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1 www.cranfield.ac.uk Sensor development State-of-the-art review Dr Claudiu L Giusca Surface Engineering and Precision Institute (SEPi) 22 nd January 2019 MetMap 22 - 23 January 2019 AMRC Sheffield, UK

Sensor development State-of-the-art review€¦ · Sensor development – State-of-the-art review Dr Claudiu L Giusca Surface Engineering and Precision Institute (SEPi) 22nd January

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Page 1: Sensor development State-of-the-art review€¦ · Sensor development – State-of-the-art review Dr Claudiu L Giusca Surface Engineering and Precision Institute (SEPi) 22nd January

1

www.cranfield.ac.uk

Sensor development –State-of-the-art review

Dr Claudiu L Giusca

Surface Engineering and Precision Institute (SEPi)

22nd January 2019

MetMap 22 - 23 January 2019

AMRC Sheffield, UK

Page 2: Sensor development State-of-the-art review€¦ · Sensor development – State-of-the-art review Dr Claudiu L Giusca Surface Engineering and Precision Institute (SEPi) 22nd January

2

• Introduction

• Dimensional metrology tools

• Non-dimensional sensing

• Future requirements

Overview

Page 3: Sensor development State-of-the-art review€¦ · Sensor development – State-of-the-art review Dr Claudiu L Giusca Surface Engineering and Precision Institute (SEPi) 22nd January

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Surface Engineering and Precision Institute

We envision a UK manufacturing sector with world

abundant Engineering for life products for extreme

service.

Advanced Functional Coatings supported by the

National High Temperature Surface Engineering

Centre, Sol-Gel Centre and Nanotechnology Labs.

Precision Device Manufacturing: Cranfield Nano,

specialising in creating new forms of materials for

detectors, sensors, biosensors, and actuators,

In-Process Metrology: metrology applied as closely as

possible to the point of manufacture supported by

world-class Precision and ultra precision engineering

laboratories

Page 4: Sensor development State-of-the-art review€¦ · Sensor development – State-of-the-art review Dr Claudiu L Giusca Surface Engineering and Precision Institute (SEPi) 22nd January

4

QA/QC

Page 5: Sensor development State-of-the-art review€¦ · Sensor development – State-of-the-art review Dr Claudiu L Giusca Surface Engineering and Precision Institute (SEPi) 22nd January

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A bit of context – Taniguchi’s chart

Goel S et al (2015) Int. J. Mach. Tools Manuf. 88 131-164

Page 6: Sensor development State-of-the-art review€¦ · Sensor development – State-of-the-art review Dr Claudiu L Giusca Surface Engineering and Precision Institute (SEPi) 22nd January

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Achievable surface quality

Brinksmeier E and Preuss W (2012) Philos. Trans. R. Soc. A: Math. Phys. Eng. Sci. 370 3973-3992.

Page 7: Sensor development State-of-the-art review€¦ · Sensor development – State-of-the-art review Dr Claudiu L Giusca Surface Engineering and Precision Institute (SEPi) 22nd January

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Large-Scale Metrology (LSM)

Franceschini F et al. in Distributed Large-Scale

Dimensional Metrology Springer (2011)

Schmitt RH et al. (2016) CIRP Annals 65 643-665

Challenging

applications

20 µm in 4 m

Page 8: Sensor development State-of-the-art review€¦ · Sensor development – State-of-the-art review Dr Claudiu L Giusca Surface Engineering and Precision Institute (SEPi) 22nd January

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Available with contact and non-contact probesWeckenmann A et al.(2004) CIRP Annals 53 657–684

Weckenmann A et al. (2006) Meas Sci Technol 17 504-509

Large CMM-s (5 m)

7 µm + L/250 µm

Schmitt RH et al. (2016) CIRP Annals 65 643-665

Micro CMM-s

probe errors in excess of 50 nm

Thalmann R et al. (2016) Appl. Sci. 6 150

Tactile

Norman J (2019) PhD Thesis

Page 9: Sensor development State-of-the-art review€¦ · Sensor development – State-of-the-art review Dr Claudiu L Giusca Surface Engineering and Precision Institute (SEPi) 22nd January

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Other techniques are less accurate:

Coherent laser radars

Laser line scanners

PhotogrammetrySchmitt RH et al. (2016) CIRP Annals 65 643-665

Various form measurement interferometric configurations are able to achieve sub-nanometremeasurement repeatability.Wyant JC (2018) Proc. SPIE 10749 107490P

Issues with Lateral Dynamic Range v measurable slope (Loughborough talk)

Laser TrackerLau K et al. (1986) Prec. Eng. 8 3-8

Muralikrishnan B (2016) Prec. Eng. 44 13-28

[0.32 + (0.4 × 10-3 L)2]1/2 µm

Umetsu K (2005) Meas. Sci. Technol. 16 2466-2472

Laser Tracers

0.2 µm + 0.3 µm/m (k=2)

Hughes EB et al. (2000) CIRP Annals 41 391-394

FSI (Frequency Scanning Interferometry)

40 µm in 10 m × 5 m × 2.5 m

Dale J et al. (2014) Opt. Exp. 22 24869-24893

Optical

Page 10: Sensor development State-of-the-art review€¦ · Sensor development – State-of-the-art review Dr Claudiu L Giusca Surface Engineering and Precision Institute (SEPi) 22nd January

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Medium to small scale

Savio E et al. (2007) CIRP Annals 56 643-665

1:5 ratio

uncertainty

tolerance difficult to

achieve

Page 11: Sensor development State-of-the-art review€¦ · Sensor development – State-of-the-art review Dr Claudiu L Giusca Surface Engineering and Precision Institute (SEPi) 22nd January

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Micro and below …

Hansen HN et al. (2006) CIRP Annals 55 721-743

Aspect ratio!

Page 12: Sensor development State-of-the-art review€¦ · Sensor development – State-of-the-art review Dr Claudiu L Giusca Surface Engineering and Precision Institute (SEPi) 22nd January

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Surface texture (ISO25178 standards)

Rosen S et al. (2011) Surf. Topogr.: Metrol. Prop. 2 014005

Page 13: Sensor development State-of-the-art review€¦ · Sensor development – State-of-the-art review Dr Claudiu L Giusca Surface Engineering and Precision Institute (SEPi) 22nd January

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Mostly developed for two reasons:

- Tool positioning and alignment

- Error compensation

Added benefits:

- QA/QC

- Process monitoring

• Various interferometric techniques

• Photogrammetry

• Fringe projection

• 3D microscopes (ST)

• Optical and contact probes

• Laser trackers

• AFMs

On-machine sensors

Nomura T et al. (1992) Prec Eng 14 155-159

Gao W et al. (2013) CIRP Annals 62 523-526

Page 14: Sensor development State-of-the-art review€¦ · Sensor development – State-of-the-art review Dr Claudiu L Giusca Surface Engineering and Precision Institute (SEPi) 22nd January

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Multi-Sensor Data Fusion

Geometrical

Sensors requirements

Osten W (2016) Proc. SPIE 9960 99600P

Weckenmann A et al. (2009) CIRP Ann. 58 701-721

Page 15: Sensor development State-of-the-art review€¦ · Sensor development – State-of-the-art review Dr Claudiu L Giusca Surface Engineering and Precision Institute (SEPi) 22nd January

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What do we try to achieve and in which context?

Ulhman E et al. (2016) CIRP Annals 65 549-572

Page 16: Sensor development State-of-the-art review€¦ · Sensor development – State-of-the-art review Dr Claudiu L Giusca Surface Engineering and Precision Institute (SEPi) 22nd January

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Sensor application versus level of precision and control parameters

Sensors required for machine tool control

Lee DE et al. in Condition Monitoring and Control for

Intelligent Manufacturing Wang L and Gao RX

Springer, London (2006), 33-54

Teti R et al. (2010) CIRP Annals 59 717-739

Page 17: Sensor development State-of-the-art review€¦ · Sensor development – State-of-the-art review Dr Claudiu L Giusca Surface Engineering and Precision Institute (SEPi) 22nd January

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Displacement sensors

Flaming AJ (2010) Sens Actua A-Phys 190 106-126

Page 18: Sensor development State-of-the-art review€¦ · Sensor development – State-of-the-art review Dr Claudiu L Giusca Surface Engineering and Precision Institute (SEPi) 22nd January

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Acoustic emission sensors

Teti R et al. (2010) CIRP Annals 59 717-739

Kishawy et al. (2018) Int J Adv Manuf

Technol 93 (5–8) 2275–2287

Page 19: Sensor development State-of-the-art review€¦ · Sensor development – State-of-the-art review Dr Claudiu L Giusca Surface Engineering and Precision Institute (SEPi) 22nd January

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Material removal process

Temperature measurement

Davis MA et al. (2007) CIRP Annals 57 581-604

Mayr J et al. (2012) CIRP Annals

61 771-791

Machine tools

Page 20: Sensor development State-of-the-art review€¦ · Sensor development – State-of-the-art review Dr Claudiu L Giusca Surface Engineering and Precision Institute (SEPi) 22nd January

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Point of contact

Simulations results – Can we measure it?

Goel S et al. (2016) Acta Mat 105 464-478Goel S et al. (2012) Wear 284-285 65-72

Page 21: Sensor development State-of-the-art review€¦ · Sensor development – State-of-the-art review Dr Claudiu L Giusca Surface Engineering and Precision Institute (SEPi) 22nd January

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Reduce the cost of metrology at the end point.

Virtual Metrology

Susto et al (2015) Comp Op Res 53 328-337

Page 22: Sensor development State-of-the-art review€¦ · Sensor development – State-of-the-art review Dr Claudiu L Giusca Surface Engineering and Precision Institute (SEPi) 22nd January

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Must have:

• Low cost

• Wide dynamic range

• Fast

• Cooperative

• Include non-dimensional (Temperature, Stress, Strain, Acoustic

Emission, Force etc)

• Able to measure at the point of machining

Conclusions

Page 23: Sensor development State-of-the-art review€¦ · Sensor development – State-of-the-art review Dr Claudiu L Giusca Surface Engineering and Precision Institute (SEPi) 22nd January

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