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SEM- Schematic Overview

SEM- Schematic Overview

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SEM- Schematic Overview. Electron Detection. Tungsten Filament Electron Source. Filament Emission. Field Emission Gun. Magnetic Lenses. Focusing Optics. Effect of Working distance. Effect of Condenser Lense. Aberations to Minimum Spot Size. - PowerPoint PPT Presentation

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Page 1: SEM- Schematic Overview

SEM- Schematic Overview

Page 2: SEM- Schematic Overview

Electron Detection

Page 3: SEM- Schematic Overview

Tungsten Filament Electron Source

Page 4: SEM- Schematic Overview

Filament Emission

Page 5: SEM- Schematic Overview

Field Emission Gun

Page 6: SEM- Schematic Overview

Magnetic Lenses

Page 7: SEM- Schematic Overview

Focusing Optics

Page 8: SEM- Schematic Overview

Effect of Working distance

Page 9: SEM- Schematic Overview

Effect of Condenser Lense

Page 10: SEM- Schematic Overview

Aberations to Minimum Spot Size

Page 11: SEM- Schematic Overview
Page 12: SEM- Schematic Overview

Voltage and Atomic Number Effect on Backscatter Electrons

Page 13: SEM- Schematic Overview

Monte Carlo Simulation and Secondary Electron Generation

Page 14: SEM- Schematic Overview

Electron- Atom Interaction

Page 15: SEM- Schematic Overview

X-ray Emission

Page 16: SEM- Schematic Overview

X-ray Generation

Page 17: SEM- Schematic Overview

Characteristic X-rays

• Characteristic radiation intensity is proportional to the tube current and the difference between the accelerating voltage and the excitation voltage. n ~ 1.5

Page 18: SEM- Schematic Overview

X-ray Transitions

Page 19: SEM- Schematic Overview

Energy Spectrum for Pure Ni

Page 20: SEM- Schematic Overview

Auger Electron Spectroscopy

Page 21: SEM- Schematic Overview

Energy Versus Penetration

Page 22: SEM- Schematic Overview
Page 23: SEM- Schematic Overview

SEM Operational Components

Page 24: SEM- Schematic Overview

Line Scan Process

Page 25: SEM- Schematic Overview

Pixel Element and Sample area Scanned

Page 26: SEM- Schematic Overview
Page 27: SEM- Schematic Overview

Effect of Working Distance and Aperture on Depth of Focus ( in m)

Page 28: SEM- Schematic Overview
Page 29: SEM- Schematic Overview

Electron Detector and Electron Sources

Page 30: SEM- Schematic Overview
Page 31: SEM- Schematic Overview

Non Dispersive X-ray Detection

Page 32: SEM- Schematic Overview

Non Dispersive Detector

Page 33: SEM- Schematic Overview

Multichannel Analyzer

Page 34: SEM- Schematic Overview

Super Alloy X-ray Spectrum

Page 35: SEM- Schematic Overview

Peak Broadening Due to Resolution of Si Detector

Page 36: SEM- Schematic Overview

X-ray Energies 1-10 KeV

Page 37: SEM- Schematic Overview

Mid Energy K and L Spectra

Page 38: SEM- Schematic Overview

Bi M and Cu Spectra

Page 39: SEM- Schematic Overview

Common Interfering X-ray Lines

Page 40: SEM- Schematic Overview

EDS Spectra of Glass

Page 41: SEM- Schematic Overview

Wavelength Dispersive X-ray Detector

Page 42: SEM- Schematic Overview
Page 43: SEM- Schematic Overview
Page 44: SEM- Schematic Overview

X-ray Detection

Gas Proportional Counter Single Channel Pulse HeightDetector

Page 45: SEM- Schematic Overview

Detector Output

Page 46: SEM- Schematic Overview

Wavelength Dispersive Spectra

Page 47: SEM- Schematic Overview

Comparison of EDS and WDS

Page 48: SEM- Schematic Overview

EDS Spectra of Glass

Page 49: SEM- Schematic Overview

WDS Spectra of High Z Glass

Page 50: SEM- Schematic Overview
Page 51: SEM- Schematic Overview

Corrections to Measured X-ray Spectra

Page 52: SEM- Schematic Overview

X-ray Generation with Depth (z)

Page 53: SEM- Schematic Overview

Absorption of X-rays Through Specimen

Page 54: SEM- Schematic Overview

Effect of Absorption on (z)


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