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22 bd Benoni Goullin 44200 NANTES - FRANCE +33 2 40 18 09 16 [email protected] www.systemplus.fr Skyworks’ FBAR-BAW Filter Technology in 2G/UHB PAMiD SKY78221 SP20546 - RF report by Stéphane ELISABETH LABORATORY ANALYSIS done by Guillaume CHEVALIER July 2020 – Sample REVERSE COSTING® – STRUCTURAL, PROCESS & COST REPORT

Skyworks’ FBAR-BAW Filter Technology...©2020 by System Plus Consulting | SP20546 –Skyworks’ FBAR-BAW filter technology in 2G/UHB PAMiD SKY78221 | Sample 10 Overview / Introduction

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Page 1: Skyworks’ FBAR-BAW Filter Technology...©2020 by System Plus Consulting | SP20546 –Skyworks’ FBAR-BAW filter technology in 2G/UHB PAMiD SKY78221 | Sample 10 Overview / Introduction

©2020 by System Plus Consulting | SP20546 – Skyworks’ FBAR-BAW filter technology in 2G/UHB PAMiD SKY78221 | Sample 1

22 bd Benoni Goullin44200 NANTES - FRANCE +33 2 40 18 09 16 [email protected] www.systemplus.fr

Skyworks’ FBAR-BAW Filter Technology in 2G/UHB PAMiD SKY78221SP20546 - RF report by Stéphane ELISABETH

LABORATORY ANALYSIS done by Guillaume CHEVALIERJuly 2020 – Sample

REVERSE COSTING® – STRUCTURAL, PROCESS & COST REPORT

Page 2: Skyworks’ FBAR-BAW Filter Technology...©2020 by System Plus Consulting | SP20546 –Skyworks’ FBAR-BAW filter technology in 2G/UHB PAMiD SKY78221 | Sample 10 Overview / Introduction

©2020 by System Plus Consulting | SP20546 – Skyworks’ FBAR-BAW filter technology in 2G/UHB PAMiD SKY78221 | Sample 2

Table of Contents

Overview / Introduction 4

o Executive Summary

o Reverse Costing Methodology

Company Profile 8

o Skyworks

o RF Filters technology

o Piezoelectric Filters technology

o Apple iPhone 11 Pro Max Teardown

Market Analysis Analysis 17

o RFFE Market Forecast

o RFFE Ecosystem and Supply Chain

o RF Filter technology Forecast

Physical Analysis 24

o Summary of the Physical Analysis 25

o Module Assembly 27

✓ Module Views, and Dimensions

✓ Module Opening

o Filter Die 30

✓ Filter Die View & Dimensions

✓ Filter Die Opening & Schematic

✓ Filter Die Overview

✓ Filter Die Cross-Section

✓ Filter Die Process Characteristic

Broadcom vs. Skyworks FBAR-BAW Filter 67

✓ Density and Size

✓ Packaging and Structure

Filter Manufacturing Process 71

o Summary of the main parts

o Filter Die Front-End Process & Fabrication Unit

o Filter Die Process Flow

Cost Analysis 82

o Summary of the cost analysis 83

o Yields Explanation & Hypotheses 85

o Filter die 87

✓ Filter Die Front-End Cost and Step Cost

✓ Filter Die Probe Test, Thinning & Dicing

✓ Filter Wafer & Die Cost

Comparison Cost 93

✓ Broadcom vs. Skyworks FBAR-BAW Filter

✓ Qorvo SMR vs. Skyworks FBAR BAW Filter

Feedbacks 96

SystemPlus Consulting services 98

Page 3: Skyworks’ FBAR-BAW Filter Technology...©2020 by System Plus Consulting | SP20546 –Skyworks’ FBAR-BAW filter technology in 2G/UHB PAMiD SKY78221 | Sample 10 Overview / Introduction

©2020 by System Plus Consulting | SP20546 – Skyworks’ FBAR-BAW filter technology in 2G/UHB PAMiD SKY78221 | Sample 3

Overview / Introductiono Executive Summaryo Reverse Costing Methodologyo Glossary

Company Profile & Supply Chain

Market Analysis

Physical Analysis

Physical Comparison

Manufacturing Process Flow

Cost Analysis

Cost Comparison

Feedbacks

Related Reports

About System Plus

Executive Summary

This full reverse costing study has been conducted to provide insight on technology data, manufacturing cost and selling priceof the Skyworks’ BAW Filter in SKY78221 2G PAM + UHB PAMiD.

In the smartphone’s OEMs market, Apple is one of the most profitable companies with around 40% of the market share in2018 representing more than $400 billion. As a supplier for the company, module and filter manufacturer must be reliable andhighly innovative to follow the spirit of Apple. Until 2019, Skyworks was known for its high performances SAW filters and Low-Band/Mid Band modules. Today, with its newly developed BAW filter on HVM, the company is embracing the 5G Sub-6 waveby offering UHB module. By doing so, Skyworks is now able to compete with Qorvo or Broadcom on this area of frequency.

In 2019 and even in 2020, Skyworks is supplying Apple with a Power Amplifier Module (PAM) that features 2G connectivity andUHB Front-End in the same packaging. The module is integrated in the Apple iPhone Series: 11, 11 Pro and 11 Pro Max, butalso in the latest Apple iPad Pro 2nd Gen. under the model SKY78201. Depending on the version, the module is featuringseveral dies: power Amplifier (PA), Silicon-on-insulator (SOI) Switch and Low-Noise Amplifier (LNA), Integrated Passive Device(IPD), Surface Acoustic Wave (SAW) Filter and Film bulk Acoustic Resonator (FBAR) filters.

This report will only focus on the FBAR filters. The component is using an innovative silicon cap bonded wafer Chip-Scalepackaging (CSP) technology with Through-Silicon Vias (TSVs) enabling electrical contacts and scandium doped AluminiumNitride (AlScN) as a piezoelectric material. This newly developed device is implementing a simple ladder structure with adensity comparable to its major competitor. To seal the internal structure, the packaging is using a eutectic bonding with Au-Snsolder.

The report contains a deep analysis of the filter die with a complete cost analysis of the component. It also integrates acomparison with the Broadcom’s FBAR and Qorvo’s SMR BAW filter technology also integrated in the Apple iPhone series.

Page 4: Skyworks’ FBAR-BAW Filter Technology...©2020 by System Plus Consulting | SP20546 –Skyworks’ FBAR-BAW filter technology in 2G/UHB PAMiD SKY78221 | Sample 10 Overview / Introduction

©2020 by System Plus Consulting | SP20546 – Skyworks’ FBAR-BAW filter technology in 2G/UHB PAMiD SKY78221 | Sample 4

Overview / Introduction

Company Profile & Supply Chain o Skyworkso RF Filters technologyo Piezoelectric Filters technology o Apple iPhone 11 Pro Max

Teardown

Market Analysis

Physical Analysis

Physical Comparison

Manufacturing Process Flow

Cost Analysis

Cost Comparison

Feedbacks

Related Reports

About System Plus

Piezoelectric Filters Technology

TC-SAWSAW BAW-SMR BAW-FBAR BAW-XBAR

Lateral propagation Vertical propagation

Page 5: Skyworks’ FBAR-BAW Filter Technology...©2020 by System Plus Consulting | SP20546 –Skyworks’ FBAR-BAW filter technology in 2G/UHB PAMiD SKY78221 | Sample 10 Overview / Introduction

©2020 by System Plus Consulting | SP20546 – Skyworks’ FBAR-BAW filter technology in 2G/UHB PAMiD SKY78221 | Sample 5

Overview / Introduction

Company Profile & Supply Chain

Market Analysis

Physical Analysis o Synthesiso Module Assembly

o Views & Dimensionso Opening

o Filter Dieo Views & Dimensionso Openingo Die Overviewo Die Cross-section

o Synthesis

Physical Comparison

Manufacturing Process Flow

Cost Analysis

Cost Comparison

Feedbacks

Related Reports

About System Plus

Summary of the Physical Analysis

Page 6: Skyworks’ FBAR-BAW Filter Technology...©2020 by System Plus Consulting | SP20546 –Skyworks’ FBAR-BAW filter technology in 2G/UHB PAMiD SKY78221 | Sample 10 Overview / Introduction

©2020 by System Plus Consulting | SP20546 – Skyworks’ FBAR-BAW filter technology in 2G/UHB PAMiD SKY78221 | Sample 6

Overview / Introduction

Company Profile & Supply Chain

Market Analysis

Physical Analysis o Synthesiso Module Assembly

o Views & Dimensionso Opening

o Filter Dieo Views & Dimensionso Openingo Die Overviewo Die Cross-section

o Synthesis

Physical Comparison

Manufacturing Process Flow

Cost Analysis

Cost Comparison

Feedbacks

Related Reports

About System Plus

Package Views and Dimensions

Package Top View – Optical View©2020 by System Plus Consulting

Package Bottom View – Optical View©2020 by System Plus Consulting

Package Side View – Optical View©2020 by System Plus Consulting

• Package Type : XX-balls BGA

• Dimensions : XX mm² x XX mm(XX x XX x XX mm)

• Pin Pitch : XX mm

• Marking : <Logo Skyworks>

78221-17

9620847

1924 MX

XX

mm

XX

mm

XX mm

Page 7: Skyworks’ FBAR-BAW Filter Technology...©2020 by System Plus Consulting | SP20546 –Skyworks’ FBAR-BAW filter technology in 2G/UHB PAMiD SKY78221 | Sample 10 Overview / Introduction

©2020 by System Plus Consulting | SP20546 – Skyworks’ FBAR-BAW filter technology in 2G/UHB PAMiD SKY78221 | Sample 7

Overview / Introduction

Company Profile & Supply Chain

Market Analysis

Physical Analysis o Synthesiso Module Assembly

o Views & Dimensionso Opening

o Filter Dieo Views & Dimensionso Openingo Die Overviewo Die Cross-section

o Synthesis

Physical Comparison

Manufacturing Process Flow

Cost Analysis

Cost Comparison

Feedbacks

Related Reports

About System Plus

Filter Die Views & Dimensions

XX

µm

XX

µm

XX µm

Package Top View – Optical View©2020 by System Plus Consulting

Package Bottom View – Optical View©2020 by System Plus Consulting

Package Side View – Optical View©2020 by System Plus Consulting

• Package Type : X-Pad WLCSP

• Dimensions : XX mm² x XX mm(XX x XX x XX µm)

• Pin Pitch : XX mm

Page 8: Skyworks’ FBAR-BAW Filter Technology...©2020 by System Plus Consulting | SP20546 –Skyworks’ FBAR-BAW filter technology in 2G/UHB PAMiD SKY78221 | Sample 10 Overview / Introduction

©2020 by System Plus Consulting | SP20546 – Skyworks’ FBAR-BAW filter technology in 2G/UHB PAMiD SKY78221 | Sample 8

Overview / Introduction

Company Profile & Supply Chain

Market Analysis

Physical Analysis o Synthesiso Module Assembly

o Views & Dimensionso Opening

o Filter Dieo Views & Dimensionso Openingo Die Overviewo Die Cross-section

o Synthesis

Physical Comparison

Manufacturing Process Flow

Cost Analysis

Cost Comparison

Feedbacks

Related Reports

About System Plus

Filter Die Schematic

Package Opened View – Bottom Substrate – Optical View©2020 by System Plus Consulting

BAW Filter – Schematic View©2020 by System Plus Consulting

XX(XX µm²)

XX(XX µm²)

XX(XX µm²)

XX(XX µm²)

XX(XX µm²)

Page 9: Skyworks’ FBAR-BAW Filter Technology...©2020 by System Plus Consulting | SP20546 –Skyworks’ FBAR-BAW filter technology in 2G/UHB PAMiD SKY78221 | Sample 10 Overview / Introduction

©2020 by System Plus Consulting | SP20546 – Skyworks’ FBAR-BAW filter technology in 2G/UHB PAMiD SKY78221 | Sample 9

Overview / Introduction

Company Profile & Supply Chain

Market Analysis

Physical Analysis o Synthesiso Module Assembly

o Views & Dimensionso Opening

o Filter Dieo Views & Dimensionso Openingo Die Overviewo Die Cross-section

o Synthesis

Physical Comparison

Manufacturing Process Flow

Cost Analysis

Cost Comparison

Feedbacks

Related Reports

About System Plus

Filter Die Overview

Page 10: Skyworks’ FBAR-BAW Filter Technology...©2020 by System Plus Consulting | SP20546 –Skyworks’ FBAR-BAW filter technology in 2G/UHB PAMiD SKY78221 | Sample 10 Overview / Introduction

©2020 by System Plus Consulting | SP20546 – Skyworks’ FBAR-BAW filter technology in 2G/UHB PAMiD SKY78221 | Sample 10

Overview / Introduction

Company Profile & Supply Chain

Market Analysis

Physical Analysis o Synthesiso Module Assembly

o Views & Dimensionso Opening

o Filter Dieo Views & Dimensionso Openingo Die Overviewo Die Cross-section

o Synthesis

Physical Comparison

Manufacturing Process Flow

Cost Analysis

Cost Comparison

Feedbacks

Related Reports

About System Plus

Filter Die Cross-Section

Page 11: Skyworks’ FBAR-BAW Filter Technology...©2020 by System Plus Consulting | SP20546 –Skyworks’ FBAR-BAW filter technology in 2G/UHB PAMiD SKY78221 | Sample 10 Overview / Introduction

©2020 by System Plus Consulting | SP20546 – Skyworks’ FBAR-BAW filter technology in 2G/UHB PAMiD SKY78221 | Sample 11

Overview / Introduction

Company Profile & Supply Chain

Market Analysis

Physical Analysis o Synthesiso Module Assembly

o Views & Dimensionso Opening

o Filter Dieo Views & Dimensionso Openingo Die Overviewo Die Cross-section

o Synthesis

Physical Comparison

Manufacturing Process Flow

Cost Analysis

Cost Comparison

Feedbacks

Related Reports

About System Plus

Filter Die Cross-Section

Die Overview – Optical View©2020 by System Plus Consulting

Die Cross-Section – SEM View©2020 by System Plus Consulting

Page 12: Skyworks’ FBAR-BAW Filter Technology...©2020 by System Plus Consulting | SP20546 –Skyworks’ FBAR-BAW filter technology in 2G/UHB PAMiD SKY78221 | Sample 10 Overview / Introduction

©2020 by System Plus Consulting | SP20546 – Skyworks’ FBAR-BAW filter technology in 2G/UHB PAMiD SKY78221 | Sample 12

Overview / Introduction

Company Profile & Supply Chain

Market Analysis

Physical Analysis

Physical Comparisono Broadcom vs Skyworks

Manufacturing Process Flow

Cost Analysis

Cost Comparison

Feedbacks

Related Reports

About System Plus

Package Comparison

Page 13: Skyworks’ FBAR-BAW Filter Technology...©2020 by System Plus Consulting | SP20546 –Skyworks’ FBAR-BAW filter technology in 2G/UHB PAMiD SKY78221 | Sample 10 Overview / Introduction

©2020 by System Plus Consulting | SP20546 – Skyworks’ FBAR-BAW filter technology in 2G/UHB PAMiD SKY78221 | Sample 13

Overview / Introduction

Company Profile & Supply Chain

Market Analysis

Physical Analysis

Physical Comparison

Manufacturing Process Flowo Filter Die Front-End Processo Filter Fabrication Unito Filter Die Process Flow

Cost Analysis

Cost Comparison

Feedbacks

Related Reports

About System Plus

Filter Process Flow

Page 14: Skyworks’ FBAR-BAW Filter Technology...©2020 by System Plus Consulting | SP20546 –Skyworks’ FBAR-BAW filter technology in 2G/UHB PAMiD SKY78221 | Sample 10 Overview / Introduction

©2020 by System Plus Consulting | SP20546 – Skyworks’ FBAR-BAW filter technology in 2G/UHB PAMiD SKY78221 | Sample 14

Overview / Introduction

Company Profile & Supply Chain

Market Analysis

Physical Analysis

Physical Comparison

Manufacturing Process Flow

Cost Analysiso Cost Analysis Summaryo Yields Explanation &

Hypotheseso Filter Die Cost

Cost Comparison

Feedbacks

Related Reports

About System Plus

Filter Front-End Cost

Page 15: Skyworks’ FBAR-BAW Filter Technology...©2020 by System Plus Consulting | SP20546 –Skyworks’ FBAR-BAW filter technology in 2G/UHB PAMiD SKY78221 | Sample 10 Overview / Introduction

©2020 by System Plus Consulting | SP20546 – Skyworks’ FBAR-BAW filter technology in 2G/UHB PAMiD SKY78221 | Sample 15

Overview / Introduction

Company Profile & Supply Chain

Market Analysis

Physical Analysis

Physical Comparison

Manufacturing Process Flow

Cost Analysiso Cost Analysis Summaryo Yields Explanation &

Hypotheseso Filter Die Cost

Cost Comparison

Feedbacks

Related Reports

About System Plus

Filter Front-End Cost per process steps (1/2)

Page 16: Skyworks’ FBAR-BAW Filter Technology...©2020 by System Plus Consulting | SP20546 –Skyworks’ FBAR-BAW filter technology in 2G/UHB PAMiD SKY78221 | Sample 10 Overview / Introduction

©2020 by System Plus Consulting | SP20546 – Skyworks’ FBAR-BAW filter technology in 2G/UHB PAMiD SKY78221 | Sample 16

Overview / Introduction

Company Profile & Supply Chain

Market Analysis

Physical Analysis

Physical Comparison

Manufacturing Process Flow

Cost Analysiso Cost Analysis Summaryo Yields Explanation &

Hypotheseso Filter Die Cost

Cost Comparison

Feedbacks

Related Reports

About System Plus

Filter Wafer & Die Cost

Page 17: Skyworks’ FBAR-BAW Filter Technology...©2020 by System Plus Consulting | SP20546 –Skyworks’ FBAR-BAW filter technology in 2G/UHB PAMiD SKY78221 | Sample 10 Overview / Introduction

©2020 by System Plus Consulting | SP20546 – Skyworks’ FBAR-BAW filter technology in 2G/UHB PAMiD SKY78221 | Sample 17

Overview / Introduction

Company Profile & Supply Chain

Market Analysis

Physical Analysis

Physical Comparison

Manufacturing Process Flow

Cost Analysis

Cost Comparisono Broadcom vs Skyworkso FBAR vs. SMR

Feedbacks

Related Reports

About System Plus

Cost Comparison

Page 18: Skyworks’ FBAR-BAW Filter Technology...©2020 by System Plus Consulting | SP20546 –Skyworks’ FBAR-BAW filter technology in 2G/UHB PAMiD SKY78221 | Sample 10 Overview / Introduction

©2020 by System Plus Consulting | SP20546 – Skyworks’ FBAR-BAW filter technology in 2G/UHB PAMiD SKY78221 | Sample 18

Overview / Introduction

Company Profile & Supply Chain

Market Analysis

Physical Analysis

Physical Comparison

Manufacturing Process Flow

Cost Analysis

Cost Comparisono Broadcom vs Skyworkso FBAR vs. SMR

Feedbacks

Related Reports

About System Plus

Cost Comparison

Page 19: Skyworks’ FBAR-BAW Filter Technology...©2020 by System Plus Consulting | SP20546 –Skyworks’ FBAR-BAW filter technology in 2G/UHB PAMiD SKY78221 | Sample 10 Overview / Introduction

©2020 by System Plus Consulting | SP20546 – Skyworks’ FBAR-BAW filter technology in 2G/UHB PAMiD SKY78221 | Sample 19

Overview / Introduction

Company Profile & Supply Chain

Market Analysis

Physical Analysis

Physical Comparison

Manufacturing Process Flow

Cost Analysis

Cost Comparison

Feedbacks

Related Reports

About System Plus

REVERSE COSTING ANALYSES - SYSTEM PLUS CONSULTING

Related Reports

MARKET AND TECHNOLOGY REPORTS - YOLE DÉVELOPPEMENT

RF• 5G’s Impact on RF Front-End Module and Connectivity for Cell phones 2019• Advanced RF System-in-Package for Cellphones 2019

REVERSE COSTING ANALYSES - SYSTEM PLUS CONSULTING

RF• Broadcom AFEM-8100 System-in-Package in the Apple iPhone 11 Series• RF Front-End Module Comparison 2020 – Volume 2• SAW Filter Comparison 2020• RF Front-End Module Comparison 2020 – Volume 1• Qorvo QM76018 RFFEM in the Apple iPhone Xr• Murata Incredible High Performance (IHP) SAW Filter

Page 20: Skyworks’ FBAR-BAW Filter Technology...©2020 by System Plus Consulting | SP20546 –Skyworks’ FBAR-BAW filter technology in 2G/UHB PAMiD SKY78221 | Sample 10 Overview / Introduction

©2020 by System Plus Consulting | SP20546 – Skyworks’ FBAR-BAW filter technology in 2G/UHB PAMiD SKY78221 | Sample 20

COMPANYSERVICES

Page 21: Skyworks’ FBAR-BAW Filter Technology...©2020 by System Plus Consulting | SP20546 –Skyworks’ FBAR-BAW filter technology in 2G/UHB PAMiD SKY78221 | Sample 10 Overview / Introduction

©2020 by System Plus Consulting | SP20546 – Skyworks’ FBAR-BAW filter technology in 2G/UHB PAMiD SKY78221 | Sample 21

Overview / Introduction

Company Profile & Supply Chain

Market Analysis

Physical Analysis

Physical Comparison

Manufacturing Process Flow

Cost Analysis

Cost Comparison

Feedbacks

Related Reports

About System Pluso Company serviceso Contact

Business Models Fields of Expertise

Custom Analyses(>130 analyses per year)

Reports(>60 reports per year)

Costing Tools

Trainings

Page 22: Skyworks’ FBAR-BAW Filter Technology...©2020 by System Plus Consulting | SP20546 –Skyworks’ FBAR-BAW filter technology in 2G/UHB PAMiD SKY78221 | Sample 10 Overview / Introduction

©2020 by System Plus Consulting | SP20546 – Skyworks’ FBAR-BAW filter technology in 2G/UHB PAMiD SKY78221 | Sample 22

Overview / Introduction

Company Profile & Supply Chain

Market Analysis

Physical Analysis

Physical Comparison

Manufacturing Process Flow

Cost Analysis

Cost Comparison

Feedbacks

Related Reports

About System Pluso Company serviceso Contact

Contact

Headquarters22 bd Benoni Goullin44200 NantesFRANCE+33 2 40 18 09 [email protected]

Europe Sales OfficeLizzie LEVENEZFrankfurt am MainGERMANY+49 151 23 54 41 [email protected]

www.systemplus.fr

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CORNELIUSYOLE Inc.

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Asia Sales OfficeTakashi ONOZAWATokyoJAPANT : +81 804 371 [email protected]

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