Series 48 Heater Jackets - MKS Instruments - Process ... · PDF fileImproved Heater Design • Control components reside inside controller, away from heat source extending heater life

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Series 48 heaters have been designed for safety, flexibility, power conservation, and advanced communications. The new design provides greater temperature control, improved thermal uniformity, increased performance, and further decreases system downtime.

Features & BenefitsNew Control Module• Useradjustabletemperaturesettingsforadvanced process control

• Communicationanddisplaymodulesprovidegreater temperature control versatility and functionality

• Re-settablehightemperaturesafetylimitdevice integrated into controller circuitry, eliminates the need for a thermal fuse

• User-friendlycontrolmoduleallowsforeasy modification of all controlling parameters

• Localheaterdigitaldisplayandcontroladjustment

• RS485communicationsallowsforremotedisplay, control, and diagnostics of individual heater status

• PIDandOn/Offcontroloptions

• Tuneableno-arcrelaygreatlyincreasescontroller lifetime

• ProgrammableLowTemperatureAlert/High Temperature Alert (LTA/HTA) integrated into controller circuitry

• MultipleLEDsdisplaycontroller/heateroperatingand alert conditions and status

Improved Heater Design• Controlcomponentsresideinsidecontroller,awayfrom heat source extending heater life

• Heatermatsdesignedtoachieveoptimumperformance and greater thermal uniformity

• Eachheatercanbeoperatedwithitsownunique control parameters

Enhanced Safety• Externalheatersurfacessafetotouch

• OptionalGroundFaultEquipmentLeakageCircuit Interrupter power cord eliminates shock hazard

Additional Features• Computersoftwareinterfaceavailableforsimplified heater control

• Customtemperaturesandpre-setsavailableupon request

• Fastdeliveryofstandardheaters

• Customheatersavailable

Nylon-capped metal snaps for easy installation or disassembly

Molded 1/2'' silicone foam conforms to tubing

Thermocouple embedded in heater mat

Series 48 heaters incorporate a new Integrated Temperature Controller, which provides improved thermal control versatility and functionality. The new control mechanism, along with optional modular display and communications upgrades, provide the user with the ability to adjust any of the controlling parameters in an easy and user-friendly manner.

Series 48 Heaters

ApplicationsSemiconductor Industry Applications• Preventsolidificationofammoniumchloride(NH4Cl) in a silicon nitride LPCVD system

• Preventsolidificationofaluminumchloride(AlCl3) in an aluminum etching system

• Reducesolidbuildupinothersemiconductorprocesses, such as titanium nitride, tungsten, and TEOS CVD

• Maintainuniformtemperatureenvironmentsin downstream semiconductor and related processes and equipment

• Maintaingastemperatureingasdeliverysystems

Biopharmaceutical Industry Applications • Preventvaporcondensationinsterileventfiltersand piping systems

• Maintainorpromotepreferredmaterialviscosities

Custom and R&D Applications• HeatersforcustomandR&Dapplicationscanbe engineered to meet specific requirements

DescriptionSeries 48 heaters are designed to deliver adequate heat if the supplied voltage is less than nominal, and to more appropriately distribute that heat to promote a uniform thermal profile. Extensive design and testing have been performed to ensure optimum performance.

The heaters’ molded shapes conform to the hardware, minimizing gaps and subsequent heat loss. Using a patented process, silicone foam insulation is bonded to the outside of a reinforced silicone heater mat, resulting in external temperatures that are safe for human contact and meet OSHA safety requirements.

Optional Display Module — Controller Keys and Indicator Lights

Up Arrow key Increases the displayed value Mode key

Toggles the display between the set point and process temperature

Down Arrow key Decreases the displayed value

output (green) Indicates the process temperature is below the set point, the output is on, and the controller is supplying current to the heater

in range (solid yellow) Indicates process temperature is between the high alert set point and the low alert set point values

Alarm (flashing red) Indicates process temperature is higher than the set point high limit alarm value

Integrated Temperature Controller

Series 48 heaters feature an Integrated Temperature Controller that provides unsurpassed thermal control. The controller features two microprocessor controlled relays, a safety relay for over-temperature protection and a no-arc relay for power switching. Thermal sensing is achieved via heater-embedded thermocouple feedback. The high-limit safety circuitry eliminates the need for a thermal fuse, thereby eliminating the need for heater replacement due to a single over-temperature event. This significantly reduces downtime potential and the need to stock replacement heaters.

The Base Controller unit performs all of the controlling functions for its heater, including: temperature control, thermal safety, and operating status notification via three colored LEDs. The Base Controller is required to operate any Series 48 heater.

Optional Display and Communications Modules

The controller has three optional plug and play display and communications modules which provide a user-friendly interface for adjusting control parameters.

Display Module

The Display Module allows the user to locally adjust the operating parameters, including temperature set point, high/low temperature alerts, high limit (safety) set point, control mode (on-off/PID) and related parameters. It contains an alphanumeric LED display that displays the heater’s current temperature and alert condition.

Communications Module

The Communications Module allows the user to remotely adjust the operating parameters and monitor heater operating status. The Communications Module has Modbus RTU Communications with RS485 interface.

Display and Communications Module

This is a fully functional combination of both the Display Module and the Communications Module. It allows the user to adjust the operating parameters both locally and remotely.

Base Controller

Display Module



Specifications and Ordering Information

Heater SpecificationsPre-set temperature set Points 150°C(302°F);or 105°C(221°F)

exterior range temperature Ambientto85°C(185°F) (dependent on set point)

interior range temperature Ambientto185°C(365°F)

Foam thickness 0.5 in. (12.7 mm)

Materials Molded silicone foam, fiberglass reinforced silicone, Teflon insulated wire

Connectors MolexMini-FitJr.

weight range 0.5 to 6.2 lb (0.73 to 2.8 kg)

Compliance CE, SEMI S2, UL E52951, cUL E52951

Controller Specificationsenclosure Black Plastic

Power requirements 100-240 VAC input

Power Consumption 0.3 W

relay Contact rating SPDT, 2 A @ 50 VAC resistive, 1 A @ 30 VDC

input/output wiring 1 Thermal switch line IN 2 Thermal switch line OUT 3 Normally closed 4 Common 5 Normally Open

Dimensions Base Unit 3.5'' x 2.2'' x 1.6'' (88.9 x 55.9 x 40.6 mm)

w/ Mounting Bracket 3.5'' x 2.2'' x 1.9'' (88.9 x 55.9 x 48.3 mm)

w/Upgrade&Bracket 3.5''x2.2''x2.5'' (88.9 x 55.9 x 63.5 mm)

Compliance CE, SEMI S2, UL E43684, cUL E43684

Heaters

Before configuring the part number, first determine which heaters will be required to fit the geometry of the system piping. Series 48 heaters are designed to fit onto standard MKS components, but will often fit onto components from other manufacturers. Select heaters for straight sections, elbows, tees, reducers and hoses.

When fitting a heater, do not use a length that is too long forthefitting.Forcingtheheatertocompresstofitthecomponent can cause damage to the heater. Instead, try a smaller heater or a combination of heaters. After covering as much of the vacuum line as possible with heaters, select insulators to eliminate cold spots at flanged joints, or gaps between heaters. Insulators can be trimmed to fit the gap.

warning: Never trim a heater, only an insulator.

Temperature Set Points

After selecting the heaters, determine which temperature set point you require. Heaters can be ordered with two different set points: 105°C or 150°C that are pre-set at the factory. If no temperature set point is specified, the default set point is 150°C.

Ordering InformationControl Options

Once the heaters and temperature set points are selected, determine which temperature controller/module combination will best suit the process application:

• BaseControllerOnly(ControlOption0)

• ControllerwithDisplayModule(ControlOption1)

• ControllerwithCommunicationsModule (Control Option 2)

• ControllerwithDisplay&CommunicationsModule (Control Option 3)

Cable Forms

Cables are available in two different general form types, including ''Standard Tee'' and ''Standard Terminator''. A Tee cable (named for it’s ''T'' shape) is used for the first or any intermediate heater in a group of heaters on a single power supply. A Terminator cable is used on the last heater of a heater group from a single power supply, or the only heater on a power supply.

Cable Lengths

Cable lengths are available in two general lengths: Short and Long. Short cables are intended to be used on all heaters, except straight sections that are 13'' or longer. Long cables are for use on straight section heaters that are 13'' or longer.

series 48 Part Number Configuratorseries 48 heater

Part Number

48XX-XXXX

Controller

-1

temperature set Point

XXX

Control options

-X

Cable Form

-X

Cable Length

X

4820-0102(Example)

1 105105°C

150150°C

(Default)

0Base Controller

(FixedSetPoint)

1Controller w/

Display Module

2Controller w/


3Controller w/ Display &Communications

Module

1Standard Tee

2Standard

Terminator

1Short

(Forallheaters,exceptstraightsections 13” and longer.)

2Long

(Forstraightsections 13” and longer only.)

Add the price of the base heater to the price of the options. Sample part number: 4820-0102-1105-2-11

Standard Tee

Heater

Standard Terminator

Base Controller


Ordering Information

straight section heaters, 2.0'' Diameter tubing

120 VAC 240 VACNominal Length

in. (mm)

Amps at 120 VAC

Heater Part

Number

Nominal Length

in. (mm)

Amps at 240 VAC

Heater Part

Number2'' (51)3'' (76)4'' (102)5'' (127)6'' (152)7'' (178)8'' (203)9'' (229)10'' (254)11'' (279)12'' (305)13'' (330)14'' (356)15'' (381)16'' (406)17'' (432)18'' (457)19'' (483)20'' (508)21'' (533)22'' (559)23'' (584)24'' (610)30'' (762)36'' (914)

0.260.360.430.500.550.640.730.830.931.021.111.201.291.381.481.571.661.761.851.932.032.122.222.773.33

4820-01024820-01034820-01044820-01054820-01064820-01074820-01084820-01094820-01104820-01114820-01124820-01134820-01144820-01154820-01164820-01174820-01184820-01194820-01204820-01214820-01224820-01234820-01244820-01304820-0136

2'' (51)3'' (76)

4'' (102)5'' (127)6'' (152)7'' (178)8'' (203)9'' (229)

10'' (254)11'' (279)12'' (305)13'' (330)14'' (356)15'' (381)16'' (406)17'' (432)18'' (457)19'' (483)20'' (508)21'' (533)22'' (559)23'' (584)24'' (610)30'' (762)36'' (914)

0.250.180.220.250.280.320.370.410.460.510.550.600.650.690.740.780.830.880.930.971.011.061.111.381.66

4820-02024820-02034820-02044820-02054820-02064820-02074820-02084820-02094820-02104820-02114820-02124820-02134820-02144820-02154820-02164820-02174820-02184820-02194820-02204820-02214820-02224820-02234820-02244820-02304820-0236



in. (mm)

Amps at 120 VAC

Heater Part

Number

Nominal Length

in. (mm)

Amps at 240 VAC

Heater Part

Number2'' (51)3'' (76)4'' (102)5'' (127)6'' (152)7'' (178)8'' (203)9'' (229)10'' (254)11'' (279)12'' (305)13'' (330)14'' (356)15'' (381)16'' (406)17'' (432)18'' (457)19'' (483)20'' (508)21'' (533)22'' (559)23'' (584)24'' (610)30'' (762)36'' (914)

0.210.280.350.400.440.520.590.670.740.820.890.971.041.121.191.271.341.421.491.561.631.711.782.232.68

4815-01024815-01034815-01044815-01054815-01064815-01074815-01084815-01094815-01104815-01114815-01124815-01134815-01144815-01154815-01164815-01174815-01184815-01194815-01204815-01214815-01224815-01234815-01244815-01304815-0136

3'' (76)4'' (102)5'' (127)6'' (152)7'' (178)8'' (203)9'' (229)

10'' (254)11'' (279)12'' (305)13'' (330)14'' (356)15'' (381)16'' (406)17'' (432)18'' (457)19'' (483)20'' (508)21'' (533)22'' (559)23'' (584)24'' (610)30'' (762)36'' (914)

0.220.180.200.220.260.300.330.370.410.450.480.520.560.600.630.670.710.750.780.820.850.891.111.34

4815-02034815-02044815-02054815-02064815-02074815-02084815-02094815-02104815-02114815-02124815-02134815-02144815-02154815-02164815-02174815-02184815-02194815-02204815-02214815-02224815-02234815-02244815-02304815-0236



in. (mm)

Amps at 120 VAC

Heater Part

Number

Nominal Length

in. (mm)

Amps at 240 VAC

Heater Part

Number2'' (51)3'' (76)4'' (102)5'' (127)6'' (152)7'' (178)8'' (203)9'' (229)10'' (254)11'' (279)12'' (305)13'' (330)14'' (356)15'' (381)16'' (406)17'' (432)18'' (457)19'' (483)20'' (508)21'' (533)22'' (559)23'' (584)24'' (610)30'' (762)36'' (914)

0.360.490.600.680.760.881.011.131.271.391.521.651.781.902.032.162.282.412.532.662.782.913.043.804.57

4830-01024830-01034830-01044830-01054830-01064830-01074830-01084830-01094830-01104830-01114830-01124830-01134830-01144830-01154830-01164830-01174830-01184830-01194830-01204830-01214830-01224830-01234830-01244830-01304830-0136

2'' (51)3'' (76)

4'' (102)5'' (127)6'' (152)7'' (178)8'' (203)9'' (229)

10'' (254)11'' (279)12'' (305)13'' (330)14'' (356)15'' (381)16'' (406)17'' (432)18'' (457)19'' (483)20'' (508)21'' (533)22'' (559)23'' (584)24'' (610)30'' (762)36'' (914)

0.180.250.300.340.380.440.500.570.630.700.760.830.890.951.011.081.141.201.271.331.391.451.521.902.28

4830-02024830-02034830-02044830-02054830-02064830-02074830-02084830-02094830-02104830-02114830-02124830-02134830-02144830-02154830-02164830-02174830-02184830-02194830-02204830-02214830-02224830-02234830-02244830-02304830-0236



in. (mm)

Amps at 120 VAC

Heater Part

Number

Nominal Length

in. (mm)

Amps at 240 VAC

Heater Part

Number2’’ (51)3’’ (76)4’’ (102)5’’ (127)6’’ (152)7’’ (178)8’’ (203)9’’ (229)10’’ (254)11’’ (279)12’’ (305)13’’ (330)14’’ (356)15’’ (381)16’’ (406)17’’ (432)18’’ (457)19’’ (483)20’’ (508)21’’ (533)22’’ (559)23’’ (584)24’’ (610)30’’ (762)36’’ (914)

0.45 0.63 0.76 0.88 0.97 1.13 1.29 1.45 1.62 1.78 1.94 2.10 2.26 2.43 2.58 2.75 2.91 3.08 3.23 3.39 3.55 3.72 3.884.855.83

4840-01024840-01034840-01044840-01054840-01064840-01074840-01084840-01094840-01104840-01114840-01124840-01134840-01144840-01154840-01164840-01174840-01184840-01194840-01204840-01214840-01224840-01234840-01244840-01304840-0136

2’’ (51)3’’ (76)

4’’ (102)5’’ (127)6’’ (152)7’’ (178)8’’ (203)9’’ (229)

10’’ (254)11’’ (279)12’’ (305)13’’ (330)14’’ (356)15’’ (381)16’’ (406)17’’ (432)18’’ (457)19’’ (483)20’’ (508)21’’ (533)22’’ (559)23’’ (584)24’’ (610)30’’ (762)36’’ (914)

0.23 0.31 0.38 0.44 0.48 0.56 0.65 0.73 0.81 0.89 0.97 1.05 1.13 1.21 1.29 1.38 1.45 1.54 1.62 1.70 1.78 1.86 1.94 2.432.91

4840-02024840-02034840-02044840-02054840-02064840-02074840-02084840-02094840-02104840-02114840-02124840-02134840-02144840-02154840-02164840-02174840-02184840-02194840-02204840-02214840-02224840-02234840-02244840-02304840-0236


45° elbow For iso Flanged elbows, standard Modulus in./(mm)

120 VAC

Tube Size Modulus Bend RadiusAmps at120 VAC

ForUseWithHeater

Part Number1.5''2.0''3.0''4.0''

1.37 (35)1.62 (41)2.93 (74)

4.05 (103)

2.25 (57)3.00 (76)

4.50 (114)6.00 (152)

0.270.370.731.28

100318705100318706100764408100764410

4815-01624820-01624830-01624840-0162

240 VAC


ForUseWithHeater

Part Number1.5''2.0''3.0''4.0''

1.37 (35)1.62 (41)2.93 (74)4.05 (103)

2.25 (57)3.00 (76)4.50 (114)6.00 (152)

N/A0.200.370.64

100318705100318706100764408100764410

9515-0824*4820-02624830-02624840-0262

45° elbow For weld elbows, standard Modulus in./(mm)

120 VAC


ForUseWithHeater

Part Number1.5''2.0''3.0''4.0''

0.93 (24)1.24 (31)1.86 (47)2.49 (63)

2.25 (57)3.00 (76)

4.50 (114)6.00 (152)

N/A0.300.560.85

1002345150100234520010023453001002345400

9515-0806*4820-01644830-01644840-0164

240 VAC


ForUseWithHeater

Part Number1.5''2.0''3.0''4.0''

0.93 (24)1.24 (31)1.86 (47)2.49 (63)

2.25 (57)3.00 (76)

4.50 (114)6.00 (152)

N/A0.270.280.43

1002345150100234520010023453001002345400

9515-0806*4820-02644830-02644840-0264

45° elbow For weld elbows, with tangents in./(mm)

120 VAC


ForUseWithHeater

Part Number1.5''2.0''3.0''4.0''

1.56 (40)2.24 (57)3.61 (92)

4.74 (120)

2.25 (57)3.00 (76)

4.50 (114)6.00 (152)

0.290.470.891.49

1002345WT1501002345WT2001002345WT3001002345WT400

4815-01654820-01654830-01654840-0165

240 VAC


ForUseWithHeater

Part Number1.5''2.0''3.0''4.0''

1.56 (40)2.24 (57)3.61 (92)

4.74 (120)

2.25 (57)3.00 (76)

4.50 (114)6.00 (152)

N/A0.230.450.75

1002345WT1501002345WT2001002345WT3001002345WT400

9515-0869*4820-02654830-02654840-0265

* Insulator Only. Do not configure with temperature controller.

90° elbow For weld elbows, with tangents in./(mm)120 VAC


ForUseWithHeater

Part Number1.5''2.0''3.0''4.0''

2.88 (73)4.00 (102)6.25 (159)8.25 (210)

2.25 (57)3.00 (76)

4.50 (114)6.00 (152)

0.390.631.342.26

1002390WT1501002390WT2001002390WT3001002390WT400

4815-01674820-01674830-01674840-0167

240 VAC


ForUseWithHeater

Part Number1.5''2.0''3.0''4.0''

2.88 (73)4.00 (102)6.25 (159)8.25 (210)

2.25 (57)3.00 (76)

4.50 (114)6.00 (152)

0.200.310.671.13

1002390WT1501002390WT2001002390WT3001002390WT400

4815-02674820-02674830-02674840-0267

90° elbow For iso Flanged elbows, standard Modulus in./(mm)120 VAC


ForUseWithHeater

Part Number

1.5''2.0''3.0''4.0''

2.25 (57)2.38 (60)

4.00 (102)5.50 (140)

1.50 (38)2.00 (51)

4.50 (114)6.00 (152)

0.340.430.781.37

100314505100314506100764608100764610

4815-01614820-01614830-01634840-0163

240 VAC


ForUseWithHeater

Part Number

1.5''2.0''3.0''4.0''

2.25 (57)2.38 (60)

4.00 (102)5.50 (140)

1.50 (38)2.00 (51)

4.50 (114)6.00 (152)

0.220.220.390.68

100314505100314506100764608100764610

4815-02614820-02614830-02634840-0263

90° elbow for iso Flanged elbows, Long radius in./(mm)120 VAC


ForUseWithHeater

Part Number

1.5''2.0''

4.75 (121)5.13 (130)

2.25 (57)3.00 (76)

0.630.83

100314415100314416

4815-01634820-0163

240 VAC


ForUseWithHeater

Part Number

1.5''2.0''

4.75 (121)5.13 (130)

2.25 (57)3.00 (76)

0.320.42

100314415100314416

4815-02634820-0263

90° elbow For weld elbows, standard Modulus in./(mm)120 VAC


ForUseWithHeater

Part Number

1.5''2.0''3.0''4.0''

2.25 (57)3.00 (76)

4.50 (114)6.00 (152)

2.25 (57)3.00 (76)

4.50 (114)6.00 (152)

0.330.480.901.53

1002390150100239020010023903001002390400

4815-01664820-01664830-01664840-0166

240 VAC


ForUseWithHeater

Part Number

1.5''2.0''3.0''4.0''

2.25 (57)3.00 (76)

4.50 (114)6.00 (152)

2.25 (57)3.00 (76)

4.50 (114)6.00 (152)

0.250.240.450.77

1002390150100239020010023903001002390400

4815-02664820-02664830-02664840-0266


tee - For iso Flanged tees in./(mm)

120 VAC

Tube Size Modulus LengthAmps at120 VAC

ForUseWithHeater

Part Number

1.5''2.0''3.0''4.0''

2.25 (57)2.38 (60)3.00 (76)3.38 (86)

4.50 (114)4.75 (121)6.00 (152)6.75 (171)

0.490.600.901.23

100314605100314606100761408100761410

4815-01384820-01384830-01384840-0138

240 VAC


ForUseWithHeater Part

Number

1.5''2.0''3.0''4.0''

2.25 (57)2.38 (60)3.00 (76)3.38 (86)

4.50 (114)4.75 (121)6.00 (152)6.75 (171)

0.250.300.450.62

100314605100314606100761408100761410

4815-02384820-02384830-02384840-0238

tee - For weld tees in./(mm)

120 VAC


ForUseWithHeater

Part Number

1.5''2.0''3.0''4.0''

2.19 (56)2.94 (75)3.19 (81)3.81 (97)

4.38 (111)5.88 (149)6.38 (162)7.63 (194)

0.480.700.981.44

10023T15010023T20010023T30010023T400

4815-01394820-01394830-01394840-0139

240 VAC


ForUseWithHeater Part

Number1.5''2.0''3.0''4.0''

2.19 (56)2.94 (75)3.19 (81)3.81 (97)

4.38 (111)5.88 (149)6.38 (162)7.63 (194)

0.240.350.490.72

10023T15010023T20010023T30010023T400

4815-02394820-02394830-02394840-0239

Bellows - For iso Flanged Bellows in./(mm)120 VAC

Tube Size

LengthBellows

DiameterHeater O.D.

Amps at 120V

ForUse With

Heater Part Number

1.5''2.0''3.0''4.0''

2.81 (71)2.69 (68)3.56 (90)3.56 (90)

1.84 (47)2.43 (62)3.83 (97)

4.70 (119)

3.00 (76)3.50 (89)

5.00 (127)6.00 (152)

0.190.230.430.48

100314915100314916100763508100763510

4815-01694820-01694830-01694840-0169

240 VAC

Tube Size

LengthBellows

DiameterHeater O.D.

Amps at 240V

ForUse With

Heater Part Number

1.5''2.0''3.0''4.0''

2.81 (71)2.69 (68)3.56 (90)3.56 (90)

1.84 (47)2.43 (62)3.83 (97)

4.70 (119)

3.00 (76)3.50 (89)

5.00 (127)6.00 (152)

0.190.150.210.24

100314915100314916100763508100763510

4815-02694820-02694830-02694840-0269

reducer - For iso Flanged reducers in./(mm)

120 VAC

Tube Size (in.) LengthLarge End Tangent

Small End Tangent

Amps at 120V

ForUseWithHeater

Part Number

3.0 x 1.53.0 x 2.04.0 x 2.04.0 x 3.0

3.59 (91)3.55 (90)3.60 (91)2.73 (69)

0.06 (2)0.20 (5)0.05 (1)0.05 (1)

0.91 (23)0.93 (24)0.93 (24)0.05 (1)

0.350.360.460.51

100765016100765008100765018100764908

4830-01434830-01474840-01434840-0147

240 VAC


Small End Tangent

Amps at 240V

ForUseWithHeater

Part Number

3.0 x 1.53.0 x 2.04.0 x 2.04.0 x 3.0

3.59 (91)3.55 (90)3.60 (91)2.73 (69)

0.06 (2)0.20 (5)0.05 (1)0.05 (1)

0.91 (23)0.93 (24)0.93 (24)0.05 (1)

0.210.200.230.25

100765016100765008100765018100764908

4830-02434830-02474840-02434840-0247

reducer - For weld reducers in./(mm)

120 VAC


Small End Tangent

Amps at 120V

ForUseWithHeater

Part Number2.0 x 1.53.0 x 1.53.0 x 2.04.0 x 2.04.0 x 3.0

2.38 (60)3.63 (92)3.63 (92)3.63 (92)3.63 (92)

0.50 (13)0.50 (13)0.70 (18)0.50 (13)0.50 (13)

0.50 (13)0.50 (13)0.50 (13)0.50 (13)0.50 (13)

0.250.350.450.460.51

10023200CR15010023300CR15010023300CR20010023400CR20010023400CR300

4820-01454830-01414830-01454840-01414840-0145

240 VAC

Tube Size (in.)

LengthLarge End Tangent

Small End Tangent

Amps at 240V

ForUse With

Heater Part Number

2.0 x 1.53.0 x 1.53.0 x 2.04.0 x 2.04.0 x 3.0

2.38 (60)3.63 (92)3.63 (92)3.63 (92)3.63 (92)

0.50 (13)0.50 (13)0.70 (18)0.50 (13)0.50 (13)

0.50 (13)0.50 (13)0.50 (13)0.50 (13)0.50 (13)

N/A0.210.230.230.25

10023200CR15010023300CR15010023300CR20010023400CR20010023400CR300

9520-0800*4830-02414830-02454840-02414840-0245

* Insulator Only. Do not configure with temperature controller.


hose - For iso-kF Flanged thin wall hose in./(mm)

120 VAC

Tube Size (in.) LengthBellows

DiameterHeater O.D.

Amps at 120V

ForUse With

Heater Part Number

1.5''2.0''

8.69 (221)8.56 (217)

1.94 (49)2.47 (63)

3.00 (76)3.50 (89)

0.630.77

100317415100317416

4815-01774820-0177

240 VAC


DiameterHeater O.D.

Amps at 240V

ForUse With

Heater Part Number

1.5''2.0''

8.69 (221)8.56 (217)

1.94 (49)2.47 (63)

3.00 (76)3.50 (89)

0.320.38

100317415100317416

4815-02774820-0277

hose - For iso-kF Flanged thick wall hose in./(mm)

120 VAC


DiameterHeater O.D.

Amps at 120V

ForUse With

Heater Part Number

1.5''2.0''

8.69 (221)8.56 (217)

2.13 (54)2.58 (66)

3.50 (89)4.00 (102)

0.600.67

100315905100315906

4815-01794820-0179

240 VAC


DiameterHeater O.D.

Amps at 240V

ForUse With

Heater Part Number

1.5''2.0''

8.69 (221)8.56 (217)

2.13 (54)2.58 (66)

3.50 (89)4.00 (102)

0.300.33

100315905100315906

4815-02794820-0279

Flange insulators - standard, Fits Most Clamps in./(mm)FlangeSize

NWHole 1

I.D.Hole 2

I.D.O.D. ForUseWith

Heater Part Number

404050508080100100

2.50 (64)2.50 (64)3.00 (76)3.00 (76)

4.00 (102)4.00 (102)5.00 (127)5.00 (127)

2.50 (64)3.00 (76)3.00 (76)

4.00 (102)4.00 (102)5.00 (127)5.00 (127)6.00 (152)

6.20 (157)6.20 (157)7.78 (198)7.78 (198)6.68 (170)6.68 (170)7.42 (188)7.42 (188)

MKSISO-KFClampsMKSISO-KFClampsMKSISO-KFClampsMKSISO-KFClamps

MKS Double Claw Clamp 100761106MKS Double Claw Clamp 100761106MKS Double Claw Clamp 100761106MKS Double Claw Clamp 100761106

4515-00164515-00174520-00164520-00174530-00164530-00174540-00164540-0017

Flange insulators - iso-kF Flanges, on short radius elbows in./(mm)FlangeSize NW

Hole 1 I.D.

Hole 2 I.D.

O.D.ForUseWith

(will only work with MKS clamps)

Heater Part Number

40

50

2.50 (64)

3.00 (76)

2.50 (64)

3.00 (76)

4.00 (102)

4.75 (121)

100314505& 100312905

100314506& 100312906

4515-0036

4520-0036

Flange insulators - iso-kF Flanges, Compact in./(mm)

Flange Size NW

Hole 1 I.D.

Hole 2 I.D.

O.D.ForUseWith

(will only work with MKS clamps)

Part Number

404040505050

2.50 (64)2.50 (64)2.50 (64)3.00 (76)3.00 (76)3.00 (76)

2.50 (64)3.00 (76)3.50 (89)3.00 (76)3.50 (89)

4.00 (102)

4.20 (107)4.20 (107)4.20 (107)5.16 (131)5.16 (131)5.16 (131)

MKS Wing Nut Clamp 100312905MKS Wing Nut Clamp 100312905MKS Wing Nut Clamp 100312905MKS Wing Nut Clamp 100312906MKS Wing Nut Clamp 100312906MKS Wing Nut Clamp 100312906

9515-02699515-02709515-02809520-02479520-02859520-0248


tube insulators - Foam only in./(mm)

Trim and use to fill straight gaps on line.

Attaching straps must be ordered separately.

Tube Size Length Use Part Number1.5''2.0''3.0''4.0''

12.00 (305)12.00 (305)12.00 (305)12.00 (305)

Insulating gaps on 1.5 inch tube systemsInsulating gaps on 2.0 inch tube systemsInsulating gaps on 3.0 inch tube systemsInsulating gaps on 4.0 inch tube systems

4515-00004520-00004530-00004540-0000

tube insulators - Foam with straps in./(mm)

Trim and use to fill straight gaps on line.

Tube Size Length Use Part Number1.5''2.0''3.0''4.0''

1.00 (25)1.00 (25)1.00 (25)1.00 (25)

Insulating gaps on 1.5 inch tube systemsInsulating gaps on 2.0 inch tube systemsInsulating gaps on 3.0 inch tube systemsInsulating gaps on 4.0 inch tube systems

4515-00014520-00014530-00014540-0001

straps with snaps in./(mm)

Forinstallingfoamonlytubeinsulators.

Tube Size Quantity ForUseWith Part Number

1.5''2.0''3.0''4.0''

10101010

4515-00004520-00004530-00004540-0000

4515-SNAP4520-SNAP4530-SNAP4540-SNAP

Series 48 Heaters - 2/18 © 2008-2018 MKS Instruments, Inc. All rights reserved.

MKS products provided subject to the US Export Regulations. Diversion or transfer contrary to US law is prohibited. Specifications are subject to change without notice. mksinst™ is a trademark of MKS Instruments, Inc.

Power Cables Part Number

Coiled Tee Cable, Short 4800-0011

Coiled Tee Cable, Long 4800-0012

Coiled Terminator Cable, Short 4800-0021

Coiled Terminator Cable Long 4800-0022

High temperature cable ties (package of 12) 100014821

Data cable, 14'' 100014853

Data cable, 26'' 100014854

Data cable, 38'' 100014855

Data cable, 50'' 100014856

RS232 to RS485 Converter 100014850

Power cable, 6 ft. (1.83 m), 120 VAC 48PWRCORD01

Power cable, 12 ft. (3.66 m), 120 VAC 48PWRCORD03

Power cable, 120 VAC, with ground fault leakage circuit interrupter, 6 ft. (1.83 m) 48PWRCORD04



The power cables are not included with heaters and must be ordered separately. Do not exceed 12 amps draw per power cord.

Accessories Part Number

Double claw clamp, grounding, ISO-Universal NW 80 and NW 100 100007322

Spare fuse, 12 amps, (quantity of 1) 100006985

Kit, LTA lead, with male and female connector and 10 ft. of wire 100008680

Kit, LTA jumper, with male and female connector and 6 in. of wire 100008683

Low Temperature Alert Monitor, 120V 100010832

Low Temperature Alert Monitor, 240V 100010925

Base Controller - Part Number 4800-1150

Communications Module - Part Number 4800-0002

Display Module - Part Number 4800-0001

Display and Communications Module - Part Number 4800-0003

Spare Parts, Cables & Accessories

MKS Instruments, Inc. Global Headquarters 2 Tech Drive, Suite 201 Andover, MA 01810

Tel: 978.645.5500 Tel: 800.227.8766 (in USA) Web: www.mksinst.com

MKS Instruments, Inc. Integrated Process Solutions5330 Sterling Drive Boulder, CO 80301

Tel: 303.449.9861 Tel: 800.345.1967 (in USA)

Documents

Series 48 Heater Jackets - MKS Instruments - Process ... · PDF fileImproved Heater Design • Control components reside inside controller, away from heat source extending heater life