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Project Description & Process Flow
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Flow cytometry is an important bioanalytical technique that is used for sorting and counting of cells, measurements of physical and chemical characteristics of cells etc.
Flow Cytometry
520/530/580.495 Fall 2015 A.G. Andreou and T.H. Wang
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Flow Cytometer /Molecular Focusing on a Chip
520/530/580.495 Fall 2015 A.G. Andreou and T.H. Wang
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Hydrodynamic Focusing and Electrokinetic Focusing
520/530/580.495 Fall 2015 A.G. Andreou and T.H. Wang
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Optical Waveguide on a Chip Optical waveguides are widely used, especially in the form of optical fibers, for long distance, high data rate telecommunications.
520/530/580.495 Fall 2015 A.G. Andreou and T.H. Wang
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Thin Film Deposition
Oxidization
Photolithography
Etching
Ion Implantation / Diffusion
Packaging
Basic Microfabrication Steps
CMOS
bipolar
Optical-MEMS
Bio-MEMS
etc.
520/530/580.495 Fall 2015 A.G. Andreou and T.H. Wang
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• Dry Oxidization : Si (solid) + O2 (gas) à SiO2 (solid) • Wet Oxidization: Si (solid) + 2H2O (gas) à SiO2 (solid) + 2H2 (gas)
Thermal Oxidization
520/530/580.495 Fall 2015 A.G. Andreou and T.H. Wang
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Photolithography
520/530/580.495 Fall 2015 A.G. Andreou and T.H. Wang
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Etching
• Wet etch vs Dry Etch
• Etch Selectivity
• Etch Rate
• Degree of Anisotropy
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Thin Film Deposition : Evaporation
Focused beam of electrons are used to locally heat the source
Can be used to heat/evaporate even high melting point materials
520/530/580.495 Fall 2015 A.G. Andreou and T.H. Wang
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Packaging: Anodic Bonding
• High voltage (300 -1000 V) generates large electrostatic forces
• High temperature (300-600 C) facilitates bonding • Bonds SiO2 to Si or metal
• Use Pyrex 7740 or Borofloat glass to match thermal expansion coefficient
520/530/580.495 Fall 2015 A.G. Andreou and T.H. Wang
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Layout of Flow Cytometer (FC)
520/530/580.495 Fall 2015 A.G. Andreou and T.H. Wang
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Process Flow for Flow Cytometer (FC)
(positive PR)
520/530/580.495 Fall 2015 A.G. Andreou and T.H. Wang
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Process Flow for Flow Cytometer (FC)
520/530/580.495 Fall 2015 A.G. Andreou and T.H. Wang
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SU-8 is negative PR
520/530/580.495 Fall 2015 A.G. Andreou and T.H. Wang
