of particles/1 m3
Particle diameter d µm
NA
NA
Solid particle
Particlediameterµm
NA
≤ 5
≤ 40
Concen-tration
mg/m3
NA
≤ 5
≤ 10
12
3
4
Oil
mg/m3
≤ 0.01≤ 0.1
≤ 1
≤ 5
1
2
3
4
5
6
Moisture
Pressure dew point
At air pressure( of 0.7 MPa )°C
≤ –70
≤ –40
≤ –20
≤ +3
≤ +7
≤ +10
C l a s s
C l a s s
Indication: The degree of quality is indicated with 1, 4 and 2 for systems withsolid particle “class 1,” moisture “class 4” and oil “class 2.”
Application Moisture
Dewpoint
Moisturecontent
Impurity in compressed air
S y s t e m n
o .
F i l t r a t i o n
C l e a n l i n e s s
O
i l o d o r
Q u a l i t y g r a d e
a s
s y s t e m ( 2
)
O
i l m i s t
d e
n s i t y ( 1 )
Water drop removal air
A •
•
Air blowing (Simpleremoval of particles)Generalpneumatic tools
Dry air
Dry air
Dry clean air
Dry clean air
• Used for the sameapplications as A,when temperaturedrop in the middleof piping is large.
•
•
General pneumaticequipmentGeneral painting
•
•
•
•
•
•
High grade paintingSequence controlMeasurement deviceInstrumentationDrying and cleaning (Precision parts)Machine tools (Pneumatic bearing)
•
•
Without refrigerated airdryer on the sub lineBuilt-in with equipment(With machine tools, 3-Dmeasurement device, etc.)
Deodorant air
Low dew point clean air
Low dew point clean air(For clean room)
•
•
Stirring, transporting,drying and packagingFood industry (Exceptdirect blowing to foods)
•
•
•
•
•
Drying electric and electronic partsDrying a filling tankTransporting powdersOzone generatorLow temperature actuatedequipment
• Blowing semi-
conductor partsin the clean room
Note 1) When the inlet oil mist density (compressed air density) is approximately 30 mg/m3 (ANR) or less.Note 2) This describes the grade of compressed air quality based on ISO8573-1: 2001 (JIS B8392-1: 2003), which is the maximum quality grade for the system.
It varies, however, depending on the inlet air conditions.Note 3) Contact SMC since this can be manufactured as a special order (depending on the operating conditions).
3 µmFiltering
efficiency( 99%
)
0.3 µm
Filteringefficiency( 99.9% )
0.01 µm
Filtering
efficiency
( 99.9% )
0.01 µm
Filtering
efficiency
( 99.99% )
—
Max.1 mg/m3
(ANR)
0.8 ppm
Max.0.1 mg/m3
(ANR)
0.08 ppm
Max.0.01 mg/m3
(ANR)
0.008 ppm
Max.0.004 mg/m3
(ANR)
0.0032 ppm
Max.0.004 mg/m3
(ANR)
0.0032 ppm
Max.0.01 mg/m3
(ANR)
0.008 ppm
—
Particles
with
0.3 µm
or more:100 or
less/ft3
(35 or
less/
10 L
(ANR))
Particles
with
0.1 µm
or more:0/6 L
Yes
Yes
No
No
3, -, -
3, 4, -3, 5, -3, 6, -
2, 4, 3
2, 5, 32, 6, 3
1, 4, 21, 5, 21, 6, 2
1, 4, 11, 5, 1
1, 6, 1
1, 1, 11, 2, 11, 3, 1
Atmosphericpressure dew point
6°C
0.7 MPaPressure dew point
40°C
Atmospheric
pressure
dew point
–14 to
–23°C
0.7 MPa
Pressure
dew point
15 to 3°C
Atmospheric
pressure
dew point
–30 to
–60°C
0.7 MPa
Pressure
dew point
–6 to
–42°C
7 g/m3
(ANR)
1.7 g/m3
(ANR)
to
0.8 g/m3
(ANR)
0.5 g/m3
(ANR)
to
0.02 g/m3
(ANR)
(3)
Description
Capacity
Air Tank
AT HAA, HAW IDFAFF
Air Cooled Aftercooler
Water Cooled Aftercooler
Main LineFilter
Refrigerated Air Dryer
Representative model
Max. inlet airtemperature
Filtration(Filtering efficiency)
Outlet oil mistconcentration(Max.) (1)
Outletcleanliness
100°C 60°C
3 µm(99%)
50°C
Flow capacity(L/min (ANR))
1,000 to 5,700300 to 18,000
70°C70°C, 180°C(Varies by model)
300 to 42,000 100 to 65,000100 to 3,000 L
–17°CAt inlet temperature 35°C
IDU
80°C
320 to 12,500
–17°CAt inlet temperature 55°C
Air Tank
Class 2pressurevessel
Main LineFilter
Not required when attachedto air compressors.
Dehumidification
Applicableair compressors:5.5 kW (7 hp)to 220 kW(300 hp)
HAA
HAW
RefrigeratedAir Dryer
Applicableair compressors:7.5 kW (10 hp)to 37 kW (50 hp)
Applicableair compressors:2.2 kW (3 hp)to 240 kW(320 hp)
Applicableair compressors:2.2 kW (3 hp)to 110 kW(150 hp)
Reciprocatingair compressor
Screw aircompressor
Outlet air pressuredew point10°C
(0.7 MPa, at 35°C)
Applicableair compressors:0.75 kW (1 hp)to 370 kW(500 hp)
Refrigerated Air Dryer
(High inlet airtemperature type)
Outlet air pressuredew point10°C(0.7 MPa, at 55°C)
Applicableair compressors:2.2 kW (3 hp) to75 kW (100 hp)
Oil con-centra-
tion
Atmospheric pressure
dew point [At inlet airpressure of 0.7 MPa]
Pulsation attenuation,Accumulation,
Cooling Select either Air CooledAftercooleror Water CooledAftercooler
AFF
Required even for screw compressorssince the piping of the oil-free type isrusted easily.
Not required when attachedto air compressors.
Air tank is not required for rotary screwcompressors since pulsation is small, butrequired when it is used to accumulate pressure.
Required for reciprocating air compressorssince carbon and tarry substances aregenerated at high temperatures.
5
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Production FacilityPneumatic Instrumentation Equipment/Piping Equipment for Facilities
A
B
C
D
E
F
G
H
Local line
AM
AMH
AMH IDG AME
AMF
AMF SFD
AMEAMDAM
AMH
AME
AME
AMD
AMDAM
IDG
IDG
AMD
AMH
AMH
AM ID
IDAM
AMG
AMG AMH AMD IDG AME AMFAM ID SFD
SFA/SFB/SFC
WaterSeparator
HeatlessAir Dryer
MistSeparator
Micro MistSeparator
with Pre-filter
Odor RemovalFilter
Micro MistSeparator
Super MistSeparator
Membrane Air DryerClean
Gas FilterClean
Air Filter
SFA, SFB, SFC
50°C, 55°C(Varies by model)
80°C, 120°C(Varies by models)
60°C 60°C 60°C50°C 50°C
300 to 12,000 80 to 780 200 to 12,000 200 to 40,000 10 to 1,000 200 to 12,000 200 to 40,000 26 to 300
45°C
100 to 50075 to 30050 to 150
0.3 µm(99.9%)
0.01 µm(99.9%)
0.01 µm(99.99%)
0.01 µm(99.9%)
Water drop removal ratio99%
0.01 µm(With 0.3 µm
pre-filter)
1 mg/m3 (ANR)
[ ≈ 0.8 ppm]
0.01 mg/m3 (ANR)
[ ≈ 0.008 ppm]
0.004 mg/m3
(ANR)[ ≈ 0.0032 ppm]
0.1 mg/m3 (ANR)
[ ≈ 0.08 ppm]
Particles with 0.3 µmor more: 100 or less/ft3
(35 or less/10 L (ANR))
0.01 µm(99.99%)
–30°C –50°CAt inlet temperature 35°C
–15°C –20°CAt inlet temperature 25°C
–40°C –60°CAt inlet temperature 25°C
Water Separator
Mist Separator
Micro MistSeparator
Micro MistSeparatorwith Pre-filter
With 0.3 µm pre-filter/ Integrated AM + AMD
MembraneAir Dryer
Super MistSeparator
Odor RemovalFilter
With oil saturationindicator
Atmospheric pressure dew point–15°C, –20°C(0.7 MPa, at 25°C)
CleanGas Filter
CleanAir Filter
MembraneAir Dryer
Atmospheric pressure dew point–40°C, –60°C(0.7 MPa, at 25°C)
HeatlessAir Dryer
Atmospheric pressure dew point–30°C, –50°C(0.7 MPa, at 35°C)
Filtration
Precision filtration
Water droplet separation
Separation, Filtration
Separation, Filtration
Separation, Filtration
Dehumidification
Dehumidification
Deodorization
Dehumidification
Particles with 0.1 µm
or more: 0/6 L
6
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Pressure SwitchMain Line Filter Filter Regulator
Positioner
Serial Communication Valve
Sanitary Valve Control
Flow Switch
q w e r t
y
Manifold withSupply Stop Valve
rFilter Regulator
wPressure Switch
eFlow Switch
tPositioner
Series ISGSet pressure range
0.1 to 1.0 MPaPort size
10A (3/8)
Series 1301/IW
Filtration accuracy5 µm
Set pressure range0.02 to 0.5 MPa
Port size8A (1/4)
Series IP Input current
4 to 20 mADCPort size
8A (1/4)
yReduced-wiring Fieldbus System (Serial Transmission System)
Series SY/VQC· DeviceNetTM
· CC-Link
· PROFIBUS DP· AS-Interface
· CANopen
· EtherNet/IPTM
· CompoNetTM
· EtherCAT ®
· PROFINET
qMain Line Filter
Series AFFFiltration accuracy
3 µm (95% filtered particle size)
Rated flow300 to 42000 L/min (ANR)
Port size6A (1/8) to 4B flange
Double-layered Tube for Instrumentation Device (single-tubed/double-tubed)
Trademark DeviceNet™ is a trademark of ODVA. EtherNet/IP™ is a trademark of ODVA. CompoNet™ is a trademark of ODVA.EtherCAT ® is registered trademark and patented technology, licensed by Beckhoff Automation GmbH, Germany.
IN-241-
-
T0604 to T1075--- (X120, X121, X166)Double-layered tube with an external layer of vinyl chloride orpolyolefin to protect the inner tube-Double-tubed type (Color:black + black/black + white) and 300 m length are available.∗ If you need a different no. of tubes, different colors or lengths over
300 mm, please contact our sales representatives.
Explosion-proofSolenoid Valve
NAMUR StandardsSolenoid Valve
Outer layer:
Vinyl chloride orPolyolefin-based resin
Inner Special: Nylon
Explosion-proof Solenoid Valve
51-SY5000/7000/900050-VFE3000/500050-VPE500/700
NAMUR Standards Solenoid Valve
VFN2120N-X23VFN2120N-X36Air operated type
Solenoid valve for actuating a sanitary valve, etc.
Conforming to NAMUR standards
Manifold with Supply Stop Valve
SS5Y3-X460, SS5Y5-X4601SS5Y7-X460, SS5Y3-X2104The supply pressure can be stopped individually.Solenoid valve can be replaced without shuttingoff the supply pressure in case of emergency.
Pneumatic Instrumentation Equipment
Series PF2A
Measurement flow rate (L/min)1 to 10, 5 to 50, 10 to 100, 20 to 20050 to 500, 150 to 3000
300 to 6000, 600 to 12000
Port size6A to 50A (1/8 to 2)
Pressure adjustment
Particle separation/
Filtration
Pressure detection
Flow rate detection
Actuator control Reduced wiring
Particle separation/
Filtration
Pressure adjustment
Particle separation/
Filtration
Pressure detection
Flow rate detection
Actuator control Reduced wiring
Particle separation/
Filtration
7
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Element
q w e r
t
y
y
Pump
Cooling Tower(Cooling building)
<Air-cooled Refrigerated Type>
<Water-cooled Refrigerated Type>
Boiler
Installing extra cooling towers can be troublesome.The HRSH (air-cooled refrigerated type) can be
moved easily to wherever you need it, when you
need it. Cooling water is supplied from theattached hose.
wFlow SwitchqIndustrial Filter
ePressure Switch
t2 Port Valve (for Steam)
yCirculating Fluid Temperature Controller Thermo-cooler
Series PF3WMeasurement flow rate (L/min)
0.5 to 4, 2 to 16, 5 to 40
10 to 100, 50 to 250Port size
10A to 40A (3/8 to 1 1/2)
Series IFW5Set flow rate range (L/min)
1 to 10, 10 to 20, 20 to 50Port size
3/8 to 3/4
Series VXOrifice diameter
ø3 to ø50Port size
Thread: 6A to 50A (1/8 to 2)Flange: 32A to 50A
Series FG/FQ/FNNominal filtration accuracy
0.5 to 120 µmPort size
Thread: 10A to 50A (3/8 to 2)Flange: 25A to 150A (1B to 6B)
Series ISE80Rated pressure range
−0.100 to 2.000 MPaPort size
M5, 6A (1/8), 8A (1/4)
r2 Port Valve
Series HRSHSet temperature 5 to 35°C
Port size Rc1
Cooling capacity (60Hz) 10 to 25 kW (air-cooled, water-cooled)
Series VNDOrifice diameter
ø7 to ø50Port size
Thread: 6A to 50A (1/8 to 2)Flange: 32F to 50F
Check Valve
INA-14-290 (Brass, Rc: 1/8)
XTO-674-
(Brass, Rc: 1/4 to 1/2)INA-14- (All stainless steel, Rc: 1/4 to 1/2)
Series IF3Set flow rate range (L/min)
14 to 60, 20 to 1500
36 to 2600Port size
3/4, 1
This equipment supplies temperature-controlled water to the heat
source in a circular manner.
“Industrial Water (Municipal Water)” Line
Production FacilityPneumatic Instrumentation Equipment/Piping Equipment for Facilities
Particle separation/
Filtration
Flow rate detection
Pressure detection
Flow rate control Flow rate control
Cooling water
temperature control
Particle separation/
Filtration
Flow rate detection
Pressure detection
Flow rate control Flow rate control
Cooling water
temperature control
8
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Clean Air Module
N2 Bomb
q w e t
y
r
N i t r o g e n
w2 Port ValveqRegulator
tClean Gas Filter yClean Air Module
Series VXOrifice diameter
ø3 to ø50Port size
Thread: 6A to 50A (1/8 to 2)
Flange: 32A to 50A
Series ISE
Rated pressure range−0.100 to 1.000 MPaPort size
M5, 6A (1/8), 8A (1/4)
Series SRHSet pressure range
0.05 to 0.7 MPaPort size
6A to 15A (1/8 to 1/2)
Series AP/AZ/AK
Series LLB
Filtration accuracy 0.01 µmPort size 8A to 10A (1/4 to 3/8)
rPressure Switch
Series SFFiltration accuracy
0.01 µmPort size
8A to 10A (1/4 to 3/8)
Piping Equipment
eFlow Switch
Series PF2A
Measurement flow rate (L/min)1 to 10, 5 to 50, 10 to 100, 20 to 200
50 to 500, 150 to 3000
300 to 6000, 600 to 12000
Port size6A to 50A (1/8 to 2)
Stainless Steel 316 Fittings: Series KQG2/KFG2Clean One-touch Fittings: Series KPFluoropolymer Tubing: Series TH/TL/TD/TLM/TQClean Tubing: Series TPH/TPS
“Inert Gas” “Clean Dry Air” Line
A flow switch, regulator, 2 port valve, restrictor,
and filter have been combined into a single unit.
Easily obtains clean air.
Pressure adjustment Fluid control
Pressure detection
Particle separation
/Fil tra tionModularization
Flow rate detection
Pressure adjustment Fluid control
Pressure detection
Particle separation
/Fil trat ionModularization
Flow rate detection
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q w e r t
r2 Port Valve
qPump wRegulator
eFlow Switch
tRestrictor
SeriesSRFPort size
Integral fitting: Applicable tubing O.D.ø4 to ø19
Tube extension: 1/4" to 3/4"Set pressure range
0.02 to 0.4 MPa
Series LVPort size
Thread: (1/8 to 1) / 6A to 25AIntegral fitting: Applicable tubing O.D.
ø3 to ø25Tube extension: ø3 to ø25
Orifice diameterø2 to ø22
Series LVPApplicable tubing O.D.
16A, 20A, 25AOrifice diameter
ø16, ø22
Process Pump: SeriesPAFDischarge flow rate
1 to 45 L/minPort size
Thread: (3/8, 3/4)/10A, 20ATube extension: 1/2", 3/4"With nut: Connection
fitting size4 or 5(LQ1, LQ3)
Series PF2DMeasurement flow rate
0.4 to 40 L/minPort size
Tube extension: 3/8" to 3/4"
Series PF3WMeasurement flow rate (L/min)
10 to 100, 30 to 250Port size
PVC tubing O.D. 25A, 30A
Needle Valve: Series LVNPort size
Integral fitting: Applicable tubing O.D. ø4 to ø12Orifice diameter
ø4.4 to ø10
Piping Equipment
Quick Drain Valve: Series LVWApplicable tubing O.D.
ø32 to ø89 (25A to 80A)
“Deionized Water/Chemical Liquids” Line
Fluoropolymer Fittings: Series LQFluoropolymer Tubing: Series TH/TL/TD/TLM/TQ
Production FacilityPneumatic Instrumentation Equipment/Piping Equipment for Facilities
Liquid discharge Pressure adjustment
Flow rate detection Liquid discharge
Flow rate adjustment
Liquid discharge Pressure adjustment
Flow rate detection Liquid discharge
Flow rate adjustment
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