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Th.M. Adams, Rose-Hulman Institute of Technology, Terre Haute, IN, USA; R.A. Layton,

Rose-Hulman Institute of Technology, Terre Haute, IN, USA

Introductory MEMS

Fabrication and Applications

One of the first texts written that is accessible to undergraduate

technical majors regardless of specific discipline

Describes sensors, actuators, and microfluidics, and their relationship

with MEMS

Includes laboratory exercises designed to facilitate student learning

about the basic microfabrication processes

Provides review questions and problems at the end of each chapter

to summarize learning objectives

Introductory MEMS: Fabrication and Applications is a practical introduction to MEMS for

advanced undergraduate and graduate students. Part I introduces the student to the

most commonly used MEMS fabrication techniques as well as the MEMS devices produced

using these techniques. Part II focuses on MEMS transducers: principles of operation,

modeling from first principles, and a detailed look at commercialized MEMS devices, in

addition to microfluidics. Multiple field-tested laboratory exercises are included, designed

to facilitate student learning about the fundamentals of microfabrication processes.

References, suggested reading, review questions, and homework problems are provided

at the close of each chapter.

Introductory MEMS: Fabrication and Applications is an excellent introduction to the

subject, with a tested pedagogical structure and an accessible writing style suitable for

students at an advanced undergraduate level across academic disciplines.

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