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The Scanning Electron Microscope (SEM) today is extending into an everwider field of applications, not only in academic research, but also in various

industries. Associated with this trend, samples requiring observation andanalysis also cover a wide spectrum of applications from one to another.

The S-3700N has been developed with these widely diversified applicationsin mind. In its standard configuration it comes with a secondary electron

detector, a five-segment backscattered electron (BSE) detector and a variable pressure (VP) mode. This allows observation of most samples in

their natural state, or wet condition, without the need for metal coatingwhich had in the past been required for conventional SEM.

The S-3700N has a huge sample chamber and can accommodate samples as large as 300mm in diameter and 110mm high.

It has many accessory ports for the wide range of applications today’smicroscopists require. These accessories include EDX, WDX, EBSD,

Chamber scope,cooling stage and so on. This versatile and flexible systemwill deal with your needs well into the future.

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FeaturesFeatures

1. The extra large chamber can accommodate a maximum 300mm diameter sample andEDX/WDX/EBSD accessories simultaneously. It also accommodates a tall sample up to110mm.

2. 5-axis motorized stage with eucentric tilt and rotation, image navigation system, stage history,stage memory and click to center.

3. User-friendly GUI design that is consistent with the S-4800, SU-70 & the S-3400N to allow oper-ators to easily migrate from tool to tool with minimum training.

4. The display system allows a full-frame, flicker free, high pixel density and real-time image. Italso allows simultaneous display of images from two different detectors, each having differentsample information, in real-time, including signal mixing.

5. VP mode for observation of non-conductive samples without the need for metal coating.

6. High sensitivity semiconductor BSE detector, that operates at a rapid scan mode. This makesfinding areas of interest on large samples easy and convenient.

7. Turbo Molecular Pump (TMP) is standard. This minimizes sample contamination due to itsclean and dry vacuum conditions. Unlike conventional diffusion pumped SEM, it does notrequire large heating power or water re-circulator, making it an energy saving ecological SEM.

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A huge sample chamber allowing accommodation of variety of samples

300mm diameter sample compatible design.

The large chamber, capable of accommodating a 300mm diameter sampleand the 5-axis motorized stage with its coverage of a complete 200mmdiameter wafer, make it ideal to study a wide range of sample sizes andshapes.

110mm tall sample compatible design.

Samples up to 110mm tall can be accommodated and still be at the analyti-cal working distance for EDX analysis.

Typical accommodation of a 300mm sample (Batteries have been removed)

Typical accommodation of a 100mm thicksample (a grinding disc)

Observation of tip of a grinding disc set at a working distance of 10mm for EDX work

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Versatile/Analytical sample chamber design

The flexible design of the S-3700N has a standard sam-ple chamber capable of accommodating a wide varietyof accessories for analytical work. These accessoriesinclude Energy Dispersive X-ray spectrometer (EDX),Wavelength Dispersive X-ray spectrometer (WDX),Electron Backscatter Diffraction systems (EBSD). BothEDX and WDX detectors look at a sample at analyticalworking distance of 10mm and at optimum X-ray take-off geometries with a sample held normal or at rightangles to the beam. The S-3700N allows a low magnifi-cation of ×5. This design allows operators to locate apoint of interest on a large sample without difficulty andfacilitates observation and analysis. With the sample setat the analytical working distance a low magnification of×27 can be obtained.

Airlock/Pre-pumped sample exchange device (Option)

Airlock/Pre-pumped sample exchange device is avail-able for the S-3700N. This allows sample exchange inless than 30 seconds without breaking the column vacu-um. The sample exchange device accommodates asample up to 127mm in diameter and 40mm high.

A huge sample chamber with many accessory ports A typical installation of EDX, WDX and EBSPsystems

A typical low magnification observation at ×27 using a sampleset at a working distance of 10mm for X-ray work

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User-friendly functions

5-axis motorized stage control

X-Y control by joystick (or a trackball as an option) operation

Stage motionDisplay of current position, sample/stage movement, observed areas and upto 200 saved stage locations. It allows the operator to go back to any savedlocations.

Focus linked Z controlThe image focus is linked to the stage Z position. Therefore when changing Zposition the image remains in focus.

Eucentric tilt/rotationEnables sample tilt and rotation without loosing the field of interest.

X-Y stepwise controlThis function allows the operator to move the sample in a stepwise motioninstead of the standard continuous motion. This is useful and convenient forobserving samples with a repeated pattern.

Graphic display of observation pointThis function shows the relative position of a sample and objective lens in agraphic display. Stage operation menu

Image navigation An optical microscope image The stage motion tool

Image navigationThis function allows the operator to navigatearound the sample using either a low magnifi-cation SEM image, an image from an opticalscope or digital image (available file format isBMP, JPEG and TIFF).

Virtual joystickAll 5-axis of the stage movement can be controlledby the virtual joystick software which can be overlaidon the image.

Sample: MEMS Racheting Torsion Motor, coutesy of Dalhousie University, Canada

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5mm

MOVE function

The MOVE function uses both electrical image shift and motordrive controls. It allows operators to move an object ofinterest located at the edge of the frame to the center of the monitor screen. It also allows any part of the image to bebrought to a new location as shown below.

Returning the stage to a captured image position

Selecting one of the last 16 captured images allowsthe operator to return to the stage coordinates ofthat image. This is convenient for further study of apreviously visited area.

Stage history

This function keeps track of stage positions on a sampleand displays the current position and previously visitedlocations. The operator can return to previously visitedpoints on the sample.

Montage function (Option)

This function allows the operator to record SEM imagesautomatically across a large sample from neighboringfields. By combining the recorded images it is possibleto make an image covering a large field of view on a sam-ple.

This is a point of interest. This isbroguht to the center of the screenby clicking the point of interest.

Here is a point of interest. It isbrought to the right or any newposition by dragging it.

Clicking

Dragging

A history of the stage motion Markings on a coin

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Electron optics for high resolution microscopy

High resolution imaging (10nm at 3kV, 3nm at 30kV)

Electron optics of the S-3700N have been composed of a low aberration objective lens and a unique gun bias sys-tem that allows delivery of high emission current at low accelerating voltages. This design allows a guaranteedhigh resolution of 10nm at a low 3kV and 3nm at a high 30kV.

Gun bias voltage system

The S-3700N, in addition to the tradi-tional variable bias, has a unique Quadbias system, in which it allows deliveryof high emission currents at the fourmost frequently used accelerating volt-ages. This produces images with goodsignal to noise ratio even when operat-ed at low accelerating voltages.

Condenser lenses

The condenser lens system of the S-3700N is aligned to the electron optical axis enabling minimum image shiftwhen changing parameters such as accelerating voltage and probe current.

A typical high resolution imageMagnification: ×30,000Accelerating voltage: 3kV

Magnification: ×100,000Accelerating voltage: 30kV

Sample: Evaporated gold particles

A small probe current for observation A large probe current for analytical workSample: Diatoms

The traditional variable biasMagnification: ×30,000Accelerating voltage: 3kV

A unique Quad bias systemMagnification: ×30,000Accelerating voltage: 3kV

Sample: Evaporated gold particles

1µm

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Useful image display functions

Real-time image display

The S-3700N has a choice of image displays. The operator can choose from real time displays of full screen,small screen or simultaneously display two different signals as shown below.

Signal mixing function

The S-3700N has a signal mxing function in which operators can mix different signals generated from the same fieldof view and produce one combined image. If operators mix a secondary electron signal (which is sensitive to surfacetopography) and a backscattered electron signal (which is sensitive to chemical compositions), for example, they maybe able to evaluate surface details and compsitions using a single image.

A full frame realtime image (1,280 × 960 pixels) A simultaneous display of two differentimages (640 × 480 pixels × 2)

A typical signal mixing image (secondary electrons andbackscattered electrons)

Sample: Worn part of a drill

A reduced area realtime image (640 × 480 pixels)

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Observation of insulating samples

Observation in variable pressure (VP) mode

A beam of electrons

A comparison of BSE images at high and low accelerating voltages in VP-mode

The new, high sensitivity, 5 segment BSE detector makes observation of samples at low accelerating voltages areality.

Typical applications

Accelerating voltage: 15kV Accelerating voltage: 5kVSample: Cement

Sample: Cross-section of BGA Sample: AlNi compound material, courtesy of Prof. ToruSekino, The institute of Scientific and IndustrialResearch, Osaka University, Japan

The VP mode enables observation of non-conductive or hydrated samples without the need for sample preparationsuch as metal coating. Positive ions generated by either, the interaction of the incident electron beam, or the sec-ondary electrons leaving the sample with the gas, act to neutralize the build up of negative charge on the sample sur-face. The chamber pressure is controlled by a simple slide bar. A patented Real-time Vacuum Feedback (RVF)system permits rapid vacuum stability in the specimen chamber at the user specified pressure setting.

A backscatteredelectron detector

The objectivelens

Sample

Residual gasmolecules

A variablepressure

environment(6 to 270Pa)

e e

+ +

— — — — — —

Neutralization ofa sample surfacepotential by ions

A variable pressureenvironment

Preventing sample charging

Microscopy ofwater/oil containingwet samples without

metal coatings

The same field of view

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25.0µm 25.0µm

25.0µm 25.0µm

BSE imaging at high speed scan rates

High sensitivity semiconductor BSE detector

It is well known that BSE images reflect sample composition due to atomic number contrast. This has been widelyused in the examination of metal samples as well as particles on various products such as molded parts. The S-3700N has a new 5 segment BSE detector. In addition to the normal compositional image this allows observation ofsample topography from four different orientations without the need to rotate the sample. In addition, utilizing the fifthsegment allows visualization of a BSE/3D image display by the click of a button. The BSE detector is so compactthat samples can be imaged at short working distances at very high sensitivity.

BSE / Composition BSE / Topography

SE BSE / 3D