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Robo$queminiatureetcollabora$vepourassemblageultraprécis

PhilippeLutzAS2M/FEMTO-ST

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2016

La robotique dans l’Usine du Futur - 9 juin 2016 – CNRS - Paris

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FEMTO-ST

FEMTO-ST - CNRS institute, Besançon, France A wide range of technical competencies in ENGINEERING SCIENCES •  A MULTIDISCIPLINARY research institute •  A high level MICROFABRICATION TECHNOLOGY facility •  A culture of INNOVATION : from basic research to industrial partnership

Automation and Robotics department Members: 26 associate, full-professors or CNRS scientists, 9 engineers and 2 administrative staff 33 PhD students, 6 post-docs, and about 20 MSc students. Budget: Indicative annual consolidated budget: 3,3 M€ /year included 1,4 M€ /year on contracts Publications: 35 articles and 45 communications in conf. each year

Exploit dynamics in

micro-nanoscale

Improve

dexterity of systems

Improve

intelligence of systems

Prognostics

Robotics

Automation

Mechatronics

Artificial Intelligence

In-vitro robotics

Micromechatronics

Nanorobotics Biomedical microrobots

Health management

Robotic micro-assembly

Robotic nanomanipulation

Non-linear control

Microsystems design

Micro-nano-handling

Lifetime prediction

Microactuators

Smart systems

Hybrid microsystems

Cell sorting

Microsurgery

High precision

Predictive maintenance Intelligent systems

Nanodevices

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Scien<ficchallengesBackground:automa<on,robo<cs,mechatronics,ar<ficalintelligence

Interna0onalposi0onningOneofthelargestteaminmicrorobo<csinEuropeRecognisedworksonPronositc&HealthManagementattheinterna<onallevel

Ac$vi$es:AdvancedcontrolNoncontactµmanipula<onPercep<ondynamics

Exploitthemicro-nanoscaledynamicbehaviours

Improvemicrorobotdexterity

Improveintelligenceofsystems

Ac$vi$es:MicrohandlingdexterityMicroassemblyoprera<onsSurgicalmicrorobots

Ac$vi$es:Dataanalysis&clusteringPronos<c&HealthmanagementMaintenanceop<misa<on

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… and also FEMTO-ST facilities including 800m2 clean rooms for MEMS fabrication and characterisation

TechnicalplaUormsandequipmentsµROBOTEX platform (sci. instrumentation for µ-nanorobotics) - 2 electronic microscopes - SEM & SEM–FIB (focused ion beam) - 1 environemental room (temperature and humidity control) - 3 interferometers and several high precision position sensors - 2 micro-nano-force measurement equipments - 2 home-made micromanipulation robots (SAMMI-PRONOMIA) - 6 real-time control boards and several acquisition boards - 3 high speed cameras and several cameras or microscopes…

Intelligent Systems platform (sci. instrumentation for prognostics) Equipements for testing bearing aging, cuting tools aging, fuell cells aging, MEMS aging…

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Challengesforminiaturerobo<cs

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Robo<csandscaleeffect

EPFL

Evolution of the robotic joints

- 1961 : the first robot ‘UNIMATE’ launched in General Motors

- 80’s : development of compliant joint to improve precision

Throughput and velocity growing impact of robot inertia when the object size reduces:

type robotmass Objectmass ra<o

automobile 600kg 30kg 20

Micro-electronics 10kg 5g 2000

Micro-assembly 100g 5pg 2.1013

Inertia of the robots reduces the throughput in micro-assembly

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•  Nouvellegénéra<ondemicrorobotscompactsetintégrés

Systèmesmicromécatroniques:Approcheparmicro-assemblageetop<queintégrée

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Proposedapproaches

Objectives - reach huge throughput in pick-and-place µ-operations (100Hz to 1kHZ) - develop a new microscale paradigm:

« assemble smaller to assemble cheaper »

Proposedapproach-Robo<csolu<onisveryinteres<ngwhenhumancan’tact-  AssociateHumanandrobottogetdexterity,accessibilityandprecision-  Designmicrobottoactinthe«microworld»

- Dexterous, precise and smart microhandling - principle: manipulation using multifingered gripper - advantages: local rotation of the object, high blocking force - challenge: develop handling strategies available in microscale

- Non contact manipulation - principle: exploitation de forces à distance - advantages: no mechanical interia of the power transmission - challenge: high speed control and 3D positionning

Possible architectures

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Dexterous,preciseandsmartmicrohandling

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Dexterousetprecisemicromanipula<on

Why developing dexterous micromanipulation ? •  Micro-assembly plays an important role in the

development of new technologies due to theminiaturiza<onofsystemsandcomponents

•  Fields of applica<ons are very large such as health,defenseandtelecommunica<on

•  Most of the micro-assembly are done by hand ortele-operated

•  Exis<ngmicro-manipulators lackof speed,flexibility,

andautonomy

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Why dexterous micromanipulation are problematic ? •  Precise rota<ons are difficult to perform at

microscale

•  Miniaturize the robo<carms fromthemacroscale isnot a feasible solu<on because of backlash andeccentricity

•  Adhesionphenomenaarepreponderantthusobjectss<cktoeachother

Developing specific techniques is required

Dexterousetprecisemicromanipula<on

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Automa0cmicro-assemblybasedonvision Objective: -  Automating complex micro-assembly tasks -  Control the final position of an object based on vision

Mainresults:Automatedassemblysuccessfullyperformed

Method: -  CAD based model tracking -  Streoscopic feedback

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Tac<lemicrogripper

•  Displacement resolution: nm range •  Displacement range: 100 µm

•  Dynamics of the actuator: 1 kHz

•  Sensor resolution: 100 nN •  Sensor range: 2mN

•  Dynamics of the sensor: 8.52 kHz

TSFM performances

Piezoelectric actuator

Piezoresistive force sensor

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AutomatedMicroassemblybasedonforce

Robo<cmicro-assemblyusing2DOFForcebasedcontrol

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Robo<cmicroassemblyandforcecontrol

Principle:forcecontrolforassistedassembly

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DexterousMicromanipula<on

How to perform autonomous dexterous micromanipulation ?

•  Developingamicro-handsystem

•  Using in-hand manipula<on which take advantageofaccuratemicro-posi<oner

•  Developing specific micromanipula<on strategiesthankstoadhesionphenomena

Trajectories for dexterous micromanipulation with or without adhesion

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DexterousMicromanipula<on

Example of dexterous micromanipulation without using adhesion:

Example of dexterous micromanipulation using adhesion:

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Nanoscalerobo<cassembly

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Nano-assemblyinscanningelectronicmicroscope

2realhighprecisionrobotsinaSEM-FIB

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Nanoscaleassemblies

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Conclusion:enhancerobo<cperformanceswithcollabora<vestrategieswithhuman

-  Use the microrobot dexterity -  Automatized when and where it is necessary -  User-friendly HMI interface to have a very well adapted

feedback coupling

•  Robot to help augmented human operator to increase his precision and hability

-  Smart gripping system (4 DoF instrumentized gripper) -  Haptic interface with high fidelity, stability and transparency -  Bilateral control with different kind of control modes -  Virtual reality system -  Acceptability by the users

•  Scientific challenges for a new collaborative microrobotic platform

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PRODUCTSANDSERVICES

Extremerobo<cmicromanipula<onforhightechnologyapplica<ons

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Thecompany 23

PERCIPIOROBOTICSdesigns,buildsandsellssmartrobo<csystemsfor:

-Cobo<cmicro-assembly-Helpinextrememicromanipula<on-Automatedmicromanipula<on-Automatedmicro-assembly

Femto-STIns<tute’sspinofffoundedin2011:

-15yearsofknow-howonworldclassresearch-Supportfromfrenchinnova<onagencies-ValuableIPontechnologiesandsoiware

Teamof8engineersandPhD,4techniciansinmechanics,microtechnics,cleanroomfabrica<on,soiwaredesignandrobo<cs.

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CoreProducts 24

•  Highestflexibility•  Highaccuracy(50xTP80fromStaubli)•  Easy-to-use,plug-and-produce•  Automa<onready

Robo$cgripper,handlingpartsfrom5µmto5mminsizewith1µmaccuracy

Embbededhighprecisionrobotintabletopmachineformicro-assembly

•  Principleoftweezers•  Highaccuracy(100xmanualtweezers)•  Highstroke(10xthanbestcompe<tor)

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CoreTechnology 25

•  Piezoelectricbidirec<onalbenders(patented)•  Integratedinnovatedmagne<cposi<onsensors(patented)•  Fast-mountend-effectorswithwiderangeofshape(patented)

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Chronogrip 26

Easy-to-use,tabletophighaccuraterobotformicrohandlingandmicro-assembly

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CoreAc0vity 27

FromR&Dprojecttosystemdesign&produc<on

Processupgrade

Micro-assembly

Customer’sapplica<on

Luxurywatchindustry Lab-on-chip

Op$calm

icro-systems

Complexpackaging

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KnowhowandR&Dservices 28

•  10yearsofunderstandingmicrohandlinginnumerousapplica<ondomains•  Widerangeofdesignsandprinciplesmasteredtoperformmicro-assembly

100µmproteincrystal25µmglasssphere

Watchcomponentwith0,5mmshaL

7µmcarbonfiber

40µmsiliconpart

•  Analyzeobjectshandlingprocessaspartofaproduc<onflow•  Designoradaptmicro-assemblyfrommanualtorobo<zedprocess