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20
15
10
5
0
Perc
enta
ge
0 20 40 60 80 100 120 140
Diameter (nm)
11.12 0.00 1546.73
1031.16
515.58 0.00 0.00
511.79
1023.57
1535.36
nm
2000
1500
1000
500
0
nm
0 500 1000 1500 2000
11.12 10.00 8.00 6.00 4.00 2.00 0
nm
…/197.csm CSPM title Topography Pixels = (408, 405) Size (2062 and 2047 nm)
(a) (b)
(c)
nm
nm
nm
Perc
enta
ge 30
25 20 15 10 5 0
0 40 80 120 160 Diameter (nm)
3.11 nm -0.02 1516.48
1010.98 505.49 nm
0.00 0.00 514.94
1544.82 1029.88
2000
1500
1000
500
0
nm
0 500 1000 1500 2000 nm
3.00
2.50
2.00
1.50
1.00
0.50
0
nm
…/200.csm CSPM title Topography Pixels = (428, 436) Size = (2022 and 2060 m)
(a) (b)
(c)
nm
35 30 25 20 15 10 5 0
Perc
enta
ge
0 20 40 60 80 100 Diameter (nm)
(a)
33.91 -0.17
nm
1503.49 1002.32
501.16 nm 0.00 0.00
511.71 1023.43
1535.14
nm
(b) 2000
1500
1000
500
0
nm
(c) 33.91 30.00 25.00 20.00 15.00 10.00 5.00 0
200…/-csm CSPM title Topography Pixels = (380.388) Size = (2005 and 2047 nm)
700
600
500
400
300
200
100
0
Cou
nts
(a)
10 20 30 40 50 60 70 80 Values
101
004
300
280
260
240
220
200
180
160
140
120
100
800
600
400
200 0
Cou
nts
20 30 40 50 60 70 80 Values
(b) 101A
110 R 101 R
004 A
111 R 112 A
200 A
105 A 211 A 204 A
TiO2
15000
10000
5000
0 10 20 30 40 50 60 70
Copper (Cu)
(a)
Val
ues
1300
1200
1100
1000
900
800
700
600
500
400
300
200
100
0
Cou
nts
20 30 40 50 60 70 80 Values
(b)
3500
3000
2500
2000
1500
1000
500
0 0 5 10 15
keV
Val
ues
TiLα 0 Kα
200 nm
(a) (b) TiKα
60 nm
3500
3000
2500
2000
1500
1000
500
0
TiKα
TiLα 0 Kα
200 nm
0 5 10 15 keV
Val
ues
(a) (b)
80 nm
o a
o
C -C(D%) ×100%
3000
2500
2000
1500
1000
500
0
TiKα
0 5 10 15 keV
Val
ues
200 nm
(a) (b)
40 nm
60
50
40
30
20
10
0
Val
ues
0 50 100
Time (min)