Slide 1- and -
A technology push in the direction of bio-medicine at the molecular scale
J.N. Randall, Jim Von Ehr, Josh Ballard, James Owen, Udi Fuchs, Rahul Saini, and Sergiy Pryadkin
Zyvex Labs
Richardson, Texas
Zyvex Technologies – Columbus Ohio
Carbon Nanotube / Polymer Composites
ZyCraft – a Global Company
Independent Unmanned Surface Vehicles
Zyvex Labs – Richardson Texas
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Most of you have probably never heard of Zyvex and even those of you who have known Zyvex for years, the situation is fluid and often confusing. Let me summarize.
Jim Von Ehr founded Zyvex Corp in 1997 with the express intent of developing atom by atom manufacturing, even if he did not know how he would do it.
On April fools day 2007 we split to become Zyvex Instruments, Zyvex Performance Materials (now Zyvex Technologies), and Zyvex Labs. Zyvex Technologies is the worlds leading producer of CNT enhanced composites that they are now using to build large structures such as boats which is why Jim Von Ehr is not here. He has founded Zycraft and is working hard to see that our boats are used profitably. Zyvex Instruments was acquired in 2010 by DCG systems and has a dominance in the Niche Market of nanoprobing ICs. Their business is booming and they forced Zyvex Labs to move across the parking lot to a new Building. I am here to talk about Zyvex Labs efforts to develop atomically precise manufacturing.
History of Commercializing Nanotech
Zyvex Technologies has developed the world’s leading CNT enhanced composites:
Zyvex Instruments has developed the world’s leading nanoprobing technology:
Zyvex Labs is developing Atomically Precise Manufacturing:
3nm
3nm
3nm
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5
4-8 hour surgery
Limited spatial resolution at retina surface
Surface electrode excites nerve bundles
Nano Retina advantages
Normal optics of the eye are used (no camera)
Power is delivered by IR laser through the pupil.
Tiny package is implanted in 30 minutes, with local anesthetic, on an outpatient basis.
External image received by Bio Retina thru the eye’s optics.
Bio Retina converts the image to neuron stimulation.
Bio Retina stimulates the retinal neurons connected to the brain.
Ordinary looking eyeglasses hold the laser power source.
Invisible infrared laser powers the Bio Retina wirelessly.
Bio Retina implant
Operation Principles
Integrated structure
Battery included
Eye safe
Outcomes
Resolution is a key performance parameter
Argus II resolution is 20/1260 only with black and white pixels (6x10)
Bio Retina I targets 576 pixels possibly providing 20/260 functional vision
Bio Retina II aims for 20/20 gray scale vision enabling facial recognition
Ambulatory
Vision -
Bio Retina
Strong IP position
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Founders
Jim R. Von Ehr, Zyvex labs CEO
Efi Cohen-Arazi, Rainbow Medical CEO
Ra’anan Gefen
Leonid Yanovitch Lab engineer
The Company
John Randall Executive VP
1910 to 2010
How did we go from horse carriages, manually operated telephone exchanges, and life expectancy of 50 to space tourism, gps cell phones, and life expectancy of 80 in only 100 years?
I want to start with a historical perspective: “How did we go from horse carriages, manually operated telephone exchanges, and life expectancy of 50 to space tourism, GPS cell phones, and life expectancy of 80 in only 100 years?”
The principle answer ladies and gentlemen is Manufacturing precision.
But wait a minute John (you are thinking) can this last century of progress really be attributable to improvement in manufacturing precision? Can it really make such a difference? After all how much has manufacturing precision changed in the last hundred years?
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Machining
Accuracy
0.1mm
0.01mm
1mm
0.1mm
0.01mm
1nm
Atomic
Distance
x
x
x
x
o
x
Manufacturing Precision improved 100,000-fold in past 100 years
I’m glad you asked! In fact manufacturing precision and accuracy has improved by the incredible factor of 100,000 over the past 100 years. I point to a subset of the data compiled and accurately predicted by Norio Taniguchi. The man who first used the term nanotechnology.
I submit to you ladies and gentlemen that the progress we have made in the past 100 years could not have been made without every bit of this improvement in manufacturing precision.
And note that much of the steady progress over the last century impacted things beside electronics. However in the last 5 decades the most visible and arguably the largest impact has been in electronics which has driven information technology. I am speaking of course about.
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1961 Fairchild
Integrated Circuit
Moores law. The beginning of which was really about 1960 shortly after Jack Kilby invented the integrated circuit and in 1965 Gordon Moore noted the trend of doubling the number of devices every 18-24 months and predicted that this might go on for another 10 years!
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In fact we know as we improved manufacturing precision which allowed downscaling which allowed Moore’s Law to continue and turn into the exponential technical, and economic Juggernaut that it has become. Pictured here are a small subset of the many amazing products that have changed our lives. Early in this process no one expected video games, digital audio and video, or GPS cell phones. Jack Kilby when asked what IC’s would be good for suggested that they might be good for controlling washing machines.
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Technology nodes in ICs
What Makes all of this possible of course is the improvement in manufacturing precision that makes downscaling possible. I want to make several points here.
The relative precision for making IC’s is roughly +/- 5% suggestion that the current precision is a very few nm.
This means Precision is already approaching the atomic scale.
You might think I am heading fro a prediction of the end of Moore’s law. I am not about to do that. Clever engineers have always foiled such predictions.
I do have a prediction to make but it will not be the end of an expoential trend, it will be the start of a new one.
You might also think that all we have to do is wait for the IC industry to develop Atomically Precise Manufacturing. - But they are not going to do it.
Why?
They will fight tooth and nail not to need AP!
The initial markets that AP will first serve will be much too small to interest them
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Machining
Accuracy
0.1mm
0.01mm
1mm
0.1mm
0.01mm
1nm
Atomic
Distance
x
x
x
x
o
x
Manufacturing Precision improved 100,000-fold in past 100 years
I’m glad you asked! In fact manufacturing precision and accuracy has improved by the incredible factor of 100,000 over the past 100 years. I point to a subset of the data compiled and accurately predicted by Norio Taniguchi. The man who first used the term nanotechnology.
I submit to you ladies and gentlemen that the progress we have made in the past 100 years could not have been made without every bit of this improvement in manufacturing precision.
And note that much of the steady progress over the last century impacted things beside electronics. However in the last 5 decades the most visible and arguably the largest impact has been in electronics which has driven information technology. I am speaking of course about.
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Everything is exactly the same size
First I need to clean up some of the language that I use. I often say Atomic Precision Manufacturing and while we are striving for Atomic precision currently our real goal is absolute precision. Atomic precision would be manufacturing with a tollerance of +/- one atomic distance in size.
Absolute precision means making things that are exactly the same size. If we can make things where we in Richard Feynman’s words put atoms where we want them, We can achieve absolute precision manufacturing.
This ability is key to my prediction.
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Atom-by-Atom Manipulation
Richard Feynman – “I am not afraid to consider the final question as to whether, ultimately – in the great future – we can arrange the atoms the way we want” - 1959
“STM” – Nobel Prize in Physics 1986
Don Eigler spells out IBM in atoms 1989
Since I am talking about absolute precision, I better justify that this is possible. After Feynman drew a line in the sand about 30 years later Don Eigler put atoms where he wanted them.
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Our Goal: Reliable Versatile Atom-by-Atom Manufacturing
And I want to be able to make any structure that is physically and chemically possible with a reliable versatile process that puts every atom where we want them.
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Universities:
Bob Wallace, Yves Chabal,
KJ Cho, JF Veyan,
Joe Lyding
S. V. Sreenivasan
R.Saini, J. Owen, Udi Fuchs
S. Manning
Atomically Precise Manufacturing Consortium
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We had a fantastic team of collaborators working on this project including five Universities, 5 Companies, and A national Lab. As a group we are the atomically precise manufacturing consortium. We are committed to brining Atom by Atom manufacturing tools to market.
Over here are our international collaborators. Included in this group are world leading scientist and engineers in their discipline. Right here we are reserving a spot for you to join us.
Making AXA Manufacturing a Reality
This is one of our 2 UHV STM systems designed and built by Zyvex Labs.
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Developing a system from the ground up for complete freedom – not force-fitting off-the-shelf systems
Vibration Isolation
UHV STM System
2 Lyding Scanners
Field Ion Microscope
Closed loop heating
Two Systems Fully Operational
These are strictly home built systems based on a Joe Lyding STM scanner design. We did not buy a commercial STM because they are designed to be imaging and analytical tools. We are making a very different lithography manufacturing tool. We are not limited by anyone else’s software are hardware.
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Dimer rows switch direction with each atomic layer.
This surface has been highly studied, making studies easier to understand.
12 nm
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All of the work I will show you today occurs on the technologically relevant Si(100) which I show you below in its hydrogen passivated state. Notice the dimer rows alternating direction with each terrace.
Details: Crystal Silicon Surface – Pixels formed from 2 dimers
Fourier analysis allows us to identify the pixels on the Si surface.
We can associate a design grid with the Si lattice, and use the lattice as a global fiducial grid.
Identifying Pixels on Si Surface
Each surface atom has 1 unfilled bond:
When bare, the atom is reactive
With H there, the atom is “passive”
Two atoms form one surface dimer.
We define one pixel as two adjacent dimers
Depiction of Surface of “Si (100) 2x1”
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Hersam and Lyding UIUC
3nm
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Using, creep and drift correction and alignment to the lattice, more accurate litho is possible.
Theory
Experiment
Atomic precision pattern placement over small area. Have currently extended to roughly 40x40nm area.
Using creep and drift correction along with our ability to register to the Si lattice, we can write fiducial marks and then place geometries with atomic precision.
Currently we can do this over small scan fields, with modest yields. A major part of this program will be improving our hardware and software to improve the yield and extend the size and speed with which we can perform atomically and later absolutely precise patterning.
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Automated Vector Compiler
In this way we can expose a wide range of patterns including , point six pointed stars, our company logo, a portrait of Josh Ballard’s wife, Hello Kitty!, or even some useful patterns.
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#1 DR saturated
#1 DR unsaturated
Optimize Step Distances
Put longest vector in master vector list
Find vector with nearest start or end point to end of previous vector
Remove vector from search list
Perform Litho
Step in scan mode
We are also developing software similar to the pattern fracturing tools available to conventional e-beam lithography but specialized for H depassivation lithography so that we can quickly program tip motions and adjust exposure conditions to make arbitrary patterns. We even have a mode where we can input bitmap binary images and produce them with our lithography tool. Here we show how we can make the important Hello Kitty pattern.
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Litho
Dose
Litho
Dose
Litho
Dose
Litho
Dose
Litho
Patterned Epitaxy
Owen et al. J. Vac. Sci. Technol. B 29 06F201  (2011) DOI: 10.1116/1.3628673
Atom-by-Atom Manufacturing
2 nm epitaxial growth, automated, overnight process with system cycling through:
Imaging
Litho
Depo
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And we have gotten this basic process to work on these 2 nm tall 20nm on a side boxes. While there are several aspects of this work to address, one is that this took 60 cycles of patterning. We want to speed up the manufacturing process so that we can have a pattern once, or pattern few approach
New Device Regime!
Simmons has shown high-precision 2D placement of dopants in silicon leads to remarkable devices
Insulating, semiconducting, and metallic regions created in single crystal silicon
A new device regime with:
NO Metal Oxide Semiconductor interface
Michelle Simmons is an english woman working in Austrailia that has done brilliant work using this same sort of lithography to put P atoms where she wants them to make a so called single atom transitor and has shown that this is one of the more promissing ways to make quantum computers.
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H
H
H
H
H
H
H
H
H
H
H
H
H
H
AFM of Patterns after ALD
And here is a survey AFM image of our surface after ALD. You can clearly see all six patterns. Some extra features you will see are some Si-C islands which are an artifact of our initial sample prep in UHV as well as some background deposition. I won’t say anything else about the Si-C, but I will address the background contamination.
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a
b
c
d
e
Lines written with FE mode litho can easily be controlled down to 10 nm, but edges matter
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30.8936202 31.77659909999998 32.65957800000001 33.5425569 34.42553580000001 35.3085147 36.19148530000001 37.07446419999997 37.95744309999994 38.840422 39.7234009 40.6063798 41.4893587 42.37233760000001 43.2553165 44.13829540000001 45.0212743 45.90425320000001 46.7872321 47.67021100000001 48.55318990000001 49.43616880000001 0.041591815 0.036882781 0.038364272 0.044713538 0.043284957 0.03540129 0.041433085 0.042808767 0.055507288 0.048523102 0.047729441 0.05751789 0.058152821 0.055031098 0.0587348309999999 0.060745433 0.0703751519999999 0.0 686291 0.0593697619999999 0.048893472 0.042173836 0.048099811 0.0354542 0.040004504 0.039634134 0.0466712299999999 0.053602517 0.04698869 0.036776961 0.043866978 0.037041511 0.029210754 0.022120737 0.02450172 0.027200152 0.017252973 0.00270256899999999 0.00402534099999996 0.010797887 0.016141852 0.0219620069999999 0.043602417 0.080904352 0.103338423 0.161592927 0.227466548 0.293604719 0.363287893 0.432283237 0.506887107 0.583501557 0.637946508 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x (nm)
ALD 1.0 2.0 3.0 4.0 5.0 6.0 18.0 25.0 32.0 42.0 43.0 46.0 ALD' 1.0 2.0 3.0 4.0 5.0 6.0 8.0 15.0 22.0 32.0 33.0 36.0 HDL 1.0 2.0 3.0 4.0 5.0 6.0 6.0 11.1 17.3 22.2 27.0 30.8 RIE 1.0 2.0 3.0 4.0 5.0 6.0 10.6 16.6 23.9 25.1 29.8
Line Number
Linewidth (nm)
From Master to Daughter
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S.V. Sreenivasan the CTO of Molecular Imprints and a Prof at UT Austin is on the team to explore the use of atomically precise master templates for nano imprint lithography.
Case Study: Nano Mechanics
An oscillator with a near terahertz frequency
Excellent control over frequency
Extremely high Q
Myriad applications such as ultra low power radios and extremely sensitive sensors
MEMS Oscillators are orders of magnitude better than electronic oscillators in terms of their quality factor and produce much better filters.
BUT semiconductor processing has terrible relative precision making the control of frequency poor.
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Another example is a highly scaled NEMS oscillator its fabrication would require some capabilities not discussed here namely a sacrificial layer. Such a device would produce a very high Q oscillator that would operate in the neighborhood of a quarter terahertz and the atomic precision would give excellent control of the frequency. There are multiple applications of such a device if it could be produced including the front end of a very low power radio, and extremely sensitive sensors.
Nano Bio Uses
Structures that interact in extremely precise ways with specific molecules:
Ultra precise molecular filtering
Precisely designed binding sites for ultra effective drugs to enhance or block protein action
Designed enzymes
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We believe that opportunities in the nanobio area are plentiful. When you can create structures and surfaces with atomic precision, you can design in specific molecular interaction. I leave it as an exercise to the astute audience members to work out the dramatic impact of these sort of applications.
Case Study: DNA “Nanopore” for Ultra-High-Speed DNA Sequencing
DNA readout mechanisms are extremely sensitive to distance
Currently far too much variation
Game Changer: AXA Manufactured “Nanopore” DNA Sequencers
Atomic precision will enable speeds needed for ultra low cost
True “personalized medicine” and tailored treatments – a medical revolution
Optimized crops
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One application that I want to spend a short while on is DNA sequencing via nanopores. There are many competing technologies, but many are pursuing a nanopore approach that could rapidly read the bases as a strand of DNA moves through a pore of about 2nm. The problem is that that 2nm pores can’t be made, the problem is that they can’t be made precisely enough so that the DNA will move in a controlled manner past electrodes that can read the bases. Our technology may provide a solution.
Concept: Molecular Specific Filtering
pores in membrane
The ability to control a molecules ability to pass through the filter
Can be based on shape of the pore as well as the size
And possibly the surface chemistry of the membrane and pores
Selective Depassivation
OH
OH
CH3
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Cell’s interactions with different surface textures are well documented.
We could make surfaces (via nanoimprint templates) with unprecedented precision, designed for specific molecular interaction with specific molecular structures on cell surfaces.
We are looking for collaborators