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2007/12/26 Sensing and Actuation in Miniaturized Systems presentation#3 Chia-Min Lin
Parylene-based pressure sensor for IOP measurement
Presenter : Chia-Min Lin (9535811)
Research from Caltech Micromachining Laboratory
2007/12/26 Sensing and Actuation in Miniaturized Systems presentation#3 Chia-Min Lin
Outline
Motivation Design concept / Fabrication process Results Summary
2007/12/26 Sensing and Actuation in Miniaturized Systems presentation#3 Chia-Min Lin
Motivation
Glaucoma is a debilitating disease affecting the optic nerve that results in loss of vision for hundreds of millions of people worldwide.
Raised intraocular pressure is a significant risk factor for developing glaucoma.
Wikipedia
2007/12/26 Sensing and Actuation in Miniaturized Systems presentation#3 Chia-Min Lin
Traditional IOP sensor
Contact tonometer Non-contact tonometer
Wikipedia
2007/12/26 Sensing and Actuation in Miniaturized Systems presentation#3 Chia-Min Lin
Implantable biodevice
P.-J. Chen et al., JMM, 2007.
2007/12/26 Sensing and Actuation in Miniaturized Systems presentation#3 Chia-Min Lin
Bourdon tube theory
Wikipedia
2007/12/26 Sensing and Actuation in Miniaturized Systems presentation#3 Chia-Min Lin
Microchannel
M. J. de Boer et al., JMEMS, 2000.
SurfaceBonding Buried
2007/12/26 Sensing and Actuation in Miniaturized Systems presentation#3 Chia-Min Lin
Parylene microchannel
P.-J. Chen et al., μTAS’05.
Concept and Fabrication results Fabrication results
2007/12/26 Sensing and Actuation in Miniaturized Systems presentation#3 Chia-Min Lin
Cont’d
P.-J. Chen et al., Lab Chip, 2006.
2007/12/26 Sensing and Actuation in Miniaturized Systems presentation#3 Chia-Min Lin
Spiral-tube pressure sensor (1G)
P.-J. Chen et al., IEEE MEMS’05.
Apply Bourdon tube theory Fabrication process
Unpowered
2007/12/26 Sensing and Actuation in Miniaturized Systems presentation#3 Chia-Min Lin
Cont’d
Fabrication results Testing in water results
P.-J. Chen et al., Sensors and Actuators A, 2006.
2007/12/26 Sensing and Actuation in Miniaturized Systems presentation#3 Chia-Min Lin
Implantable pressure sensor (2G)
P.-J. Chen et al., MMB’06.
Fabrication processUnpowered
Monolithic fabrication and packaging
2007/12/26 Sensing and Actuation in Miniaturized Systems presentation#3 Chia-Min Lin
Cont’d
Fabrication results Implatable results
2007/12/26 Sensing and Actuation in Miniaturized Systems presentation#3 Chia-Min Lin
Cont’d
P.-J. Chen et al., JMM, 2007.
P.-J. Chen et al., μTAS’06.
In vitro (water)
2007/12/26 Sensing and Actuation in Miniaturized Systems presentation#3 Chia-Min Lin
Cont’d
In vivo (rabitt)Ex vivo (rabitt)
2007/12/26 Sensing and Actuation in Miniaturized Systems presentation#3 Chia-Min Lin
Summary
An implantable, unpowered micromechanical parylene-based pressure sensor has been successfully developed as a part of a novel paradigm for intraocular pressure (IOP) sensing.
Monolithic fabrication and packaging of the microdevices have been successfully demonstrated.
The micromachined IOP sensors were characterized in vitro, ex vivo, as well as in vivo.