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1 Imina Technologies SA © 2014. All rights reserved. www.imina.ch
Robots for Microscopes
Imina Technologies SA
EPFL Innovation Park, Bâtiment E
1015 Lausanne
Switzerland
+41 22 534 90 78 // [email protected] // www.imina.ch
2 Imina Technologies SA © 2014. All rights reserved. www.imina.ch
Imina Technologies, Swiss design & engineering
• Spin-off from the High Precision Robotics Laboratory of EPFL (Incorporated in 2009)
• 10 years of R&D on piezoactuators and micro robotics
• Core business focused on design and engineering of high precision systems
3 Imina Technologies SA © 2014. All rights reserved. www.imina.ch
Imina Technologies around the world
• Customers at leading research institutes
• Local representation in Europe, North America, Mexico, Japan, Korea, Singapore, Taiwan, China
5 Imina Technologies SA © 2014. All rights reserved. www.imina.ch
Robotic Solutions for Optical and Electron Microscopes
High Vacuum Ambient High Vacuum + Ambient Atmosphere
1 nm 50 nm 50 nm Positioning res.
6 Imina Technologies SA © 2014. All rights reserved. www.imina.ch
Technology The miBot™, a mini mobile robot
• Unique mobile motion technology
8 Imina Technologies SA © 2014. All rights reserved. www.imina.ch
Technology The miBot™, a mini mobile robot
• Degrees of freedom – 4 (X, Y, Z, qZ)
• Size – 20.5 x 20.5 x 13.6 mm3
• Speed – up to 2.5 mm/s
• Resolution – down to 0.5 nm
• Travel range – up to centimeters
Bottom view
9 Imina Technologies SA © 2014. All rights reserved. www.imina.ch
Tool holder: easily mount your tools on the miBot™
• Probe tips
• Optical fibers
• Micro-grippers
• Micro-pipettes
• Sensors
• …
10 Imina Technologies SA © 2014. All rights reserved. www.imina.ch
Multiple user benefits
• Quick installation and reconfiguration
make more experiments in less time
• Centimeter range motion with nanometer accuracy
probe large samples
• Intuitive to control
carry out complex maneuvers
reduce sample damaging
• Simultaneously characterize multiple properties of samples
11 Imina Technologies SA © 2014. All rights reserved. www.imina.ch
Nanoprobing SEM Solution Intuitive in situ low current electrical measurements.
• Leakage current down to fA (triax)
• Simultaneous nanometric positioning resolution
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Electrical characterization (microelectronics)
Kavli Nanoscience Institute, Caltech, USA
SRAM, 40nm devices
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4-point probe measurements (I-V characterization)
Compatibility with semiconductor parameter analyzers of all major brands (HP/Agilent, Keithley, etc.)
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Electron Microscopes
(SEM/FIB)
Portable stage. Plug and start getting results
Light Microscopes
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Electronic devices / LEDs Testing
Keyence VHX
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MEMS Membrane Resonator
Lyncée Tec DHM™ R2100
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Compact solutions Seamless integration with any equipment
• Stages for 1 and 4 miBots – Workspace
• X/Y: +/- 5 mm
• Rot: +/- 180°
• Compatible mount with – Light microscopes (upright and
inverted)
– Probe stations
– Optical breadboards and components (Newport, Thorlabs)
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Compact solutions Seamless integration with any equipment
Inverted light microscope Probe station
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Thank you for your attention!
www.imina.ch [email protected]
