Embed Size (px)
Citation preview
G-30-020AH12 Rev 06
PO Box 217 Leander, TX USA 78646-0217 ● ● ●800-621-9598
A Resource for Semiconductor Manufacturers
Illustrated Parts Guide forRF Resonator Assembly-99780
G-30-020AH12 Rev 062 PO Box 217 Leander, TX USA 78646-0217 ● ● ●800-621-9598
* Glemco offers improvements, modifications, or alternatives to standard OEM replacement components as indicated in red throughout this guide.
A Resource for Semiconductor Manufacturers
12
11
10 *
9
8 ***
7
6 ** 5 *
4
3
2
1
Item P/N Description OEMs QTY1 8A094 VSHCS, 8-32 X 3/4 18-8, SST No OEM Reference 62 8A162 O-Ring, -260, Resonator Cone Mounting Flange, Large, Buna-N 3500592 13 8A358 Set Screw, Resonator Electrode, Outer Locking No OEM Reference 24 82253 O-Ring, -257, Resonator Cone Mounting Flange, Small, Buna-N 3500473 15 82498* EMI Shielding, .172” Diameter Spiral, * Included with P/N 99780-S1 5001171 16 99778** Acceleration Electrode, ** See pg. 4 17058040 17 99778-2 Set Screw, Resonator Electrode, Inner Locating No OEM Reference 28 99780-11*** Padding Cap, 66.5mm, *** See pg. 3 17061210 19 99780-14B Contact Ring, Electrode to Cone No OEM Reference 110 99780-15* Resonator Contact Ring, Cone to Body, * Included with P/N 99780-S1 5000861 111 99780-6 Resonator Cone Mounting Flange 17061760 112 99780-S1 Resonator Cone Base 11000380 1
RF Resonator Components for99780
G-30-020AH12 Rev 063 PO Box 217 Leander, TX USA 78646-0217 ● ● ●800-621-9598
* Glemco offers improvements, modifications, or alternatives to standard OEM replacement components as indicated in red throughout this guide.
A Resource for Semiconductor Manufacturers
876
5
4
32
1
Item P/N Description OEMs1 99780-11 Padding Cap, 66.5mm 170612102 99780-11A Padding Cap, 60mm 173196103 99780-11B Padding Cap, 55mm 173196204 99780-11C Padding Cap, 50mm 173196305 99780-11D Padding Cap, 45mm 173196406 99780-11E Padding Cap, 42.5mm 173196507 99780-11F Padding Cap, 40mm 173196608 99780-11H Padding Cap, 6.78 MHZ, 83.8mm 17061551
Padding Caps
G-30-020AH12 Rev 064 PO Box 217 Leander, TX USA 78646-0217 ● ● ●800-621-9598
* Glemco offers improvements, modifications, or alternatives to standard OEM replacement components as indicated in red throughout this guide.
A Resource for Semiconductor Manufacturers
1514131211
109 876
54321
Item P/N Description OEMs1 99778 HE/VHE Electrode 1-3 170580402 99778A VHE Electrode 4 171334213 99778B VHE Electrode 5 171334224 99778C VHE Electrode 6 17133423 5 99778D HE Electrode 9 170900416 99778E HE Electrode 10 170900407 99778F HE Electrode 5-8 170900428 99778H HE Electrode 4 170900439 99778J VHE Electrode 9 1713342510 99778K VHE Electrode 7-8 1713342411 99778L VHE Electrode 10 1713342612 99778N VHE Electrode 11 1713342713 99778P VHE Electrode 12 17133428 14 99778Q VHE Electrode 13 17133429 15 99778R VHE Electrode 14 17133430
HE/VHE Electrodes
G-30-020AH12 Rev 065 PO Box 217 Leander, TX USA 78646-0217 ● ● ●800-621-9598
* Glemco offers improvements, modifications, or alternatives to standard OEM replacement components as indicated in red throughout this guide.
A Resource for Semiconductor Manufacturers
20
19
18
17
16
15
14
13
12
1110
9
8
7
6
5
4
3
2
1
Item P/N Description OEMs Qty1 30682 3/8” Dia X 5/8” Long Standoff, Ceramic 7230-0003-0039 32 8A278 O-Ring, -222, Buna-N No OEM Reference 13 82118 Set Screw, 6-32 x 3/8, SST 4400103 34 82207 O-Ring, -208, Coil to Cone, Buna-N No OEM Reference 15 82254 O-Ring, -269, Antenna Access Flange, 2 per, Buna-N 3500223 26 82413 SHCS, 6-32 X 5/16”, SST No OEM Reference 67 82415 SHCS, 6-32 X 1/2”, SST 1231200608 88 82421 SHCS, 6-32 x 3/4” 18-8, SST E47000020 49 82428 SHCS, 8-32 X 7/16”, SST No OEM Reference 410 82469 Washer, #6, .032TH, 5/16” ID, 1/4” OD, 18-8 SST 4400232 1211 82627 BHSS, 6-32 X 3/8”, SST 1236200606 412 83112 O-Ring, 212, Antenna Feedthru, Buna-N E35000190 113 99780-10 Antenna Bracket 17036360 314 99780-14 Contact Ring, Inner, Coil to Cone 5001170 115 99780-14A Contact Ring, Small, Antenna to Feedthru 5001170 116 99780-17 Resonator Feedthru Flange 17050540 117 99780-29 Antenna Feedthru Assembly No OEM Reference 118 99780-7-3 Antenna Slide 17061570 219 99780-7-3A Antenna Slide, Long, Custom 1706157020 99780-8 Resonator Blank-Off Flange 17066320 2
Feedthru Assembly Components
G-30-020AH12 Rev 066 PO Box 217 Leander, TX USA 78646-0217 ● ● ●800-621-9598
* Glemco offers improvements, modifications, or alternatives to standard OEM replacement components as indicated in red throughout this guide.
A Resource for Semiconductor Manufacturers
16 *
15
14
13
12
11
10
9
8
7
6
5
4
3
2
1
Item P/N Description OEMs Qty1 8A226 O-Ring, -218, Bellows, Flange End, Buna-N 3500313 12 8A278 O-Ring, -222, Bellows, Floating End, Buna-N 3500509 13 8A355 Fitting, Quick Disconnect, 1/8 Flow,1/8 Npt, Male/Female Socket No OEM Reference 14 82299 Nut, 10-32 Hex, 18-8 SST 4400049 15 82420 SHCS, 6-32 X 5/8”, SST 4400061 16 82426 SHCS, 8-32 X 3/8”, 18-8 SST 4400028 37 82436 SHCS, 10-32 x 5/8”, 18-8 SST E47000049 48 82441 SHCS, 10-32 x 3/4”, SST 1231206012 29 82478 Standard Washer, #10, 18-8 SST 4400007 210 82608 Regular Spring Lock Washer, #10, SST 4400041 311 99780-16 Contact Ring, RF, Coil to Flange 5001169 112 99780-3 Drive Motor Mounting Bracket No OEM Reference 113 99780-30 Motor Assembly 1178980 114 99780-31 Linear Potentiometer Assembly 1178990 115 99780-4 Gear Bracket No OEM Reference 116 99780-5* Resonator Bellows Assembly, * Includes 3 each of P/N 82426 17031140 1
Motor Assembly Components
G-30-020AH12 Rev 067 PO Box 217 Leander, TX USA 78646-0217 ● ● ●800-621-9598
* Glemco offers improvements, modifications, or alternatives to standard OEM replacement components as indicated in red throughout this guide.
A Resource for Semiconductor Manufacturers
1817
1615
14
13
12
11
10
9
8
7
6
5
4
3
2
1
Item P/N Description OEMs Qty1 8A325 Bearing, Roller, 2.950 OD X 1.770 ID, SST No OEM Reference 12 82299 Nut, 10-32 Hex, 18-8 SST 4400049 13 82415 SHCS, 6-32 X 1/2”, SST 1231200608 34 82431 SHCS, 8-32 X 3/4”, SST 1236200620 25 82440 SHCS, 10-32 X 1/2”, SST 1231206008 16 82469 Washer, #6, .032TH, 5/16 ID, 1/4 OD, 18-8 SST 4400232 37 82478 Washer, #10, Standard, 18-8 SST 4400007 18 82572 Fitting, Thermoplastic Male Connector, Tube To Pipe No OEM Reference 29 82606 Regular Spring Washer, #6, 18-8 SST 4400034 310 82608 Regular Spring Lock Washer, #10, SST 4400041 111 82689 Belt, Drive, Resonator 4100230 112 82690 Timing Pulley, 12 Groove, 5mm Pitch, Flanged 4100227 1 13 82912 O-Ring, -012, Water Fitting to Coil, Buna-N E3500068 214 99780-23 Cooling Line Adapter Fitting 17124840 115 99780-24 Drive Bushing Bearing Mount No OEM Reference 116 99780-25 Bearing Positioning Ring No OEM Reference 117 99780-26 Drive Pulley 40 Grooves, Resonator No OEM Reference 118 99780-27 Encoder Arm No OEM Reference 1
Resonator Drive Components
G-30-020AH12 Rev 068 PO Box 217 Leander, TX USA 78646-0217 ● ● ●800-621-9598
* Glemco offers improvements, modifications, or alternatives to standard OEM replacement components as indicated in red throughout this guide.
A Resource for Semiconductor Manufacturers
7
6
5
4
3
2
1
Item P/N Description OEMs Qty1 8A324 Retaining Ring, Ext. 1.25 Shaft, 1.176 Groove DIA. 4300529 12 82257 O-Ring, -381, End Flange, Buna-N 3500300 13 82498 EMI Shielding, 32 Inches, Copper 5001171 14 82687 Bushing, Graphite Coated Resonator No OEM Reference 15 99780-1 Resonator Body 17100000 16 99780-2 Resonator End Cap 17107790 17 99780-S2 Resonator Plumbing Assembly 17122580 1
Resonator Body
G-30-020AH12 Rev 069 PO Box 217 Leander, TX USA 78646-0217 ● ● ●800-621-9598
* Glemco offers improvements, modifications, or alternatives to standard OEM replacement components as indicated in red throughout this guide.
A Resource for Semiconductor Manufacturers
5 4
3
2
1
Item P/N Description OEMs Qty1 8A226 O-Ring, -217 Buna-N No OEM Reference 12 8A278 O-Ring, -222 Buna-N No OEM Reference 13 82426 SHCS, 8-32 X 3/8”, 18-8 SST 4400028 34 99780-16 Contact Ring, Resonator 5001169 15 99780-5 Resonator Bellows Assembly 17031140 1
Bellows Replacement Kit K99780BR
G-30-020AH12 Rev 0610 PO Box 217 Leander, TX USA 78646-0217 ● ● ●800-621-9598
* Glemco offers improvements, modifications, or alternatives to standard OEM replacement components as indicated in red throughout this guide.
A Resource for Semiconductor Manufacturers
5
4
3
2
1
Item P/N Description OEMs Qty1 82498 EMI Shielding, .172” Dia. Spiral 5001171 50 in.2 99780-14 Contact Ring, Coil to Cone 5001170 13 99780-14A Contact Ring, Small, Antenna to Feedthru 5001170 14 99780-15 Contact Ring, Cone to Body 5000861 15 99780-16 Contact Ring, RF, Coil to Flange 5001169 1
Resonator Contact Ring Kit K99780CR
G-30-020AH12 Rev 0611 PO Box 217 Leander, TX USA 78646-0217 ● ● ●800-621-9598
* Glemco offers improvements, modifications, or alternatives to standard OEM replacement components as indicated in red throughout this guide.
A Resource for Semiconductor Manufacturers
6
5
4
3
2
1
Item P/N Description OEMs Qty1 82498 EMI Shielding, .172” Dia. Spiral 5001171 50 in.2 99780-14 Contact Ring, Coil to Cone 5001170 13 99780-14A Contact Ring, Small, Antenna to Feedthru 5001170 14 99780-14B Contact Ring, Electrode to Cone No OEM Reference5 99780-15 Contact Ring, Cone to Body 5000861 16 99780-16 Contact Ring, RF, Coil to Flange 5001169 1
Resonator Contact Ring Kit K99780CRB
G-30-020AH12 Rev 0612 PO Box 217 Leander, TX USA 78646-0217 ● ● ●800-621-9598
* Glemco offers improvements, modifications, or alternatives to standard OEM replacement components as indicated in red throughout this guide.
A Resource for Semiconductor Manufacturers
7
6
5
4
3
21
Item P/N Description OEMs Qty1 82411 SHCS, 6-32 X 3/8”, SST 4400044 22 82478 Standard Washer, #10, 18-8 SST 4400007 23 82608 Regular Spring Lock Washer, #10, SST 4400041 24 82690 Timing Pulley, 12 Groove, 5MM Pitch, Flanged 4100227 15 82717 SHCS, Vented, 4-40 x 5/16, 18-8 Vented E47000247 36 99780-3 Drive Motor Mounting Bracket No OEM Reference 17 99780-30 Motor Assembly 1178980 1
Motor Assembly Kit K99780MA
G-30-020AH12 Rev 0613 PO Box 217 Leander, TX USA 78646-0217 ● ● ●800-621-9598
* Glemco offers improvements, modifications, or alternatives to standard OEM replacement components as indicated in red throughout this guide.
A Resource for Semiconductor Manufacturers
7
6
5
4
3
2
1
Item P/N Description OEMs Qty1 82441 SHCS, 10-32 x 3/4, Long 1231206012 22 82478 Standard Washer, #10, 18-8 SST 4400007 23 82608 Regular Spring Lock Washer, #10, SST 4400041 24 82689 Belt, Drive, Resonator 4100230 15 82690 Timing Pulley, 12 Groove, 5mm Pitch, Flanged 4100227 16 99780-3 Drive Motor Mounting Bracket No OEM Reference 17 99780-30 Motor Assembly 1178980 1
Resonator Drive Kit K99780MA2
G-30-020AH12 Rev 0614 PO Box 217 Leander, TX USA 78646-0217 ● ● ●800-621-9598
* Glemco offers improvements, modifications, or alternatives to standard OEM replacement components as indicated in red throughout this guide.
A Resource for Semiconductor Manufacturers
Resonator Coil Refurbishment99780-SR
Refurbishment Procedures• The RF LAM contact surfaces is removed and replaced with new material.• The Drive thread is removed and replaced with new material.• The RF contact surface is reconditioned and prepared for a new RF contact.• Thecoilpitchisinspectedandadjustedtooriginalspecifications.
Refurbishment Details • The original adapter, and end piece (P/N 99780-S2-1) are removed. • Newitemsarereplaced,andbrazedtooriginalspecifications.•A vacuum leak test is performed after assembly.
Resonator Coil RefurbishmentP/N 99780-S2R
G-30-020AH12 Rev 0615 PO Box 217 Leander, TX USA 78646-0217 ● ● ●800-621-9598
* Glemco offers improvements, modifications, or alternatives to standard OEM replacement components as indicated in red throughout this guide.
A Resource for Semiconductor Manufacturers
Resonator Cone Refurbishments for99780-S1
99780-S1R Refurbishment Details•Basic refurbishment consists of cleaning and decontamination. •Cone is reused. •Assembly is rebuilt with new outer contact ring and EMI shielding, and leak tested.
99780-S1R2 Refurbishment Details•Refurbishment consists of complete disassembly, cleaning and decontamination. •Assembly is rebuilt with a new cone. •Metal parts are reused with the exception of the new contact ring and EMI shielding. • Final assembly is leak tested.
99780-S1R3 Refurbishment Details•Refurbishment consists of complete disassembly, cleaning and decontamination. •Assembly is rebuilt with new cone and electrode hardware.• Final assembly is leak tested.
* An RMA number and declaration of contamination will be sent for the used unit. Once received, the unit is evaluated and the ceramic cone is leak-tested to verify good condition. It may be determined after evaluation that the assembly requires additional parts or labor to refurbish. Minimum pricing is supplied at RFQ. Full quote is provided after evaluation.
G-30-020AH12 Rev 0616 PO Box 217 Leander, TX USA 78646-0217 ● ● ●800-621-9598
* Glemco offers improvements, modifications, or alternatives to standard OEM replacement components as indicated in red throughout this guide.
A Resource for Semiconductor Manufacturers
200mm Resonator Test Can46150D
Resonator Leak Test Housing
This housing can be used in conjunction with Glemco P/N 99780-6 to leak test the 99780-S1 (Resonator Cone Assembly) and can also be attached to the entire resonator assembly to leak test the cone after installation.
P/N 99780-6 must be quoted when the 46150D is used as a leak test vessel for the 99780-S1R resonator cones.
