Graphite and C/C Productsfor Semiconductor & Solar Applications

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Schunk Carbon Technology

Graphite and C/C Products for Semiconductor & Solar Applications

SCHUNK GROUP HIGH TEMPERATURE APPLICATIONS

Schunk Carbon Technology: Always at your side

Schunk Carbon Technology focuses on development, manufacture and application of carbon and ceramic solutions.

It combines innovative spirit and technological expertise with exceptional customer service to provide a range of

products and services unique to the market. In Schunk Carbon Technology, you have a partner who can offer all the

technological possibilities of an international company and implement ideas custom-tailored to your needs, both for

high-volume industrial markets and for highly specialized niche markets.

A Schunk Group division

Our premium carbon solutions are used in nearly every thermal application: heat treatment, medical and analysis

technology, the glass industry and solar technology. Schunk Carbon Technology offers a broad spectrum of graphite,

carbon fibre-reinforced carbon and ceramics, carbon and graphite felt materials and components for these applications.

Together with solutions devised by our technical ceramics business unit, we have a spectrum of products and services

for high temperature applications and heat engineering available nowhere else in the world.

High Temperature Applications: Material expertise for the most extreme conditions

Made-to-order industrial solutions

It‘s good to know what markets need. It‘s even better to

provide the technological answers. As a global leading

specialist for high temperature applications, Schunk Carbon

Technology has solutions and ideas to benefit every market,

including:

¬ hollow glassware industry

¬ components and systems for the photovoltaic industry

¬ delicate, yet high-performance, graphite components

for analysis and medical technology

Thermal processes firmly under control

In the area of heat treatment and tempering, we have

assembled a product portfolio that sets standards in techno-

logical development. This includes everything from furnace

components, insulation materials and charge carrier systems

to burning aids and solutions for temperature measurement.

We combine innovative solutions, such as new patented

processes for relining Hot Zones, silicon material solutions

and intelligent charge carrier designs, with our distinctive

material and application expertise to create solutions that

bring economy, energy efficiency and a long service life.

Enabling, idea-driven, cooperative – if you hope to apply

technology to develop better products and capture

new markets, we can help. The Schunk Group has been

supporting customers with innovative technologies since

1913. As an idea-driven technology company, innovation

is funda mental to our culture. We forge long-lasting,

cooperative working relationships with our clients.

You will find our custom-tailored high-tech products and

systems in markets such as carbon technology and ceramics,

environment simulation and air conditioning technology,

sintered metal and ultrasonic welding.

The Schunk Group is active in a large number of key

industries, from automotive, rail, aviation and marine tech-

nologies to solar and wind energy, medical and electrical

technology as well as the semiconductor industry. Our more

than 8,000 employees in 29 countries are ready to serve

you.

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Customized Solutions for Polysilicon Production

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POLYSILICON PRODUCTION

Inhouse Graphite-Production

¬ optimized production-flow for short delivery time ¬ standard dimensions available from our stock¬ high density with optimized grain-size¬ isostatic graphite¬ extruded graphite

Purification at Semiconductor Standard

¬ high temperature purification of graphite-products ¬ impurity-level of single elements in the

ppb-range¬ total ash-content below 5 ppm¬ boron and phosphor content in single digit

ppb-rang¬ certificate of purification available on request¬ clean room environment for processing and

packing (ISO Class 3)

CVD-PyroCarbon

¬ high purity CVD/CVI coatings and infiltration¬ highly orientated¬ large dimensions up to diameter 1800 mm

and 2000 mm length¬ layer thicknesses are adapted to end use¬ high unifomity and homogeneity even

for large substrates

Customized Heat-Exchanger

¬ machining of large dimensions¬ in bore CVD-SiC coating

Material Combination for Best Performance

¬ soft felt ¬ hard felt¬ graphite foil¬ C/C foil¬ C/C composite materials¬ Oxatherm C and SiC

specialized insulation

Outstanding Heater Elements

¬ single piece design + CVD-SiC¬ tailorable specific electrical resistance¬ high uniformity of heat transfer Components for STC-to-TCS Thermal Converters

¬ improved lifetime due to refined materials¬ reduction of operating costs¬ lowest operating cost per kilogram of Si produced

CVD-SiC

¬ highly orientated coatings with ß-SiC crystalline structure

¬ prevents from carbon contamination¬ lifetime improvement¬ large dimensions up to diameter 1700 mm and

2000 mm length¬ high unifomity and homogeneity even for large

substrates¬ tight tolerances feasible

Graphite chuck for Siemens reactor

STC-TCS converter

Graphite Electrodes for CVD-Reactors

¬ modern press-fit design¬ high precision machining¬ very low tolerances feasible ¬ graphite grades selection according to customer

requirements¬ customized design development

Hybrid Insulation Tube

¬ purification to semiconductor standards

¬ insulation tubes with diffusion barriers

¬ insulations tubes with coatings to prevent particle release

Siemens CVD reactor

C/C heating element

Customized Solutions for CZ-Puller

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CZ-PULLER

Graphite Crucible

¬ standard and new designs available¬ low thermal mass design¬ high lifetime performance due to new design¬ new concept of material combinations¬ increased lifespan and optimized handling

C/C-Crucible

¬ single piece design from 20“ – 36“¬ low thermal mass design¬ high lifetime performance¬ increased lifespan and optimized handling

CVD/CVI Technology for Process Improvement

¬ CVD ß-SiC (10 – 300 µm)¬ CVD of pryrolitic carbon (5 – 300 µm)¬ CVI of pyrolitic carbon

High Temperature Purification of All Carbon Parts

¬ impurity level below 5 ppm¬ prevents from carbon contamination¬ element content i.e. for boron and phosphorus are in the single digit

ppb-range

CZ hybrid crucible

C/C Crucible

OxaTherm C150Insulation

CZ Hot Zones

Graphite Heater

¬ tight electrical resistance tolerance¬ wide range of graphite grades

available to match specific electrical resistance ¬ high durability and lifetime

Graphite Funnel

¬ optimized design for thermal properties¬ increased pulling speed due to refinement

with PyC¬ prevention of chemical contamination due

to CVD-SiC¬ less crystal defects due to optimized

temperature profile

Insulation Setup

¬ self-supporting soft felt insulation design

¬ optimized thermal conductivity level ¬ particle release protection ¬ uniform temperature distribution

enhances process¬ optimized energy consumption

One-Piece Insulation Tubes

¬ reduced particle release ¬ improved insulation performance¬ inside graphite foil as reflection layer¬ low thermal conductivity reduces

heat loss¬ customized designs available

Customized Products for DSS Hot Zones

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DSS HOT ZONES

Optimized Graphite Portfolio

¬ all graphite materials are selected for ultimate performance

¬ isostatic graphite and extruded graphite¬ high temperature uniformity due to selected

graphite materials¬ high durability and lifetime¬ lower cost of ownership

Upgrade from Gen5 up to Gen8

¬ on-site consulting service available¬ customized dimensions and solutions for

upgrades¬ short production and delivery times for

customized parts¬ one-stop service

Premium Insulation Material

¬ high uniformity¬ low thermal conductivity¬ tight flatness tolerances for plate materials¬ best insulation properties in their class

(one-piece-design)¬ specialized grades due to CVD/CVI refinement¬ very low particle release

Top-Plates with CVD-SiC

¬ reduced contamination¬ no back-contamination¬ improved mono like block production¬ improved block utilization¬ longer lifetime¬ lowest operating costs

Protection Layer Made of C/C

¬ increased lifespan of insulation¬ higher temperature uniformity ¬ extended maintenance cycle ¬ reduced down-time

C/C Material

¬ variety of C/C grades from stock available¬ different thermal conductivity options ¬ highly purified C/C ¬ top class mechanical properties

New Crucible-Box Design

¬ improved thermal mass¬ lower energy consumption due to improved

material utilization¬ high chemical resistance due to CVD/CVI

refinement¬ lowest possible C-contamination

Fasteners Made of Carbon

¬ graphite or C/C fasteners for highest mechanical loads

¬ optimized design for high durability¬ standard and customized designs

available

C/C fasteners

C/C Top Plate for DSS (left)C/C Top Plate with specialized coating (right)

DSS Hot Zone

C/C Carrier for PECVD-Systems

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PECVD-SYSTEMS

In-House Premium C/C Production

¬ optimized production-flow for short delivery time ¬ standard dimensions available from our stock¬ different C/C grades available¬ maximum plate size 3000 x 2000 mm2 available¬ customized grades and sizes on request¬ state-of-the-art production methods in-house¬ on-site consulting service available

Different C/C grades

PECVD coating tool

Optimized Machining

¬ tight tolerances for complex pocket designs¬ no fiber release in application¬ precise Si-wafer positioning on carrier¬ reduced automation failure¬ 3D measurement of pocket symmetry

Optimized Temperature Profile

¬ reduced thermal mass due to optimized carrier density

¬ high temperature uniformity across carrier¬ best in class thin layer depostion uniformity¬ low discoloration effect

Improved Mechanical Performance

¬ optimized mechanical strength and stiffness¬ no degradation of mechanical performance ¬ high durability during PECVD¬ carrier optimization with FE analysis optional

Maximum Production Size for Plates 3000 x 2000 mm2

C/C Carrier Optimized Cleaning Behavior

¬ optimized pore structure¬ reduced outgasing after cleaning¬ reduced conditioning¬ reduced contamination of coating tool

Schunk Kohlenstofftechnik GmbH

Rodheimer Strasse 59

35452 Heuchelheim ¬ Germany

Phone +49 641 608-0

Fax +49 641 6080-1223

E-Mail info@schunk-group.com

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