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Service Features

• Sampled Gases include: Nitrogen, Compressed Dry Air (CDA)• Part-per-trillion volume sensitivity • Compliant with lithography and inspection/metrology tool manufacturer optics

warranty certification• Molecular contaminant analysis and speciation include:▫ Acids ▫ Bases ▫ Hydrocarbons (condensables, volatile organics)▫ Refractory compounds (Si-organics)▫ Sulphur- and Halogenated-organics

BenefitsCollectTorr Sampling System

• Compact design: easy to install, operate and ship• Single sample connection for complete molecular contamination

assessment allows for minimum connection downtime

• Solid-state trap sampling allows for any mounting orientation (with in-tool installation possible)

SAES Pure Gas Added Value• State-of-the-art analytical laboratory• Quick analysis turnaround time• User-friendly analytical report • Contamination root cause analysis available• 20 years expertise in purification solutions

Applications• Lithography and inspection/metrology tool manufacturer purge gases

certification for optics and lenses warranty• Pre/Post Purification Molecular Contamination Level Assessment• Gas Piping and component outgassing survey

The unique “in-situ” CollectTorr sampling system and off-line analytical service from SAES Pure Gas have been developed to provide end-users of leading edge lithog-raphy and inspection/metrology equipment with a dedicated, simple, and reliable tool for optics molecular contamination purge gas certification.

Utilizing the solid-state trap-based Collect-Torr Sampling System coupled with state-of-the-art analytical equipment, parts per tril-lion (pptV) levels assessment of molecular acids, bases, refractory and organic con-taminants are successfully achieved.

SAES Pure Gas analytical sampling, analy-sis and certification are compliant with lithog-raphy and inspection/ metrology tool optics warranty certification requirements.

SAES Pure GasThe Technology of Pure Gas

Microcontamination Inspection Service

The PS22 series uses ambient temperature adsorption processes designed specifically to provide UHP gas for semiconductor applications. Outlet impurity levels for CO2, H2O and trace impurities including TOC’s (C7+), amines, ammonia, siloxanes, sulfurs, refractory compounds, phthalates, carboxylic acids and NOx, are reduced to below parts-per-trillion (pptV) levels.

The risk of impurity breakthrough is minimized when using a regenerable, “self-cleaning” purifier, like the PS22, as opposed to a disposable, “fixed capacity” canister. Experience has shown that inlet impurities found in CDA, for example, can vary greatly depending on ambient atmospheric conditions.

Flow rates: 5 – 10,000 Nm3/hr

U.S.ASAES Pure Gas, Inc.Headquarters4175 Santa Fe RdSan Luis Obispo, CA 93401Tel: + 805 541-9299Fax: + 805 541-9399

www.puregastechnologies.comSAES Pure Gas reserves the right to make changes in equipment design and fabrication or specification at any time without notice. While the information supplied herein is believed to be accurate and reliable, SAES Pure Gas assumes no responsibility for errors, omissions or future changes.

© 2006 SAES Pure Gas, Inc. All rights reserved

ItalySAES Getters S.p.A.Group HeadquartersViale Italia, 7720020 Lainate (Milano), ItalyTel: +39 02 93178 1Fax: +39 02 93178 320

Logistics Steps

1. Install the CollectTorr Sampling System manifold to a single sample port; open valve to begin sample flow.2. Retrieve CollectTorr after 24 hours sampling and return it, capped, to SAES Pure Gas Analytical Department.3. Analytical Certification Report will be delivered within 5 working days after receipt at SAES laboratory.

Speciation and Typical Sensitivity (based on 24 hours sampling)

Solid StateTrap Detected Contaminants DL (ng) DL (ng/l) DL (ppbV)

Fluoride (F-) 28.8 0.01 0.01

Choride (Cl-) 115.2 0.04 0.03

Nitrite (NO2-) 57.6 0.02 0.01

Bromide (Br-) 57.6 0.02 0.006

Nitrate (NO3-) 57.6 0.02 0.008

Sulphate (SO4=) 57.6 0.02 0.005

#2 Ammonium (NH4+) 28.8 0.01 0.014

HCs (C6-C30 as Toluene) 1 0.01 0.002

Refractories (as HMDSO) 1 0.01 0.001

#1

#3

SAES Pure Gas Purification Solutions

The MicroTorr® line, offered for bulk, CDA, and specialty gases in a wide range of sizes, uses ambient temperature technology to meet individual flow and purity requirements.

Flow rates: 500 sccm – 1000 slpm

SAES Pure GasThe Technology of Pure Gas

CollectTorr Sampling System field installation

Media Gases Purified Impurities Removed Outlet

203 N2, CDAH2O, CO2 Organics, Acids, Bases, Refractory Compounds

< 100 ppt

< 10 ppt

403 N2, CDA Organics, Acids, Bases, Refractory Compounds < 10ppt

903 N2H2O, O2, CO, CO2, H2 Organics, Acids, Bases, Refractory Compounds

< 100 ppt

< 10 ppt