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SACHEM, Inc. Presentation to CMC Fabs Meeting May 10, 2017
“SACHEM is a global chemical science company specializing in extremely pure,
precise, and innovative chemistry products and services critical to our customers’
manufacturing processes” 2
SACHEM Company Profile
Privately Held Company
375 Associates Worldwide
6 Manufacturing Facilities
3 Research & Development Centers
Strong Commitment to Health, Safety, Security, the Environment, and Ethics
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SACHEM is a Global Company
Wuxi, CN Mfg.
Osaka, JP Mfg. | R&D
Shanghai, CN Sales
Zaltbommel, NL Mfg. | R&D
Austin, TX Global HQ Mfg. | R&D
Cleburne, TX Mfg.
Seoul, KR Sales
SACHEM serves its customers with a network that spans over 30 countries.
Hsinchu, TW Sales
Sakai, JP Recycle
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Electronic Materials Integrated Circuit, TFT-LCD, Printed Wiring Board
Energy Materials Oilfield, Energy Storage, Electrolytes, Photovoltaic, Reducing Agents
Structured Materials Zeolites, Catalytic Converters
Specialties Carbohydrates, Polymers, Personal Care, Ag Chem, Pharma, Biotech, Advanced Ceramics, Casting
Multiple Markets, Many Products
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SACHEM’s Value Proposition
►Chemical Science-Based Approach ♦ Molecular design of products to meet
target application performance ♦ Ability to selectively synthesize new
materials meeting stringent purity and performance targets for specific markets
♦ Capabilities for producing high purity and precision formulations at commercial scale
►Partnerships ♦ Close relationships with customers,
suppliers and equipment manufacturers to design products for new applications
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► Responsible Care® organization ♦ ICCA Guiding Principles
► ISO 9001 certified ► ISO/RC 14001 certified ► Together for Sustainability
♦ EcoVadis ► OSHA SHARP program participant
SACHEM’s Commitment to the Community
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► Regulatory Standards ♦ Greater depth, regional variation ♦ Non-standardized testing requirements
Varies by region, country Inconsistent reciprocity of test data
♦ TSCA USA, Taiwan, etc. 2016 recertification has slowed new product introduction
♦ REACH Europe system well-established Korea, China, Japan, others “REACH-like” but still maturing
♦ GHS not fully global, not fully harmonized Rev #3 –USA Rev #4 –Japan Rev #5 –In development Labelling requirements vary by country
► Global management practices not harmonized ♦ More scrutiny on occupational exposure ♦ Requires review by country ♦ New compounds taking longer for approval, require more testing ♦ Waste treatment demand increased pre-treatment, less ultimate discharge, more costly ♦ Water becoming more expensive, less available ♦ Driving increased emphasis on re-use, recycle
A Challenging Regulatory Landscape
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2014 2015 2016 2017 2018
Filtr
atio
n (n
m)
Met
als
(ppt
) TMAH – A Study in New Horizons
SACHEM CONFIDENTIAL
28nm
20nm 14nm
10nm
Current Metrology Limits Current Metrology Limits
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25% TMAH Quality Roadmap
…and beyond
Packaging and Distribution at Leading Edge
Bulk Delivery • Metals <25 ppt • Filtration @ 30-50 nm
Facility Side • Metals <25 ppt • Filtration @ 30 nm
Dilution/Chemical Distribution
• Metals <2.5 ppt • Filtration @ 10-20 nm
Tool Side • Metals <2.5 ppt • Filtration @ 2-5 nm
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AMBIGUITIES GAP CLOSURE
Product delivered conforming to specs Transportation and shelf life studies
Measuring at metrology limits
Drive metrology improvements with suppliers Method development and performance testing
Lack of correlation with customer Customer & supplier harmonization / metrology alignment (GR&R)
Package quality impact (single-use) Upgrade to higher purity, returnable packaging
Sampling discrepancies Procedure harmonization
As-Shipped versus As-Delivered Compliance
SACHEM CONFIDENTIAL 11
Reduce, Reuse, Recycle: Mobius® Delivers Advantage
Enabling control of the supply chain for a critical chemical
♦ 99+% removal of TMAH from waste streams ♦ Water recovery, purification enable water to be reused ♦ TMAH recovery offers large reduction in virgin TMAH usage ♦ Waste load greatly reduced (liquid and solid) ♦ Reduces on-site bulk truck, drum and IBC handling ♦ Personnel exposure minimized due to closed loop system ♦ Two locations in Japan currently operational
Closed Loop Recycle System – operational >8 years – Recycle Ratio > 90%
Central Collection Recycle Plant – operational >10 years – Spent stream inputs from multiple IC, FPD sites – Generating Electronic-Grade TMAH
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Mobius® TMAH Recycle Flow Diagram
► Isolate TMAH handling into a closed-loop system ► Electronics Grade TMAH produced ► Potential for remediation of nitrogen-containing waste ► Reduce incoming raw material exposure and handling ► Lower environmental impact ► Potential to reduce net water consumption
SACHEM CONFIDENTIAL 13
Beyond TMAH
► SACHEM was first in TMAH ♦ Safely manufactured and delivered TMAH for 30+ years ♦ Developed recycling, waste reduction technology ♦ Provide customer safety training, consultations
► Electronics industry HSE focus growing ♦ Operator exposure concerns ♦ Reduced allowable TMAH concentration ♦ “No new sources” of TMAH allowed
► SACHEM is first in TMAH alternatives ♦ Proactively addressing stricter HSE and performance
requirements
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TMAH Alternatives
► TMAH has been primary go-to non-metal base for semiconductor industry applications
► Performance gaps, EHS issues causing drive for additional solutions ♦ One-size-fits-all increasingly problematic in lithography, other applications
EUV developer Silicon etching CMP slurries Post-etch, Post-CMP cleans
♦ Increasing focus on TMAH toxicity ► SACHEM has long been a manufacturer of high-purity, higher molecular weight
quaternary hydroxides and salts in addition to TMAH ♦ Purity roadmap has been driven by TMAH requirements ♦ Technology developed for TMAH transferred to HMW product
manufacturing to accelerate roadmap to ultra-high purity
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ETMAH: TMAH’s Closest Cousin
► Ethyltrimethylammonium hydroxide (ETMAH) nearest quaternary hydroxide to TMAH in MW
► Similar usage rate to achieve pH ► Similar etch rate, selectivity on typical semiconductor films ► Dermal LD50 >5x higher than TMAH
TMAH ETMAH
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Higher MW QOH: The Immediate Family (C1-C4)
► A range of solutions with tunable performance ► All exhibit dermal LD50 5-10x higher than TMAH
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Performance Comparison of Selected Quaternary Hydroxides
*etch rate data: 75°C, 1M OH concentration on blanket films
Etch Rate* (Å/min) Toxicity
Product Si PolySi ThOx Low-k TiN Cu W (Dermal LD50, mg/kg)
TMAH 7500 3700 <1 <1 <1 0.9 2.6 ~150 ETMAH 6500 4115 <1 <1 <1 1.0 3.0 ~1000
TEAH 4500 2400 <1 <1 <1 0.8 2.5 >2000 TBAH 1420 325 <1 <1 <1 0.3 1.5 >2000
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A Range of Products, A Range of Properties
Putting It All Together
Products Technology Support Quality
The Products You Need Today
• Multiple high-purity products • Hydroxides,
salts • Aqueous • Non-aqueous • Performance
products • Reduced toxicity • Tunable for your
application
The Products You Need Tomorrow
• Deep expertise in components, applications, formulations
• Fast turnaround development and scale-up
Where and When You Need Them
• Global manufacturing
• Volumes from R&D through HVM
• Redundant manufacturing capability - BCP
Dependable Execution
• Robust Quality systems (MOC, SPC, STC, etc.)
• Global regulatory expertise
• Harmonized packaging, labeling, HSSEE system
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Questions?
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